JP7166802B2 - 部材、特に電子部材とガラス材料またはガラスセラミック材料との接合体 - Google Patents
部材、特に電子部材とガラス材料またはガラスセラミック材料との接合体 Download PDFInfo
- Publication number
- JP7166802B2 JP7166802B2 JP2018117807A JP2018117807A JP7166802B2 JP 7166802 B2 JP7166802 B2 JP 7166802B2 JP 2018117807 A JP2018117807 A JP 2018117807A JP 2018117807 A JP2018117807 A JP 2018117807A JP 7166802 B2 JP7166802 B2 JP 7166802B2
- Authority
- JP
- Japan
- Prior art keywords
- glass
- ceramic material
- coefficient
- expansion
- less
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Images
Classifications
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C27/00—Joining pieces of glass to pieces of other inorganic material; Joining glass to glass other than by fusing
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B17/00—Layered products essentially comprising sheet glass, or glass, slag, or like fibres
- B32B17/06—Layered products essentially comprising sheet glass, or glass, slag, or like fibres comprising glass as the main or only constituent of a layer, next to another layer of a specific material
- B32B17/10—Layered products essentially comprising sheet glass, or glass, slag, or like fibres comprising glass as the main or only constituent of a layer, next to another layer of a specific material of synthetic resin
- B32B17/10005—Layered products essentially comprising sheet glass, or glass, slag, or like fibres comprising glass as the main or only constituent of a layer, next to another layer of a specific material of synthetic resin laminated safety glass or glazing
- B32B17/10009—Layered products essentially comprising sheet glass, or glass, slag, or like fibres comprising glass as the main or only constituent of a layer, next to another layer of a specific material of synthetic resin laminated safety glass or glazing characterized by the number, the constitution or treatment of glass sheets
- B32B17/10036—Layered products essentially comprising sheet glass, or glass, slag, or like fibres comprising glass as the main or only constituent of a layer, next to another layer of a specific material of synthetic resin laminated safety glass or glazing characterized by the number, the constitution or treatment of glass sheets comprising two outer glass sheets
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B18/00—Layered products essentially comprising ceramics, e.g. refractory products
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C27/00—Joining pieces of glass to pieces of other inorganic material; Joining glass to glass other than by fusing
- C03C27/06—Joining glass to glass by processes other than fusing
- C03C27/10—Joining glass to glass by processes other than fusing with the aid of adhesive specially adapted for that purpose
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B37/00—Joining burned ceramic articles with other burned ceramic articles or other articles by heating
- C04B37/001—Joining burned ceramic articles with other burned ceramic articles or other articles by heating directly with other burned ceramic articles
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B2457/00—Electrical equipment
- B32B2457/08—PCBs, i.e. printed circuit boards
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C3/00—Glass compositions
- C03C3/04—Glass compositions containing silica
- C03C3/076—Glass compositions containing silica with 40% to 90% silica, by weight
- C03C3/083—Glass compositions containing silica with 40% to 90% silica, by weight containing aluminium oxide or an iron compound
