WO2023238275A1 - オゾン供給装置及びオゾン供給方法 - Google Patents

オゾン供給装置及びオゾン供給方法 Download PDF

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Publication number
WO2023238275A1
WO2023238275A1 PCT/JP2022/023103 JP2022023103W WO2023238275A1 WO 2023238275 A1 WO2023238275 A1 WO 2023238275A1 JP 2022023103 W JP2022023103 W JP 2022023103W WO 2023238275 A1 WO2023238275 A1 WO 2023238275A1
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WIPO (PCT)
Prior art keywords
ozone
gas
adsorption tower
gas tank
supply
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Ceased
Application number
PCT/JP2022/023103
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English (en)
French (fr)
Japanese (ja)
Inventor
学 生沼
洋航 松浦
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Mitsubishi Electric Corp
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Mitsubishi Electric Corp
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Filing date
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Priority to PCT/JP2022/023103 priority Critical patent/WO2023238275A1/ja
Priority to JP2022554845A priority patent/JP7203293B1/ja
Publication of WO2023238275A1 publication Critical patent/WO2023238275A1/ja
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

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    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B13/00—Oxygen; Ozone; Oxides or hydroxides in general
    • C01B13/10—Preparation of ozone

Definitions

  • This application relates to an ozone supply device and an ozone supply method.
  • Ozone is used as a powerful oxidizing agent in a wide variety of fields, including water environment purification, semiconductor cleaning, sterilization, and virus inactivation, and there is an increasing demand for highly efficient ozone supply equipment.
  • the upper limit of the ozone concentration generated by a single ozone generating unit is about 20% by volume, and since ozone has a property of self-decomposition, it is difficult to store it in a gas phase at room temperature. Therefore, there is a need for an ozone supply device that generates ozone intermittently as needed.
  • Patent Document 2 describes an adsorption operation in which ozonized gas generated in an ozone generation section is adsorbed into a first adsorption/desorption region and a second adsorption/desorption region of an adsorption/desorption tower, and an adsorption operation in which ozonized gas is adsorbed from the first adsorption/desorption region.
  • concentration operation in which ozonized gas is desorbed and recovered by adsorption in a second adsorption/desorption region, and ozonized gas recovered in the second adsorption/desorption region is desorbed while transporting the raw material gas (oxygen gas) from the raw material gas source.
  • An ozone supply device is disclosed that performs a supply operation of supplying ozone from an adsorption/desorption region to the outside of an adsorption/desorption tower.
  • Patent Document 1 it is necessary to supply a large amount of oxygen gas for desorption of ozone, which increases the operating cost. Furthermore, in the configuration of Patent Document 2, it is necessary to transport the raw material gas (oxygen) from the raw material gas source to desorb the ozone adsorbed in the second adsorption/desorption region, which increases the amount of oxygen gas used and increases the operating cost. There were other problems such as higher prices.
  • the present application was made in order to solve the above-mentioned problems, and provides an ozone supply device and an ozone supply device that can reduce the amount of oxygen gas used when supplying the required amount of ozone to the supply target and suppress operating costs.
  • the purpose is to provide a supply method.
  • the ozone supply device disclosed in this application includes an ozone generator that generates ozone gas from oxygen-containing gas, an ozone adsorption tower that is installed downstream of the ozone generator and has an adsorbent that adsorbs ozone gas, and an ozone adsorption tower that is installed downstream of the ozone adsorption tower.
  • a gas tank provided independently of the ozone adsorption tower, a supply pipe that supplies ozone gas from the ozone adsorption tower to the supply target, and an outlet through which the ozone gas generated by the ozone generator is adsorbed to the ozone adsorption tower and passed through the ozone adsorption tower.
  • the ozone adsorption process involves storing gas as a storage gas in a gas tank, and the ozone adsorption process involves flowing the stored gas from the gas tank toward the ozone adsorption tower, desorbing the ozone adsorbed by the ozone adsorption tower, and supplying ozone gas from the supply piping to the supply target.
  • the stored gas in the gas tank is It is characterized by performing an ozone supply step in which ozone adsorbed by the ozone adsorption tower is desorbed by flowing it from the gas tank toward the ozone adsorption tower, and ozone gas is supplied to the supply target.
  • the ozone supply device and the ozone supply method disclosed in the present application it is possible to reduce the amount of oxygen gas used when supplying ozone to the supply target, and to suppress operating costs.
  • FIG. 1 is a structural diagram showing an ozone supply device according to Embodiment 1.
