JP7030626B2 - アルミニウム膜の形成方法 - Google Patents
アルミニウム膜の形成方法 Download PDFInfo
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- JP7030626B2 JP7030626B2 JP2018117580A JP2018117580A JP7030626B2 JP 7030626 B2 JP7030626 B2 JP 7030626B2 JP 2018117580 A JP2018117580 A JP 2018117580A JP 2018117580 A JP2018117580 A JP 2018117580A JP 7030626 B2 JP7030626 B2 JP 7030626B2
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- film
- aluminum
- sputtering
- alsi
- reflow
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- 229910052782 aluminium Inorganic materials 0.000 title claims description 59
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 title claims description 55
- 238000004544 sputter deposition Methods 0.000 claims description 43
- 238000000034 method Methods 0.000 claims description 37
- 239000000758 substrate Substances 0.000 claims description 29
- 238000010438 heat treatment Methods 0.000 claims description 20
- 239000000463 material Substances 0.000 claims description 16
- -1 aluminum compound Chemical class 0.000 claims description 4
- 229910000789 Aluminium-silicon alloy Inorganic materials 0.000 description 41
- 239000010410 layer Substances 0.000 description 23
- 230000015572 biosynthetic process Effects 0.000 description 22
- 239000004065 semiconductor Substances 0.000 description 21
- 230000000052 comparative effect Effects 0.000 description 20
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 15
- 229910052814 silicon oxide Inorganic materials 0.000 description 15
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 11
- 229910052710 silicon Inorganic materials 0.000 description 11
- 239000010703 silicon Substances 0.000 description 11
- 235000012431 wafers Nutrition 0.000 description 10
- 238000004519 manufacturing process Methods 0.000 description 8
- PXHVJJICTQNCMI-UHFFFAOYSA-N nickel Substances [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 7
- 230000006911 nucleation Effects 0.000 description 7
- 238000010899 nucleation Methods 0.000 description 7
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 7
- 229910010271 silicon carbide Inorganic materials 0.000 description 7
- 238000007747 plating Methods 0.000 description 6
- 238000005476 soldering Methods 0.000 description 4
- 238000005229 chemical vapour deposition Methods 0.000 description 3
- 239000010931 gold Substances 0.000 description 3
- 230000008018 melting Effects 0.000 description 3
- 238000002844 melting Methods 0.000 description 3
- 239000002244 precipitate Substances 0.000 description 3
- BOTDANWDWHJENH-UHFFFAOYSA-N Tetraethyl orthosilicate Chemical compound CCO[Si](OCC)(OCC)OCC BOTDANWDWHJENH-UHFFFAOYSA-N 0.000 description 2
- 239000012528 membrane Substances 0.000 description 2
- 230000001629 suppression Effects 0.000 description 2
- 239000010936 titanium Substances 0.000 description 2
- 229910016570 AlCu Inorganic materials 0.000 description 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- NRTOMJZYCJJWKI-UHFFFAOYSA-N Titanium nitride Chemical compound [Ti]#N NRTOMJZYCJJWKI-UHFFFAOYSA-N 0.000 description 1
- 238000004220 aggregation Methods 0.000 description 1
- 230000002776 aggregation Effects 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 230000003111 delayed effect Effects 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000005669 field effect Effects 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 239000011229 interlayer Substances 0.000 description 1
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 1
- 229920005591 polysilicon Polymers 0.000 description 1
- 238000007790 scraping Methods 0.000 description 1
- 229910000679 solder Inorganic materials 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
- 239000012808 vapor phase Substances 0.000 description 1
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
- H01L21/768—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics
- H01L21/76838—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the conductors
- H01L21/76877—Filling of holes, grooves or trenches, e.g. vias, with conductive material
- H01L21/76882—Reflowing or applying of pressure to better fill the contact hole
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/14—Metallic material, boron or silicon