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C3/00—Glass compositions
- C03C3/04—Glass compositions containing silica
- C03C3/076—Glass compositions containing silica with 40% to 90% silica, by weight
- C03C3/083—Glass compositions containing silica with 40% to 90% silica, by weight containing aluminium oxide or an iron compound
- C03C3/085—Glass compositions containing silica with 40% to 90% silica, by weight containing aluminium oxide or an iron compound containing an oxide of a divalent metal
- C03C3/087—Glass compositions containing silica with 40% to 90% silica, by weight containing aluminium oxide or an iron compound containing an oxide of a divalent metal containing calcium oxide, e.g. common sheet or container glass
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C3/00—Glass compositions
- C03C3/04—Glass compositions containing silica
- C03C3/076—Glass compositions containing silica with 40% to 90% silica, by weight
- C03C3/089—Glass compositions containing silica with 40% to 90% silica, by weight containing boron
- C03C3/091—Glass compositions containing silica with 40% to 90% silica, by weight containing boron containing aluminium
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
- C04B2235/70—Aspects relating to sintered or melt-casted ceramic products
- C04B2235/96—Properties of ceramic products, e.g. mechanical properties such as strength, toughness, wear resistance
- C04B2235/9607—Thermal properties, e.g. thermal expansion coefficient
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
- C04B2237/30—Composition of layers of ceramic laminates or of ceramic or metallic articles to be joined by heating, e.g. Si substrates
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
- C04B2237/30—Composition of layers of ceramic laminates or of ceramic or metallic articles to be joined by heating, e.g. Si substrates
- C04B2237/32—Ceramic
- C04B2237/34—Oxidic
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
- C04B2237/30—Composition of layers of ceramic laminates or of ceramic or metallic articles to be joined by heating, e.g. Si substrates
- C04B2237/32—Ceramic
- C04B2237/34—Oxidic
- C04B2237/341—Silica or silicates
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
- C04B2237/30—Composition of layers of ceramic laminates or of ceramic or metallic articles to be joined by heating, e.g. Si substrates
- C04B2237/32—Ceramic
- C04B2237/34—Oxidic
- C04B2237/343—Alumina or aluminates
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
- C04B2237/30—Composition of layers of ceramic laminates or of ceramic or metallic articles to be joined by heating, e.g. Si substrates
- C04B2237/32—Ceramic
- C04B2237/34—Oxidic
- C04B2237/345—Refractory metal oxides
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
- C04B2237/30—Composition of layers of ceramic laminates or of ceramic or metallic articles to be joined by heating, e.g. Si substrates
- C04B2237/32—Ceramic
- C04B2237/36—Non-oxidic
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
- C04B2237/30—Composition of layers of ceramic laminates or of ceramic or metallic articles to be joined by heating, e.g. Si substrates
- C04B2237/32—Ceramic
- C04B2237/36—Non-oxidic
- C04B2237/365—Silicon carbide
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
- C04B2237/50—Processing aspects relating to ceramic laminates or to the joining of ceramic articles with other articles by heating
