CN112444273B - 传感器 - Google Patents

传感器 Download PDF

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Publication number
CN112444273B
CN112444273B CN202010160792.4A CN202010160792A CN112444273B CN 112444273 B CN112444273 B CN 112444273B CN 202010160792 A CN202010160792 A CN 202010160792A CN 112444273 B CN112444273 B CN 112444273B
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movable
electrodes
fixed
electrode
movable electrodes
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Chinese (zh)
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CN112444273A (zh
Inventor
藤本明
富泽英之
汤泽亚希子
中村直文
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Toshiba Corp
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Toshiba Corp
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/125—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by capacitive pick-up
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P13/00—Indicating or recording presence, absence, or direction, of movement
    • G01P13/02—Indicating direction only, e.g. by weather vane
    • G01P13/04—Indicating positive or negative direction of a linear movement or clockwise or anti-clockwise direction of a rotational movement
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P2015/0805—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration
    • G01P2015/0822—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass
    • G01P2015/0825—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass for one single degree of freedom of movement of the mass
    • G01P2015/0831—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass for one single degree of freedom of movement of the mass the mass being of the paddle type having the pivot axis between the longitudinal ends of the mass, e.g. see-saw configuration
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P2015/0805—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration
    • G01P2015/0848—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration using a plurality of mechanically coupled spring-mass systems, the sensitive direction of each system being different

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Pressure Sensors (AREA)
  • Micromachines (AREA)
CN202010160792.4A 2019-08-28 2020-03-10 传感器 Active CN112444273B (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2019-155985 2019-08-28
JP2019155985A JP7134931B2 (ja) 2019-08-28 2019-08-28 センサ

Publications (2)

Publication Number Publication Date
CN112444273A CN112444273A (zh) 2021-03-05
CN112444273B true CN112444273B (zh) 2023-01-13

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US (1) US11460482B2 (https=)
JP (1) JP7134931B2 (https=)
CN (1) CN112444273B (https=)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7441195B2 (ja) * 2021-04-13 2024-02-29 株式会社東芝 センサ及び電子装置
JP2022175616A (ja) * 2021-05-14 2022-11-25 セイコーエプソン株式会社 慣性センサー及び慣性計測装置
JP2023066598A (ja) * 2021-10-29 2023-05-16 セイコーエプソン株式会社 物理量センサー及び慣性計測装置
JP7793933B2 (ja) 2021-10-29 2026-01-06 セイコーエプソン株式会社 物理量センサー及び慣性計測装置
CN114487480B (zh) * 2022-01-14 2025-09-16 瑞声开泰科技(武汉)有限公司 微机电系统加速度计
JP7746236B2 (ja) * 2022-08-16 2025-09-30 株式会社東芝 センサ及び電子装置

Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1750260A (zh) * 2004-09-16 2006-03-22 株式会社电装 具有传感芯片和电路芯片的电容式物理量传感器
JP2007139505A (ja) * 2005-11-16 2007-06-07 Denso Corp 容量式力学量センサ
US20070214891A1 (en) * 2006-03-14 2007-09-20 Commissariat A L'energie Atomique Triaxial membrane accelerometer
JP2011043411A (ja) * 2009-08-21 2011-03-03 Panasonic Electric Works Co Ltd 静電容量型加速度センサ
CN104345173A (zh) * 2013-07-24 2015-02-11 精工爱普生株式会社 功能元件、电子设备及移动体
CN104380120A (zh) * 2012-06-13 2015-02-25 株式会社电装 静电电容式物理量传感器
CN105277183A (zh) * 2014-06-12 2016-01-27 精工爱普生株式会社 功能元件、功能元件的制造方法、电子设备以及移动体
CN108700612A (zh) * 2016-03-03 2018-10-23 精工爱普生株式会社 传感器装置、电子设备以及移动体
JP2019045511A (ja) * 2018-12-10 2019-03-22 セイコーエプソン株式会社 物理量センサー、電子機器および移動体

