JP7061036B2 - 光照射装置、光学評価装置および物品製造方法 - Google Patents

光照射装置、光学評価装置および物品製造方法 Download PDF

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Publication number
JP7061036B2
JP7061036B2 JP2018126888A JP2018126888A JP7061036B2 JP 7061036 B2 JP7061036 B2 JP 7061036B2 JP 2018126888 A JP2018126888 A JP 2018126888A JP 2018126888 A JP2018126888 A JP 2018126888A JP 7061036 B2 JP7061036 B2 JP 7061036B2
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Prior art keywords
light
light irradiation
irradiation device
shielding portions
shielding
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Expired - Fee Related
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JP2018126888A
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Japanese (ja)
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JP2020008318A5 (enExample
JP2020008318A (ja
Inventor
卓典 植村
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Canon Inc
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Canon Inc
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Application filed by Canon Inc filed Critical Canon Inc
Priority to JP2018126888A priority Critical patent/JP7061036B2/ja
Priority to US16/454,542 priority patent/US10686995B2/en
Priority to CN201910591735.9A priority patent/CN110672615A/zh
Publication of JP2020008318A publication Critical patent/JP2020008318A/ja
Publication of JP2020008318A5 publication Critical patent/JP2020008318A5/ja
Application granted granted Critical
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/8806—Specially adapted optical and illumination features
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N23/00—Cameras or camera modules comprising electronic image sensors; Control thereof
    • H04N23/70—Circuitry for compensating brightness variation in the scene
    • H04N23/72—Combination of two or more compensation controls
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/8851—Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/9515—Objects of complex shape, e.g. examined with use of a surface follower device
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N23/00—Cameras or camera modules comprising electronic image sensors; Control thereof
    • H04N23/60—Control of cameras or camera modules
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N23/00—Cameras or camera modules comprising electronic image sensors; Control thereof
    • H04N23/70—Circuitry for compensating brightness variation in the scene
    • H04N23/74—Circuitry for compensating brightness variation in the scene by influencing the scene brightness using illuminating means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/9515—Objects of complex shape, e.g. examined with use of a surface follower device
    • G01N2021/9518—Objects of complex shape, e.g. examined with use of a surface follower device using a surface follower, e.g. robot
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2201/00—Features of devices classified in G01N21/00
    • G01N2201/06—Illumination; Optics
    • G01N2201/061—Sources
    • G01N2201/06166—Line selective sources

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  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Pathology (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Immunology (AREA)
  • Chemical & Material Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Analytical Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Signal Processing (AREA)
  • Multimedia (AREA)
  • Computer Vision & Pattern Recognition (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Length Measuring Devices By Optical Means (AREA)
JP2018126888A 2018-07-03 2018-07-03 光照射装置、光学評価装置および物品製造方法 Expired - Fee Related JP7061036B2 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2018126888A JP7061036B2 (ja) 2018-07-03 2018-07-03 光照射装置、光学評価装置および物品製造方法
US16/454,542 US10686995B2 (en) 2018-07-03 2019-06-27 Light irradiation apparatus, optical evaluation apparatus, and article manufacturing method
CN201910591735.9A CN110672615A (zh) 2018-07-03 2019-07-03 光照射装置、光学评估装置和物品制造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2018126888A JP7061036B2 (ja) 2018-07-03 2018-07-03 光照射装置、光学評価装置および物品製造方法

Publications (3)

Publication Number Publication Date
JP2020008318A JP2020008318A (ja) 2020-01-16
JP2020008318A5 JP2020008318A5 (enExample) 2021-07-29
JP7061036B2 true JP7061036B2 (ja) 2022-04-27

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JP2018126888A Expired - Fee Related JP7061036B2 (ja) 2018-07-03 2018-07-03 光照射装置、光学評価装置および物品製造方法

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US (1) US10686995B2 (enExample)
JP (1) JP7061036B2 (enExample)
CN (1) CN110672615A (enExample)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
IT201700099120A1 (it) * 2017-09-05 2019-03-05 Salvatore Lamanna Sistema di illuminazione per schermo di qualsiasi tipo
CN111561870B (zh) * 2020-05-29 2021-10-08 神华准格尔能源有限责任公司 获取室外植物表型数据的方法和系统
CN112184706B (zh) * 2020-10-29 2024-03-05 广东省电子技术研究所 片式电阻丝印外观检测方法、装置、电子设备和存储介质

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002109513A (ja) 2000-09-28 2002-04-12 Toyota Motor Corp 塗装欠陥検出装置およびマスク画像作成方法
JP2002258763A (ja) 2001-03-01 2002-09-11 Ohtsu Tire & Rubber Co Ltd :The 照明装置
JP2003098093A (ja) 2001-09-25 2003-04-03 Ccs Inc 検査用照明装置
EP2272417A1 (en) 2009-07-10 2011-01-12 GE Inspection Technologies, LP Fringe projection system and method for a probe suitable for phase-shift analysis
JP2014002125A (ja) 2012-06-21 2014-01-09 Fujitsu Ltd 検査方法及び検査装置
JP2014059164A (ja) 2012-09-14 2014-04-03 4D Sensor Inc 形状計測装置及び形状計測方法

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7476629B2 (en) * 2003-04-21 2009-01-13 Semiconductor Energy Laboratory Co., Ltd. Beam irradiation apparatus, beam irradiation method, and method for manufacturing thin film transistor
JP5853331B2 (ja) * 2011-03-11 2016-02-09 株式会社ブイ・テクノロジー レーザ照射装置及びそれを使用した液晶表示パネルの輝点修正方法

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002109513A (ja) 2000-09-28 2002-04-12 Toyota Motor Corp 塗装欠陥検出装置およびマスク画像作成方法
JP2002258763A (ja) 2001-03-01 2002-09-11 Ohtsu Tire & Rubber Co Ltd :The 照明装置
JP2003098093A (ja) 2001-09-25 2003-04-03 Ccs Inc 検査用照明装置
EP2272417A1 (en) 2009-07-10 2011-01-12 GE Inspection Technologies, LP Fringe projection system and method for a probe suitable for phase-shift analysis
JP2014002125A (ja) 2012-06-21 2014-01-09 Fujitsu Ltd 検査方法及び検査装置
JP2014059164A (ja) 2012-09-14 2014-04-03 4D Sensor Inc 形状計測装置及び形状計測方法

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
FORTE, Paulo M.F. 外６名，"Exploring combined dark and bright field illumination to improve the detection of defects on specular surfaces"，OPTICS AND LASERS IN ENGINEERING，2016年08月26日，Volume 88，Pages 120-128，<URL: https://doi.org/10.1016/j.optlaseng.2016.08.002 >

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US20200014835A1 (en) 2020-01-09
US10686995B2 (en) 2020-06-16
JP2020008318A (ja) 2020-01-16
CN110672615A (zh) 2020-01-10

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