JP6455109B2 - 半導体装置及び半導体装置の製造方法 - Google Patents
半導体装置及び半導体装置の製造方法 Download PDFInfo
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- JP6455109B2 JP6455109B2 JP2014245948A JP2014245948A JP6455109B2 JP 6455109 B2 JP6455109 B2 JP 6455109B2 JP 2014245948 A JP2014245948 A JP 2014245948A JP 2014245948 A JP2014245948 A JP 2014245948A JP 6455109 B2 JP6455109 B2 JP 6455109B2
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Description
金属製のワイヤーと金属製の電極膜の表面とを接触させてワイヤーボンディングする際、超音波のパワー等により電極膜の内部にクラック等のダメージが発生する場合がある。ワイヤーボンディングダメージを抑制する技術として、半導体装置の電極膜の下側に形成される層間絶縁膜を2層構造とし、この2層間に凹凸部を形成することで、ワイヤーボンディング時のダメージを低減する方法が提案されている(特許文献1参照)。
図1に、本発明の実施の形態に係る半導体装置の一例として、トレンチ型MOSFETの断面構造を示す。セラミック等パッケージに搭載された半導体装置は、半導体チップの上面に形成された電極膜1の表面に、図3〜図5中に電極膜1a,1bと接合した状態で例示したようなワイヤー2がボンディングされる。ここでは半導体装置として、例えば図1に示すように、n−型のドリフト層(nベース層)4の内部に選択的に形成された複数のp−型のベース領域3a,3b,3c,3d,…と、この複数のp−型のベース領域3a,3b,3c,3d,…の内部に選択的に形成された複数のn+型のソース領域11a,11b,…11f,…とを備える構造について説明する。
また半導体装置は、この層間絶縁膜8a,8b,8c,…上に積層されたバリアメタル層6と、このバリアメタル層6の上に積層された電極膜1とを更に備える。電極膜1は図1に示す半導体装置ではソース電極に対応する。電極膜1の上面には、最表層として図示しないパッシベーション膜等が堆積され、パッシベーション膜等に形成された開口部(窓部)には下層の電極膜1の主面が露出し、ワイヤー2がボンディングされるボンディングパッド又はその等価物が形成される。
電極膜1は、アルミニウム(Al)を主成分元素とした金属膜であり、Alとシリコン(Si)、銅(Cu)、ニッケル(Ni)、マグネシウム(Mg)、亜鉛(Zn)等の合金元素との合金膜が好適に用いられる。また電極膜1は、AlとSi等の金属との2元系合金に限定されず、例えばAl‐Si‐Cuのように3元系合金で構成されてもよい。
ここで、パッケージの内部にはナトリウム(Na)等の可動イオンが多く存在し、可動イオンは電界や温度により半導体装置内部に移動し易いが、半導体装置の金属製の電極膜1や層間絶縁膜8a,8b,8c,…により侵入を防がれている。しかし、ワイヤーボンディングの圧力により電極膜1のグレイン30の粒径が小さく、且つ、グレイン30間の粒界が拡大して隙間が増加すると、可動イオンが通過可能な経路が増加し、可動イオンが隙間を介してゲート絶縁膜9及びゲート絶縁膜9の下層の半導体領域に侵入し易くなる。可動イオンの侵入は、ゲート閾値電圧の上昇や発熱等、半導体装置の特性の劣化を引き起こし、製品の信頼性を低下させる。
また電極膜1の硬度は、ワイヤーの硬度に対して予め設定された硬度に構成されている。電極膜1の硬度が所定の硬度に制御されることにより、ゲート絶縁膜9a,9b,9c,…やベース領域3a,3b,3c,3d,…への応力が緩和され、半導体装置のゲート閾値電圧の劣化を更に効果的に抑制する。硬度の制御は、例えば、Al以外の合金元素の、Alに対する含有比率を調整することで行う。
