JP7203293B1 - オゾン供給装置及びオゾン供給方法 - Google Patents

オゾン供給装置及びオゾン供給方法 Download PDF

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JP7203293B1
JP7203293B1 JP2022554845A JP2022554845A JP7203293B1 JP 7203293 B1 JP7203293 B1 JP 7203293B1 JP 2022554845 A JP2022554845 A JP 2022554845A JP 2022554845 A JP2022554845 A JP 2022554845A JP 7203293 B1 JP7203293 B1 JP 7203293B1
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ozone
gas
adsorption tower
gas tank
supply
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JPWO2023238275A1 (https=
JPWO2023238275A5 (https=
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学 生沼
洋航 松浦
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Mitsubishi Electric Corp
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Mitsubishi Electric Corp
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    • CCHEMISTRY; METALLURGY
    • C01INORGANIC CHEMISTRY
    • C01BNON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B13/00Oxygen; Ozone; Oxides or hydroxides in general
    • C01B13/10Preparation of ozone

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  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Oxygen, Ozone, And Oxides In General (AREA)
JP2022554845A 2022-06-08 2022-06-08 オゾン供給装置及びオゾン供給方法 Active JP7203293B1 (ja)

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PCT/JP2022/023103 WO2023238275A1 (ja) 2022-06-08 2022-06-08 オゾン供給装置及びオゾン供給方法

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JP7203293B1 true JP7203293B1 (ja) 2023-01-12
JPWO2023238275A1 JPWO2023238275A1 (https=) 2023-12-14
JPWO2023238275A5 JPWO2023238275A5 (https=) 2024-05-20

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7630749B1 (ja) * 2024-07-09 2025-02-17 三菱電機株式会社 オゾン供給装置およびオゾン供給装置の運転方法

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4935512B1 (https=) * 1970-09-30 1974-09-24
WO2017130523A1 (ja) * 2016-01-28 2017-08-03 三菱電機株式会社 オゾン供給装置およびオゾン供給方法
JP6516941B1 (ja) * 2018-06-07 2019-05-22 三菱電機株式会社 オゾン供給装置およびオゾン供給方法

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4935512B1 (https=) * 1970-09-30 1974-09-24
WO2017130523A1 (ja) * 2016-01-28 2017-08-03 三菱電機株式会社 オゾン供給装置およびオゾン供給方法
JP6516941B1 (ja) * 2018-06-07 2019-05-22 三菱電機株式会社 オゾン供給装置およびオゾン供給方法

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7630749B1 (ja) * 2024-07-09 2025-02-17 三菱電機株式会社 オゾン供給装置およびオゾン供給装置の運転方法
WO2026013765A1 (ja) * 2024-07-09 2026-01-15 三菱電機株式会社 オゾン供給装置およびオゾン供給装置の運転方法
JP2026010640A (ja) * 2024-07-09 2026-01-22 三菱電機株式会社 オゾン供給装置およびオゾン供給装置の運転方法

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WO2023238275A1 (ja) 2023-12-14

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