JP7127732B2 - 蓋開閉装置 - Google Patents
蓋開閉装置 Download PDFInfo
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- JP7127732B2 JP7127732B2 JP2021501711A JP2021501711A JP7127732B2 JP 7127732 B2 JP7127732 B2 JP 7127732B2 JP 2021501711 A JP2021501711 A JP 2021501711A JP 2021501711 A JP2021501711 A JP 2021501711A JP 7127732 B2 JP7127732 B2 JP 7127732B2
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
- H01L21/6735—Closed carriers
- H01L21/67353—Closed carriers specially adapted for a single substrate
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G1/00—Storing articles, individually or in orderly arrangement, in warehouses or magazines
- B65G1/02—Storage devices
- B65G1/04—Storage devices mechanical
- B65G1/10—Storage devices mechanical with relatively movable racks to facilitate insertion or removal of articles
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
- G03F1/66—Containers specially adapted for masks, mask blanks or pellicles; Preparation thereof
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
- H01L21/6735—Closed carriers
- H01L21/67359—Closed carriers specially adapted for containing masks, reticles or pellicles
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
- H01L21/6735—Closed carriers
- H01L21/67373—Closed carriers characterised by locking systems
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
- H01L21/6735—Closed carriers
- H01L21/67386—Closed carriers characterised by the construction of the closed carrier
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- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Mechanical Engineering (AREA)
- Closures For Containers (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Control And Other Processes For Unpacking Of Materials (AREA)
Description
図1は、第1実施形態に係る蓋開閉装置100の一例を示す斜視図である。図2は、蓋開閉装置100を-X側から視た図である。図3は、蓋開閉装置100を-Y側から視た図である。図1から図3に示す蓋開閉装置100は、容器本体1及び上蓋2を有し、レチクル等の物品が収容される容器3の上蓋2を開閉する。
図10は、第2実施形態に係る蓋開閉装置200の一例を示す斜視図である。図10に示すように、蓋開閉装置200は、第1実施形態に係る蓋開閉装置100の構成に加えて、容器3を挿入するための入り口部分を開閉可能なシャッタ50と、シャッタ50を開閉するシャッタ駆動機構60と、上記した蓋開閉装置100を囲む筐体70とを有する。シャッタ50及びシャッタ駆動機構60は、容器3を挿入する入り口部分ごとに(載置台10ごと)に設けられる。筐体70は、2つの側壁部71と、背面部73とを有する。側壁部71は、蓋開閉装置200の+X側及び-X側にそれぞれ配置される。なお、図10に示す蓋開閉装置200において、昇降機構40の記載を省略している。筐体70の背面部73には、不図示の開口部が設けられる。この開口部は、載置台10に載置された容器3に対応して設けられる。容器3に収容されたレチクルRの取り出し、又は、容器3へのレチクルRの載置は、不図示の開口部を介して行われる。
L・・・所定の距離
P・・・規定位置
R・・・レチクル
1・・・容器本体
2・・・上蓋
2a・・・側部
2c・・・突出片
3・・・容器
4・・・係止機構
5・・・係止部材
5a・・・片部
5c・・・爪部
10・・・載置台
11・・・傾斜部
20・・・下側案内部(案内部)
20a・・・上面
21・・・曲面
30・・・上側案内部
30a・・・下面
40・・・昇降機構
41・・・昇降駆動部
50・・・シャッタ
52・・・マグネット
53・・・被吸着部
60・・・シャッタ駆動機構
61・・・駆動部
62・・・リンク部材
71・・・側壁部
72・・・溝部
100、200・・・蓋開閉装置
Claims (7)
- 容器本体と、上蓋と、前記容器本体に前記上蓋が装着された状態において前記容器本体に対して前記上蓋を係止する係止機構と、前記上蓋に設けられ、前記容器本体に対して所定値を超えて上方に回動させられると前記係止機構による係止を解除させる水平方向の片部と、を備える容器の前記上蓋を開閉する蓋開閉装置であって、
前記容器を載置する載置台と、
前記載置台の上方かつ両側方に設けられ、前記容器が前記載置台の規定位置まで水平方向に挿入される際に、前記片部の下面に当接して前記片部を前記容器本体に対して前記所定値を超えて上方に回動させる案内部と、
前記係止機構による係止が解除された前記容器本体と前記上蓋とを上下方向に相対的に移動させる昇降機構と、を備える、蓋開閉装置。 - 前記容器が前記載置台の規定位置まで水平方向に挿入される際に、前記片部の上方において対向する前記上蓋の側部の上面に当接する上側案内部を備える、請求項1に記載の蓋開閉装置。
- 前記案内部の上面と、前記上側案内部の下面とにより溝が形成され、
前記上蓋の側部及び前記片部は、前記溝に沿って移動可能である、請求項2に記載の蓋開閉装置。 - 前記溝は、前記昇降機構に備えられる、請求項3に記載の蓋開閉装置。
- 前記溝は、前記上蓋の側部及び前記片部を保持し、
