JP2020008318A5 - - Google Patents

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Publication number
JP2020008318A5
JP2020008318A5 JP2018126888A JP2018126888A JP2020008318A5 JP 2020008318 A5 JP2020008318 A5 JP 2020008318A5 JP 2018126888 A JP2018126888 A JP 2018126888A JP 2018126888 A JP2018126888 A JP 2018126888A JP 2020008318 A5 JP2020008318 A5 JP 2020008318A5
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JP
Japan
Prior art keywords
light
light irradiation
irradiation device
portions
shielding
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2018126888A
Other languages
English (en)
Japanese (ja)
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JP2020008318A (ja
JP7061036B2 (ja
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Publication date
Application filed filed Critical
Priority to JP2018126888A priority Critical patent/JP7061036B2/ja
Priority claimed from JP2018126888A external-priority patent/JP7061036B2/ja
Priority to US16/454,542 priority patent/US10686995B2/en
Priority to CN201910591735.9A priority patent/CN110672615A/zh
Publication of JP2020008318A publication Critical patent/JP2020008318A/ja
Publication of JP2020008318A5 publication Critical patent/JP2020008318A5/ja
Application granted granted Critical
Publication of JP7061036B2 publication Critical patent/JP7061036B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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JP2018126888A 2018-07-03 2018-07-03 光照射装置、光学評価装置および物品製造方法 Expired - Fee Related JP7061036B2 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2018126888A JP7061036B2 (ja) 2018-07-03 2018-07-03 光照射装置、光学評価装置および物品製造方法
US16/454,542 US10686995B2 (en) 2018-07-03 2019-06-27 Light irradiation apparatus, optical evaluation apparatus, and article manufacturing method
CN201910591735.9A CN110672615A (zh) 2018-07-03 2019-07-03 光照射装置、光学评估装置和物品制造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2018126888A JP7061036B2 (ja) 2018-07-03 2018-07-03 光照射装置、光学評価装置および物品製造方法

Publications (3)

Publication Number Publication Date
JP2020008318A JP2020008318A (ja) 2020-01-16
JP2020008318A5 true JP2020008318A5 (enExample) 2021-07-29
JP7061036B2 JP7061036B2 (ja) 2022-04-27

Family

ID=69068612

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2018126888A Expired - Fee Related JP7061036B2 (ja) 2018-07-03 2018-07-03 光照射装置、光学評価装置および物品製造方法

Country Status (3)

Country Link
US (1) US10686995B2 (enExample)
JP (1) JP7061036B2 (enExample)
CN (1) CN110672615A (enExample)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
IT201700099120A1 (it) * 2017-09-05 2019-03-05 Salvatore Lamanna Sistema di illuminazione per schermo di qualsiasi tipo
CN111561870B (zh) * 2020-05-29 2021-10-08 神华准格尔能源有限责任公司 获取室外植物表型数据的方法和系统
CN112184706B (zh) * 2020-10-29 2024-03-05 广东省电子技术研究所 片式电阻丝印外观检测方法、装置、电子设备和存储介质

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002109513A (ja) * 2000-09-28 2002-04-12 Toyota Motor Corp 塗装欠陥検出装置およびマスク画像作成方法
JP2002258763A (ja) * 2001-03-01 2002-09-11 Ohtsu Tire & Rubber Co Ltd :The 照明装置
JP2003098093A (ja) * 2001-09-25 2003-04-03 Ccs Inc 検査用照明装置
US7476629B2 (en) * 2003-04-21 2009-01-13 Semiconductor Energy Laboratory Co., Ltd. Beam irradiation apparatus, beam irradiation method, and method for manufacturing thin film transistor
EP2272417B1 (en) * 2009-07-10 2016-11-09 GE Inspection Technologies, LP Fringe projection system for a probe suitable for phase-shift analysis
JP5853331B2 (ja) * 2011-03-11 2016-02-09 株式会社ブイ・テクノロジー レーザ照射装置及びそれを使用した液晶表示パネルの輝点修正方法
JP5994419B2 (ja) * 2012-06-21 2016-09-21 富士通株式会社 検査方法及び検査装置
JP5956296B2 (ja) * 2012-09-14 2016-07-27 ４Ｄセンサー株式会社 形状計測装置及び形状計測方法

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