JP7034700B2 - Conveyor device, resin molding device and resin molded product manufacturing method - Google Patents

Description

The present invention relates to a transport device, a resin molding device, and a method for manufacturing a resin molded product, which transports an object to be molded to a molding die of the resin molding device.

It is widely practiced to use a molding die to perform resin molding on an object to be molded such as a substrate. In order to attach the object to be molded to the mounting part of the object to be molded, a resin molding device provided with a transfer device for transporting (carrying in) the object to be molded between the first and second molds of the molding die is used. Has been done. For example, in Patent Document 1, the lateral position of the object to be molded is fixed by supporting the side portion of the object to be molded by a plurality of support portions, and the position is provided on the lower surface of the upper mold which is the second mold. After carrying the transport device (loader) directly under the molded object mounting part so as to match the molded object mounting part (clamp surface), gas is sucked from the suction hole provided in the molded object mounting part. It is described that the object to be molded is attached to the attachment portion of the object to be molded.

Japanese Unexamined Patent Publication No. 2013-153146 (Fig. 15)

The outer dimensions of the object to be molded may vary due to processing errors and the like that occur during processing. Therefore, the support portion of the transport device may not be able to support the side portion of the object to be molded, or the gap between the support portion and the object to be molded may become large. In that case, there is a possibility that the object to be molded cannot be conveyed by the transport device, or the mounting position may shift when the object to be molded is attached to the attachment portion of the object to be molded.

Therefore, according to the present invention, even if the outer dimensions of the object to be molded vary, the object to be molded can be conveyed, and the transfer device capable of suppressing the deviation of the attachment position of the molding die to the attachment portion of the object to be molded. An object of the present invention is to provide a resin molding apparatus and a method for manufacturing a resin molded product.

The transport device according to the present invention, which has been made to solve the above problems, is a device for transporting a molded object to a molding die of a resin molding device.
A molding target mounting portion on which the molding target is placed,
A plurality of ends that are provided on the peripheral edge of the molding target mounting portion or on the outside thereof and that abut on the edge of the molding target and are movable toward the inside of the molding target mounting portion. Edge regulation member and
An urging member having a spring that urges the edge restricting member in the direction, and
The urging member control unit that turns on / off the operation of the urging member,
It is characterized by including a molded object holding portion provided with.

The resin molding apparatus according to the present invention is
It is characterized by comprising a molding mold including a first mold having a transport device and a molding target mounting portion to which the molding target is mounted, and a second mold arranged to face the first mold. ..

The method for manufacturing a resin molded product according to the present invention is
A plurality of members that regulate the edge of the molded object held by the molded object holding portion and are provided on the peripheral edge of the molded object mounting portion provided in the molded object holding portion of the transport device or on the outer side thereof. A preliminary step of turning off the operation of the urging member having a spring that urges the edge regulating member toward the inside of the object mounting portion to be molded.
The molding target is placed on the molding target mounting portion, the operation of the urging member is turned ON, and the urging member urges the molding target in the direction, whereby the plurality of edge restricting members are moved in the direction. A molding target holding step at the time of carrying in, in which the edge restricting member is brought into contact with the edge by moving and the molding target is held in the molding target holding portion.
The molding target mounting portion and the molding target mounting portion of the molding mold including the first mold having the molding target mounting portion to which the molding target is mounted and the second mold arranged opposite to the first mold. Molding in which the molding target holding portion is moved so as to align the position of the placing portion, the molding target is attached to the molding target mounting portion, and then the molding target holding portion is moved to the outside of the molding mold. Object delivery process and
A resin molding step of molding the first mold and the second mold and then resin molding the object to be molded.
It is characterized by including.

According to the present invention, even if the outer dimensions of the object to be molded vary, the object to be molded can be conveyed, and the position of the mold to be attached to the object to be molded can be suppressed from being displaced.

The schematic diagram which shows one Embodiment of the transfer apparatus and resin molding apparatus which concerns on this invention. Top view (a), A-A'longitudinal sectional view (b), and B-B'longitudinal sectional view (c) showing the entire transfer device of the present embodiment. The top view which shows the elevating frame (a) and the rotating frame (b) of the transporting apparatus of this embodiment. The movement of the edge regulating member accompanying the rotation of the rotating frame, when the edge regulating member moves in the internal direction of the molding target mounting portion (a) and in the external direction (b). ). The vertical sectional view which shows the edge regulation member in the transfer apparatus and resin molding apparatus of this embodiment. It is a top view which shows the operation of the rotation frame and the edge regulation member in the transfer device and the resin molding apparatus of this embodiment, and shows the operation which moves the edge regulation member in the direction to the outside of the molding object placing part. Figure (a-1) and its partially enlarged view (a-2), and figure (b-1) showing the operation of moving the edge restricting member toward the inside of the molding target mounting portion and its partially enlarged view. (b-2). It is a figure which shows the operation of the transfer | The figure which shows the state of attachment (c) of an object to be molded, attachment of a release film to a cavity and supply of a resin material (d), mold clamping (e) and mold opening (f). It is a figure which shows the continuation of the operation of the transfer device, the molding die, etc. shown in FIG. .. Top view (a) and B-B'vertical cross-sectional view (b) showing a transport device in the first modification. The top view which shows the molding object placement part and the edge regulation member of the transfer device in the 2nd modification. Top view (a) and side view (b) showing the transport device in the third modification. The side view which shows the operation of the transfer device in the 3rd modification. A plan view (a) showing the configuration of a modified example of the urging member control unit, and a plan view (b) showing a state in which the urging member is OFF. A plan view (a) showing another modification of the urging member control unit, and a plan view (b) showing a state in which the urging member is OFF. The schematic diagram which shows the structure of the resin molding unit which has the transfer apparatus and resin molding apparatus of this embodiment.

In the transport device, the resin molding device, and the method for manufacturing a resin molded product according to the present invention, the object to be molded is placed on the part on which the object to be molded is placed, and the edge restricting member is placed in the direction inside the part on which the object to be molded is placed. By moving the object to be molded, the object to be molded is held in the object holding portion. By using the movable edge restricting member in this way, the object to be molded can be held even if the outer dimensions of the object to be molded vary. Further, since the edge restricting member can be moved so as to reduce the gap between the edge restricting member and the object to be molded, it is possible to prevent the position where the object to be molded is attached to the attachment portion of the object to be molded to be displaced. can.