前記昇降機構は、前記溝により保持された前記案内部及び前記上側案内部を、前記容器本体に対して昇降させる昇降駆動部を備える、請求項4に記載の蓋開閉装置。 - 前記載置台は、前記容器が挿入される際の入り口側の先端部分に傾斜部が設けられる、請求項1から請求項5のいずれか一項に記載の蓋開閉装置。
- 前記案内部の入り口側の先端部分に、傾斜面又は曲面が設けられる、請求項1から請求項6のいずれか一項に記載の蓋開閉装置。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2019030400 | 2019-02-22 | ||
JP2019030400 | 2019-02-22 | ||
PCT/JP2020/001662 WO2020170672A1 (ja) | 2019-02-22 | 2020-01-20 | 蓋開閉装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPWO2020170672A1 JPWO2020170672A1 (ja) | 2021-12-23 |
JP7127732B2 true JP7127732B2 (ja) | 2022-08-30 |
Family
ID=72144201
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2021501711A Active JP7127732B2 (ja) | 2019-02-22 | 2020-01-20 | 蓋開閉装置 |
Country Status (6)
Country | Link |
---|---|
US (1) | US11987445B2 (ja) |
EP (1) | EP3929117A4 (ja) |
JP (1) | JP7127732B2 (ja) |
CN (1) | CN113454007B (ja) |
TW (1) | TWI831929B (ja) |
WO (1) | WO2020170672A1 (ja) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN113968562B (zh) * | 2021-11-03 | 2022-11-22 | 江苏医药职业学院 | 一种医学检验实验室用开管器械 |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2002009133A (ja) | 2000-06-26 | 2002-01-11 | Canon Inc | 基板搬送装置 |
JP2007141924A (ja) | 2005-11-15 | 2007-06-07 | Nikon Corp | マスク収納容器開装置、露光装置 |
JP2015093696A (ja) | 2013-11-12 | 2015-05-18 | ヒューグルエレクトロニクス株式会社 | 基板ケース分離合体装置及び基板ケース洗浄装置 |
Family Cites Families (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5895812A (ja) * | 1981-12-01 | 1983-06-07 | Nippon Kogaku Kk <Nikon> | 基板の収納容器及び収納容器の装着装置 |
JP3089590B2 (ja) * | 1991-07-12 | 2000-09-18 | キヤノン株式会社 | 板状物収納容器およびその蓋開口装置 |
JP3014640B2 (ja) * | 1996-03-26 | 2000-02-28 | キヤノン株式会社 | 板状物収納容器 |
WO2004046418A1 (ja) * | 2002-11-15 | 2004-06-03 | Ebara Corporation | 基板処理装置及び基板処理方法 |
JP4647417B2 (ja) * | 2005-07-08 | 2011-03-09 | 信越ポリマー株式会社 | 基板収納容器の蓋体開閉方法 |
KR101110621B1 (ko) * | 2008-09-12 | 2012-02-28 | 가부시키가이샤 다이후쿠 | 기판용 수납 용기와 기판용 수납 용기를 위한 기판 반송 설비 |
US9149131B2 (en) * | 2011-01-13 | 2015-10-06 | Life2Sell, LLC | Scissor lift pallet lifter |
JP5959381B2 (ja) * | 2012-09-20 | 2016-08-02 | ヒューグルエレクトロニクス株式会社 | 基板ケース洗浄装置 |
JP6977946B2 (ja) | 2017-08-07 | 2021-12-08 | 関東農機株式会社 | トイレ用介護装置 |
-
2020
- 2020-01-20 JP JP2021501711A patent/JP7127732B2/ja active Active
- 2020-01-20 EP EP20758667.8A patent/EP3929117A4/en active Pending
- 2020-01-20 CN CN202080015695.4A patent/CN113454007B/zh active Active
- 2020-01-20 WO PCT/JP2020/001662 patent/WO2020170672A1/ja unknown
- 2020-01-20 US US17/432,522 patent/US11987445B2/en active Active
- 2020-02-21 TW TW109105593A patent/TWI831929B/zh active
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2002009133A (ja) | 2000-06-26 | 2002-01-11 | Canon Inc | 基板搬送装置 |
JP2007141924A (ja) | 2005-11-15 | 2007-06-07 | Nikon Corp | マスク収納容器開装置、露光装置 |
JP2015093696A (ja) | 2013-11-12 | 2015-05-18 | ヒューグルエレクトロニクス株式会社 | 基板ケース分離合体装置及び基板ケース洗浄装置 |
Also Published As
Publication number | Publication date |
---|---|
EP3929117A4 (en) | 2022-11-02 |
EP3929117A1 (en) | 2021-12-29 |
JPWO2020170672A1 (ja) | 2021-12-23 |
CN113454007B (zh) | 2023-02-17 |
WO2020170672A1 (ja) | 2020-08-27 |
TW202039333A (zh) | 2020-11-01 |
US11987445B2 (en) | 2024-05-21 |
TWI831929B (zh) | 2024-02-11 |
US20220135326A1 (en) | 2022-05-05 |
CN113454007A (zh) | 2021-09-28 |
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