JP7152627B2 - 熱式流量計 - Google Patents

熱式流量計 Download PDF

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Publication number
JP7152627B2
JP7152627B2 JP2022501657A JP2022501657A JP7152627B2 JP 7152627 B2 JP7152627 B2 JP 7152627B2 JP 2022501657 A JP2022501657 A JP 2022501657A JP 2022501657 A JP2022501657 A JP 2022501657A JP 7152627 B2 JP7152627 B2 JP 7152627B2
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JP
Japan
Prior art keywords
passage
circuit board
thermal flowmeter
sub
conductive coating
Prior art date
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Active
Application number
JP2022501657A
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English (en)
Japanese (ja)
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JPWO2021166419A1 (https=
Inventor
瑞紀 芝田
孝之 余語
暁 上ノ段
博幸 阿部
ファハナー ビンティ ハリダン ファティン
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Astemo Ltd
Original Assignee
Hitachi Astemo Ltd
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Filing date
Publication date
Application filed by Hitachi Astemo Ltd filed Critical Hitachi Astemo Ltd
Publication of JPWO2021166419A1 publication Critical patent/JPWO2021166419A1/ja
Application granted granted Critical
Publication of JP7152627B2 publication Critical patent/JP7152627B2/ja
Active legal-status Critical Current
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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F5/00—Measuring a proportion of the volume flow
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
    • G01F1/684—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow
    • G01F1/6842—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow with means for influencing the fluid flow
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
    • G01F1/684—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow
    • G01F1/6845—Micromachined devices
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
    • G01F1/684—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow
    • G01F1/688—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow using a particular type of heating, cooling or sensing element
    • G01F1/69—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow using a particular type of heating, cooling or sensing element of resistive type
    • G01F1/692—Thin-film arrangements
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01K—MEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
    • G01K13/00—Thermometers specially adapted for specific purposes
    • G01K13/02—Thermometers specially adapted for specific purposes for measuring temperature of moving fluids or granular materials capable of flow
    • G01K13/024—Thermometers specially adapted for specific purposes for measuring temperature of moving fluids or granular materials capable of flow of moving gases
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01K—MEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
    • G01K17/00—Measuring quantity of heat
    • G01K17/06—Measuring quantity of heat conveyed by flowing media, e.g. in heating systems e.g. the quantity of heat in a transporting medium, delivered to or consumed in an expenditure device

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • Measuring Volume Flow (AREA)
  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Combustion & Propulsion (AREA)
JP2022501657A 2020-02-20 2020-12-22 熱式流量計 Active JP7152627B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2020027467 2020-02-20
JP2020027467 2020-02-20
PCT/JP2020/047827 WO2021166419A1 (ja) 2020-02-20 2020-12-22 熱式流量計

Publications (2)

Publication Number Publication Date
JPWO2021166419A1 JPWO2021166419A1 (https=) 2021-08-26
JP7152627B2 true JP7152627B2 (ja) 2022-10-12

Family

ID=77391914

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2022501657A Active JP7152627B2 (ja) 2020-02-20 2020-12-22 熱式流量計

Country Status (4)

Country Link
US (1) US11965761B2 (https=)
JP (1) JP7152627B2 (https=)
DE (1) DE112020005816T5 (https=)
WO (1) WO2021166419A1 (https=)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2021089190A (ja) * 2019-12-03 2021-06-10 株式会社デンソー 流量検出装置
JP2021173559A (ja) * 2020-04-21 2021-11-01 株式会社デンソー 物理量計測装置

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6475860B2 (ja) 2015-10-28 2019-02-27 日立オートモティブシステムズ株式会社 流量計
JP6578238B2 (ja) 2016-04-11 2019-09-18 日立オートモティブシステムズ株式会社 物理量検出装置
JP6670792B2 (ja) 2017-04-06 2020-03-25 日立オートモティブシステムズ株式会社 物理量検出装置、物理量検出装置の製造方法
WO2020179251A1 (ja) 2019-03-04 2020-09-10 日立オートモティブシステムズ株式会社 物理量検出装置
JP6915160B2 (ja) 2018-05-22 2021-08-04 日立Astemo株式会社 物理量検出装置
JP6965358B2 (ja) 2017-09-05 2021-11-10 日立Astemo株式会社 熱式流量計

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59119248A (ja) * 1982-12-27 1984-07-10 Toshiba Corp 核磁気共鳴装置
JPH0665358B2 (ja) * 1986-03-14 1994-08-24 株式会社石井鐵工所 立体迷路状の遊戯施設
DE3704670A1 (de) * 1987-02-14 1988-08-25 Leitz Louis Brieflocher
JP3587734B2 (ja) * 1999-06-30 2004-11-10 株式会社日立製作所 熱式空気流量センサ
JP2019007902A (ja) 2017-06-28 2019-01-17 日立オートモティブシステムズ株式会社 熱式流量計

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6475860B2 (ja) 2015-10-28 2019-02-27 日立オートモティブシステムズ株式会社 流量計
JP6578238B2 (ja) 2016-04-11 2019-09-18 日立オートモティブシステムズ株式会社 物理量検出装置
JP6670792B2 (ja) 2017-04-06 2020-03-25 日立オートモティブシステムズ株式会社 物理量検出装置、物理量検出装置の製造方法
JP6965358B2 (ja) 2017-09-05 2021-11-10 日立Astemo株式会社 熱式流量計
JP6915160B2 (ja) 2018-05-22 2021-08-04 日立Astemo株式会社 物理量検出装置
WO2020179251A1 (ja) 2019-03-04 2020-09-10 日立オートモティブシステムズ株式会社 物理量検出装置

Also Published As

Publication number Publication date
US20230332936A1 (en) 2023-10-19
CN115023591A (zh) 2022-09-06
US11965761B2 (en) 2024-04-23
JPWO2021166419A1 (https=) 2021-08-26
WO2021166419A1 (ja) 2021-08-26
DE112020005816T5 (de) 2022-09-08

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