JP7095966B2 - 検査装置および検査方法 - Google Patents

検査装置および検査方法 Download PDF

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JP7095966B2
JP7095966B2 JP2017182464A JP2017182464A JP7095966B2 JP 7095966 B2 JP7095966 B2 JP 7095966B2 JP 2017182464 A JP2017182464 A JP 2017182464A JP 2017182464 A JP2017182464 A JP 2017182464A JP 7095966 B2 JP7095966 B2 JP 7095966B2
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region
light
unit
inspection
illumination
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Japanese (ja)
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JP2019056669A (ja
Inventor
力夫 村岡
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Screen Holdings Co Ltd
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Screen Holdings Co Ltd
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Priority to JP2017182464A priority Critical patent/JP7095966B2/ja
Priority to CN201810743640.XA priority patent/CN109540899B/zh
Priority to TW107125190A priority patent/TWI691714B/zh
Publication of JP2019056669A publication Critical patent/JP2019056669A/ja
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/8851—Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges

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  • Engineering & Computer Science (AREA)
  • Computer Vision & Pattern Recognition (AREA)
  • Signal Processing (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
JP2017182464A 2017-09-22 2017-09-22 検査装置および検査方法 Active JP7095966B2 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2017182464A JP7095966B2 (ja) 2017-09-22 2017-09-22 検査装置および検査方法
CN201810743640.XA CN109540899B (zh) 2017-09-22 2018-07-09 检查装置及检查方法
TW107125190A TWI691714B (zh) 2017-09-22 2018-07-20 檢查裝置及檢查方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2017182464A JP7095966B2 (ja) 2017-09-22 2017-09-22 検査装置および検査方法

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JP2019056669A JP2019056669A (ja) 2019-04-11
JP7095966B2 true JP7095966B2 (ja) 2022-07-05

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JP (1) JP7095966B2 (zh)
CN (1) CN109540899B (zh)
TW (1) TWI691714B (zh)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2020194864A (ja) * 2019-05-28 2020-12-03 レーザーテック株式会社 撮像装置、及びその撮像方法
CN113032919B (zh) * 2021-03-12 2022-03-04 奥特斯科技(重庆)有限公司 部件承载件制造方法、处理系统、计算机程序和系统架构
CN113804078B (zh) * 2021-11-01 2024-02-06 国网河北省电力有限公司建设公司 一种液槽测量装置

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20090323053A1 (en) 2008-06-25 2009-12-31 Dov Furman Optical Inspection Tools Featuring Light Shaping Diffusers
JP2014222155A (ja) 2013-05-13 2014-11-27 パナソニック株式会社 凹凸検査装置
JP2015059907A (ja) 2013-09-20 2015-03-30 ウシオ電機株式会社 表面観察装置

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03189606A (ja) * 1989-12-19 1991-08-19 Mitsubishi Rayon Co Ltd ラインポイントライトガイド
JP2006284211A (ja) * 2005-03-31 2006-10-19 Dainippon Screen Mfg Co Ltd ムラ検査装置およびムラ検査方法
JP4960026B2 (ja) * 2006-06-09 2012-06-27 富士フイルム株式会社 フイルムの欠陥検査装置及びフイルムの製造方法
CN101762595A (zh) * 2009-12-29 2010-06-30 上海亨通光电科技有限公司 硅片表面缺陷的激光扫描散射检测与分类系统
JP5833963B2 (ja) * 2012-03-28 2015-12-16 株式会社Ｓｃｒｅｅｎホールディングス 明暗検査装置、明暗検査方法
JP5648937B2 (ja) * 2013-06-06 2015-01-07 株式会社ニコン 評価装置
CN203758925U (zh) * 2014-01-15 2014-08-06 唐山英莱科技有限公司 基于折射式双路会聚可调光路的无坡口对接焊缝检测系统
JP2016045142A (ja) * 2014-08-26 2016-04-04 住友ゴム工業株式会社 架橋ゴムのクラックの評価方法
JP2016070730A (ja) * 2014-09-29 2016-05-09 株式会社Ｓｃｒｅｅｎホールディングス 画像取得装置および画像取得方法
CN104482875B (zh) * 2014-12-19 2017-07-21 合肥工业大学 单狭缝空间载波剪切散斑干涉测量系统及测量方法
JP6467233B2 (ja) * 2015-01-29 2019-02-06 株式会社Ｓｃｒｅｅｎホールディングス 検査装置、描画装置及び検査方法
JP6625901B2 (ja) * 2016-02-29 2019-12-25 株式会社Ｓｃｒｅｅｎホールディングス 照明装置、および検査装置

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20090323053A1 (en) 2008-06-25 2009-12-31 Dov Furman Optical Inspection Tools Featuring Light Shaping Diffusers
JP2014222155A (ja) 2013-05-13 2014-11-27 パナソニック株式会社 凹凸検査装置
JP2015059907A (ja) 2013-09-20 2015-03-30 ウシオ電機株式会社 表面観察装置

Also Published As

Publication number Publication date
CN109540899B (zh) 2021-08-03
CN109540899A (zh) 2019-03-29
TWI691714B (zh) 2020-04-21
JP2019056669A (ja) 2019-04-11
TW201915467A (zh) 2019-04-16

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