  • FIG. FIG. 2 is a structural diagram of main parts showing an ozone supply device according to a second embodiment.
  • FIG. 7 is a structural diagram of main parts showing an ozone supply device according to a third embodiment.
  • FIG. 7 is a structural diagram of main parts showing an ozone supply device according to a fourth embodiment.
  • FIG. 7 is a structural diagram of main parts showing an ozone supply device according to a fifth embodiment.
  • FIG. 7 is a structural diagram of main parts showing an ozone supply device according to a sixth embodiment.
  • FIG. 7 is a structural diagram of main parts showing an ozone supply device according to a seventh embodiment.
  • FIG. 7 is a structural diagram of main parts showing an ozone supply device according to Embodiment 8.
  • FIG. 3 is a diagram illustrating an example of hardware of a control unit according to an embodiment.
  • FIG. 1 is a structural diagram showing an ozone supply device according to the first embodiment.
  • the ozone supply device 100 of this embodiment includes an oxygen source 1, an ozone generator 2 provided downstream of the oxygen source 1, an ozone adsorption tower 3 provided downstream of the ozone generator 2, and an ozone adsorption tower 3 downstream of the ozone adsorption tower 3.
  • the gas tank 4 is equipped with a gas tank 4, a pressure regulator 11 is installed downstream of the gas tank 4, and a control section 99 is provided.
  • a main pipe 6 connects the oxygen source 1 to the pressure regulator 11 in a continuous gas flow.
  • the gas tank 4 is provided independently of the ozone adsorption tower 3.
  • a valve 8 is provided in the main pipe 6 between the ozone generator 2 and the ozone adsorption tower 3.
  • the ozone adsorption tower 3 and the supply target 5 are connected by a supply pipe 7, and the supply pipe 7 is equipped with a valve 10.
  • the control unit 99 is connected to the oxygen source 1, the ozone generator 2, the pressure regulator 11, the valve 8, and the valve 10, and performs the ozone adsorption process and the ozone supply process described below, and the ozone adsorption process and the ozone supply process. controlling the operation of at least one connected device for switching.
  • the oxygen source 1 is a means for supplying a gas containing oxygen, and for example, a gas production device such as a gas cylinder, liquefied gas, or PSA (Pressure Swing Adsorption) is used.
  • a gas production device such as a gas cylinder, liquefied gas, or PSA (Pressure Swing Adsorption) is used.
  • PSA Pressure Swing Adsorption
  • any gas containing at least oxygen may be used, such as air, a mixed gas of oxygen and an inert gas, etc. may also be used.
  • the ozone generator 2 is a device that generates ozone gas from gas containing oxygen, and in general, an air discharge type such as dielectric barrier discharge and creeping discharge is preferably used.
  • the ozone adsorption tower 3 includes an adsorbent 20 that can selectively adsorb ozone.
  • adsorbent 20 that can selectively adsorb ozone.
  • silica gel can be used as the adsorbent 20.
  • the gas tank 4 is a tank that can store gas inside, and for example, a stainless steel container with excellent ozone resistance is used. Further, it is preferable that the gas tank has a structure suitable for pressurization and depressurization.
  • the supply target 5 includes, for example, a reaction tank for water treatment, a closed space for ozone fumigation treatment, a treatment container for biomass treatment such as sludge and cellulose, a vacuum container containing semiconductors and objects to be sterilized, etc. It is not limited to these.
  • the pressure regulator 11 has a function of arbitrarily adjusting the pressure on the upstream (previous stage) side, and for example, an auto pressure regulator or a back pressure regulator is used.
  • the control unit 99 supplies oxygen gas from the oxygen source 1 and causes the ozone generator 2 to generate ozone. Further, the valve 8 is opened, the valve 10 is closed, and the pressure regulator 11 is controlled to maintain the pressure of the ozone adsorption tower 3 and the gas tank 4 to be higher than the pressure of the supply target 5.
  • a portion of the oxygen gas supplied from the oxygen source 1 is converted into ozone gas in the ozone generator 2 and supplied to the ozone adsorption tower 3. Since the adsorbent 20 in the ozone adsorption tower 3 has the property of selectively adsorbing ozone gas, ozone is stored in the ozone adsorption tower 3, and the ozone concentration in the outlet gas from the ozone adsorption tower 3 is The ozone concentration in the inlet gas in No. 3 is lower than that in the inlet gas. The outlet gas of the ozone adsorption tower 3 is not discharged, but is stored in the gas tank 4 as a stored gas.
  • the control unit 99 stops the oxygen gas supply from the oxygen source 1 and the ozone generation from the ozone generator 2, closes the valve 8, and opens the valve 10.
  • the gas stored in the gas tank 4 is supplied to the ozone adsorption tower 3 (ie, reverse flow to the adsorption process).
  • ozone gas is desorbed from the adsorbent 20.
  • the desorbed ozone gas is supplied from the ozone adsorption tower 3 to the supply target 5 through the supply pipe 7.