- C04B2237/52—Pre-treatment of the joining surfaces, e.g. cleaning, machining
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
- C04B2237/50—Processing aspects relating to ceramic laminates or to the joining of ceramic articles with other articles by heating
- C04B2237/66—Forming laminates or joined articles showing high dimensional accuracy, e.g. indicated by the warpage
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
- C04B2237/50—Processing aspects relating to ceramic laminates or to the joining of ceramic articles with other articles by heating
- C04B2237/70—Forming laminates or joined articles comprising layers of a specific, unusual thickness
- C04B2237/704—Forming laminates or joined articles comprising layers of a specific, unusual thickness of one or more of the ceramic layers or articles
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Ceramic Engineering (AREA)
- Materials Engineering (AREA)
- Organic Chemistry (AREA)
- Structural Engineering (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Geochemistry & Mineralogy (AREA)
- Glass Compositions (AREA)
- Joining Of Glass To Other Materials (AREA)
- Laminated Bodies (AREA)
Description
SCHOTT:“Ultra-Thin Glass for Electronics Application”, 2015年11月版, パンフレット,
www.schott.com/advanced_optics/english/download/index.html
および
SCHOTT:“AF 32 Thin Glass”, 2013年5月, パンフレット,
www.schott.com/advanced_optics/english/download/index.html/
から公知である。
KG=10×(α1/α2)×((1-(LTV/1.5))+(1-(TTV/7))+(1-(WARP/200)))
が成り立ち、ここで、常に
KG≧4であり、特にKG≧15であり、好ましくはKG≧30である
ことにより解決される。
組成 (質量%)
SiO2 63~85
Al2O3 0~10
B2O3 5~20
Li2O+Na2O+K2O 2~14
MgO+CaO+SrO+BaO+ZnO 0~12
TiO2+ZrO2 0~5
P2O5 0~2
組成 (質量%)
SiO2 60~84
Al2O3 0~10
B2O3 3~18
Li2O+Na2O+K2O 5~20
MgO+CaO+SrO+BaO+ZnO 0~15
TiO2+ZrO2 0~4
P2O5 0~2
組成 (質量%)
SiO2 58~65
Al2O3 14~25
B2O3 6~10.5
MgO+CaO+SrO+BaO+ZnO 8~18
ZnO 0~2
組成 (質量%)
SiO2 50~81
Al2O3 0~5
B2O3 0~5
Li2O+Na2O+K2O 5~28
MgO+CaO+SrO+BaO+ZnO 5~25
TiO2+ZrO2 0~6
P2O5 0~2
組成 (質量%)
SiO2 52~66
B2O3 0~8
Al2O3 15~25
MgO+CaO+SrO+BaO+ZnO 0~6
ZrO2 0~2.5
Li2O+Na2O+K2O 4~30
TiO2+CeO2 0~2.5
・200μmのWARP
・15μmのTTV
・0.6μmのLTV
である。
http://global-sei.com/sc/products_e/inp/flat.html
に記載されているような、慣用の定義が参照される。
KG=-20.357
KG=10×(α1/α2)×((1-(LTV/1.5))+(1-(TTV/7))+(1-(WARP/200)))
は、全体厚みムラTTVの値が5μmであり、局所厚みムラLTVの値が0.6μmであり、WARPの値が130μmであり、かつ電子基板のα1およびガラス材料のα2が上記の値である場合に、
KG=46.12
であり、これはKG=15およびKG=30を上回る。
10 本発明による接合体、 12 部材、 14 ガラス基板、 20 入力/出力構造体、 22 吸収体、 24 表面波
Claims (11)
- 部材とガラス材料またはガラスセラミック材料との接合体であって、
・前記部材は、第1の膨張係数α1を有し、
・前記ガラス材料またはガラスセラミック材料は、第2の膨張係数α2を有し、
・前記ガラス材料またはガラスセラミック材料は、厚みと、表面内の全体厚みムラ(TTV)と、局所厚みムラ(LTV)と、WARPとを有する表面を有し、
・前記部材とガラス材料またはガラスセラミック材料との接合体は、前記ガラス材料またはガラスセラミック材料内の残留応力を有する
接合体において、
・前記接合体は、幾何学的および材料物理学的適合度
KG=10×(α1/α2)×((1-(LTV/1.5))+(1-(TTV/7))+(1-(WARP/200)))
により特徴付けられ、常に
KG≧4であり、かつ
前記部材の前記第1の膨張係数α 1 は、前記ガラス材料またはガラスセラミック材料の前記第2の膨張係数α 2 よりも大きいかまたはこれと同一である
ことを特徴とする接合体。 - 前記部材の前記第1の膨張係数α1は、前記ガラス材料またはガラスセラミック材料の前記第2の膨張係数α2の最大で3倍であることを特徴とする、請求項1記載の接合体。
- 前記ガラス材料またはガラスセラミック材料の前記表面内の全体厚みムラ(TTV)は、10μm未満であることを特徴とする、請求項1または2記載の接合体。
- 前記ガラス材料またはガラスセラミック材料の前記局所厚みムラ(LTV)は、25mm2以下の面積で、5μm未満であることを特徴とする、請求項1から3までのいずれか1項記載の接合体。
- 直径6インチの接合部材に関して、前記ガラス材料またはガラスセラミック材料内のWARPは、300μm未満であることを特徴とする、請求項1から4までのいずれか1項記載の接合体。
- 前記部材は、シリコン、タンタル酸リチウム、ニオブ酸リチウム、四ホウ酸リチウム、ガラス、セラミック、炭化ケイ素、窒化ガリウム、ヒ化ガリウム、リン化インジウム、サファイアおよび石英の群から選択される1つの材料または複数の材料を含むことを特徴とする、請求項1から5までのいずれか1項記載の接合体。
- 前記ガラス材料は、
・ソーダ石灰ガラス、
・ホウケイ酸ガラス
・無アルカリアルミノホウケイ酸ガラス
であることを特徴とする、請求項1から6までのいずれか1項記載の接合体。 - 前記ガラス材料は、板ガラスであることを特徴とする、請求項1から7までのいずれか1項記載の接合体。
