JP7224300B2 - 半導体装置 - Google Patents
半導体装置 Download PDFInfo
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- JP7224300B2 JP7224300B2 JP2019554227A JP2019554227A JP7224300B2 JP 7224300 B2 JP7224300 B2 JP 7224300B2 JP 2019554227 A JP2019554227 A JP 2019554227A JP 2019554227 A JP2019554227 A JP 2019554227A JP 7224300 B2 JP7224300 B2 JP 7224300B2
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- 239000004065 semiconductor Substances 0.000 title claims description 351
- 150000004767 nitrides Chemical class 0.000 claims description 214
- 239000000758 substrate Substances 0.000 claims description 97
- 239000012535 impurity Substances 0.000 claims description 85
- 230000005533 two-dimensional electron gas Effects 0.000 claims description 19
- 229910052799 carbon Inorganic materials 0.000 claims description 11
- 229910052749 magnesium Inorganic materials 0.000 claims description 7
- 229910052742 iron Inorganic materials 0.000 claims description 6
- 229910052725 zinc Inorganic materials 0.000 claims description 6
- 239000000370 acceptor Substances 0.000 description 78
- 238000011084 recovery Methods 0.000 description 39
- 229910052751 metal Inorganic materials 0.000 description 17
- 239000002184 metal Substances 0.000 description 17
- 238000002161 passivation Methods 0.000 description 17
- JMASRVWKEDWRBT-UHFFFAOYSA-N Gallium nitride Chemical compound [Ga]#N JMASRVWKEDWRBT-UHFFFAOYSA-N 0.000 description 16
- 229910002601 GaN Inorganic materials 0.000 description 15
- 230000004888 barrier function Effects 0.000 description 14
- 238000004088 simulation Methods 0.000 description 12
- 238000009826 distribution Methods 0.000 description 10
- XEEYBQQBJWHFJM-UHFFFAOYSA-N iron Substances [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 10
- 239000011777 magnesium Substances 0.000 description 10
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 8
- 229910002704 AlGaN Inorganic materials 0.000 description 7
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 7
- 239000011701 zinc Substances 0.000 description 7
- 239000000203 mixture Substances 0.000 description 6
- 230000007423 decrease Effects 0.000 description 5
- 230000010287 polarization Effects 0.000 description 5
- FYYHWMGAXLPEAU-UHFFFAOYSA-N Magnesium Chemical compound [Mg] FYYHWMGAXLPEAU-UHFFFAOYSA-N 0.000 description 4
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 4
- 230000008859 change Effects 0.000 description 4
- 238000010586 diagram Methods 0.000 description 4
- 229910052710 silicon Inorganic materials 0.000 description 4
- 239000010703 silicon Substances 0.000 description 4
- HCHKCACWOHOZIP-UHFFFAOYSA-N Zinc Chemical compound [Zn] HCHKCACWOHOZIP-UHFFFAOYSA-N 0.000 description 3
- 230000015572 biosynthetic process Effects 0.000 description 3
- PMHQVHHXPFUNSP-UHFFFAOYSA-M copper(1+);methylsulfanylmethane;bromide Chemical compound Br[Cu].CSC PMHQVHHXPFUNSP-UHFFFAOYSA-M 0.000 description 3