  • ozone in the ozone adsorption tower 3 is desorbed and ozone is supplied to the supply target 5. Therefore, there is no need to supply oxygen gas from the oxygen source 1 in the ozone supply process, reducing the amount of oxygen gas used and reducing operating costs.
  • the flow rate of the gas supplied from the oxygen source 1 is generally limited to a relatively small flow rate due to flow rate adjustment and restrictions on the amount of gas produced.
  • the stored gas can be flowed at a large flow rate from the gas tank 4, the ozone in the ozone adsorption tower 3 can be desorbed in a short time, and a large amount of ozone gas can be intermittently delivered to the supply target 5 in a short time. can be supplied.
  • ozone in an adsorbed state is energetically more stable than ozone in a gaseous state, and its self-decomposition rate is slower. Therefore, the presence of the ozone adsorption tower 3 suppresses the decrease in ozone during storage, and allows ozone to be efficiently supplied to the supply target.
  • the ozone adsorption tower 3 can achieve the effect of concentrating ozone. Therefore, compared to storing ozone in a gaseous state, it is possible to store more ozone in a smaller volume.
  • the adsorbent 20 generally tends to adsorb moisture, and once moisture is adsorbed, the adsorption sites are blocked, which may result in deterioration of subsequent ozone adsorption performance. Therefore, in the ozone supply process, it is necessary to prevent moisture from entering the ozone adsorption tower 3 as much as possible.
  • the gas supplied from the oxygen source 1 in the ozone adsorption process is stored as a stored gas, and is supplied to the ozone adsorption tower 3 in the ozone supply process. Therefore, air is prevented from entering from the outside of the ozone adsorption tower 3, and the effect of suppressing performance deterioration of the adsorbent 20 due to moisture can be obtained.
  • the pressure regulator 11 has a function of controlling the upstream pressure to a predetermined value. For example, at the beginning of the adsorption process, the ozone adsorption tower The pressure inside the tank 3 is increased to store the stored gas in the gas tank 4. When the pressure reaches a predetermined value, gas is circulated and discharged to suppress excessive pressure rise.
  • FIG. 2 is a structural diagram of main parts showing an ozone supply device according to a second embodiment.
  • the supply target is a vacuum container 14, and a vacuum pump 12 is connected to the vacuum container 14 via a valve 13.
  • a valve 9 is provided on the downstream side of the gas tank 4 instead of the pressure regulator 11.
  • the control unit 99 is connected to the oxygen source 1, the ozone generator 2, the valve 8, the valve 9, the valve 10, the valve 13, and the vacuum pump 12, and performs the ozone adsorption process and the ozone supply process described below, as well as the ozone adsorption process.
  • the operation of at least one connected device is controlled for switching between the process and the ozone supply process.
  • the other structure is the same as that of the first embodiment.
  • the control unit 99 opens the valves 8 and 9, closes the valve 10, and supplies ozone gas from the ozone generator 2, thereby adsorbing ozone to the ozone adsorption tower 3.
  • the control unit 99 closes the valves 8 and 9 and opens the valve 10 to supply the gas stored in the gas tank 4 to the ozone adsorption tower 3 to desorb the ozone gas and supply it to the vacuum container 14. . That is, the stored gas is caused to flow using the pressure difference between the vacuum container 14 and the gas tank 4. Other operations are similar to those in the first embodiment.
  • ozone is supplied from the ozone adsorption tower 3 due to the pressure difference by lowering the pressure of the vacuum container 14 that is the supply target than the pressure of the gas tank 4. . Therefore, it is not necessary to make the ozone adsorption tower 3 and the gas tank 4 positive pressure (at least atmospheric pressure), which facilitates device design.
  • applying negative pressure (below atmospheric pressure) before supplying ozone is effective. processing becomes possible. Note that it is also possible to perform the step of evacuation of the vacuum container 14 using the vacuum pump 12 and the ozone adsorption step at the same time. Thereby, the time required for ozone treatment can be shortened.
  • FIG. 3 is a structural diagram of main parts showing an ozone supply device according to the third embodiment.
  • this embodiment includes a vacuum pipe 16 connecting the vacuum pump 12 and the gas tank 4 and a valve 15 provided in the vacuum pipe 16.
  • the control unit 99 is connected to the oxygen source 1, the ozone generator 2, the valve 8, the valve 10, the valve 13, the valve 15, and the vacuum pump 12, and performs the evacuation process, ozone adsorption process, and ozone supply process described below. At least one connected device is controlled in order to carry out the process and switch between these processes.
  • the valve 9 provided in the second embodiment is not provided.
  • the other configurations are the same as in the second embodiment.
  • a vacuuming step is provided before the ozone adsorption step.
  • the evacuation step the workpiece is placed in the vacuum container 14, the valve 8 is closed, the valves 13 and 15 are opened, the vacuum pump 12 is operated, and the gas inside the vacuum container 14 and the gas tank 4 is evacuated. do.
