JP7164025B2 - 電子デバイスの製造方法 - Google Patents
電子デバイスの製造方法 Download PDFInfo
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- JP7164025B2 JP7164025B2 JP2021513535A JP2021513535A JP7164025B2 JP 7164025 B2 JP7164025 B2 JP 7164025B2 JP 2021513535 A JP2021513535 A JP 2021513535A JP 2021513535 A JP2021513535 A JP 2021513535A JP 7164025 B2 JP7164025 B2 JP 7164025B2
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- H01L2224/80—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
- H01L2224/83—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a layer connector
- H01L2224/838—Bonding techniques
- H01L2224/8385—Bonding techniques using a polymer adhesive, e.g. an adhesive based on silicone, epoxy, polyimide, polyester
- H01L2224/83855—Hardening the adhesive by curing, i.e. thermosetting
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- H01L24/82—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected by forming build-up interconnects at chip-level, e.g. for high density interconnects [HDI]
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Description
まず、出発基板上にエピタキシャル成長によって形成された、化合物半導体からなる複数の独立した太陽電池構造を有する第一のウェーハを準備する。図1及び図2に第一のウェーハ100の概略を示した。第一のウェーハ100は、出発基板10上にエピタキシャル成長により、太陽電池構造101を複数形成する。
次に、第一の実施形態の途中工程を変更した本発明の第二の実施形態を説明する。第二の実施形態は、基本的に第一の実施形態と同様であるが、配線方式が異なる。第二の実施形態において形成される電子デバイス用接合を行う前に第二のウェーハ200において駆動回路に電力を供給可能なようにパッド電極22、23を設けることは同様であるが、接合を行う前において、予め、第一のウェーハの太陽電池構造から電力を取り出すことが可能なように太陽電池構造用電極52を形成することが異なる(図11参照)。以下では、第一の実施形態との差異に着目して第二の実施形態を説明する。第一の実施形態と本質的に同じ構成要素は同じ符号を用いて説明する。
Claims (5)
- 太陽電池構造を備えた駆動回路を有する電子デバイスを製造する方法であって、
出発基板上にエピタキシャル成長によって形成された、化合物半導体からなる複数の独立した太陽電池構造を有する第一のウェーハと、複数の独立した駆動回路が形成された第二のウェーハを、前記複数の独立した太陽電池構造と前記複数の独立した駆動回路が夫々重なり合うように接合して接合ウェーハとする工程と、
前記接合ウェーハにおいて前記複数の独立した太陽電池構造から前記複数の独立した駆動回路に夫々電力が供給可能なように配線を行う工程と、
前記接合ウェーハをダイシングすることで、前記太陽電池構造を備えた駆動回路を有する電子デバイスを製造する工程と
を有することを特徴とする電子デバイスの製造方法。 - 前記接合を、熱硬化性の接着剤を用いて行うことを特徴とする請求項1に記載の電子デバイスの製造方法。
- 前記熱硬化性の接着剤の厚みを2.0μm以上とすることを特徴とする請求項2に記載の電子デバイスの製造方法。
- 前記接合を行った後、前記接合ウェーハから前記出発基板を分離することを特徴とする請求項1から請求項3のいずれか1項に記載の電子デバイスの製造方法。
- 前記配線を、
前記接合を行う前に前記第二のウェーハにおいて前記駆動回路に電力を供給可能なようにパッド電極を設けることと、
前記接合を行う前及び後の少なくともいずれかにおいて、前記第一のウェーハの太陽電池構造から電力を取り出すことが可能なように太陽電池構造用電極を形成することと、
前記パッド電極及び前記太陽電池構造用電極を電気的に接続することと
により行うことを特徴とする請求項1から請求項4のいずれか1項に記載の電子デバイスの製造方法。
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