- 238000002474 experimental method Methods 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- 238000004518 low pressure chemical vapour deposition Methods 0.000 description 2
- 230000002269 spontaneous effect Effects 0.000 description 2
- PIGFYZPCRLYGLF-UHFFFAOYSA-N Aluminum nitride Chemical compound [Al]#N PIGFYZPCRLYGLF-UHFFFAOYSA-N 0.000 description 1
- -1 GaN nitride Chemical class 0.000 description 1
- NWAIGJYBQQYSPW-UHFFFAOYSA-N azanylidyneindigane Chemical compound [In]#N NWAIGJYBQQYSPW-UHFFFAOYSA-N 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 229910021478 group 5 element Inorganic materials 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 230000001590 oxidative effect Effects 0.000 description 1
- 238000005268 plasma chemical vapour deposition Methods 0.000 description 1
- 238000003892 spreading Methods 0.000 description 1
- 230000007480 spreading Effects 0.000 description 1
- 238000003949 trap density measurement Methods 0.000 description 1
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- H01L29/7787—Field effect transistors with two-dimensional charge carrier gas channel, e.g. HEMT ; with two-dimensional charge-carrier layer formed at a heterojunction interface with direct single heterostructure, i.e. with wide bandgap layer formed on top of active layer, e.g. direct single heterostructure MIS-like HEMT with wide bandgap charge-carrier supplying layer, e.g. direct single heterostructure MODFET
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- H01L29/66446—Unipolar field-effect transistors with an active layer made of a group 13/15 material, e.g. group 13/15 velocity modulation transistor [VMT], group 13/15 negative resistance FET [NERFET]
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- Manufacturing & Machinery (AREA)
- Junction Field-Effect Transistors (AREA)
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Description
[1]第1実施例
第1実施例では、第1窒化物半導体層41のアクセプタ型不純物は、Mg(マグネシウム)である。第1窒化物半導体層41のアクセプタ密度NTとドナー密度NDとの差(NT-ND)は、5×1017cm-3である。第1窒化物半導体層41のアクセプタ準位ETと価電子帯上端のエネルギーEVとの差(ET-EV)は、0.2eVである。
[2]第2実施例
第2実施例では、第1窒化物半導体層41のアクセプタ型不純物は、Zn(亜鉛)である。第1窒化物半導体層41のアクセプタ密度NTとドナー密度NDとの差(NT-ND)は、5×1017cm-3である。第1窒化物半導体層41のアクセプタ準位ETと価電子帯上端のエネルギーEVとの差(ET-EV)は、0.3eVである。
[3]第3実施例
第3実施例では、第1窒化物半導体層41のアクセプタ型不純物は、Mg(マグネシウム)である。第1窒化物半導体層41のアクセプタ密度NTとドナー密度NDとの差(NT-ND)は、5×1017cm-3である。第1窒化物半導体層41のアクセプタ準位ETと価電子帯上端のエネルギーEVとの差(ET-EV)は、0.2eVである。
[4]第4実施例
第4実施例では、第1窒化物半導体層41のアクセプタ型不純物は、Zn(亜鉛)である。第1窒化物半導体層41のアクセプタ密度NTとドナー密度NDとの差(NT-ND)は、5×1017cm-3である。第1窒化物半導体層41のアクセプタ準位ETと価電子帯上端のエネルギーEVとの差(ET-EV)は、0.3eVである。
・第1の組合せ:(NT-ND)=4×1016cm-3 and (ET-EV)=0.9eV
・第2の組合せ:(NT-ND)=4×1016cm-3 and (ET-EV)=0.3eV
・第3の組合せ:(NT-ND)=5×1017cm-3 and (ET-EV)=0.9eV
・第4の組合せ:(NT-ND)=5×1017cm-3 and (ET-EV)=0.3eV
