JP7134931B2 - センサ - Google Patents

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Publication number
JP7134931B2
JP7134931B2 JP2019155985A JP2019155985A JP7134931B2 JP 7134931 B2 JP7134931 B2 JP 7134931B2 JP 2019155985 A JP2019155985 A JP 2019155985A JP 2019155985 A JP2019155985 A JP 2019155985A JP 7134931 B2 JP7134931 B2 JP 7134931B2
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JP
Japan
Prior art keywords
movable
electrodes
fixed
movable electrodes
along
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JP2019155985A
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English (en)
Japanese (ja)
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JP2021032820A5 (https=
JP2021032820A (ja
Inventor
明 藤本
英之 富澤
亜希子 湯澤
直文 中村
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Toshiba Corp
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Toshiba Corp
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Publication date
Application filed by Toshiba Corp filed Critical Toshiba Corp
Priority to JP2019155985A priority Critical patent/JP7134931B2/ja
Priority to CN202010160792.4A priority patent/CN112444273B/zh
Priority to US16/815,148 priority patent/US11460482B2/en
Publication of JP2021032820A publication Critical patent/JP2021032820A/ja
Publication of JP2021032820A5 publication Critical patent/JP2021032820A5/ja
Application granted granted Critical
Publication of JP7134931B2 publication Critical patent/JP7134931B2/ja
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/125—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by capacitive pick-up
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P13/00—Indicating or recording presence, absence, or direction, of movement
    • G01P13/02—Indicating direction only, e.g. by weather vane
    • G01P13/04—Indicating positive or negative direction of a linear movement or clockwise or anti-clockwise direction of a rotational movement
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P2015/0805—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration
    • G01P2015/0822—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass
    • G01P2015/0825—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass for one single degree of freedom of movement of the mass
    • G01P2015/0831—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass for one single degree of freedom of movement of the mass the mass being of the paddle type having the pivot axis between the longitudinal ends of the mass, e.g. see-saw configuration
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P2015/0805—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration
    • G01P2015/0848—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration using a plurality of mechanically coupled spring-mass systems, the sensitive direction of each system being different

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Pressure Sensors (AREA)
  • Micromachines (AREA)
JP2019155985A 2019-08-28 2019-08-28 センサ Active JP7134931B2 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2019155985A JP7134931B2 (ja) 2019-08-28 2019-08-28 センサ
CN202010160792.4A CN112444273B (zh) 2019-08-28 2020-03-10 传感器
US16/815,148 US11460482B2 (en) 2019-08-28 2020-03-11 Sensor with fixed and movble components

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2019155985A JP7134931B2 (ja) 2019-08-28 2019-08-28 センサ

Publications (3)

Publication Number Publication Date
JP2021032820A JP2021032820A (ja) 2021-03-01
JP2021032820A5 JP2021032820A5 (https=) 2021-11-25
JP7134931B2 true JP7134931B2 (ja) 2022-09-12

Family

ID=74678466

Family Applications (1)

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JP2019155985A Active JP7134931B2 (ja) 2019-08-28 2019-08-28 センサ

Country Status (3)

Country Link
US (1) US11460482B2 (https=)
JP (1) JP7134931B2 (https=)
CN (1) CN112444273B (https=)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7441195B2 (ja) * 2021-04-13 2024-02-29 株式会社東芝 センサ及び電子装置
JP2022175616A (ja) * 2021-05-14 2022-11-25 セイコーエプソン株式会社 慣性センサー及び慣性計測装置
JP2023066598A (ja) * 2021-10-29 2023-05-16 セイコーエプソン株式会社 物理量センサー及び慣性計測装置
JP7793933B2 (ja) 2021-10-29 2026-01-06 セイコーエプソン株式会社 物理量センサー及び慣性計測装置
CN114487480B (zh) * 2022-01-14 2025-09-16 瑞声开泰科技(武汉)有限公司 微机电系统加速度计
JP7746236B2 (ja) * 2022-08-16 2025-09-30 株式会社東芝 センサ及び電子装置

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4913778B2 (ja) 2002-03-15 2012-04-11 株式会社豊田中央研究所 可動電極を有する装置、可動ミラー装置、振動型ジャイロスコープ及びこれらの製造方法
JP5211387B2 (ja) 2006-03-14 2013-06-12 コミシリア ア レネルジ アトミック エ オ エナジーズ オルタネティヴズ 三軸薄膜加速度計
JP5352865B2 (ja) 2010-02-10 2013-11-27 三菱電機株式会社 加速度センサ
JP5357166B2 (ja) 2008-09-22 2013-12-04 アルプス電気株式会社 Ｍｅｍｓセンサ及び検出装置
JP5664292B2 (ja) 2011-02-01 2015-02-04 株式会社豊田中央研究所 変位センサおよびその製造方法、半導体ウェハ
JP6150056B2 (ja) 2013-07-24 2017-06-21 セイコーエプソン株式会社 機能素子、電子機器、および移動体