- 前記板ガラスの厚みは、200μm未満であることを特徴とする、請求項8記載の接合体。
- 前記接合体は、前記ガラス材料またはガラスセラミック材料と前記部材とを接合するための接合材料を含むことを特徴とする、請求項1から9までのいずれか1項記載の接合体。
- 請求項1から10までのいずれか1項記載の接合体の製造方法であって、以下:
・膨張係数α1を有する部材と、膨張係数α2を有するガラス材料またはガラスセラミック材料とを準備するステップと、
・前記ガラス材料またはガラスセラミック材料を矯正するステップと、
・前記部材の表面および/または前記ガラス材料もしくはガラスセラミック材料の表面を、接合材料の薄層で濡らすステップと、
・前記部材と前記ガラス材料またはガラスセラミック材料とを圧着して接合体を得るステップと
を含む方法。
Applications Claiming Priority (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE102017210509.7 | 2017-06-22 | ||
DE102017210509 | 2017-06-22 | ||
DE102018209589.2 | 2018-06-14 | ||
DE102018209589.2A DE102018209589B4 (de) | 2017-06-22 | 2018-06-14 | Verbund aus einem Bauteil, insbesondere einem elektronischen Bauteil, und einem Glas- oder Glaskeramikmaterial sowie Verfahren zu dessen Herstellung |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2019006671A JP2019006671A (ja) | 2019-01-17 |
JP7166802B2 true JP7166802B2 (ja) | 2022-11-08 |
Family
ID=64567781
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2018117807A Active JP7166802B2 (ja) | 2017-06-22 | 2018-06-21 | 部材、特に電子部材とガラス材料またはガラスセラミック材料との接合体 |
Country Status (4)
Country | Link |
---|---|
US (1) | US10836140B2 (ja) |
JP (1) | JP7166802B2 (ja) |
CN (1) | CN109111130B (ja) |
DE (1) | DE102018209589B4 (ja) |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE102018209589B4 (de) * | 2017-06-22 | 2023-05-04 | Schott Ag | Verbund aus einem Bauteil, insbesondere einem elektronischen Bauteil, und einem Glas- oder Glaskeramikmaterial sowie Verfahren zu dessen Herstellung |
DE102019215075B4 (de) | 2019-09-30 | 2023-04-27 | Schott Ag | Glasverbundmaterial und Verfahren zur Herstellung eines Glasverbundmaterials sowie dessen Verwendung |
DE102019215076B4 (de) | 2019-09-30 | 2021-04-22 | Schott Ag | Vorrichtung, Verfahren zur Herstellung der Vorrichtung sowie Verwendung der Vorrichtung |
WO2021192700A1 (ja) * | 2020-03-23 | 2021-09-30 | Agc株式会社 | 接合体 |
Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2003275953A (ja) | 2002-03-25 | 2003-09-30 | Kyocera Corp | 基板研磨用ベースプレート |
JP2008162861A (ja) | 2006-12-28 | 2008-07-17 | Fujifilm Corp | 接合方法および接合部材 |
JP2009177034A (ja) | 2008-01-26 | 2009-08-06 | Fujikura Ltd | 半導体パッケージの製造方法 |
JP2014517805A (ja) | 2011-05-27 | 2014-07-24 | コーニング インコーポレイテッド | 未研磨ガラスウェハ、未研磨ガラスウェハを使用して半導体ウェハを薄厚化する薄厚化システム及び方法 |
JP2016501809A (ja) | 2012-10-26 | 2016-01-21 | ダウ コーニング コーポレーションDow Corning Corporation | 平坦なSiC半導体基板 |
WO2016047210A1 (ja) | 2014-09-25 | 2016-03-31 | 日本電気硝子株式会社 | 支持ガラス基板及びこれを用いた積層体 |
Family Cites Families (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE3931213A1 (de) | 1989-09-19 | 1991-04-04 | Wacker Chemitronic | Verfahren und vorrichtung zur interferometrischen messung der ebenheit von beidseitig oberflaechen geringer rauhigkeit aufweisenden halbleiter-, insbesondere siliciumscheiben |
US20030060020A1 (en) * | 2000-10-12 | 2003-03-27 | Silicon Evolution, Inc. | Method and apparatus for finishing substrates for wafer to wafer bonding |
DE102006032047A1 (de) * | 2006-07-10 | 2008-01-24 | Schott Ag | Verfahren zur Herstellung optoelektronischer Bauelemente und damit hergestellte Erzeugnisse |
EP2137757B1 (en) * | 2007-04-17 | 2015-09-02 | Imec | Method for reducing the thickness of substrates |
JP4577526B2 (ja) | 2007-07-17 | 2010-11-10 | ソニーケミカル&インフォメーションデバイス株式会社 | フレキシブル配線回路基板の製造方法 |
US8846499B2 (en) * | 2010-08-17 | 2014-09-30 | Taiwan Semiconductor Manufacturing Company, Ltd. | Composite carrier structure |