Family Cites Families (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6785117B2 (en) 2002-03-15 2004-08-31 Denso Corporation Capacitive device
US7140250B2 (en) * 2005-02-18 2006-11-28 Honeywell International Inc. MEMS teeter-totter accelerometer having reduced non-linearty
US7258010B2 (en) * 2005-03-09 2007-08-21 Honeywell International Inc. MEMS device with thinned comb fingers
JP4453587B2 (ja) * 2005-03-24 2010-04-21 株式会社デンソー 加速度センサ
US7210352B2 (en) * 2005-06-14 2007-05-01 Innovative Micro Technology MEMS teeter-totter apparatus with curved beam and method of manufacture
US8171793B2 (en) * 2008-07-31 2012-05-08 Honeywell International Inc. Systems and methods for detecting out-of-plane linear acceleration with a closed loop linear drive accelerometer
WO2010032818A1 (ja) * 2008-09-22 2010-03-25 アルプス電気株式会社 Ｍｅｍｓセンサ及び検出装置
JP5352865B2 (ja) 2010-02-10 2013-11-27 三菱電機株式会社 加速度センサ
DE102011011160B4 (de) * 2011-01-05 2024-01-11 Robert Bosch Gmbh Mikromechanisches Bauteil und Herstellungsverfahren für ein mikromechanisches Bauteil
JP5664292B2 (ja) 2011-02-01 2015-02-04 株式会社豊田中央研究所 変位センサおよびその製造方法、半導体ウェハ
ITTO20110806A1 (it) * 2011-09-12 2013-03-13 St Microelectronics Srl Dispositivo microelettromeccanico integrante un giroscopio e un accelerometro
JP6146566B2 (ja) * 2013-08-06 2017-06-14 セイコーエプソン株式会社 物理量センサー、電子機器、および移動体
CN104614553A (zh) * 2015-01-30 2015-05-13 歌尔声学股份有限公司 一种加速度计中的z轴结构
JP6433842B2 (ja) 2015-04-03 2018-12-05 株式会社東芝 電子装置及びその製造方法
US20180031603A1 (en) * 2016-07-27 2018-02-01 Lumedyne Technologies Incorporated Systems and methods for detecting inertial parameters using a vibratory accelerometer with multiple degrees of freedom
JP7176353B2 (ja) * 2018-10-29 2022-11-22 セイコーエプソン株式会社 物理量センサー、電子機器および移動体
JP2020085744A (ja) * 2018-11-28 2020-06-04 セイコーエプソン株式会社 加速度センサー、電子機器および移動体

Patent Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1750260A (zh) * 2004-09-16 2006-03-22 株式会社电装 具有传感芯片和电路芯片的电容式物理量传感器
JP2007139505A (ja) * 2005-11-16 2007-06-07 Denso Corp 容量式力学量センサ
US20070214891A1 (en) * 2006-03-14 2007-09-20 Commissariat A L'energie Atomique Triaxial membrane accelerometer
JP2011043411A (ja) * 2009-08-21 2011-03-03 Panasonic Electric Works Co Ltd 静電容量型加速度センサ
CN104380120A (zh) * 2012-06-13 2015-02-25 株式会社电装 静电电容式物理量传感器
CN104345173A (zh) * 2013-07-24 2015-02-11 精工爱普生株式会社 功能元件、电子设备及移动体
CN105277183A (zh) * 2014-06-12 2016-01-27 精工爱普生株式会社 功能元件、功能元件的制造方法、电子设备以及移动体
CN108700612A (zh) * 2016-03-03 2018-10-23 精工爱普生株式会社 传感器装置、电子设备以及移动体
JP2019045511A (ja) * 2018-12-10 2019-03-22 セイコーエプソン株式会社 物理量センサー、電子機器および移動体

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US11460482B2 (en) 2022-10-04
CN112444273A (zh) 2021-03-05
JP7134931B2 (ja) 2022-09-12
JP2021032820A (ja) 2021-03-01
US20210063432A1 (en) 2021-03-04

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