JPWO2021059569A1 - - Google Patents
Info
- Publication number
- JPWO2021059569A1 JPWO2021059569A1 JP2021548315A JP2021548315A JPWO2021059569A1 JP WO2021059569 A1 JPWO2021059569 A1 JP WO2021059569A1 JP 2021548315 A JP2021548315 A JP 2021548315A JP 2021548315 A JP2021548315 A JP 2021548315A JP WO2021059569 A1 JPWO2021059569 A1 JP WO2021059569A1
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01G—CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES, LIGHT-SENSITIVE OR TEMPERATURE-SENSITIVE DEVICES OF THE ELECTROLYTIC TYPE
- H01G4/00—Fixed capacitors; Processes of their manufacture
- H01G4/30—Stacked capacitors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01G—CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES, LIGHT-SENSITIVE OR TEMPERATURE-SENSITIVE DEVICES OF THE ELECTROLYTIC TYPE
- H01G4/00—Fixed capacitors; Processes of their manufacture
- H01G4/33—Thin- or thick-film capacitors (thin- or thick-film circuits; capacitors without a potential-jump or surface barrier specially adapted for integrated circuits, details thereof, multistep manufacturing processes therefor)
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01G—CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES, LIGHT-SENSITIVE OR TEMPERATURE-SENSITIVE DEVICES OF THE ELECTROLYTIC TYPE
- H01G4/00—Fixed capacitors; Processes of their manufacture
- H01G4/002—Details
- H01G4/005—Electrodes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01G—CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES, LIGHT-SENSITIVE OR TEMPERATURE-SENSITIVE DEVICES OF THE ELECTROLYTIC TYPE
- H01G4/00—Fixed capacitors; Processes of their manufacture
- H01G4/002—Details
- H01G4/018—Dielectrics
- H01G4/06—Solid dielectrics
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01G—CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES, LIGHT-SENSITIVE OR TEMPERATURE-SENSITIVE DEVICES OF THE ELECTROLYTIC TYPE
- H01G4/00—Fixed capacitors; Processes of their manufacture
- H01G4/002—Details
- H01G4/018—Dielectrics
- H01G4/06—Solid dielectrics
- H01G4/08—Inorganic dielectrics
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01G—CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES, LIGHT-SENSITIVE OR TEMPERATURE-SENSITIVE DEVICES OF THE ELECTROLYTIC TYPE
- H01G4/00—Fixed capacitors; Processes of their manufacture
- H01G4/38—Multiple capacitors, i.e. structural combinations of fixed capacitors
Landscapes
- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Manufacturing & Machinery (AREA)
- Chemical & Material Sciences (AREA)
- Inorganic Chemistry (AREA)
- Fixed Capacitors And Capacitor Manufacturing Machines (AREA)
- Ceramic Capacitors (AREA)
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2019174347 | 2019-09-25 | ||
| JP2019174347 | 2019-09-25 | ||
| PCT/JP2020/016272 WO2021059569A1 (ja) | 2019-09-25 | 2020-04-13 | キャパシタおよびその製造方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPWO2021059569A1 true JPWO2021059569A1 (https=) | 2021-04-01 |
| JP7151907B2 JP7151907B2 (ja) | 2022-10-12 |
Family
ID=75166937
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2021548315A Active JP7151907B2 (ja) | 2019-09-25 | 2020-04-13 | キャパシタおよびその製造方法 |
Country Status (3)
| Country | Link |
|---|---|
| US (1) | US11749463B2 (https=) |
