JP7070517B2 - ガスセンサ素子およびガスセンサ - Google Patents
ガスセンサ素子およびガスセンサ Download PDFInfo
- Publication number
- JP7070517B2 JP7070517B2 JP2019139191A JP2019139191A JP7070517B2 JP 7070517 B2 JP7070517 B2 JP 7070517B2 JP 2019139191 A JP2019139191 A JP 2019139191A JP 2019139191 A JP2019139191 A JP 2019139191A JP 7070517 B2 JP7070517 B2 JP 7070517B2
- Authority
- JP
- Japan
- Prior art keywords
- electrode
- solid electrolyte
- gas sensor
- gas
- detection electrode
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- 239000007789 gas Substances 0.000 claims description 209
- 238000001514 detection method Methods 0.000 claims description 152
- 239000010948 rhodium Substances 0.000 claims description 102
- 239000007784 solid electrolyte Substances 0.000 claims description 99
- 229910052703 rhodium Inorganic materials 0.000 claims description 82
- MHOVAHRLVXNVSD-UHFFFAOYSA-N rhodium atom Chemical compound [Rh] MHOVAHRLVXNVSD-UHFFFAOYSA-N 0.000 claims description 76
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 claims description 42
- 229910000510 noble metal Inorganic materials 0.000 claims description 39
- 239000001301 oxygen Substances 0.000 claims description 28
- 229910052760 oxygen Inorganic materials 0.000 claims description 28
- 229910052697 platinum Inorganic materials 0.000 claims description 20
- MCMNRKCIXSYSNV-UHFFFAOYSA-N Zirconium dioxide Chemical compound O=[Zr]=O MCMNRKCIXSYSNV-UHFFFAOYSA-N 0.000 claims description 16
- 238000003411 electrode reaction Methods 0.000 claims description 14
- 239000010970 precious metal Substances 0.000 claims description 3
- MWUXSHHQAYIFBG-UHFFFAOYSA-N nitrogen oxide Inorganic materials O=[N] MWUXSHHQAYIFBG-UHFFFAOYSA-N 0.000 description 75
- 238000005259 measurement Methods 0.000 description 29
- 238000010586 diagram Methods 0.000 description 20
- -1 oxygen ion Chemical class 0.000 description 16
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 13
- 230000001603 reducing effect Effects 0.000 description 13
- 238000009792 diffusion process Methods 0.000 description 10
- 238000002149 energy-dispersive X-ray emission spectroscopy Methods 0.000 description 10
- 239000012298 atmosphere Substances 0.000 description 9
- 229910018967 Pt—Rh Inorganic materials 0.000 description 8
- 239000002245 particle Substances 0.000 description 8
- 229910001233 yttria-stabilized zirconia Inorganic materials 0.000 description 8
- 229910045601 alloy Inorganic materials 0.000 description 7
- 239000000956 alloy Substances 0.000 description 7
- 230000007423 decrease Effects 0.000 description 7
- 239000002923 metal particle Substances 0.000 description 7
- 238000000034 method Methods 0.000 description 7
- 238000013507 mapping Methods 0.000 description 6
- 238000000611 regression analysis Methods 0.000 description 6
- 239000000203 mixture Substances 0.000 description 5
- 125000006850 spacer group Chemical group 0.000 description 5
- 239000010931 gold Substances 0.000 description 4
- 229910052751 metal Inorganic materials 0.000 description 4
- 239000006104 solid solution Substances 0.000 description 4
- 238000011144 upstream manufacturing Methods 0.000 description 4
- KDLHZDBZIXYQEI-UHFFFAOYSA-N Palladium Chemical compound [Pd] KDLHZDBZIXYQEI-UHFFFAOYSA-N 0.000 description 3
- 230000008859 change Effects 0.000 description 3
- 238000002485 combustion reaction Methods 0.000 description 3
- 239000004020 conductor Substances 0.000 description 3
- 239000012212 insulator Substances 0.000 description 3
- 238000000691 measurement method Methods 0.000 description 3
- 230000008569 process Effects 0.000 description 3
- 238000010405 reoxidation reaction Methods 0.000 description 3
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 description 2
