CN110672615A - 光照射装置、光学评估装置和物品制造方法 - Google Patents

光照射装置、光学评估装置和物品制造方法 Download PDF

Info

Publication number
CN110672615A
CN110672615A CN201910591735.9A CN201910591735A CN110672615A CN 110672615 A CN110672615 A CN 110672615A CN 201910591735 A CN201910591735 A CN 201910591735A CN 110672615 A CN110672615 A CN 110672615A
Authority
CN
China
Prior art keywords
light
shutters
center
irradiators
imager
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN201910591735.9A
Other languages
English (en)
Chinese (zh)
Inventor
植村卓典
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Publication of CN110672615A publication Critical patent/CN110672615A/zh
Pending legal-status Critical Current

Links

Images

Classifications

    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N23/00—Cameras or camera modules comprising electronic image sensors; Control thereof
    • H04N23/70—Circuitry for compensating brightness variation in the scene
    • H04N23/72—Combination of two or more compensation controls
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/8806—Specially adapted optical and illumination features
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/8851—Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/9515—Objects of complex shape, e.g. examined with use of a surface follower device
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N23/00—Cameras or camera modules comprising electronic image sensors; Control thereof
    • H04N23/60—Control of cameras or camera modules
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N23/00—Cameras or camera modules comprising electronic image sensors; Control thereof
    • H04N23/70—Circuitry for compensating brightness variation in the scene
    • H04N23/74—Circuitry for compensating brightness variation in the scene by influencing the scene brightness using illuminating means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/9515—Objects of complex shape, e.g. examined with use of a surface follower device
    • G01N2021/9518—Objects of complex shape, e.g. examined with use of a surface follower device using a surface follower, e.g. robot
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2201/00—Features of devices classified in G01N21/00
    • G01N2201/06—Illumination; Optics
    • G01N2201/061—Sources
    • G01N2201/06166—Line selective sources

Landscapes

  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Pathology (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Immunology (AREA)
  • Chemical & Material Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Analytical Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Signal Processing (AREA)
  • Multimedia (AREA)
  • Computer Vision & Pattern Recognition (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Length Measuring Devices By Optical Means (AREA)
CN201910591735.9A 2018-07-03 2019-07-03 光照射装置、光学评估装置和物品制造方法 Pending CN110672615A (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2018-126888 2018-07-03
JP2018126888A JP7061036B2 (ja) 2018-07-03 2018-07-03 光照射装置、光学評価装置および物品製造方法

Publications (1)

Publication Number Publication Date
CN110672615A true CN110672615A (zh) 2020-01-10

Family

ID=69068612

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201910591735.9A Pending CN110672615A (zh) 2018-07-03 2019-07-03 光照射装置、光学评估装置和物品制造方法

Country Status (3)

Country Link
US (1) US10686995B2 (enExample)
JP (1) JP7061036B2 (enExample)
CN (1) CN110672615A (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111561870A (zh) * 2020-05-29 2020-08-21 神华准格尔能源有限责任公司 获取室外植物表型数据的方法和系统

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
IT201700099120A1 (it) * 2017-09-05 2019-03-05 Salvatore Lamanna Sistema di illuminazione per schermo di qualsiasi tipo
CN112184706B (zh) * 2020-10-29 2024-03-05 广东省电子技术研究所 片式电阻丝印外观检测方法、装置、电子设备和存储介质

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002109513A (ja) * 2000-09-28 2002-04-12 Toyota Motor Corp 塗装欠陥検出装置およびマスク画像作成方法
JP2002258763A (ja) * 2001-03-01 2002-09-11 Ohtsu Tire & Rubber Co Ltd :The 照明装置
JP2003098093A (ja) * 2001-09-25 2003-04-03 Ccs Inc 検査用照明装置
US7476629B2 (en) * 2003-04-21 2009-01-13 Semiconductor Energy Laboratory Co., Ltd. Beam irradiation apparatus, beam irradiation method, and method for manufacturing thin film transistor
EP2272417B1 (en) * 2009-07-10 2016-11-09 GE Inspection Technologies, LP Fringe projection system for a probe suitable for phase-shift analysis
JP5853331B2 (ja) * 2011-03-11 2016-02-09 株式会社ブイ・テクノロジー レーザ照射装置及びそれを使用した液晶表示パネルの輝点修正方法
JP5994419B2 (ja) * 2012-06-21 2016-09-21 富士通株式会社 検査方法及び検査装置
JP5956296B2 (ja) * 2012-09-14 2016-07-27 ４Ｄセンサー株式会社 形状計測装置及び形状計測方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111561870A (zh) * 2020-05-29 2020-08-21 神华准格尔能源有限责任公司 获取室外植物表型数据的方法和系统

Also Published As

Publication number Publication date
US20200014835A1 (en) 2020-01-09
US10686995B2 (en) 2020-06-16
JP2020008318A (ja) 2020-01-16
JP7061036B2 (ja) 2022-04-27

Similar Documents

Publication Publication Date Title
JP4719284B2 (ja) 表面検査装置
US6011620A (en) Method and apparatus for the automatic inspection of optically transmissive planar objects
US20200364483A1 (en) Method for regulating position of object
US20190132524A1 (en) Image generation method, image generation apparatus, and defect determination method using image generation method and image generation apparatus
CN110672615A (zh) 光照射装置、光学评估装置和物品制造方法
WO2008123604A1 (ja) 表面検査装置
CN115398213B (zh) 用于光学检测表面的方法和检测装置
MX2014000972A (es) Metodo y dispositivo para la deteccion confiable de defectos de material en un material transparente.
JP4511978B2 (ja) 表面疵検査装置
KR101294915B1 (ko) 마이크로 미러 디바이스의 선별 방법, 마이크로 미러 디바이스 선별 장치 및 마스크리스 노광 장치
JP7010213B2 (ja) 円筒体表面検査装置および円筒体表面検査方法
US10740890B2 (en) Image processing apparatus, method, and storage medium
JP2019002928A (ja) 画像取得装置及び方法
JP2008180578A (ja) 周期性パターンのムラ検査装置
JP2025130814A (ja) 測定装置および測定方法
JP3774395B2 (ja) 凹凸パターン検知装置、凹凸パターン検知処理装置
JP7267665B2 (ja) ワーク検査装置およびワーク検査方法
JP2014169988A (ja) 透過体または反射体の欠陥検査装置
JP3771901B2 (ja) 蛍光体検査方法及び蛍光体検査装置
US20020053647A1 (en) Pattern detection, processing and testing apparatus
JP2020094877A (ja) 光学評価装置、光学評価方法、被検物搬送方法
JP4743395B2 (ja) ピッチムラ検査方法およびピッチムラ検査装置
JP2012150079A (ja) 透明部材の欠陥検出装置及び欠陥検出方法
RU2810913C1 (ru) Устройство для контроля поверхности, способ контроля поверхности, способ изготовления стального материала, способ сортировки стального материала, производственное оборудование для изготовления стального материала
JP4910637B2 (ja) 基板検査装置及び基板検査方法

Legal Events

Date Code Title Description
PB01 Publication
PB01 Publication
WD01 Invention patent application deemed withdrawn after publication

Application publication date: 20200110

WD01 Invention patent application deemed withdrawn after publication