The shape of the edge regulating member is not particularly limited. Further, the type and shape of the object to be molded are not particularly limited. Examples of the types of objects to be molded to which the present invention can be applied include semiconductor wafers, circuit boards, lead frames, glass substrates, metal substrates, etc., and the shapes of objects to be molded include circles, rectangles and other polygons, and ellipses. The shape and the like can be mentioned.

Further, the method for producing a resin molded product according to the present invention further
After the resin molding step, the first mold and the second mold are opened, and the molding target holding portion is moved so as to align the positions of the molding target mounting portion and the molding target mounting portion. The molding target, which has been resin-molded and attached to the molding target mounting portion, is placed on the molding target mounting portion, and the edge restricting member is moved toward the inside of the molding target mounting portion. The step of holding the object to be molded at the time of carrying out, and the step of holding the object to be molded, to hold the object to be molded in the holding portion of the object to be molded.
It can include a carry-out step of moving the molded object holding portion to the outside of the molding die.

Variations in the outer dimensions of the object to be molded are caused by, for example, the following causes, in addition to the processing errors that occur during the above-mentioned processing. An example of the first cause is due to the thermal expansion of the object to be molded. Since the temperature of the first mold and the second mold is raised to a temperature at which resin molding is possible during resin molding, the temperature of the object to be molded is higher immediately after resin molding than before molding. In order to increase the production efficiency, it is necessary to remove it from the mounting part of the object to be molded and carry it out of the molding die before the temperature drops sufficiently. The outer dimensions will be different at the time of loading and unloading. Further, since the thermal expansion rate differs depending on the material of the object to be molded, the outer dimensions of the object to be molded also differ depending on the material of the object to be molded. An example of the second cause is a problem that occurs when the overmold described below is performed. Overmolding refers to resin molding to the outside of the object to be molded, and is used for fan-out packaging in which wiring and input / output terminals are provided outside the resin-sealed chip. Since the overmolded object to be molded is larger than the original shape, the outer dimensions of the object to be molded will be different between the time of loading and the time of carrying out. According to the transport device, the resin molding device, and the method for manufacturing a resin molded product according to the present invention, the object to be molded can be held and the object to be molded can be held in any of the examples of the first and second causes. It is possible to prevent the position where the object to be molded is attached to the attachment portion from being displaced.

Further, in the examples of these first and second causes, the outer dimensions of the object to be molded differ between when the object to be molded is carried into the molding die and when the object to be molded is carried out from the molding die. The described resin molding apparatus is provided with a transport device (offloader) for carrying out in addition to the transporting device (loader) for carrying in, which has been a factor in increasing the cost of the resin molding device. On the other hand, in the transport device, the resin molding device, and the resin molded product manufacturing method according to the present invention, the same transport device can be used at the time of carrying in and at the time of carrying out, so that the cost can be suppressed.

In the transport device and the resin molding device according to the present invention, the molding target holding portion further urges the plurality of edge restricting members in the direction (internal direction of the molding target mounting portion). It is desirable to have. Further, in the method for manufacturing a resin molded product according to the present invention, it is desirable that the plurality of edge restricting members are urged in the above direction by the urging member while the molding target is held by the molding target holding portion. .. As a result, while the object to be molded is held by the object holding portion to be molded, the object to be molded is held by a plurality of edge regulating members urged toward the inside of the object mounting portion to be molded by the urging member. Therefore, the object to be molded can be held more stably. For example, when the molded object holding portion and the molded object held by the molded object holding portion and the molded object held therein approach the first and second molds having been heated, each of the molded object holding portion and the molding target object has its own thermal expansion rate. May expand accordingly. Even in such a case, the object to be molded can be stably held by urging the plurality of edge-regulating members toward the inside of the mounting portion of the object to be molded.

In the transport device according to the present invention
A plate-shaped rotating member that rotates around the center of rotation,
The rotating member is provided with one edge regulating member for each of the plurality of edge regulating members, and the edge regulating member is inserted through the rotating member to move the edge regulating member. With a hole,
An edge that is provided one for each of the plurality of edge restricting members and regulates the movable direction of the edge restricting member on a straight line passing through the edge regulating member and the rotation center. It can be configured to include a regulation member movement regulation unit. Such a transport device can be used in the resin molding device and the resin molded product manufacturing method according to the present invention.

According to the configuration having the rotating member, the edge restricting member guide slot, and the edge restricting member movement restricting portion, the edge restricting member can be formed by rotating the rotating member around the center of rotation. The edge restricting member moves on a straight line passing through the edge restricting member and the rotation center so that the position in the guide slot changes and the distance from the rotation center changes accordingly. As a result, the edge restricting member can be moved in the direction inside the molding target mounting portion or in the opposite direction.

The width of the edge regulating member guide slot is different from that of the one point on the width direction center line connecting the widthwise centers of the edge regulating member guide slot and the rotation center. It is possible to take a configuration in which the distance between one point on the direction center line and the rotation center is different. As a result, when the edge restricting member moves between these two points in the edge restricting member guide slot due to the rotation of the rotating member, the distances from the rotation center differ from each other at these two points. The edge restricting member moves on a straight line passing through the edge restricting member and the rotation center. Here, the "width direction" refers to a point on the outer edge of the edge restricting member guide slot and the other on the outer edge at the shortest distance from the point across the inside of the edge control member guide slot. The direction connecting the points.

The edge restricting member guide slot is formed so that the distance between the point on the width direction center line and the rotation center increases as the point increases from one end to the other end of the width direction center line. It can be configured to be. As a result, when the rotating member is rotated either clockwise or counterclockwise in the top view, the edge regulating member moves closer to the center of rotation and is rotated in the opposite direction. As it goes on, the edge restricting member moves away from the center of rotation.

It is desirable that the transport device and the resin molding device having the urging member further include an urging member control unit that turns ON / OFF the operation of the urging member. Further, in the step of holding the object to be molded at the time of carrying in (and the step of holding the object to be molded at the time of carrying out) of the resin molded product manufacturing method in which the operation using the urging member is performed, the object to be molded is placed on the portion for placing the object to be molded. It is desirable that the operation of the urging member is turned off before the molding object is placed, and the operation of the urging member is turned on after the molding object is placed on the molding object mounting portion. As a result, when the molding target is placed on the molding target mounting portion, the plurality of edge restricting members are not urged toward the inside of the molding target mounting portion by the urging member. The molding target can be placed on the molding target mounting portion while ensuring a gap between the plurality of edge regulating members and the molding target.