すなわちボンディングワイヤーがAl−Niの場合、電極膜1の硬度は、ワイヤー中のNiの含有比率に応じてHv14程度〜Hv56程度の硬度に構成する。硬度比が70%未満である場合、図2に示すように、半導体装置のゲート閾値電圧が劣化した製品の発生率が大きくなる。
本発明の実施の形態に係る半導体装置によれば、電極膜1のグレイン30の粒径Dj−2,Dj−1,Dj,Dj+1,Dj+2,…を電極膜1の厚みd程度以上に制御するとともに、電極膜1のワイヤーに対する硬度比を70%以上に制御することで、ワイヤーボンディングのダメージを効果的に抑制することができる。
超音波周波数:60[kHz]
超音波出力時間:180[ms(ミリ秒)]
超音波出力:16[W]
ボール部の径:500[μm]
サーチ荷重:750gf
ボンディング荷重:1000gf
ループ高さ(ボンディングワイヤーの半導体装置表面からの高さ):1.5mm
このとき、図5中の破線囲みで表す領域Aのように、ワイヤー2と電極膜1bとの境界領域を中心にグレイン30の細粒化が発生した。領域Aは、半導体装置の形成時には存在しておらず、ワイヤーボンディングによって形成された領域である。領域Aでは、半導体装置製造時に形成された電極膜1bの厚みdよりも小さい(半分以下)粒径のグレイン30が多数発生するとともに、グレイン30間の隙間も図4の場合より多く形成された。図5に示すように、領域Aでは、電極膜1bのグレイン30及びワイヤー2のグレイン30が細粒化し、電極膜1bとワイヤー2との境目が不明確に示された。
本発明の実施の形態に係る半導体装置によれば、電極膜1aのグレイン30の粒径Dj−2,Dj−1,Dj,Dj+1,Dj+2,…を制御するとともに、電極膜1aのワイヤー2に対する硬度比を制御することにより、ゲート閾値電圧の劣化を抑制してワイヤーボンディングを行うことができる。
次に、本発明の実施の形態に係る半導体装置の製造方法を説明する。半導体装置がトレンチ型MOSFETの場合、まずn型の高濃度半導体基板上に、所定の不純物濃度のドリフト層4となるエピタキシャル層が、エピタキシャル成長法により半導体基板の表面に形成される。続いて、ドリフト層4の表面に、イオン注入法等によってp−層を全面に形成する。次に、p−層が形成された半導体基板の主面に複数のトレンチ22j−1,22j,22j+1,…をp−層よりも深く形成することによって、p−層は、複数のp−型のベース領域3a,3b,3c,3d,…に分離される。
(1)電極膜が主成分元素であるAlに下記のいずれか1種の合金元素を添加した2元系合金の場合
Cu:10ppm〜1%
Ni:10ppm〜0.2%
Mg:10ppm〜3%
Zn:10ppm〜1%
Si:100ppm〜3%
Cu:10ppm〜5%
Ni:10ppm〜1%
Mg:10ppm〜10%
Zn:10ppm〜5%
上記の含有比率は、ワイヤー2が、Alに対してNiを10ppm〜5%の範囲で含有した合金で形成され、ワイヤー2の硬度はHv20程度〜Hv80程度であることを考慮し、電極膜1のワイヤー2に対する硬度比を70%以上とするための条件である。
このとき、電極膜1のグレイン30の粒径Dj−2,Dj−1,Dj,Dj+1,Dj+2,…が電極膜1の厚みd程度に制御されていることにより、クラック等ワイヤーボンディングによる電極膜1へのダメージが抑制され、パッケージ中の可動イオンの半導体装置への侵入を抑制することができる。併せて電極膜1のワイヤー2に対する硬度比が70%以上に制御されていることにより、ワイヤーボンディングのダメージを更に効果的に抑制することができる。また電極膜1形成後、パッシベーション膜やコレクタドレイン電極膜10の形成、パッケージへの固着、或いはボンディング等のために熱処理が施されるが、バリアメタル層6が形成されていることにより電極膜1中のSiノジュールの成長が抑制される。