JP6593669B2 (ja) * | 2013-09-12 | 2019-10-23 | 日本電気硝子株式会社 | 支持ガラス基板及びこれを用いた搬送体 |
CN103643302B (zh) * | 2013-11-26 | 2017-01-25 | 浙江上城科技有限公司 | 一种蓝宝石热复合方法 |
JP6519221B2 (ja) | 2015-02-23 | 2019-05-29 | 日本電気硝子株式会社 | ガラス基板及びこれを用いた積層体 |
DE102018209589B4 (de) * | 2017-06-22 | 2023-05-04 | Schott Ag | Verbund aus einem Bauteil, insbesondere einem elektronischen Bauteil, und einem Glas- oder Glaskeramikmaterial sowie Verfahren zu dessen Herstellung |
-
2018
- 2018-06-14 DE DE102018209589.2A patent/DE102018209589B4/de active Active
- 2018-06-21 JP JP2018117807A patent/JP7166802B2/ja active Active
- 2018-06-21 US US16/014,627 patent/US10836140B2/en active Active
- 2018-06-22 CN CN201810652180.XA patent/CN109111130B/zh active Active
Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2003275953A (ja) | 2002-03-25 | 2003-09-30 | Kyocera Corp | 基板研磨用ベースプレート |
JP2008162861A (ja) | 2006-12-28 | 2008-07-17 | Fujifilm Corp | 接合方法および接合部材 |
JP2009177034A (ja) | 2008-01-26 | 2009-08-06 | Fujikura Ltd | 半導体パッケージの製造方法 |
JP2014517805A (ja) | 2011-05-27 | 2014-07-24 | コーニング インコーポレイテッド | 未研磨ガラスウェハ、未研磨ガラスウェハを使用して半導体ウェハを薄厚化する薄厚化システム及び方法 |
JP2016501809A (ja) | 2012-10-26 | 2016-01-21 | ダウ コーニング コーポレーションDow Corning Corporation | 平坦なSiC半導体基板 |
WO2016047210A1 (ja) | 2014-09-25 | 2016-03-31 | 日本電気硝子株式会社 | 支持ガラス基板及びこれを用いた積層体 |
Also Published As
Publication number | Publication date |
---|---|
JP2019006671A (ja) | 2019-01-17 |
US20180370193A1 (en) | 2018-12-27 |
CN109111130A (zh) | 2019-01-01 |
DE102018209589B4 (de) | 2023-05-04 |
CN109111130B (zh) | 2022-05-31 |
DE102018209589A1 (de) | 2018-12-27 |
US10836140B2 (en) | 2020-11-17 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP7166802B2 (ja) | 部材、特に電子部材とガラス材料またはガラスセラミック材料との接合体 | |
KR101636220B1 (ko) | 복합 기판, 압전 디바이스 및 복합 기판의 제법 | |
JP6630287B2 (ja) | ガラス物品 | |
TW201919883A (zh) | 具有高壓縮深度的複合疊層物 | |
JP7279432B2 (ja) | 複合基板、電子デバイス、複合基板の製造方法及び電子デバイスの製造方法 | |
KR101661361B1 (ko) | 복합 기판, 및 그것을 이용한 탄성 표면파 필터와 탄성 표면파 공진기 | |
US9159901B2 (en) | Composite substrate and elastic wave device | |
US10882778B2 (en) | Glass substrate, laminated substrate, laminate, and method for producing semiconductor package | |
WO2016088868A1 (ja) | ガラス板 | |
KR20120098640A (ko) | 유리 적층체 및 그의 제조 방법, 및 표시 패널의 제조 방법 및 그 제조 방법에 의해 얻어지는 표시 패널 | |
KR20150118143A (ko) | 복합 기판, 탄성파 디바이스 및 탄성파 디바이스의 제법 | |
US8424746B2 (en) | Method of manufacturing optical component and optical component | |
KR20160140615A (ko) | 지지 유리 기판 및 이것을 사용한 적층체 | |
JP6631935B2 (ja) | ガラス板の製造方法 | |
WO2020189115A1 (ja) | 複合基板、電子デバイス、複合基板の製造方法及び電子デバイスの製造方法 | |
JP2011019043A (ja) | 複合基板及び複合基板の製造方法 | |
KR102440332B1 (ko) | 공학적 응력 분포를 갖는 유리계 제품 및 이의 제조 방법 | |
JP2014125360A (ja) | 強化板ガラス及びその製造方法 | |
JP2017202953A (ja) | 封止材積層体及び接合体 | |
TW202235268A (zh) | 具黏著劑及複雜幾何形狀之玻璃基材料 | |
JP2020045281A (ja) | ガラス板 | |
JP2015005931A (ja) | 圧電基板及び弾性表面波素子 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20210325 |
|
A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20220114 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20220117 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20220411 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20220523 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20220817 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20221005 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20221026 |
|
R150 | Certificate of patent or registration of utility model |
Ref document number: 7166802 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 |