In the transport device and the resin molding device according to the present invention, it is desirable that all of the plurality of edge restricting members are interlocked and movable in the direction. Further, in the method for manufacturing a resin molded product according to the present invention, when the plurality of edge regulating members are moved in the direction, it is desirable that all of the plurality of edge regulating members are interlocked and moved in the direction. .. As a result, the object to be molded can be held near the center of the holding portion of the object to be molded, and the accuracy of the mounting position on the mounting portion of the object to be molded can be improved.

One of the plurality of edge restricting members may be provided at a position corresponding to a notch provided in the molding target to be mounted on the molding target mounting portion. desirable. As a result, the position of the notch is aligned with the edge regulation member, and the molding target is placed on the molding target mounting portion, so that the orientation of the molding target on the molding target mounting portion can be determined. Can be determined.

Hereinafter, more specific embodiments of the transport device, the resin molding device, and the method for manufacturing a resin molded product according to the present invention will be described with reference to FIGS. 1 to 15.

(1) Configuration of Transport Device and Resin Molding Device of the Present Invention In FIG. 1, the transport device (transport mechanism) 20 according to the embodiment of the present invention and the transport device 20 according to the embodiment of the present invention are shown. The overall configuration of the resin molding apparatus 10 having the resin molding apparatus 10 is shown in a schematic diagram. This resin molding apparatus 10 is an apparatus for performing compression molding, and is provided with a base 111 and four upright on the base 111 (only two are shown in FIG. 1, but two more are provided in the depth direction). The tie bar 112, the movable platen 121 held by the tie bar 112 so as to be movable up and down, the fixed platen 122 fixed to the upper end of the tie bar 112, and the movable platen 121 provided on the base 111. It is provided with a toggle link 113 that can be moved up and down. Further, the resin molding apparatus 10 is provided with a lower mold 152 on the upper surface of the movable platen 121 and an upper mold 151 on the lower surface of the fixed platen 122. A set of molding dies 15 is formed by these upper dies 151 and lower dies 152.

The upper mold 151 corresponds to the first mold, and the lower surface thereof is a molding target mounting portion 1511 for holding the molding target, and the molding target mounting portion 1511 is provided with a gas suction hole 1512. Between the upper mold 151 and the fixed platen 122, a heater 142 is provided closer to the upper mold 151, and a heat insulating material 141 is provided closer to the fixed platen 122. The gas suction hole 1512 is connected to a vacuum pump (not shown) via a gas suction pipe 1513 provided in the upper mold 151 and the heater 142.

The lower mold 152 corresponds to the second type, and includes a peripheral wall member 1521 having a planar shape (top view) and a circular frame, and a flat bottom member 1522 mounted in the frame of the peripheral wall member 1521. It has an elastic member 1523 provided on the lower surface of the peripheral wall member 1521. The space surrounded by the peripheral wall member 1521 and the bottom surface member 1522 is the cavity C to which the resin material is supplied. The shape of the frame of the peripheral wall member 1521 and the shape of the bottom surface member 1522 can be a rectangular shape other than a circular shape, depending on the shape of the resin molded product to be manufactured. Between the lower mold 152 and the movable platen 121, a heater 142 is provided closer to the lower mold 152, and a heat insulating material 141 is provided closer to the movable platen 121. The compression molding apparatus 101 is configured by each of the components described so far.

In the state where the molding die 15 is opened, the transfer device 20 is located between the upper die 151 and the lower die 152 (inside the molding die 15), directly below the molding object mounting portion 1511, and outside the molding die 15. It is movable in the lateral direction between them, and has a molding target mounting portion 25 on which the molding target S is placed on the upper surface. In the present embodiment, the molding target S to be mounted on the molding target mounting portion 25 is a plate-shaped and circular substrate.

The configuration of the transport device 20 will be described in detail with reference to FIGS. 2 to 5.

2 (a) is a top view of the entire transfer device 20, (b) is a view in the A-A'longitudinal section shown in (a), and (c) is a B-B'longitudinal section shown in (a). It is a figure in. The transport device 20 includes a base frame 21, an elevating frame 22, a rotating frame (rotating member) 23, a non-rotating frame 24, a molding target mounting portion 25, an elevating mechanism 26, and edge regulation. It has a member 27. In the present embodiment, 10 edge restricting members 27 are provided, and 9 of them are arranged at equal intervals (40 ° intervals) on the circumference. The remaining one edge limiting member 27A is located between the two adjacent edge limiting members 27 out of the nine, slightly inside the circumference. The number of edge restricting members 27 shown here is an example, and is not limited thereto. The elevating frame 22, the rotating frame 23, the non-rotating frame 24, and the object mounting portion 25 are stacked in this order from the bottom, and all of them have a circular outer shape having the same planar shape. .. The elevating frame 22 is provided on the base frame 21.

The base frame 21 has a shape extending outward from the outer circle of the elevating frame 22 or the like in one direction (horizontal direction in FIG. 2A) of the planar shape. A pair of convex rails 211 extending in a direction orthogonal to the one direction (vertical direction in FIG. 2A and perpendicular to the paper surface in FIG. 2B) on the lower surfaces of both ends of the base frame 21 in the one direction. Is provided. The resin molding apparatus 10 is provided with rails 16 (not shown in FIG. 2, see FIG. 7 described later) corresponding to the convex rails 211, and the entire transfer apparatus 20 is guided by these rails. Move between the inside of the molding die 15 and the outside of the molding die 15.

FIG. 3A shows a top view of the elevating frame 22, and FIG. 3B shows a top view of the rotating frame 23. A shaft body 221 projects from the center of the upper surface of the elevating frame 22. A hole 231 through which the shaft body 221 is inserted is provided in the center of the rotating frame 23, and the rotating frame 23 rotates around the shaft body 221.

