JP7142404B2 - 走査型電子顕微鏡を用いた観察方法、及びそのための試料ホルダ - Google Patents

走査型電子顕微鏡を用いた観察方法、及びそのための試料ホルダ Download PDF

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JP7142404B2
JP7142404B2 JP2022531786A JP2022531786A JP7142404B2 JP 7142404 B2 JP7142404 B2 JP 7142404B2 JP 2022531786 A JP2022531786 A JP 2022531786A JP 2022531786 A JP2022531786 A JP 2022531786A JP 7142404 B2 JP7142404 B2 JP 7142404B2
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sample
thin film
target sample
target
stage
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JPWO2021256412A1 (https=
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正嶺 新谷
誠二 山口
博朗 ▲たか▼玉
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Chubu University
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N1/00—Sampling; Preparing specimens for investigation
    • G01N1/28—Preparing specimens for investigation including physical details of (bio-)chemical methods covered elsewhere, e.g. G01N33/50, C12Q
    • G01N1/36—Embedding or analogous mounting of samples
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/20—Means for supporting or positioning the object or the material; Means for adjusting diaphragms or lenses associated with the support
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H01J37/28—Electron or ion microscopes; Electron or ion diffraction tubes with scanning beams
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/20—Positioning, supporting, modifying or maintaining the physical state of objects being observed or treated
    • H01J2237/2002—Controlling environment of sample
    • H01J2237/2003—Environmental cells
    • H01J2237/2004—Biological samples

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  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Sampling And Sample Adjustment (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
JP2022531786A 2020-06-16 2021-06-14 走査型電子顕微鏡を用いた観察方法、及びそのための試料ホルダ Active JP7142404B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2020103469 2020-06-16
JP2020103469 2020-06-16
PCT/JP2021/022443 WO2021256412A1 (ja) 2020-06-16 2021-06-14 走査型電子顕微鏡を用いた観察方法、及びそのための試料ホルダ

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JPWO2021256412A1 JPWO2021256412A1 (https=) 2021-12-23
JP7142404B2 true JP7142404B2 (ja) 2022-09-27

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JP2022531786A Active JP7142404B2 (ja) 2020-06-16 2021-06-14 走査型電子顕微鏡を用いた観察方法、及びそのための試料ホルダ

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US (1) US20230274905A1 (https=)
EP (1) EP4167266A4 (https=)
JP (1) JP7142404B2 (https=)
WO (1) WO2021256412A1 (https=)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN117405719B (zh) * 2023-12-14 2024-03-05 崇义章源钨业股份有限公司 一种薄膜材料截面扫描电镜样品制取装置

Citations (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006518534A (ja) 2003-02-20 2006-08-10 クアントミックス・リミテッド 走査型電子顕微鏡のためのサンプルエンクロージャと、その使用法
JP2008016249A (ja) 2006-07-04 2008-01-24 Jeol Ltd 試料保持体、試料検査方法及び試料検査装置並びに試料検査システム
JP2008210715A (ja) 2007-02-27 2008-09-11 Ebara Corp 荷電粒子線装置及びこれを用いた試料表面観察方法
JP2014022323A (ja) 2012-07-23 2014-02-03 National Institute Of Advanced Industrial & Technology 試料ホルダおよび電子顕微鏡像の観察方法
JP2014025755A (ja) 2012-07-25 2014-02-06 Honda Motor Co Ltd 電子顕微鏡用の試験片及びその製造方法
JP2016072184A (ja) 2014-10-01 2016-05-09 国立研究開発法人産業技術総合研究所 走査電子顕微鏡像の観察システム
JP2016091674A (ja) 2014-10-31 2016-05-23 大日本印刷株式会社 試料収容セル
JP2016103387A (ja) 2014-11-28 2016-06-02 株式会社日立ハイテクノロジーズ 荷電粒子線装置
JP2016177915A (ja) 2015-03-19 2016-10-06 大日本印刷株式会社 試料収容セル
JP2017201289A (ja) 2016-04-28 2017-11-09 国立大学法人浜松医科大学 電子顕微鏡によるナノ粒子の直接的な同定・定量のための検出キットおよび方法
JP2018026197A (ja) 2016-08-08 2018-02-15 国立研究開発法人産業技術総合研究所 顕微鏡観察方法及び顕微鏡観察補助装置

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2003104846A2 (en) * 2002-06-05 2003-12-18 Quantomix Ltd. A sample enclosure for a scanning electron microscope and methods of use thereof
WO2006021961A2 (en) * 2004-08-26 2006-03-02 Quantomix Ltd. Sample enclosure for inspection and methods of use thereof
WO2013035866A1 (ja) 2011-09-09 2013-03-14 独立行政法人科学技術振興機構 生物試料をそのままの姿で観察するための電子顕微鏡による観察方法とそれに用いられる真空下での蒸発抑制用組成物、走査型電子顕微鏡および透過型電子顕微鏡
JP6112553B2 (ja) 2013-04-08 2017-04-12 国立研究開発法人産業技術総合研究所 観察システム及び観察方法

Patent Citations (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006518534A (ja) 2003-02-20 2006-08-10 クアントミックス・リミテッド 走査型電子顕微鏡のためのサンプルエンクロージャと、その使用法
JP2008016249A (ja) 2006-07-04 2008-01-24 Jeol Ltd 試料保持体、試料検査方法及び試料検査装置並びに試料検査システム
JP2008210715A (ja) 2007-02-27 2008-09-11 Ebara Corp 荷電粒子線装置及びこれを用いた試料表面観察方法
JP2014022323A (ja) 2012-07-23 2014-02-03 National Institute Of Advanced Industrial & Technology 試料ホルダおよび電子顕微鏡像の観察方法
JP2014025755A (ja) 2012-07-25 2014-02-06 Honda Motor Co Ltd 電子顕微鏡用の試験片及びその製造方法
JP2016072184A (ja) 2014-10-01 2016-05-09 国立研究開発法人産業技術総合研究所 走査電子顕微鏡像の観察システム
JP2016091674A (ja) 2014-10-31 2016-05-23 大日本印刷株式会社 試料収容セル
JP2016103387A (ja) 2014-11-28 2016-06-02 株式会社日立ハイテクノロジーズ 荷電粒子線装置
JP2016177915A (ja) 2015-03-19 2016-10-06 大日本印刷株式会社 試料収容セル
JP2017201289A (ja) 2016-04-28 2017-11-09 国立大学法人浜松医科大学 電子顕微鏡によるナノ粒子の直接的な同定・定量のための検出キットおよび方法
JP2018026197A (ja) 2016-08-08 2018-02-15 国立研究開発法人産業技術総合研究所 顕微鏡観察方法及び顕微鏡観察補助装置

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US20230274905A1 (en) 2023-08-31
EP4167266A1 (en) 2023-04-19
EP4167266A4 (en) 2024-07-10
JPWO2021256412A1 (https=) 2021-12-23
WO2021256412A1 (ja) 2021-12-23

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