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 2
- 239000003795 chemical substances by application Substances 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 230000004907 flux Effects 0.000 description 2
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 2
- 229910052737 gold Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- IJGRMHOSHXDMSA-UHFFFAOYSA-N nitrogen Substances N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- 239000012299 nitrogen atmosphere Substances 0.000 description 2
- 230000002093 peripheral effect Effects 0.000 description 2
- 239000011148 porous material Substances 0.000 description 2
- 230000009467 reduction Effects 0.000 description 2
- 238000000851 scanning transmission electron micrograph Methods 0.000 description 2
- 230000003068 static effect Effects 0.000 description 2
- 230000001052 transient effect Effects 0.000 description 2
- 230000000007 visual effect Effects 0.000 description 2
- OYPRJOBELJOOCE-UHFFFAOYSA-N Calcium Chemical compound [Ca] OYPRJOBELJOOCE-UHFFFAOYSA-N 0.000 description 1
- MYMOFIZGZYHOMD-UHFFFAOYSA-N Dioxygen Chemical compound O=O MYMOFIZGZYHOMD-UHFFFAOYSA-N 0.000 description 1
- 229910000629 Rh alloy Inorganic materials 0.000 description 1
- KJTLSVCANCCWHF-UHFFFAOYSA-N Ruthenium Chemical compound [Ru] KJTLSVCANCCWHF-UHFFFAOYSA-N 0.000 description 1
- 230000009471 action Effects 0.000 description 1
- 230000004931 aggregating effect Effects 0.000 description 1
- 229910002087 alumina-stabilized zirconia Inorganic materials 0.000 description 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 229910021529 ammonia Inorganic materials 0.000 description 1
- 238000004458 analytical method Methods 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 229910052791 calcium Inorganic materials 0.000 description 1
- 239000011575 calcium Substances 0.000 description 1
- 239000003054 catalyst Substances 0.000 description 1
- 230000003197 catalytic effect Effects 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000009833 condensation Methods 0.000 description 1
- 230000005494 condensation Effects 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 230000003111 delayed effect Effects 0.000 description 1
- 229910001873 dinitrogen Inorganic materials 0.000 description 1
- 229910001882 dioxygen Inorganic materials 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 230000003993 interaction Effects 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- 238000010030 laminating Methods 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 230000001590 oxidative effect Effects 0.000 description 1
- 229910052763 palladium Inorganic materials 0.000 description 1
- 239000012466 permeate Substances 0.000 description 1
- 239000000047 product Substances 0.000 description 1
- 238000005086 pumping Methods 0.000 description 1
- 229910052707 ruthenium Inorganic materials 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 238000001179 sorption measurement Methods 0.000 description 1
- 229910002076 stabilized zirconia Inorganic materials 0.000 description 1
- 230000000087 stabilizing effect Effects 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 230000001131 transforming effect Effects 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Images
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
- G01N27/26—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating electrochemical variables; by using electrolysis or electrophoresis
- G01N27/403—Cells and electrode assemblies
- G01N27/406—Cells and probes with solid electrolytes
- G01N27/407—Cells and probes with solid electrolytes for investigating or analysing gases