- C23C14/16—Metallic material, boron or silicon on metallic substrates or on substrates of boron or silicon
- C23C14/165—Metallic material, boron or silicon on metallic substrates or on substrates of boron or silicon by cathodic sputtering
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
- C23C14/3407—Cathode assembly for sputtering apparatus, e.g. Target
- C23C14/3421—Cathode assembly for sputtering apparatus, e.g. Target using heated targets
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/58—After-treatment
- C23C14/5806—Thermal treatment
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/28—Manufacture of electrodes on semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/268
- H01L21/283—Deposition of conductive or insulating materials for electrodes conducting electric current
- H01L21/285—Deposition of conductive or insulating materials for electrodes conducting electric current from a gas or vapour, e.g. condensation
- H01L21/28506—Deposition of conductive or insulating materials for electrodes conducting electric current from a gas or vapour, e.g. condensation of conductive layers
- H01L21/28512—Deposition of conductive or insulating materials for electrodes conducting electric current from a gas or vapour, e.g. condensation of conductive layers on semiconductor bodies comprising elements of Group IV of the Periodic Table
- H01L21/2855—Deposition of conductive or insulating materials for electrodes conducting electric current from a gas or vapour, e.g. condensation of conductive layers on semiconductor bodies comprising elements of Group IV of the Periodic Table by physical means, e.g. sputtering, evaporation
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/52—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames
- H01L23/522—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames including external interconnections consisting of a multilayer structure of conductive and insulating layers inseparably formed on the semiconductor body
- H01L23/532—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames including external interconnections consisting of a multilayer structure of conductive and insulating layers inseparably formed on the semiconductor body characterised by the materials
- H01L23/53204—Conductive materials
- H01L23/53209—Conductive materials based on metals, e.g. alloys, metal silicides
- H01L23/53214—Conductive materials based on metals, e.g. alloys, metal silicides the principal metal being aluminium
- H01L23/53219—Aluminium alloys
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02612—Formation types
- H01L21/02617—Deposition types
- H01L21/02631—Physical deposition at reduced pressure, e.g. MBE, sputtering, evaporation
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/02—Bonding areas; Manufacturing methods related thereto
- H01L2224/04—Structure, shape, material or disposition of the bonding areas prior to the connecting process
- H01L2224/05—Structure, shape, material or disposition of the bonding areas prior to the connecting process of an individual bonding area
- H01L2224/0554—External layer
- H01L2224/05599—Material
- H01L2224/056—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron [B], silicon [Si], germanium [Ge], arsenic [As], antimony [Sb], tellurium [Te] and polonium [Po], and alloys thereof
- H01L2224/05617—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron [B], silicon [Si], germanium [Ge], arsenic [As], antimony [Sb], tellurium [Te] and polonium [Po], and alloys thereof the principal constituent melting at a temperature of greater than or equal to 400°C and less than 950°C
- H01L2224/05624—Aluminium [Al] as principal constituent
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- Engineering & Computer Science (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Thermal Sciences (AREA)
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
- Physical Vapour Deposition (AREA)
- Electrodes Of Semiconductors (AREA)
Description
Claims (2)
- 基板に対してアルミニウムまたはアルミニウム化合物を材料とする膜であるアルミニウム膜を形成する方法であって、
前記基板に対して前記材料をスパッタリングして0.1μm以上1μm未満の厚さを有する第1膜を形成するステップと、
前記第1膜を加熱して前記第1膜をリフローするステップと、
リフロー後の前記第1膜に対して前記材料をスパッタリングして第2膜を形成するステップと、
前記第2膜を加熱して前記第2膜をリフローするステップと、
リフロー後の前記第2膜に対して前記材料をスパッタリングして第3膜を形成するステップと、
前記第3膜を加熱して前記第3膜をリフローするステップと
を備え、
前記基板は前記材料がスパッタリングされる側において凹部の長さに対する凸部の高さの比が0.5以下である凹凸のパターンを有し、