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JP2006084327A (ja) * 2004-09-16 2006-03-30 Denso Corp 容量式力学量センサ装置
US7140250B2 (en) * 2005-02-18 2006-11-28 Honeywell International Inc. MEMS teeter-totter accelerometer having reduced non-linearty
US7258010B2 (en) * 2005-03-09 2007-08-21 Honeywell International Inc. MEMS device with thinned comb fingers
JP4453587B2 (ja) * 2005-03-24 2010-04-21 株式会社デンソー 加速度センサ
US7210352B2 (en) * 2005-06-14 2007-05-01 Innovative Micro Technology MEMS teeter-totter apparatus with curved beam and method of manufacture
JP2007139505A (ja) * 2005-11-16 2007-06-07 Denso Corp 容量式力学量センサ
US8171793B2 (en) * 2008-07-31 2012-05-08 Honeywell International Inc. Systems and methods for detecting out-of-plane linear acceleration with a closed loop linear drive accelerometer
JP2011043411A (ja) * 2009-08-21 2011-03-03 Panasonic Electric Works Co Ltd 静電容量型加速度センサ
DE102011011160B4 (de) * 2011-01-05 2024-01-11 Robert Bosch Gmbh Mikromechanisches Bauteil und Herstellungsverfahren für ein mikromechanisches Bauteil
ITTO20110806A1 (it) * 2011-09-12 2013-03-13 St Microelectronics Srl Dispositivo microelettromeccanico integrante un giroscopio e un accelerometro
JP5772873B2 (ja) * 2012-06-13 2015-09-02 株式会社デンソー 静電容量式物理量センサ
JP6146566B2 (ja) * 2013-08-06 2017-06-14 セイコーエプソン株式会社 物理量センサー、電子機器、および移動体
JP6398348B2 (ja) * 2014-06-12 2018-10-03 セイコーエプソン株式会社 機能素子、機能素子の製造方法、電子機器、および移動体
CN104614553A (zh) * 2015-01-30 2015-05-13 歌尔声学股份有限公司 一种加速度计中的z轴结构
JP6433842B2 (ja) 2015-04-03 2018-12-05 株式会社東芝 電子装置及びその製造方法
CN108700612B (zh) * 2016-03-03 2020-11-17 精工爱普生株式会社 传感器装置、电子设备以及移动体
US20180031603A1 (en) * 2016-07-27 2018-02-01 Lumedyne Technologies Incorporated Systems and methods for detecting inertial parameters using a vibratory accelerometer with multiple degrees of freedom
JP7176353B2 (ja) * 2018-10-29 2022-11-22 セイコーエプソン株式会社 物理量センサー、電子機器および移動体
JP2020085744A (ja) * 2018-11-28 2020-06-04 セイコーエプソン株式会社 加速度センサー、電子機器および移動体
JP6766861B2 (ja) * 2018-12-10 2020-10-14 セイコーエプソン株式会社 物理量センサー、電子機器および移動体

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4913778B2 (ja) 2002-03-15 2012-04-11 株式会社豊田中央研究所 可動電極を有する装置、可動ミラー装置、振動型ジャイロスコープ及びこれらの製造方法
JP5211387B2 (ja) 2006-03-14 2013-06-12 コミシリア ア レネルジ アトミック エ オ エナジーズ オルタネティヴズ 三軸薄膜加速度計
JP5357166B2 (ja) 2008-09-22 2013-12-04 アルプス電気株式会社 Ｍｅｍｓセンサ及び検出装置
JP5352865B2 (ja) 2010-02-10 2013-11-27 三菱電機株式会社 加速度センサ
JP5664292B2 (ja) 2011-02-01 2015-02-04 株式会社豊田中央研究所 変位センサおよびその製造方法、半導体ウェハ
JP6150056B2 (ja) 2013-07-24 2017-06-21 セイコーエプソン株式会社 機能素子、電子機器、および移動体

Also Published As

Publication number Publication date
US11460482B2 (en) 2022-10-04
CN112444273A (zh) 2021-03-05
JP2021032820A (ja) 2021-03-01
CN112444273B (zh) 2023-01-13
US20210063432A1 (en) 2021-03-04

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