The elevating frame 22 is provided with 10 edge restricting member guide recesses 222, 9 of which are provided slightly inside the outer hull of the elevating frame 22 at intervals of 40 ° along the circumference of the outer hull. (Fig. 2 (c), Fig. 3 (a)). The remaining one edge restricting member guide recess 222A is between the two adjacent edge restricting member guide recesses 222 out of the nine, and is more than the nine edge regulating member guide recess 222. It is located slightly inside the elevating frame 22. The position in the circumferential direction in which the edge restricting member guide recess 222A is arranged is the position where the notch provided in the object to be molded is to be arranged (the notch should be directed) when the object to be molded is attached to the molding die. It may be arbitrarily determined according to the direction). In one edge regulating member guide recess 222 (including the edge regulating member guide recess 222A), the vicinity of the lower surface of the cylindrical edge regulating member accommodating portion 272 (described later) included in one edge regulating member 27. Is retained. The distance between both ends of the edge restricting member guide recess 222 in the direction in which the straight line intersecting the rotation center (the alternate long and short dash line in FIG. 3A) extends is set to be larger than the diameter of the edge restricting member accommodating portion 272. There is. Further, the direction perpendicular to the straight line of the edge restricting member guide recess 222 so that the edge restricting member accommodating portion 272 hardly moves in the direction perpendicular to the straight line and can move in the direction of the straight line. The width of is set to be shorter than the distance and slightly larger than the diameter of the edge restricting member accommodating portion 272. As a result, the edge restricting member 27 is guided by the edge restricting member guide recess 222 and is restricted to move in the direction in which the straight line extends. The edge restricting member guide recess 222 corresponds to the above-mentioned edge restricting member movement restricting portion.

The rotating frame 23 has a plate shape and is provided with 10 edge restricting member guide elongated holes 232, 9 of which are slightly inside the outer shell of the rotating frame 23 and along the circumference of the outer shell. It is provided at intervals of 40 ° (Fig. 3 (b)). The remaining one edge regulating member guide slot 232A is between the two adjacent edge limiting member guide slot 232 out of the nine, and the nine edge regulating member guide slot 232. It is arranged slightly inside the rotating frame 23 with respect to 232. One edge regulating member 27 held in the edge regulating member guide recess 222 of the elevating frame 22 is inserted into each edge regulating member guide slot 232, of which the edge regulating member guide slot 232A is inserted through the edge regulating member guide slot 232A. The edge restricting member 27A is inserted. The edge restricting member guide slot 232 has a width slightly larger than the diameter of the edge restricting member accommodating portion 272 in the direction in which the straight line intersecting the rotation center extends. Of the edge restricting member guide elongated holes 232, the locus drawn by the edge restricting member main body 271 while the edge restricting member 27 to be inserted moves in the longitudinal direction of the edge restricting member guide elongated hole 232 (FIG. 3 (b). The thick line in)) is defined as the "center line in the width direction". Turn from the left end to the right end of this width direction center line (here, the left and right are specified when the edge restricting member guide slot 232 is located directly above the rotation center in FIG. 3 (b)). The distance from the rotation center (center of the hole 231) of the moving frame 23 (r ₁ at the left end of the edge restricting member guide long hole 232 and r ₂ at the right end. Also, the left end of the edge restricting member guide long hole 232. Is " _{r 1} end" and the right end is " _{r 2} end"). It is provided at an angle with respect to the tangential direction of the circle. The nine edge restricting member guide elongated holes 232 except for the edge restricting member guide elongated hole 232A are provided with the same shape and the same inclination with respect to the tangential direction. The edge restricting member guide elongated hole 232A is from the left end to the right end of the center line in the width direction (the definition is the same as in the case of other edge restricting member guide elongated holes 232, and the edge is drawn in FIG. 3 (b). The distance from the rotation center of the rotation frame 23 decreases from r ₃ to r ₄ (r ₃ > r ₄ , r ₁ > r) toward the regulation member guide slot 232A (from the right end to the left end). ₃ , r ₂ > r ₄ ), it is inclined with respect to the tangential direction. The left end of the edge restricting member guide slot 232A is referred to as "r ₃ end", and the right end is referred to as "r ₄ end".

With such a configuration, when the rotating frame 23 is rotated counterclockwise in the top view (hereinafter, "counterclockwise" and "clockwise" are defined in the top view), the position of each edge restricting member 27 is at the end. The edge restricting member guide long hole 232 moves from the r ₁ end side to the r ₂ end side (in the edge restricting member guide long hole 232A, from the r ₃ end side to the r ₄ end side), whereby the edge restricting member 27 ( The distance between 27A) and the center of rotation becomes smaller, and the object moves toward the inside of the object mounting portion 25 (direction in which the center of rotation is located) (FIG. 4 (a)). On the other hand, when the rotating frame 23 is rotated clockwise, the position of each edge restricting member 27 is changed from the r ₂ end side to the r ₁ end side (edge restricting member guide length) in the edge restricting member guide slot 232. In the hole 232A, it moves from the r ₄ end side to the r ₃ end side), whereby the distance between the edge restricting member 27 (27A) and the rotation center increases, and the outside of the molding target mounting portion 25 Move in the direction (Fig. 4 (b)). Here, the nine edge restricting member guide elongated holes 232 excluding the edge restricting member guide elongated holes 232A are provided with the same shape and the same inclination with respect to the tangential direction, so that these molding target mounting portions are provided. During the movement of the 25 in the internal direction and the external direction, a state in which the distance from the rotation center is equal among the nine edge restricting members 27 excluding the edge restricting member 27A is maintained. The edge restricting member 27A moves so that the distance from the rotation center is closer than that of the other edge restricting members 27.

The elevating frame 22 is provided with a torsion spring 234 that urges the rotating frame 23 to rotate counterclockwise. As a result, the edge restricting member 27 is urged toward the inside of the molding target mounting portion 25. The torsion spring 234 and the rotating frame 23 correspond to the urging member. The urging member is not limited to the torsion spring, and an air cylinder, a servomotor, or the like that rotates the rotating frame 23 counterclockwise can also be used.

One notch 235 is provided on the outer edge of the rotating frame 23. Further, a stopper 225 is provided on the outer edge of the elevating frame 22. The stopper 225 is urged toward the notch 235 by a spring, and is provided at a position where it engages with the notch 235 when the rotating frame 23 is fully rotated clockwise. As described above, the rotating frame 23 is urged by the torsion spring 234 to rotate counterclockwise (that is, to move the edge restricting member 27 toward the inside of the object mounting portion 25 to be molded). However, by engaging the stopper 225 with the notch 235, the rotating frame 23 is fully rotated clockwise (that is, the edge restricting member 27 is moved toward the outside of the object mounting portion 25 to be molded. It can be stopped in the state of). Then, by removing the engaged stopper 225 from the notch 235, the rotating frame 23 rotates counterclockwise due to the action of the torsion spring 234. The stopper 225 and the notch 235 correspond to the urging member control unit that turns on / off the operation of the urging member. The position and orientation of the stopper 225 are not particularly limited.