  • the valves 10 and 15 are closed, and the ozone gas supplied from the ozone generator 2 is adsorbed in the ozone adsorption tower 3, and the outlet gas of the ozone adsorption tower 3 is stored in the gas tank 4 as a storage gas.
  • the pressure in the gas tank 4 reaches a predetermined value, the ozone gas is supplied from the ozone adsorption tower 3 to the vacuum container 14 by closing the valve 8 and opening the valve 10 as an ozone supply step.
  • Embodiment 1 in addition to the effects of Embodiment 1, there is a vacuum drawing process for exhausting the gas in the gas tank 4 prior to the ozone adsorption process, so that the air in the gas tank is exhausted, Gas with a low water content can be stored in the gas tank 4 as a storage gas. For this reason, in the ozone supply process, it is possible to suppress moisture from entering the ozone adsorption tower 3 and suppress performance deterioration of the ozone adsorption tower 3.
  • a valve may be provided between the ozone adsorption tower 3 and the gas tank 4, and the ozone adsorption tower 3 may be separated in the step of evacuation of the gas tank 4. Thereby, when the gas tank 4 is evacuated, the pressure and gas composition within the ozone adsorption tower 3 do not change, and the performance of ozone adsorption can be stabilized.
  • FIG. 4 is a structural diagram of main parts showing an ozone supply device according to a fourth embodiment.
  • a reflux pipe 19 is provided that connects the gas tank 4 and the upstream side of the ozone generator 2.
  • the reflux pipe 19 is equipped with a valve 18 and a compressor 17.
  • the control unit 99 is connected to the oxygen source 1, the ozone generator 2, the valve 8, the valve 10, the compressor 17, and the valve 18, and performs the ozone adsorption process described below and the ozone supply described in Embodiment 1.
  • the operation of at least one connected device is controlled to perform the process and to switch between the ozone adsorption process and the ozone supply process.
  • the pressure regulator 11 is not provided.
  • the other configurations are the same as in the first embodiment.
  • the valve 8 is opened to allow the ozone adsorption tower 3 to adsorb ozone and to store the stored gas in the gas tank 4.
  • a predetermined value at least atmospheric pressure
  • the valve 18 is opened and the compressor 17 is operated. This causes the gas stored in the gas tank 4 to flow back to the upstream side of the ozone generator 2.
  • Other operations are similar to those in the first embodiment.
  • the amount of stored gas is determined by the volume and pressure of the gas tank 4, and when excess oxygen gas is supplied from the oxygen source 1 (that is, when the ozone adsorption process takes a long time), the amount of stored gas is determined by the volume and pressure of the gas tank 4.
  • the pressure in the gas tank 4 was maintained at a predetermined value. For this reason, a part of the gas supplied from the oxygen source 1 was ineffectively consumed.
  • the reflux pipe 19 and the compressor 17 are provided, the gas after passing through the ozone adsorption tower 3 can be used again for ozone generation. Oxygen usage is reduced. Moreover, since ozone is adsorbed in the ozone adsorption tower 3, the ozone concentration in the outlet gas of the ozone adsorption tower 3 can be suppressed to a low level. Therefore, high ozone resistance is not required on the upstream side of the compressor and ozone generator 2, and oxygen gas can be efficiently recirculated and used.
  • FIG. 5 is a structural diagram of main parts showing an ozone supply device according to a fifth embodiment.
  • a compressor 17 is provided in the main pipe 6 between the ozone adsorption tower 3 and the gas tank 4.
  • a valve 22 is provided in the reflux pipe 19 that connects the gas tank 4 and the upstream side of the ozone generator 2.
  • a backflow pipe 23 is provided between the ozone adsorption tower 3 and the gas tank 4 in addition to the main pipe 6, and the backflow pipe 23 is equipped with a valve 21.
  • the control unit 99 is connected to the oxygen source 1, the ozone generator 2, the valve 8, the valve 10, the compressor 17, the valve 21, and the valve 22, and performs the ozone adsorption process, the ozone supply process, and the ozone adsorption process described below.
  • the operation of at least one connected device is controlled for switching between the process and the ozone supply process.
  • the other configurations are the same as in the fourth embodiment.
  • the outlet gas of the ozone adsorption tower 3 is pressurized by the compressor 17 and stored in the gas tank 4 as a stored gas. That is, the pressure in the gas tank 4 is maintained higher than the pressure in the ozone adsorption tower 3.
  • the valve 22 is opened and the stored gas is returned to the upstream side of the ozone generator 2 through the return pipe 19.
  • the gas stored in the gas tank 4 is supplied to the ozone adsorption tower 3 to desorb ozone, and ozone is supplied to the supply target 5.
  • Other operations are similar to those in the first embodiment.
  • gas can be stored in the gas tank 4 at a higher pressure. As a result, more gas can be stored in a smaller volume.
