JP7078037B2 - 圧電組成物および圧電素子 - Google Patents
圧電組成物および圧電素子 Download PDFInfo
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Description
[1]一般式ABO3で表されるペロブスカイト構造を有する複合酸化物と、マンガンと、を含む圧電組成物であって、
ABO3におけるAサイト元素が、カリウム、または、カリウムおよびナトリウムであり、Bサイト元素がニオブであり、
圧電組成物において、マンガンの濃度分布がばらつきを有しており、当該ばらつきがCV値で、35%以上440%以下であることを特徴とする圧電組成物である。
zが、0.50≦z≦2.50である関係を満足することを特徴とする[1]または[2]に記載の圧電組成物である。
複合酸化物1モルに対して、銅が、CuO換算で、nモル%含有されており、
nが、0.20≦n≦0.80である関係を満足することを特徴とする[1]から[3]のいずれかに記載の圧電組成物である。
1.圧電素子
1.1 圧電組成物
2.圧電素子の製造方法
3.本実施形態における効果
4.変形例
まず、本実施形態に係る圧電組成物が適用された圧電素子について説明する。圧電素子としては、本実施形態に係る圧電組成物が適用可能な素子であれば特に制限されない。本実施形態では、たとえば、圧電トランス、薄膜センサ、圧電超音波モータ等が例示される。
本実施形態に係る圧電組成物は、一般式ABO3で表されるペロブスカイト構造を有する複合酸化物を主成分として含有している。本実施形態では、主成分は、圧電組成物100mol%に対して、90mol%以上を占める成分である。
CV値(%)=100×(σ/Av)
本実施形態では、面分析を行う倍率としては、200倍~5000倍の視野であることが好ましく、このような視野を3視野以上測定することが好ましい。
次に、圧電素子の製造方法の一例について以下に説明する。
本実施形態では、圧電組成物に主成分として含まれる複合酸化物として、ペロブスカイト構造を有するニオブ酸アルカリ金属系の化合物を採用し、さらに、圧電組成物にマンガン(Mn)を含有させ、Mn濃度のCV値が上記の範囲内となるように制御している。Mn濃度のCV値が上記の範囲内であるということは、圧電組成物において、Mnが高濃度で存在している箇所とMnが低濃度で存在している箇所とが混在している、すなわち、Mnの濃度分布にばらつきが生じていることを示している。圧電組成物において、Mnは、ニオブ酸アルカリ金属系の化合物から構成される結晶粒子にはほとんど固溶せず、当該結晶粒子間に形成される粒界に高濃度で存在している。
上述した実施形態では、圧電体部が単層である圧電素子について説明したが、圧電体部が積層された構成を有する圧電素子であってもよい。また、これらが組み合わされた構成を有する圧電素子であってもよい。
CV値(%)=100(σ/Av)
本実施例では、CV値が35%以上440%以下である試料を良好であると判断した。結果を表1に示す。
1… 圧電体部
2,3… 電極
50… 圧電素子
10… 積層体
11… 圧電層
12… 内部電極層
21,22… 端子電極
Claims (4)
- 組成式(K x Na y )NbO 3 で表され、ペロブスカイト構造を有する複合酸化物と、マンガンと、を含む圧電組成物であって、
組成式中の前記xおよび前記yが、0.500≦x≦0.999、y≦0.500、0.980≦x+y≦0.999である関係を満足し、
前記圧電組成物において、前記マンガンの濃度分布がばらつきを有しており、当該ばらつきがCV値で、35%以上440%以下であることを特徴とする圧電組成物。 - 前記複合酸化物1モルに対して、前記マンガンが、MnO2換算で、zモル%含有されており、
前記zが、0.50≦z≦2.50である関係を満足することを特徴とする請求項1に記載の圧電組成物。 - 前記圧電組成物が銅を含み、
前記複合酸化物1モルに対して、前記銅が、CuO換算で、nモル%含有されており、
前記nが、0.20≦n≦0.80である関係を満足することを特徴とする請求項1または2に記載の圧電組成物。 - 請求項1から3のいずれかに記載の圧電組成物を含む圧電素子。
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JP2017062381 | 2017-03-28 | ||
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PCT/JP2018/011037 WO2018180770A1 (ja) | 2017-03-28 | 2018-03-20 | 圧電組成物および圧電素子 |
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JP7151531B2 (ja) * | 2019-02-14 | 2022-10-12 | Tdk株式会社 | 圧電組成物、圧電素子、圧電デバイス、圧電トランス、超音波モータ、超音波発生素子およびフィルタ素子 |
JP7319848B2 (ja) * | 2019-07-04 | 2023-08-02 | 住友化学株式会社 | 圧電積層体、圧電素子および圧電積層体の製造方法 |
JP7399752B2 (ja) | 2020-03-05 | 2023-12-18 | 住友化学株式会社 | 圧電膜、圧電積層体、圧電素子および圧電積層体の製造方法 |
US20220254988A1 (en) * | 2019-07-04 | 2022-08-11 | Sumitomo Chemical Company, Limited | Piezoelectric film, piezoelectric layered body, piezoelectric element, and method for manufacturing piezoelectric layered body |
JP7399753B2 (ja) | 2020-03-05 | 2023-12-18 | 住友化学株式会社 | 圧電膜、圧電積層体、圧電素子および圧電積層体の製造方法 |
US11545615B2 (en) | 2020-09-09 | 2023-01-03 | Baker Hughes Oilfield Operations Llc | Method for manufacturing piezoelectric instrumentation devices with 3D structures using additive manufacturing |
Citations (4)
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