The non-rotating frame 24 and the object mounting portion 25 to be molded have edge edges having the same planar shape as the edge restricting member guide recess 222 at positions corresponding to the edge regulating member guide recess 222 of the elevating frame 22, respectively. Regulatory member passage holes 242 and 252 are provided (FIG. 2 (c)).

The elevating mechanism 26 is provided on the upper surface of the base frame 21 and is a mechanism for raising and lowering the elevating frame 22. As the elevating frame 22 rises and falls, the rotating frame 23, the non-rotating frame 24, and the object mounting portion 25 provided on the elevating frame 22 also rise and fall.

As shown in FIG. 5, the edge regulating member 27 has an edge regulating member main body 271, the above-mentioned cylindrical edge regulating member accommodating portion 272, and an elastic member 273. The edge regulating member main body 271 is a columnar member having a diameter smaller than that of the cylinder of the edge regulating member accommodating portion 272. The elastic member 273 supports the lower end of the edge regulating member main body 271 and is provided at the bottom of the edge regulating member accommodating portion 272. When the upper end of the edge restricting member main body 271 is pressed, the elastic member 273 is compressed and the upper end is lowered. When this pressing is released, the elastic member 273 expands and its upper end returns to its original position. When the upper end of the edge restricting member main body 271 is in this original position, the upper end passes through the edge restricting member passing hole 252 and protrudes above the upper surface of the object mounting portion 25 to be molded. On the other hand, the upper end of the edge restricting member accommodating portion 272 is located below the upper surface of the molding target mounting portion 25. The combination of the molding target mounting portion 25 and the edge restricting member 27 constitutes the molding target holding portion 28.

The elevating frame 22 is provided with four plate-shaped positioning tools 2241 to 2244 for aligning the lateral positions of the transfer device 20 and the upper die 151 in the molding die 15. The positioning tools 2241 to 2244 are arranged so that when the transport device 20 is raised from below the upper mold 151, one of the positioning tools 2241 to 2244 comes into contact with each of the four side surfaces of the upper mold 151.

(2) Operation of the transport device and the resin molding device of the present embodiment and the method of manufacturing the resin molded product of the present embodiment Next, using FIGS. 6 to 8, the operation of the transport device 20 and the resin molding device 10 and the present invention. An embodiment of the method for manufacturing a resin molded product according to the present invention will be described. In addition, in FIG. 7 and FIG. 8, the figure which looked at the resin molding apparatus 10 from the right direction of FIG. 1 was shown.

First, the transport device 20 is moved to the attachment / detachment position of the object to be molded along the rail 16 provided in the resin molding device 10 that engages with the convex rail 211 provided in the base frame 21.

Next, the rotating frame 23 is rotated clockwise to engage the stopper 225 with the notch 235. As a result, the edge restricting member 27 moves to the outer side of the molding target mounting portion 25 (FIGS. 6 (a-1) and (a-2)). In this state, the disk-shaped object to be molded (semiconductor wafer) S is arranged inside the region surrounded by the nine edge restricting members 27 on the upper surface of the object to be molded 25. Here, one notch SC is provided on the outer edge of the object S to be molded, and the position of the notch SC is aligned with the position of the edge restricting member 27A (FIG. 6 (a-1)). .. In this state, each edge restricting member 27 (including the edge regulating member 27A) is not in contact with the outer edge of the object S to be molded.

Next, the stopper 225 is removed from the notch 235, and the rotation frame 23 is rotated counterclockwise by the action of the torsion spring 234. As a result, the 10 edge restricting members 27 move in conjunction with each other toward the inside of the object mounting portion 25 to be molded. Then, when the edge restricting member main body 271 of the edge restricting member 27 comes into contact with the outer edge of the object S to be molded, the rotation of the rotating frame 23 is stopped (therefore, the rotating frame 23 is not necessarily full counterclockwise. The molding target S is held by the molding target placing portion 25 (FIGS. 6 (b-1) and (b-2)). In this way, the plurality of edge restricting members 27 are interlocked and abut against the outer edge of the molding target mounting portion 25, so that the molding target S is held in the center of the molding target mounting portion 25 and molded. The misalignment of the object S can be suppressed. Further, even if the outer dimensions of the object to be molded S vary due to a processing error or the like, the object to be molded S can be held by moving the edge restricting member 27, and the deviation of the mounting position can be suppressed. Can be done. Further, the edge restricting member 27A arranged at the position of the notch SC among the edge restricting members 27 engages with the notch SC, whereby the position of the object S to be molded in the circumferential direction becomes a predetermined position, and the molding is performed. The orientation of the molded object S on the object placing portion 25 can be determined. This completes the process of holding the object to be molded at the time of delivery.

After the molding target S is placed on the molding target mounting portion 25 in this way, the positions of the molding target mounting portion 25 and the molding target mounting portion 1511 of the upper mold 151 are aligned along the rail 16. As described above, the transport device 20 is moved between the upper die 151 and the lower die 152 (FIG. 7 (a)).

At this position, the portion above the elevating frame 22 including the molding target mounting portion 25 is raised by the elevating mechanism 26, and the molding target S mounted on the molding target mounting portion 25 is mounted on the molding target. It is brought into contact with the portion 1511 (FIG. 7 (b)). At that time, the upper end of the edge restricting member main body 271 abuts on the molding target mounting portion 1511 before the molding target S, and then further rises by the elevating mechanism 26 to compress the elastic member 273, thereby forming the molding. The position relative to the upper surface of the object placing portion 25 is lowered. Therefore, the object to be molded S can be brought into contact with the object to be molded attachment portion 1511 without being hindered by the edge restricting member 27.

