JP7151907B2 - キャパシタおよびその製造方法 - Google Patents

キャパシタおよびその製造方法 Download PDF

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Publication number
JP7151907B2
JP7151907B2 JP2021548315A JP2021548315A JP7151907B2 JP 7151907 B2 JP7151907 B2 JP 7151907B2 JP 2021548315 A JP2021548315 A JP 2021548315A JP 2021548315 A JP2021548315 A JP 2021548315A JP 7151907 B2 JP7151907 B2 JP 7151907B2
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Prior art keywords
conductive
columnar portions
dielectric layer
capacitor
support portion
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JP2021548315A
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Japanese (ja)
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JPWO2021059569A1 (https=
Inventor
康弘 清水
真己 永田
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Murata Manufacturing Co Ltd
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Murata Manufacturing Co Ltd
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01G—CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES, LIGHT-SENSITIVE OR TEMPERATURE-SENSITIVE DEVICES OF THE ELECTROLYTIC TYPE
    • H01G4/00—Fixed capacitors; Processes of their manufacture
    • H01G4/30—Stacked capacitors
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01G—CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES, LIGHT-SENSITIVE OR TEMPERATURE-SENSITIVE DEVICES OF THE ELECTROLYTIC TYPE
    • H01G4/00—Fixed capacitors; Processes of their manufacture
    • H01G4/33—Thin- or thick-film capacitors (thin- or thick-film circuits; capacitors without a potential-jump or surface barrier specially adapted for integrated circuits, details thereof, multistep manufacturing processes therefor)
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01G—CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES, LIGHT-SENSITIVE OR TEMPERATURE-SENSITIVE DEVICES OF THE ELECTROLYTIC TYPE
    • H01G4/00—Fixed capacitors; Processes of their manufacture
    • H01G4/002—Details
    • H01G4/005—Electrodes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01G—CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES, LIGHT-SENSITIVE OR TEMPERATURE-SENSITIVE DEVICES OF THE ELECTROLYTIC TYPE
    • H01G4/00—Fixed capacitors; Processes of their manufacture
    • H01G4/002—Details
    • H01G4/018—Dielectrics
    • H01G4/06—Solid dielectrics
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01G—CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES, LIGHT-SENSITIVE OR TEMPERATURE-SENSITIVE DEVICES OF THE ELECTROLYTIC TYPE
    • H01G4/00—Fixed capacitors; Processes of their manufacture
    • H01G4/002—Details
    • H01G4/018—Dielectrics
    • H01G4/06—Solid dielectrics
    • H01G4/08—Inorganic dielectrics
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01G—CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES, LIGHT-SENSITIVE OR TEMPERATURE-SENSITIVE DEVICES OF THE ELECTROLYTIC TYPE
    • H01G4/00—Fixed capacitors; Processes of their manufacture
    • H01G4/38—Multiple capacitors, i.e. structural combinations of fixed capacitors

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  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Manufacturing & Machinery (AREA)
  • Chemical & Material Sciences (AREA)
  • Inorganic Chemistry (AREA)
  • Fixed Capacitors And Capacitor Manufacturing Machines (AREA)
  • Ceramic Capacitors (AREA)
JP2021548315A 2019-09-25 2020-04-13 キャパシタおよびその製造方法 Active JP7151907B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2019174347 2019-09-25
JP2019174347 2019-09-25
PCT/JP2020/016272 WO2021059569A1 (ja) 2019-09-25 2020-04-13 キャパシタおよびその製造方法

Publications (2)

Publication Number Publication Date
JPWO2021059569A1 JPWO2021059569A1 (https=) 2021-04-01
JP7151907B2 true JP7151907B2 (ja) 2022-10-12

Family

ID=75166937

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2021548315A Active JP7151907B2 (ja) 2019-09-25 2020-04-13 キャパシタおよびその製造方法

Country Status (3)

Country Link
US (1) US11749463B2 (https=)
JP (1) JP7151907B2 (https=)
WO (1) WO2021059569A1 (https=)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7151907B2 (ja) * 2019-09-25 2022-10-12 株式会社村田製作所 キャパシタおよびその製造方法
CN120019459A (zh) * 2022-11-01 2025-05-16 株式会社村田制作所 电容器
US12581667B2 (en) 2022-12-30 2026-03-17 International Business Machines Corporation Multistack metal-insulator-metal (MIM) structure using spacer formation process for heterogeneous integration with discrete capacitors
US20250006780A1 (en) * 2023-06-30 2025-01-02 International Business Machines Corporation Extremely high density silicon capacitor

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003234254A (ja) 2002-02-07 2003-08-22 Hitachi Zosen Corp カーボンナノチューブを用いた電気二重層キャパシタ
JP2005129566A (ja) 2003-10-21 2005-05-19 Toyota Motor Corp キャパシタ
JP2008193096A (ja) 2007-02-06 2008-08-21 Young Joo Oh 金属キャパシタ及びその製造方法
JP2015514315A (ja) 2012-03-22 2015-05-18 カリフォルニア インスティチュート オブ テクノロジー 細長体を有する導電性素子のアレイを具えるマイクロ・ナノスケールキャパシタ
JP2015519742A (ja) 2012-05-03 2015-07-09 ダイソン テクノロジー リミテッド ハイブリッドキャパシタ

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1538640B1 (en) * 2003-12-05 2016-11-16 NGK Spark Plug Co., Ltd. Capacitor and method for manufacturing the same
JP5091242B2 (ja) 2006-10-04 2012-12-05 エヌエックスピー ビー ヴィ Ｍｉｍキャパシタ
JP4357577B2 (ja) * 2007-06-14 2009-11-04 太陽誘電株式会社 コンデンサ及びその製造方法
JP5931594B2 (ja) * 2012-06-07 2016-06-08 太陽誘電株式会社 コンデンサ
US9119289B2 (en) * 2013-02-25 2015-08-25 3M Innovative Properties Company Film constructions for interdigitated electrodes with bus bars and methods of making same
WO2021059570A1 (ja) * 2019-09-25 2021-04-01 株式会社村田製作所 ナノ構造集合体およびその製造方法
JP7151907B2 (ja) * 2019-09-25 2022-10-12 株式会社村田製作所 キャパシタおよびその製造方法
JP7248143B2 (ja) * 2019-10-24 2023-03-29 株式会社村田製作所 複合キャパシタ
CN114600209B (zh) * 2019-10-24 2024-07-23 株式会社村田制作所 复合电容器
US11715594B2 (en) * 2021-05-27 2023-08-01 International Business Machines Corporation Vertically-stacked interdigitated metal-insulator-metal capacitor for sub-20 nm pitch

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003234254A (ja) 2002-02-07 2003-08-22 Hitachi Zosen Corp カーボンナノチューブを用いた電気二重層キャパシタ
JP2005129566A (ja) 2003-10-21 2005-05-19 Toyota Motor Corp キャパシタ
JP2008193096A (ja) 2007-02-06 2008-08-21 Young Joo Oh 金属キャパシタ及びその製造方法
JP2015514315A (ja) 2012-03-22 2015-05-18 カリフォルニア インスティチュート オブ テクノロジー 細長体を有する導電性素子のアレイを具えるマイクロ・ナノスケールキャパシタ
JP2015519742A (ja) 2012-05-03 2015-07-09 ダイソン テクノロジー リミテッド ハイブリッドキャパシタ

Also Published As

Publication number Publication date
WO2021059569A1 (ja) 2021-04-01
US20220189702A1 (en) 2022-06-16
US11749463B2 (en) 2023-09-05
JPWO2021059569A1 (https=) 2021-04-01

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