第1窒化物半導体層341の(NT-ND)および(ET-EV)の組合せ毎に、次のようなシミュレーションを行った。すなわち、ソース電極309を基準電位(0V)と設定し、ドレイン電極310への印可電圧を1Vに設定した。そして、10000secの間、基板電極312に-20Vの電圧を印可した後、10000secの間、基板電極312に0Vの電圧を印可した。このときの、ドレイン電極に流れる電流(ドレイン電流)Idを演算した。
2 基板
3 バッファ層
31 第1バッファ層
32 第2バッファ層
4 電子走行層
41 第1窒化物半導体層
42 第2窒化物半導体層
43 第3窒化物半導体層
5 電子供給層
6 ゲート部
61 窒化物半導体層
62 ゲート電極
7 パッシベーション膜
8 パリアメタル層
9 ソース電極
9a ソース電極用コンタクト孔
10 ドレイン電極
10a ドレイン電極用コンタクト孔
15 二次元電子ガス
21 ゲート電極膜
22 レジスト膜
23 ソース・ドレイン電極膜
A 高不純物濃度層
B 低不純物濃度層
Claims (9)
- 基板と、前記基板上に配置された電子走行層と、前記電子走行層上に配置された電子供給層とを含む半導体装置において、
前記電子走行層は、前記電子供給層に接する伝導経路形成層と、導電アクセプタ型不純物を含む第1半導体領域と、前記伝導経路形成層に対して前記第1半導体領域よりも近い位置に配置され、アクセプタ型不純物を含む第2半導体領域とを含んでおり、
前記第1半導体領域のアクセプタ密度が、前記第2半導体領域のアクセプタ密度よりも大きく、
前記第1半導体領域には、MgおよびZnのうちの少なくとも1種類の不純物がドーピングされており、
前記第2半導体領域には、CおよびFeのうちの少なくとも1種類の不純物がドーピングされている、半導体装置。 - 基板と、前記基板上に配置された電子走行層と、前記電子走行層上に配置された電子供給層とを含む半導体装置において、
前記電子走行層は、前記電子供給層に接する伝導経路形成層と、アクセプタ型不純物を含む第1半導体領域と、前記伝導経路形成層に対して前記第1半導体領域よりも近い位置に配置され、アクセプタ型不純物を含む第2半導体領域とを含んでおり、
前記第1半導体領域のアクセプタ準位と価電子帯上端とのエネルギー差が、前記第2半導体領域のアクセプタ準位と価電子帯上端との間のエネルギー差よりも小さい、半導体装置。 - 基板と、前記基板上に配置された電子走行層と、前記電子走行層上に配置された電子供給層とを含む半導体装置において、
前記電子走行層は、前記電子供給層に接する伝導経路形成層と、アクセプタ型不純物を含む第1半導体領域と、前記伝導経路形成層に対して前記第1半導体領域よりも近い位置に配置され、アクセプタ型不純物を含む第2半導体領域とを含んでおり、
前記第1半導体領域のアクセプタ密度が、前記第2半導体領域のアクセプタ密度よりも大きく、前記第1半導体領域のアクセプタ準位と価電子帯上端とのエネルギー差が、前記第2半導体領域のアクセプタ準位と価電子帯上端との間のエネルギー差よりも小さい、半導体装置。 - 前記第1半導体領域には、MgおよびZnのうちの少なくとも1種類の不純物がドーピングされており、
前記第2半導体領域には、CおよびFeのうちの少なくとも1種類の不純物がドーピングされている、請求項2または3に記載の半導体装置。 - 前記第1半導体領域は前記基板上に配置されており、
前記第2半導体領域は、前記第1半導体領域における前記基板とは反対側の表面上に形成されている、請求項1~4のいずれか一項に記載の半導体装置。 - 前記伝導経路形成層には、二次元電子ガスが形成される、請求項1~5のいずれか一項に記載の半導体装置。
- 前記第1半導体領域および第2半導体領域は、半絶縁性を有する半導体からなる、請求項1~6のいずれか一項に記載の半導体装置。
- 前記第1半導体領域および前記第2半導体領域は、それぞれ窒化物半導体からなり、
前記電子供給層は、Alを含む窒化物半導体からなる、請求項1~7のいずれか一項に記載の半導体装置。 - 前記電子供給層上に配置されたソース、ゲートおよびドレインをさらに含み、
前記基板は、前記ソースと電気的に接続されている、請求項8に記載の半導体装置。
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Citations (7)
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JP2002057158A (ja) | 2000-08-09 | 2002-02-22 | Sony Corp | 絶縁性窒化物層及びその形成方法、半導体装置及びその製造方法 |
JP2008258419A (ja) | 2007-04-05 | 2008-10-23 | Toshiba Corp | 窒化物半導体素子 |
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JP2013069772A (ja) | 2011-09-21 | 2013-04-18 | Sumitomo Electric Ind Ltd | 半導体装置、及び半導体装置の製造方法 |
JP2017037967A (ja) | 2015-08-10 | 2017-02-16 | ローム株式会社 | 窒化物半導体デバイス |
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JP5064824B2 (ja) | 2006-02-20 | 2012-10-31 | 古河電気工業株式会社 | 半導体素子 |
JP2008258419A (ja) | 2007-04-05 | 2008-10-23 | Toshiba Corp | 窒化物半導体素子 |
JP2013069772A (ja) | 2011-09-21 | 2013-04-18 | Sumitomo Electric Ind Ltd | 半導体装置、及び半導体装置の製造方法 |
JP2017037967A (ja) | 2015-08-10 | 2017-02-16 | ローム株式会社 | 窒化物半導体デバイス |
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US11316041B2 (en) | 2022-04-26 |
US20220223725A1 (en) | 2022-07-14 |
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