JP7111754B2 - 真空装置及び真空システム - Google Patents

真空装置及び真空システム Download PDF

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Publication number
JP7111754B2
JP7111754B2 JP2020016016A JP2020016016A JP7111754B2 JP 7111754 B2 JP7111754 B2 JP 7111754B2 JP 2020016016 A JP2020016016 A JP 2020016016A JP 2020016016 A JP2020016016 A JP 2020016016A JP 7111754 B2 JP7111754 B2 JP 7111754B2
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Japan
Prior art keywords
flange
vacuum
vacuum device
sealing
axial
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JP2020016016A
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English (en)
Japanese (ja)
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JP2020133628A (ja
JP2020133628A5 (enExample
Inventor
ベルント・ホフマン
ミルコ・メコタ
ヘルベルト・シュタムラー
Original Assignee
プファイファー・ヴァキューム・ゲーエムベーハー
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Publication of JP2020133628A5 publication Critical patent/JP2020133628A5/ja
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    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/08—Sealings
    • F04D29/083—Sealings especially adapted for elastic fluid pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/60—Mounting; Assembling; Disassembling
    • F04D29/601—Mounting; Assembling; Disassembling specially adapted for elastic fluid pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/70—Suction grids; Strainers; Dust separation; Cleaning
    • F04D29/701—Suction grids; Strainers; Dust separation; Cleaning especially adapted for elastic fluid pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/048—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps comprising magnetic bearings

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
JP2020016016A 2019-02-12 2020-02-03 真空装置及び真空システム Active JP7111754B2 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
EP19156691 2019-02-12
EP19156691.8A EP3617523A1 (de) 2019-02-12 2019-02-12 Vakuumgerät und vakuumsystem

Publications (3)

Publication Number Publication Date
JP2020133628A JP2020133628A (ja) 2020-08-31
JP2020133628A5 JP2020133628A5 (enExample) 2021-12-23
JP7111754B2 true JP7111754B2 (ja) 2022-08-02

Family

ID=65433474

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2020016016A Active JP7111754B2 (ja) 2019-02-12 2020-02-03 真空装置及び真空システム

Country Status (2)

Country Link
EP (1) EP3617523A1 (enExample)
JP (1) JP7111754B2 (enExample)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7596936B2 (ja) * 2021-06-02 2024-12-10 株式会社島津製作所 真空ポンプおよびリークディテクタ
GB2623527B (en) * 2022-10-18 2024-12-25 Edwards Ltd Turbomolecular pump

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002250295A (ja) 2000-12-18 2002-09-06 Nikkiso Co Ltd キャンドモータポンプ
JP2003148381A (ja) 2001-11-16 2003-05-21 Boc Edwards Technologies Ltd 真空ポンプ
JP2005307971A (ja) 2004-03-22 2005-11-04 Alcatel 真空ポンプ減衰アダプタ
WO2006068014A1 (ja) 2004-12-20 2006-06-29 Boc Edwards Japan Limited 端部間の接続構造及び該構造を適用した真空システム
US20150060691A1 (en) 2013-08-29 2015-03-05 Varian Semiconductor Equipment Associates, Inc. Semiconductor process pumping arrangements
JP2017203458A (ja) 2016-05-10 2017-11-16 プファイファー・ヴァキューム・ゲーエムベーハー 真空ポンプ及び電動モーター
JP2018155223A (ja) 2017-03-21 2018-10-04 株式会社島津製作所 センターリングおよび真空ポンプ

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB8726885D0 (en) * 1987-11-17 1987-12-23 Furmanite Int Ltd Flanged pipeline connections
US6485254B1 (en) * 2000-10-19 2002-11-26 Applied Materials, Inc. Energy dissipating coupling
DE102005059208A1 (de) * 2005-12-12 2007-06-28 Pfeiffer Vacuum Gmbh Vakuumgehäuse
DE102008035972A1 (de) * 2008-07-31 2010-02-04 Pfeiffer Vacuum Gmbh Vakuumpumpanordnung
DE102009039120A1 (de) * 2009-08-28 2011-03-03 Pfeiffer Vacuum Gmbh Vakuumpumpe
CN102518890A (zh) * 2011-12-20 2012-06-27 苏州宝骅机械技术有限公司 一种用于法兰面密封的密封垫片
EP3034881B1 (de) * 2014-12-18 2018-10-31 Pfeiffer Vacuum GmbH Vakuumpumpe

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002250295A (ja) 2000-12-18 2002-09-06 Nikkiso Co Ltd キャンドモータポンプ
JP2003148381A (ja) 2001-11-16 2003-05-21 Boc Edwards Technologies Ltd 真空ポンプ
JP2005307971A (ja) 2004-03-22 2005-11-04 Alcatel 真空ポンプ減衰アダプタ
WO2006068014A1 (ja) 2004-12-20 2006-06-29 Boc Edwards Japan Limited 端部間の接続構造及び該構造を適用した真空システム
US20150060691A1 (en) 2013-08-29 2015-03-05 Varian Semiconductor Equipment Associates, Inc. Semiconductor process pumping arrangements
JP2017203458A (ja) 2016-05-10 2017-11-16 プファイファー・ヴァキューム・ゲーエムベーハー 真空ポンプ及び電動モーター
JP2018155223A (ja) 2017-03-21 2018-10-04 株式会社島津製作所 センターリングおよび真空ポンプ

Also Published As

Publication number Publication date
JP2020133628A (ja) 2020-08-31
EP3617523A1 (de) 2020-03-04

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