JPWO2021166419A1 - - Google Patents

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Publication number
JPWO2021166419A1
JPWO2021166419A1 JP2022501657A JP2022501657A JPWO2021166419A1 JP WO2021166419 A1 JPWO2021166419 A1 JP WO2021166419A1 JP 2022501657 A JP2022501657 A JP 2022501657A JP 2022501657 A JP2022501657 A JP 2022501657A JP WO2021166419 A1 JPWO2021166419 A1 JP WO2021166419A1
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2022501657A
Other languages
Japanese (ja)
Other versions
JP7152627B2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of JPWO2021166419A1 publication Critical patent/JPWO2021166419A1/ja
Application granted granted Critical
Publication of JP7152627B2 publication Critical patent/JP7152627B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F5/00—Measuring a proportion of the volume flow
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
    • G01F1/684—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow
    • G01F1/6842—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow with means for influencing the fluid flow
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
    • G01F1/684—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow
    • G01F1/6845—Micromachined devices
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
    • G01F1/684—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow
    • G01F1/688—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow using a particular type of heating, cooling or sensing element
    • G01F1/69—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow using a particular type of heating, cooling or sensing element of resistive type
    • G01F1/692—Thin-film arrangements
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01K—MEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
    • G01K13/00—Thermometers specially adapted for specific purposes
    • G01K13/02—Thermometers specially adapted for specific purposes for measuring temperature of moving fluids or granular materials capable of flow
    • G01K13/024—Thermometers specially adapted for specific purposes for measuring temperature of moving fluids or granular materials capable of flow of moving gases
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01K—MEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
    • G01K17/00—Measuring quantity of heat
    • G01K17/06—Measuring quantity of heat conveyed by flowing media, e.g. in heating systems e.g. the quantity of heat in a transporting medium, delivered to or consumed in an expenditure device

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • Measuring Volume Flow (AREA)
  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Combustion & Propulsion (AREA)
JP2022501657A 2020-02-20 2020-12-22 熱式流量計 Active JP7152627B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2020027467 2020-02-20
JP2020027467 2020-02-20
PCT/JP2020/047827 WO2021166419A1 (ja) 2020-02-20 2020-12-22 熱式流量計

Publications (2)

Publication Number Publication Date
JPWO2021166419A1 true JPWO2021166419A1 (https=) 2021-08-26
JP7152627B2 JP7152627B2 (ja) 2022-10-12

Family

ID=77391914

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2022501657A Active JP7152627B2 (ja) 2020-02-20 2020-12-22 熱式流量計

Country Status (4)

Country Link
US (1) US11965761B2 (https=)
JP (1) JP7152627B2 (https=)
DE (1) DE112020005816T5 (https=)
WO (1) WO2021166419A1 (https=)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2021089190A (ja) * 2019-12-03 2021-06-10 株式会社デンソー 流量検出装置
JP2021173559A (ja) * 2020-04-21 2021-11-01 株式会社デンソー 物理量計測装置

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0370792B2 (https=) * 1982-12-27 1991-11-08 Tokyo Shibaura Electric Co
JPH0615160B2 (ja) * 1987-02-14 1994-03-02 ルイス ライツ 書類穴あけ器
JPH0665358B2 (ja) * 1986-03-14 1994-08-24 株式会社石井鐵工所 立体迷路状の遊戯施設
JP6475860B2 (ja) * 2015-10-28 2019-02-27 日立オートモティブシステムズ株式会社 流量計
JP6578238B2 (ja) * 2016-04-11 2019-09-18 日立オートモティブシステムズ株式会社 物理量検出装置
WO2020179251A1 (ja) * 2019-03-04 2020-09-10 日立オートモティブシステムズ株式会社 物理量検出装置

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3587734B2 (ja) * 1999-06-30 2004-11-10 株式会社日立製作所 熱式空気流量センサ
JP6670792B2 (ja) 2017-04-06 2020-03-25 日立オートモティブシステムズ株式会社 物理量検出装置、物理量検出装置の製造方法
JP2019007902A (ja) 2017-06-28 2019-01-17 日立オートモティブシステムズ株式会社 熱式流量計
WO2019049513A1 (ja) 2017-09-05 2019-03-14 日立オートモティブシステムズ株式会社 熱式流量計
WO2019225073A1 (ja) 2018-05-22 2019-11-28 日立オートモティブシステムズ株式会社 物理量検出装置

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0370792B2 (https=) * 1982-12-27 1991-11-08 Tokyo Shibaura Electric Co
JPH0665358B2 (ja) * 1986-03-14 1994-08-24 株式会社石井鐵工所 立体迷路状の遊戯施設
JPH0615160B2 (ja) * 1987-02-14 1994-03-02 ルイス ライツ 書類穴あけ器
JP6475860B2 (ja) * 2015-10-28 2019-02-27 日立オートモティブシステムズ株式会社 流量計
JP6578238B2 (ja) * 2016-04-11 2019-09-18 日立オートモティブシステムズ株式会社 物理量検出装置
WO2020179251A1 (ja) * 2019-03-04 2020-09-10 日立オートモティブシステムズ株式会社 物理量検出装置

Also Published As

Publication number Publication date
US20230332936A1 (en) 2023-10-19
CN115023591A (zh) 2022-09-06
JP7152627B2 (ja) 2022-10-12
US11965761B2 (en) 2024-04-23
WO2021166419A1 (ja) 2021-08-26
DE112020005816T5 (de) 2022-09-08

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