前記凹凸のパターンはほぼ90度の傾斜を呈する、アルミニウム膜の形成方法。 - 前記アルミニウム膜は、3.0μm以上の厚さに形成される、請求項1記載のアルミニウム膜の形成方法。
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
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JP2018117580A JP7030626B2 (ja) | 2018-06-21 | 2018-06-21 | アルミニウム膜の形成方法 |
US16/376,937 US11313031B2 (en) | 2018-06-21 | 2019-04-05 | Method for forming aluminum film |
DE102019207802.8A DE102019207802A1 (de) | 2018-06-21 | 2019-05-28 | Verfahren zum Ausbilden eines Aluminiumfilms |
US17/543,451 US20220090255A1 (en) | 2018-06-21 | 2021-12-06 | Method for forming aluminum film |
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JP2018117580A JP7030626B2 (ja) | 2018-06-21 | 2018-06-21 | アルミニウム膜の形成方法 |
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JP2019220598A JP2019220598A (ja) | 2019-12-26 |
JP7030626B2 true JP7030626B2 (ja) | 2022-03-07 |
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JP2018117580A Active JP7030626B2 (ja) | 2018-06-21 | 2018-06-21 | アルミニウム膜の形成方法 |
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US (2) | US11313031B2 (ja) |
JP (1) | JP7030626B2 (ja) |
DE (1) | DE102019207802A1 (ja) |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2003318395A (ja) | 2002-04-19 | 2003-11-07 | Hitachi Ltd | 半導体装置の製造方法 |
JP2005347313A (ja) | 2004-05-31 | 2005-12-15 | Denso Corp | 半導体装置の製造方法 |
JP2014204014A (ja) | 2013-04-08 | 2014-10-27 | 三菱電機株式会社 | 半導体装置およびその製造方法 |
Family Cites Families (17)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH05275369A (ja) * | 1992-03-26 | 1993-10-22 | Toshiba Corp | 半導体装置の製造方法 |
JP3382031B2 (ja) | 1993-11-16 | 2003-03-04 | 株式会社東芝 | 半導体装置の製造方法 |
US6475903B1 (en) * | 1993-12-28 | 2002-11-05 | Intel Corporation | Copper reflow process |
JPH07249633A (ja) * | 1994-03-14 | 1995-09-26 | Matsushita Electron Corp | 半導体装置の製造方法 |
US6743723B2 (en) * | 1995-09-14 | 2004-06-01 | Canon Kabushiki Kaisha | Method for fabricating semiconductor device |
JPH1041388A (ja) * | 1996-07-26 | 1998-02-13 | Hitachi Ltd | 半導体集積回路装置配線の層間接続法 |
KR19980053692A (ko) * | 1996-12-27 | 1998-09-25 | 김영환 | 반도체 소자의 금속 배선 형성방법 |
JPH1167908A (ja) * | 1997-08-26 | 1999-03-09 | Rohm Co Ltd | 半導体装置およびその製法 |
JP3033564B2 (ja) * | 1997-10-02 | 2000-04-17 | セイコーエプソン株式会社 | 半導体装置の製造方法 |
JP3201321B2 (ja) * | 1997-11-10 | 2001-08-20 | 日本電気株式会社 | 配線用アルミニウム膜の形成方法 |
US6307267B1 (en) * | 1997-12-26 | 2001-10-23 | Kabushiki Kaisha Toshiba | Semiconductor device and manufacturing method thereof |
TW436366B (en) * | 1998-08-21 | 2001-05-28 | United Microelectronics Corp | Method of fabricating a plug |
US6355558B1 (en) * | 1999-06-10 | 2002-03-12 | Texas Instruments Incorporated | Metallization structure, and associated method, to improve crystallographic texture and cavity fill for CVD aluminum/PVD aluminum alloy films |
US6794282B2 (en) * | 2002-11-27 | 2004-09-21 | Infineon Technologies Ag | Three layer aluminum deposition process for high aspect ratio CL contacts |
JP2008172018A (ja) * | 2007-01-11 | 2008-07-24 | Elpida Memory Inc | 半導体装置及びその製造方法 |
JP2010165989A (ja) * | 2009-01-19 | 2010-07-29 | Elpida Memory Inc | 半導体装置の製造方法 |
JP2016119393A (ja) * | 2014-12-22 | 2016-06-30 | 三菱電機株式会社 | 半導体装置およびその製造方法 |
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2018
- 2018-06-21 JP JP2018117580A patent/JP7030626B2/ja active Active
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2019
- 2019-04-05 US US16/376,937 patent/US11313031B2/en active Active
- 2019-05-28 DE DE102019207802.8A patent/DE102019207802A1/de active Granted
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2021
- 2021-12-06 US US17/543,451 patent/US20220090255A1/en active Pending
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2003318395A (ja) | 2002-04-19 | 2003-11-07 | Hitachi Ltd | 半導体装置の製造方法 |
JP2005347313A (ja) | 2004-05-31 | 2005-12-15 | Denso Corp | 半導体装置の製造方法 |
JP2014204014A (ja) | 2013-04-08 | 2014-10-27 | 三菱電機株式会社 | 半導体装置およびその製造方法 |
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Publication number | Publication date |
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US11313031B2 (en) | 2022-04-26 |
US20220090255A1 (en) | 2022-03-24 |
DE102019207802A1 (de) | 2019-12-24 |
US20190390319A1 (en) | 2019-12-26 |
JP2019220598A (ja) | 2019-12-26 |
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