  • the pressure of the gas tank 4 can be made higher than the pressure of the ozone adsorption tower 3 and the ozone generator 2, the gas stored in the gas tank 4 can be refluxed and used for ozone generation.
  • the stored gas stored at high pressure in the gas tank 4 is supplied to the ozone adsorption tower 3 through the backflow pipe 23 in the ozone supply process, the high pressure difference makes it possible to flow the stored gas at a high flow rate. , a large amount of ozone can be supplied to the supply target 5 in a short time.
  • FIG. 6 is a structural diagram of main parts showing an ozone supply device according to a sixth embodiment.
  • this embodiment includes a backflow pipe 23 that connects the ozone adsorption tower 3 and the gas tank 4 separately from the main pipe 6, and the backflow pipe 23 is equipped with a flow rate regulator 24.
  • the main pipe 6 between the ozone adsorption tower 3 and the gas tank 4 is equipped with a valve 25.
  • the control unit 99 is connected to the oxygen source 1, the ozone generator 2, the valve 8, the valve 10, the flow rate regulator 24, the valve 25, and the pressure regulator 11, and performs the ozone adsorption process and the ozone supply process described below. and controlling the operation of at least one connected device for switching between the ozone adsorption process and the ozone supply process.
  • the other configurations are the same as in the first embodiment.
  • the valve 25 in the ozone supply step, the valve 25 is closed, and the stored gas whose flow rate is controlled by the flow rate regulator 24 is supplied from the gas tank 4 to the ozone adsorption tower 3 through the backflow pipe 23.
  • Other operations are similar to those in the first embodiment.
  • the flow rate of the stored gas at the time of supply can be controlled by the flow rate regulator 24, so that the ozone supply speed to the supply target 5 and the ozone
  • the concentration can be set arbitrarily.
  • FIG. 7 is a structural diagram of main parts showing an ozone supply device according to a seventh embodiment.
  • the ozone adsorption tower 3 is connected to a cooling device 26 which is a temperature difference forming means for cooling the ozone adsorption tower 3.
  • the control unit 99 is connected to the oxygen source 1, the ozone generator 2, the valve 8, the valve 10, and the cooling device 26, and performs the following ozone adsorption process, ozone supply process, and ozone adsorption process and ozone supply process. controlling the operation of at least one connected device for switching.
  • the other configurations are the same as in the first embodiment.
  • the adsorbent 20 generally adsorbs more ozone at lower temperatures, more ozone can be stored by lowering the temperature of the ozone adsorption tower 3 in the ozone adsorption step.
  • the higher the temperature the faster the desorption of ozone adsorbed by the adsorbent 20 proceeds, making it possible to supply a large amount of ozone in a short time. That is, it is preferable to form a temperature difference between the ozone adsorption step and the ozone supply step.
  • this Embodiment operates the cooling device 26 to lower the temperature of the ozone adsorption tower 3 in the ozone adsorption process, thereby achieving better results than Embodiment 1. Even if the ozone adsorption tower 3 has the same volume, more ozone can be adsorbed and stored. Furthermore, since the independently provided gas tank 4 is not cooled, it is at a higher temperature than the ozone adsorption tower 3. Therefore, in the ozone supply process, the relatively high temperature stored gas is supplied for ozone adsorption, so that ozone desorption is performed quickly.
  • FIG. 8 is a structural diagram of main parts showing an ozone supply device of Embodiment 8.
  • a heating device 27 which is a temperature difference forming means, is connected to an independently provided gas tank 4.
  • the control unit 99 is connected to the oxygen source 1, the ozone generator 2, the valve 8, the valve 10, and the heating device 27, and performs the ozone supply process described below, the ozone adsorption device described in Embodiment 1, and controlling the operation of at least one connected device for switching between the ozone adsorption process and the ozone supply process.
  • the other configurations are the same as in the first embodiment.
  • FIG. It is composed of a processor 101 and a storage device 102, and although not shown, the storage device includes a volatile storage device such as a random access memory and a nonvolatile auxiliary storage device such as a flash memory. Further, an auxiliary storage device such as a hard disk may be provided instead of the flash memory.
  • the processor 101 executes, for example, the operations of the ozone adsorption process and the ozone supply process described in Embodiments 1 to 8, and the ozone adsorption process and the ozone supply process. The operation of each connected device is controlled in order to perform the switching operation of the supply process.
  • the program is input to the processor 101 from the auxiliary storage device via the volatile storage device.
  • the processor 101 may output data such as calculation results to a volatile storage device of the storage device 102, or may store data in an auxiliary storage device via the volatile storage device.
  • the control section 99 may be one in which a plurality of logic circuits are connected.