| JP (1) | JP7151907B2 (https=) |
| WO (1) | WO2021059569A1 (https=) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP7151907B2 (ja) * | 2019-09-25 | 2022-10-12 | 株式会社村田製作所 | キャパシタおよびその製造方法 |
| CN120019459A (zh) * | 2022-11-01 | 2025-05-16 | 株式会社村田制作所 | 电容器 |
| US12581667B2 (en) | 2022-12-30 | 2026-03-17 | International Business Machines Corporation | Multistack metal-insulator-metal (MIM) structure using spacer formation process for heterogeneous integration with discrete capacitors |
| US20250006780A1 (en) * | 2023-06-30 | 2025-01-02 | International Business Machines Corporation | Extremely high density silicon capacitor |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2003234254A (ja) * | 2002-02-07 | 2003-08-22 | Hitachi Zosen Corp | カーボンナノチューブを用いた電気二重層キャパシタ |
| JP2005129566A (ja) * | 2003-10-21 | 2005-05-19 | Toyota Motor Corp | キャパシタ |
| JP2008193096A (ja) * | 2007-02-06 | 2008-08-21 | Young Joo Oh | 金属キャパシタ及びその製造方法 |
| JP2015514315A (ja) * | 2012-03-22 | 2015-05-18 | カリフォルニア インスティチュート オブ テクノロジー | 細長体を有する導電性素子のアレイを具えるマイクロ・ナノスケールキャパシタ |
| JP2015519742A (ja) * | 2012-05-03 | 2015-07-09 | ダイソン テクノロジー リミテッド | ハイブリッドキャパシタ |
Family Cites Families (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP1538640B1 (en) * | 2003-12-05 | 2016-11-16 | NGK Spark Plug Co., Ltd. | Capacitor and method for manufacturing the same |
| JP5091242B2 (ja) | 2006-10-04 | 2012-12-05 | エヌエックスピー ビー ヴィ | Ｍｉｍキャパシタ |
| JP4357577B2 (ja) * | 2007-06-14 | 2009-11-04 | 太陽誘電株式会社 | コンデンサ及びその製造方法 |
| JP5931594B2 (ja) * | 2012-06-07 | 2016-06-08 | 太陽誘電株式会社 | コンデンサ |
| US9119289B2 (en) * | 2013-02-25 | 2015-08-25 | 3M Innovative Properties Company | Film constructions for interdigitated electrodes with bus bars and methods of making same |
| WO2021059570A1 (ja) * | 2019-09-25 | 2021-04-01 | 株式会社村田製作所 | ナノ構造集合体およびその製造方法 |
| JP7151907B2 (ja) * | 2019-09-25 | 2022-10-12 | 株式会社村田製作所 | キャパシタおよびその製造方法 |
| JP7248143B2 (ja) * | 2019-10-24 | 2023-03-29 | 株式会社村田製作所 | 複合キャパシタ |
| CN114600209B (zh) * | 2019-10-24 | 2024-07-23 | 株式会社村田制作所 | 复合电容器 |
| US11715594B2 (en) * | 2021-05-27 | 2023-08-01 | International Business Machines Corporation | Vertically-stacked interdigitated metal-insulator-metal capacitor for sub-20 nm pitch |
-
2020
- 2020-04-13 JP JP2021548315A patent/JP7151907B2/ja active Active
- 2020-04-13 WO PCT/JP2020/016272 patent/WO2021059569A1/ja not_active Ceased
-
2022
- 2022-03-03 US US17/653,392 patent/US11749463B2/en active Active
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2003234254A (ja) * | 2002-02-07 | 2003-08-22 | Hitachi Zosen Corp | カーボンナノチューブを用いた電気二重層キャパシタ |
| JP2005129566A (ja) * | 2003-10-21 | 2005-05-19 | Toyota Motor Corp | キャパシタ |
| JP2008193096A (ja) * | 2007-02-06 | 2008-08-21 | Young Joo Oh | 金属キャパシタ及びその製造方法 |
| JP2015514315A (ja) * | 2012-03-22 | 2015-05-18 | カリフォルニア インスティチュート オブ テクノロジー | 細長体を有する導電性素子のアレイを具えるマイクロ・ナノスケールキャパシタ |
| JP2015519742A (ja) * | 2012-05-03 | 2015-07-09 | ダイソン テクノロジー リミテッド | ハイブリッドキャパシタ |
Also Published As
| Publication number | Publication date |
|---|---|
| JP7151907B2 (ja) | 2022-10-12 |
| WO2021059569A1 (ja) | 2021-04-01 |
| US20220189702A1 (en) | 2022-06-16 |
| US11749463B2 (en) | 2023-09-05 |
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