By sucking the gas from the gas suction hole 1512 with the vacuum pump in the state where the molding target S is in contact with the molding target mounting portion 1511 in this way, the molding target is mounted on the molding target mounting portion 1511. The suction of gas from the gas suction hole 1512 continues until the stop described later. Then, the rotating frame 23 is rotated clockwise to move the edge restricting member 27 toward the outside of the molding target mounting portion 25, and the elevating mechanism 26 lowers the molding target mounting portion 25 and the like. After that, the transport device 20 is moved out of the molding die 15 (FIG. 7 (c)). This completes the process of bringing in the object to be molded.

Next, the release film F is attached to the inner surface of the cavity C of the lower mold 152 by the release film attachment mechanism (not shown), and then the resin containing the thermosetting resin is attached by the resin material supply mechanism (not shown). The material P is supplied into the cavity C (FIG. 7 (d)). These release film tensioning mechanism and resin material supply mechanism are widely used in conventional resin molding equipment, and detailed description thereof will be omitted. The resin material P is melted in the cavity C by the heat supplied from the heater 142.

When the resin material P in the cavity C is melted, the movable platen 121 is raised by the toggle link 113. As a result, the lower mold 152 on the movable platen 121 abuts on the upper mold 151 and pushes the upper mold 151, and the upper mold 151 is fixed to the fixed platen 122. Therefore, the upper mold 151 and the lower mold 152 are molded. It is tightened (Fig. 7 (e)). When a predetermined time elapses in this state, the resin material P is cured, and a resin molded product PS in which the resin is molded on the surface of the object S to be molded is obtained. This completes the resin molding process.

Then, the movable platen 121 is lowered by the toggle link 113 to open the mold 15 (FIG. 7 (f)). Subsequently, the transport device 20 is transported between the upper mold 151 and the lower mold 152 so as to align the positions of the mold target mounting portion 25 and the mold target mounting portion 1511 of the upper mold 151 (FIG. 8A). ). Then, by rotating the rotating frame 23 to the right, the edge restricting member 27 is moved to the outside of the molding target mounting portion 25 (FIGS. 6 (a-1) and 6 (a-2)). ), The molding target mounting portion 25 and the like are raised by the elevating mechanism 26, and the upper surface of the molding target mounting portion 25 is brought into contact with the lower surface of the resin molded product PS (FIG. 8 (b)). Next, the suction of gas from the gas suction hole 1512 is stopped, and the object mounting portion 25 or the like to be molded is lowered by the elevating mechanism 26.

Further, by rotating the rotating frame 23 counterclockwise, the edge restricting member 27 is moved to the inner side of the molding target mounting portion 25 (FIGS. 6 (b-1) and (b-2)). , Contact the outer edge of the resin molded product PS. As a result, the resin molded product PS in which the resin is molded on the surface of the molded object S is held in the molded object holding portion 28. At this time, the resin molded product PS may not be sufficiently cooled and the outer size may be larger than that of the molded object S before resin molding. Even in such a case, the edge restricting member may be used. By moving 27, the resin molded product PS can be held. Similarly, the overmolded resin molded product PS in which the resin is molded to the outside of the outer shell of the object S to be molded can also be held by moving the edge restricting member 27. This completes the process of holding the object to be molded at the time of carrying out.

After that, the transport device 20 is moved out of the molding die 15 (carry-out step). Then, the resin molded product PS is molded in a state where the edge restricting member 27 is moved to the outer side of the molding target mounting portion 25 by rotating the rotating frame 23 to the right. By removing it from the storage portion 25, the production of one resin molded product PS is completed.

The operation of the transport device 20 described so far, specifically, the rotation of the rotating frame 23, the movement along the rail 16, and the elevating and lowering of the object mounting portion 25 and the like by the elevating mechanism 26 use power. It may be done automatically, or it may be done manually by the operator.

(3) Modification Example of the Transfer Device of the Present Embodiment A modification of the transfer device of the present embodiment is shown with reference to FIGS. 9 to 11. All of these modified transfer devices can be used in place of the transfer device 20 in the resin molding device 10 of the above embodiment.

FIG. 9 shows a top view of the transport device 20B of the first modified example in (a) and a vertical sectional view in (b). The transport device 20B in this modification does not have a rotating frame and a non-rotating frame, and a circular object mounting portion 25B to be molded is provided directly on the elevating frame 22B. Nine edge regulating member accommodating holes 252B are provided in the molding target mounting portion 25B, one for each edge restricting member accommodating hole 252B, the edge restricting member 27B and the edge restricting member moving portion 275B. Is provided. The edge restricting member 27B and the edge restricting member moving portion 275B are connected by a connecting rod 276B. The edge restricting member moving portion 275B moves the edge restricting member 27B to the inner (center) side and the outer side of the molding target mounting portion 25B. Each edge restricting member moving portion 275B is interlocked and controlled by a control unit (not shown) so that the distance between the center of the molding target mounting portion 25B and each edge regulating member 27B becomes equal. Further, the transfer device 20B has a base frame 21B similar to that provided in the above-mentioned transfer device 20, and an elevating mechanism 26B for elevating and elevating the elevating frame 22B. Although omitted in this example, the edge regulating member and the edge regulating member accommodating hole may be provided at a position corresponding to the notch of the object to be molded, as in the edge regulating member 27A in the above embodiment. .. Further, the edge restricting member moving portion 275B may be an air cylinder, a servomotor, or the like.

The detailed operation of the transport device 20B is the same as that of the transport device 20 described above, except that the edge restricting member 27B is moved to the inner side and the outer side of the object mounting portion 25B to be molded by the edge restricting member moving portion 275B. The same is true.

FIG. 10 shows the upper surfaces of the object mounting portion 25C and the edge restricting member 27C for the transport device 20C of the second modification.

The object mounting portion 25C has a square shape when viewed from above, and two edge restricting member passing holes 252C are lined up inside each of the four sides of the square, for a total of eight. .. One edge restricting member 27C passes through each edge regulating member passing hole 252C. The edge regulating member 27C is composed of an edge regulating member main body, an edge regulating member accommodating portion, and an elastic member similar to those described above. The edge restricting member passage hole 252C has a planar shape extending from the center of the square toward the side and having substantially the same size in the direction perpendicular to the diameter of the edge restricting member accommodating portion 272C. There is.

Each edge restricting member passing hole 252C is provided with an edge restricting member moving portion 275C similar to the edge restricting member moving portion 275B of the first modification.