- G01N27/4075—Composition or fabrication of the electrodes and coatings thereon, e.g. catalysts
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
- G01N27/26—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating electrochemical variables; by using electrolysis or electrophoresis
- G01N27/403—Cells and electrode assemblies
- G01N27/406—Cells and probes with solid electrolytes
- G01N27/407—Cells and probes with solid electrolytes for investigating or analysing gases
- G01N27/409—Oxygen concentration cells
Landscapes
- Chemical & Material Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Health & Medical Sciences (AREA)
- Physics & Mathematics (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Electrochemistry (AREA)
- Molecular Biology (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Measuring Oxygen Concentration In Cells (AREA)
Priority Applications (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2019139191A JP7070517B2 (ja) | 2019-07-29 | 2019-07-29 | ガスセンサ素子およびガスセンサ |
| PCT/JP2020/025956 WO2021020016A1 (ja) | 2019-07-29 | 2020-07-02 | ガスセンサ素子およびガスセンサ |
| DE112020003625.1T DE112020003625T5 (de) | 2019-07-29 | 2020-07-02 | Gassensorelement und Gassensor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2019139191A JP7070517B2 (ja) | 2019-07-29 | 2019-07-29 | ガスセンサ素子およびガスセンサ |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2021021660A JP2021021660A (ja) | 2021-02-18 |
| JP2021021660A5 JP2021021660A5 (enExample) | 2021-07-26 |
| JP7070517B2 true JP7070517B2 (ja) | 2022-05-18 |
Family
ID=74229960
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2019139191A Active JP7070517B2 (ja) | 2019-07-29 | 2019-07-29 | ガスセンサ素子およびガスセンサ |
Country Status (3)
| Country | Link |
|---|---|
| JP (1) | JP7070517B2 (enExample) |
| DE (1) | DE112020003625T5 (enExample) |
| WO (1) | WO2021020016A1 (enExample) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US12222314B2 (en) * | 2021-01-22 | 2025-02-11 | Ngk Insulators, Ltd. | Sensor element of NOx sensor |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2014080867A1 (ja) | 2012-11-22 | 2014-05-30 | 株式会社デンソー | ガスセンサ用の電極及びそれを用いたガスセンサ素子 |
| WO2016111345A1 (ja) | 2015-01-08 | 2016-07-14 | 株式会社デンソー | NOxセンサ |
| JP2017116530A (ja) | 2015-12-17 | 2017-06-29 | 株式会社デンソー | ガスセンサ素子及びガスセンサ |
| JP2017150933A (ja) | 2016-02-24 | 2017-08-31 | 株式会社Soken | ガスセンサ素子 |
| JP2018100879A (ja) | 2016-12-20 | 2018-06-28 | 株式会社デンソー | ガスセンサ素子およびガスセンサユニット |
| JP2019015632A (ja) | 2017-07-07 | 2019-01-31 | 株式会社デンソー | ガスセンサ素子およびガスセンサ |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2019139191A (ja) | 2018-02-15 | 2019-08-22 | キヤノン株式会社 | レンズフード、レンズ装置、及び撮像装置 |
-
2019
- 2019-07-29 JP JP2019139191A patent/JP7070517B2/ja active Active
-
2020
- 2020-07-02 DE DE112020003625.1T patent/DE112020003625T5/de active Pending
- 2020-07-02 WO PCT/JP2020/025956 patent/WO2021020016A1/ja not_active Ceased
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2014080867A1 (ja) | 2012-11-22 | 2014-05-30 | 株式会社デンソー | ガスセンサ用の電極及びそれを用いたガスセンサ素子 |
| JP2014122878A (ja) | 2012-11-22 | 2014-07-03 | Denso Corp | ガスセンサ用の電極及びそれを用いたガスセンサ素子 |
| WO2016111345A1 (ja) | 2015-01-08 | 2016-07-14 | 株式会社デンソー | NOxセンサ |
| JP2017116530A (ja) | 2015-12-17 | 2017-06-29 | 株式会社デンソー | ガスセンサ素子及びガスセンサ |
| JP2017150933A (ja) | 2016-02-24 | 2017-08-31 | 株式会社Soken | ガスセンサ素子 |
| JP2018100879A (ja) | 2016-12-20 | 2018-06-28 | 株式会社デンソー | ガスセンサ素子およびガスセンサユニット |
| JP2019015632A (ja) | 2017-07-07 | 2019-01-31 | 株式会社デンソー | ガスセンサ素子およびガスセンサ |
Also Published As
| Publication number | Publication date |
|---|---|
| WO2021020016A1 (ja) | 2021-02-04 |
| DE112020003625T5 (de) | 2022-04-21 |
| JP2021021660A (ja) | 2021-02-18 |
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