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  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Oxygen, Ozone, And Oxides In General (AREA)
PCT/JP2022/023103 2022-06-08 2022-06-08 オゾン供給装置及びオゾン供給方法 Ceased WO2023238275A1 (ja)

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PCT/JP2022/023103 WO2023238275A1 (ja) 2022-06-08 2022-06-08 オゾン供給装置及びオゾン供給方法
JP2022554845A JP7203293B1 (ja) 2022-06-08 2022-06-08 オゾン供給装置及びオゾン供給方法

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JP7630749B1 (ja) * 2024-07-09 2025-02-17 三菱電機株式会社 オゾン供給装置およびオゾン供給装置の運転方法

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4935512B1 (https=) * 1970-09-30 1974-09-24
WO2017130523A1 (ja) * 2016-01-28 2017-08-03 三菱電機株式会社 オゾン供給装置およびオゾン供給方法
JP6516941B1 (ja) * 2018-06-07 2019-05-22 三菱電機株式会社 オゾン供給装置およびオゾン供給方法

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4935512B1 (https=) * 1970-09-30 1974-09-24
WO2017130523A1 (ja) * 2016-01-28 2017-08-03 三菱電機株式会社 オゾン供給装置およびオゾン供給方法
JP6516941B1 (ja) * 2018-06-07 2019-05-22 三菱電機株式会社 オゾン供給装置およびオゾン供給方法

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