In the resin molding apparatus of the second modification, the square plate-shaped object to be molded S'is placed on the object to be molded 25C, and the edge restricting member 27C is placed on the object to be molded 25C. The molded object S'is moved in the inner direction, and the outer edge of the molded object S'is held by the edge restricting member 27C, and the molded object S'is carried into the molding die and the resin molded product is carried out from the molding die. The detailed operation of the transfer device 20C is the same as the operation of the above-mentioned transfer device 20 except that the operation of the edge restricting member 27C is the same as that of the transfer device 20B of the first modification.

FIG. 11 shows a top view of the transfer device 20D of the third modified example in (a) and a vertical sectional view in (b). In the transport device 20D in this modification, a circular object mounting portion 25D is provided directly on the elevating frame 22D. Below the elevating frame 22D, a base frame 21D similar to that provided in the above-mentioned transport device 20, and an elevating mechanism 26D for elevating and elevating the elevating frame 22D are provided. On the upper surface of the object mounting portion 25D to be molded, four edge restricting members 27D made of flexible pins are provided. The edge restricting members 27D are arranged at equal intervals (every 90 °) on a circumference having a diameter slightly larger than that of the circular object S to be molded. Each edge restricting member 27D is provided with a clamper 29 mounted on the elevating frame 22 and arranged outside the molding target mounting portion 25D. The clamper 29 is a rod-shaped material that rotates about an axis parallel to the upper surface of the molding target mounting portion 25D, and is arranged so that the projection onto the upper surface faces the center of the molding target mounting portion 25D. ing. When one end of the object mounting portion 25D to be molded is lowered by rotation, it comes into contact with the edge restricting member 27D and pushes the edge regulating member 27D toward the center of the object mounting portion 25D to be molded.

When the object S to be molded is conveyed by the transfer device 20D in the third modification, the circular object S to be molded is placed on the object mounting portion 25D, and then the clamper 29 is rotated. The end of the clamper 29 on the center side of the object mounting portion 25D is lowered, and the edge restricting member 27D made of a flexible pin is pushed toward the center side (FIG. 12). As a result, the edge restricting member 27D is pressed against the end portion of the molding target object S, and the molding target object S is fixed to the molding target object mounting portion 25D. Here, by synchronizing the four clampers 29, the object to be molded S can be arranged in the center of the object mounting portion 25D.

The present invention is not limited to the above embodiments and modifications. For example, in the above embodiment, the case where the compression molding apparatus is used has been described as an example, but even if a transfer molding apparatus is used instead of the compression molding apparatus, the same transfer apparatus 20, 20B, 20C, 20D as described above can be used. Can be configured to prepare.

The following stopper 225A and groove 226A can be used in place of the urging member control unit including the stopper 225 and the notch 235 provided in the transport device 20. FIG. 13A shows an enlarged part of the upper surface of the elevating frame 22 for the transport device 20 provided with the stopper 225A and the groove 226A. The stopper 225A is attached to the rotating frame 23, and the lever 2251A extending outward from the center of the rotating frame 23, the roller 2252A connected to the lever 2251A, and the lever 2251A are directed toward the center of the elevating frame 22. It has an elastic member 2253A that urges the user. The groove 226A is provided in the elevating frame 22, and has an L-shape so as to extend in the direction of the center of the elevating frame 22 and in the direction perpendicular to the center. The roller 2252A is fitted in the groove 226A.

When the rotation frame 23 is rotated in this configuration, the lever 2251A also rotates accordingly. Then, when the rotating frame 23 is fully rotated clockwise, that is, when the edge restricting member 27 is moved to the outermost position, the roller 2252A extends toward the center of the elevating frame 22 in the groove 226A. Reach the outer edge of. Then, the lever 2251A is urged by the elastic member 2253A, so that the roller 2252A is pulled into the portion of the groove 226A (FIG. 13 (b)). Then, the rotation of the rotating frame 23 is restricted by the portion of the groove 226A, and the rotating frame 23 is fixed. As a result, the edge restricting member 27 is fixed at the outermost position. Then, when the lever 2251A is pulled outward, the rotation restriction is released, and then the rotation frame 23 rotates counterclockwise due to the action of the torsion spring 234, and the edge restriction member 27 moves inward. The edge of the object S to be molded is regulated.

Alternatively, as shown in FIG. 14A, an urging member having a lever 2251B rotatable around the shaft attached to the rotating frame 23, a hook 2252B provided on the lever 2251B, and a groove 226B provided on the elevating frame 22. A control unit can also be used. In this case, when the rotating frame 23 is fully rotated clockwise, the hook 2252B is fitted into the groove 226B by rotating the lever 2251B around the shaft (FIG. 14 (a)), thereby rotating the hook 2252B. The rotation of the frame 23 is restricted.

Further, in the above embodiment, an example in which one transfer device is provided for one set of compression molding devices is shown, but one transfer device may be shared by a plurality of sets of compression molding devices. Since it takes time to perform resin molding between the attachment of the object to be molded to the mold and the removal of the resin molded product from the mold, the time for performing this resin molding can be used for other purposes. It is possible to attach an object to be molded to the molding die of the compression molding device of the above, or to carry out a resin molded product from another molding die. As a result, the cost required for the transport device can be suppressed.

As an example in which one transfer device is shared by a plurality of sets of compression molding devices, the resin molding unit 30 shown in FIG. 15 described below can be mentioned. The resin molding unit 30 has one material receiving module 31, a plurality of molding modules 32, and one dispensing module 33. The material receiving module 31 is a device for receiving the resin material P and the molding object S from the outside and sending them to the molding module 32, and has a molding object receiving unit 311 and a resin material supply device 312. One molding module 32 has a compression molding device 101 among the resin molding devices 10 of the above embodiment. Although three molding modules 32 are shown in FIG. 15, any number of molding modules 32 can be provided in the resin molding unit 30. Further, the number of molding modules 32 can be increased or decreased even after the resin molding unit 30 is assembled and used. The payout module 33 carries in and holds the resin molded product PS manufactured by the molding module 32 from the molding module 32, and has a resin molded product holding portion 331. The transport device 20 is a molding target from the molding target receiving portion 311 in the material receiving module 31 to the molding target mounting portion of the molding mold in the molding module 32 along the transport rail 35 provided in the resin molding unit 30. Along with carrying in the object, the resin molded product molded by the molding module 32 is carried out from the object mounting portion to be molded to the resin molded product holding portion 331 in the discharge module 33. In addition, the resin molding unit 30 is provided with a resin material transfer device that transfers the resin material P from the resin material supply device 312 in the material receiving module 31 to the cavity of the molding mold in the molding module 32.

10 ... Resin molding device 101 ... Compression molding device 111 ... Base 112 ... Tie bar 113 ... Toggle link 121 ... Movable platen 122 ... Fixed platen 141 ... Insulation material 142 ... Heater 15 ... Molding mold 151 ... Upper mold (first mold)
1511 ... Mounting object mounting part 1512 ... Gas suction hole 1513 ... Gas suction pipe 152 ... Lower mold (second type)
1521 ... Peripheral wall member 1522 ... Bottom member 1523 ... Elastic member 16 ... Rails 20, 20B, 20C, 20D ... Conveying device (conveying mechanism)
21, 21B, 21D ... Base frame 211 ... Convex rail 22 ... Elevating frame 221 ... Shaft body 222, 222A ... Edge restricting member guide recesses 2221, 2242, 2243, 2244 ... Positioning tool 225, 225A ... Stoppers 2251A, 2251B ... Lever 2252A ... Roller 2252B ... Hook 2253A ... Elastic member 226A ... 226B ... Groove 22B, 22D ... Elevating frame 23 ... Rotating frame 231 ... Hole 232, 232A ... Edge restricting member guide slot 24 ... Non-rotating frame 242 ... End Edge restricting member passing holes 25, 25B, 25C, 25D ... Molding object mounting portions 252, 252C ... Edge limiting member passing holes 252B ... Edge regulating member accommodating holes 26, 26B, 26D ... Elevating mechanism 27, 27A, 27B , 27C, 27D ... Edge regulation member 271 ... Edge regulation member main body 272, 272C ... Edge regulation member accommodating portion 273 ... Elastic member 275B, 275C ... Edge regulation member moving portion 276B ... Connecting rod 28 ... Holding of object to be molded Part 29 ... Clamper 30 ... Resin molding unit 31 ... Material receiving module 311 ... Forming object receiving part 312 ... Resin material supply device 32 ... Molding module 33 ... Discharge module 331 ... Resin molded product holding part 35 ... Conveyance rail C ... Cavity F ... Release film P ... Resin material PS ... Resin molded product S ... Molded object

Claims (10)

A device that conveys an object to be molded to the molding die of a resin molding device.
A molding target mounting portion on which the molding target is placed,
A plurality of ends that are provided on the peripheral edge of the molding target mounting portion or on the outside thereof and that abut on the edge of the molding target and are movable toward the inside of the molding target mounting portion. Edge regulation member and
An urging member having an elastic member that urges the edge restricting member in the direction,
The urging member control unit that turns on / off the operation of the urging member,
A transport device comprising a molded object holding portion. The urging member
A plate-shaped rotating member that rotates around the center of rotation,
An elongated hole provided in the rotating member, one for each of the plurality of edge restricting members, through which the edge regulating member is inserted , and connecting the centers in the width direction of the elongated holes. Edge restricting member guide slot formed so that the distance between one point on the width direction center line and the rotation center increases as the point increases from one end to the other end of the width direction center line. When,
An edge that is provided one for each of the plurality of edge restricting members and regulates the movable direction of the edge restricting member on a straight line passing through the edge regulating member and the rotation center. Equipped with a regulation member movement regulation part,
The elastic member urges the rotating member so as to rotate the rotating member from the one end side to the other end side of the edge restricting member guide slot.
The transport device according to claim 1 . The second aspect of claim 2, wherein the urging member control unit is a stopper capable of fixing the rotating member and releasing the fixing at a position where the rotating member is rotated toward one end. Conveyor device. The transport device according to claim 3, wherein the rotating member includes a notch in which the stopper engages at a position where the rotating member is rotated toward one end. The transport device according to any one of claims 1 to 4 , wherein all of the plurality of edge restricting members are interlocked and movable in the said direction. The claim is characterized in that one of the plurality of edge restricting members is provided at a position corresponding to a notch provided in the molding target to be mounted on the molding target mounting portion. The transport device according to any one of 1 to 5 . The transport device according to any one of claims 1 to 6 and
A resin molding apparatus comprising: a first mold having a molding target mounting portion to which the molding target is mounted, and a molding mold including a second mold arranged opposite to the first mold. A member that regulates the edge of the object to be molded held by the object holding portion to be molded, and is provided on the peripheral edge of or outside the peripheral portion of the object to be molded provided on the holding portion of the object to be molded of the transport device. A preliminary step of turning off the operation of the urging member having an elastic member that urges the edge restricting member toward the inside of the molding object mounting portion, and
The molding target is placed on the molding target mounting portion, the operation of the urging member is turned ON, and the urging member urges the molding target in the direction, whereby the plurality of edge restricting members are moved in the direction. A molding target holding step at the time of carrying in, in which the edge restricting member is brought into contact with the edge by moving and the molding target is held in the molding target holding portion.
The molding target mounting portion and the molding target mounting portion of the molding mold including the first mold having the molding target mounting portion to which the molding target is mounted and the second mold arranged opposite to the first mold. Molding in which the molding target holding portion is moved so as to align the position of the placing portion, the molding target is attached to the molding target mounting portion, and then the molding target holding portion is moved to the outside of the molding mold. Object delivery process and
A resin molding step of molding the first mold and the second mold and then resin molding the object to be molded.
A method for producing a resin molded product, which comprises. The urging member
A plate-shaped rotating member that rotates around the center of rotation,
An elongated hole provided in the rotating member, one for each of the plurality of edge restricting members, through which the edge regulating member is inserted , and connecting the centers in the width direction of the elongated holes. Edge restricting member guide slot formed so that the distance between one point on the width direction center line and the rotation center increases as the point increases from one end to the other end of the width direction center line. When,
An edge that is provided one for each of the plurality of edge restricting members and regulates the movable direction of the edge restricting member on a straight line passing through the edge regulating member and the rotation center. Equipped with a regulation member movement regulation part,
The elastic member urges the rotating member so as to rotate the rotating member from the one end side to the other end side of the edge restricting member guide slot.
8. The method for manufacturing a resin molded product according to the description. The resin molded product according to claim 8 or 9 , wherein when the plurality of edge regulating members are moved in the direction, all of the plurality of edge regulating members are interlocked and moved in the direction. Production method.

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