本発明は上記のとおり開示した実施の形態によって説明したが、この開示の一部をなす論述及び図面は、本発明を限定するものであると理解すべきではない。この開示から当業者には様々な代替実施の形態、実施例及び運用技術が明らかになると考えられるべきである。
例えば図6に、本発明の他の実施の形態に係る半導体装置の一例として、IGBTの断面構造を示す。図1に示すMOSFETと同様に、セラミック等パッケージに搭載された半導体装置は、電極膜1の表面にワイヤーがボンディングされる。半導体装置は、n−型のドリフト層4の内部に選択的に形成された複数のp−型のベース領域13a,13b,13c,13d,…と、この複数のp−型のベース領域13a,13b,13c,13d,…の内部に選択的に形成された複数のn+型のエミッタ領域21a,22b,…22f,…とを備える。
また図6に示す半導体装置は、p−型のベース領域13a,13b,13c,13d,…の主面(図6中の上側の面)上に、それぞれゲート絶縁膜19a,19b,19c,…を介して積層された複数のゲート電極17a,17b,17c,…と、それぞれのゲート電極17a,17b,17c,…の表面上に積層された層間絶縁膜18a,18b,18c,…と、を更に備える。
以上のように、本発明は、本明細書及び図面に記載していない様々な実施の形態等を含むとともに、本発明の技術的範囲は、上記の説明から妥当な特許請求の範囲に係る発明特定事項によってのみ定められるものである。
2 ワイヤー
6 バリアメタル層
30 グレイン
61 チタン
62 窒化チタン
63 チタン
Dj 粒径
d 厚み
Claims (10)
- ドリフト層と、
前記ドリフト層の主面上に設けられたゲート絶縁膜と、
前記ゲート絶縁膜を介して設けられたゲート電極と、
前記ゲート電極の上面に設けられた層間絶縁膜と、
前記層間絶縁膜の上面に設けられた金属膜と、を備えた半導体チップにおいて、
前記半導体チップは、パッケージに搭載され、
前記パッケージの電極端子と前記金属膜の表面との間を接続するワイヤーと、を有し、
前記金属膜の下には、全面にわたってバリアメタル層を備え、
前記金属膜内のグレインの粒径が前記金属膜の厚み程度以上の粒径であることを特徴とする半導体装置。 - 前記金属膜の硬度は、ビッカース硬さで、前記ワイヤーの硬度の70%以上であることを特徴とする請求項1に記載の半導体装置。
- 前記バリアメタル層は、チタン、窒化チタン、チタンの順に積層された膜であることを特徴とする請求項1に記載の半導体装置。
- 前記金属膜は、アルミニウムを主成分とする合金であることを特徴とする請求項1に記載の半導体装置。
- 前記ワイヤーは、アルミニウムを主成分とすることを特徴とする請求項1に記載の半導体装置。
- ドリフト層の主面上にゲート絶縁膜と前記ゲート絶縁膜を介してゲート電極を形成するゲート電極形成工程と、
前記ゲート電極上に層間絶縁膜を形成する層間絶縁膜形成工程と、
前記層間絶縁膜形成工程後、主面側全面にバリアメタル層を形成して加熱処理を行うバリアメタル形成工程と、
前記バリアメタル層の上面に金属膜を形成する金属膜形成工程と、を含む半導体チップを形成するチップ形成工程と、
前記半導体チップをパッケージに搭載する搭載工程と、
前記搭載工程後に前記パッケージの電極端子と前記半導体チップの表面の前記金属膜との間をワイヤーで接続するボンディング工程と、を含み、
前記金属膜形成工程では、前記金属膜内のグレインの粒径が前記金属膜の厚み程度以上となるようにすることを特徴とする半導体装置の製造方法。 - 前記バリアメタル形成工程において、前記バリアメタル層は、チタン、窒化チタン、チタンの順に積層された膜であることを特徴とする請求項6に記載の半導体装置の製造方法。
- 前記金属膜形成工程で形成される前記金属膜は、アルミニウムを主成分とする合金であることを特徴とする請求項6に記載の半導体装置の製造方法。
- 前記ボンディング工程で前記金属膜に接続する前記ワイヤーは、アルミニウムを主成分とすることを特徴とする請求項6に記載の半導体装置の製造方法。
- 前記金属膜の硬度は、ビッカース硬さで、前記ワイヤーの硬度の70%以上であることを特徴とする請求項6に記載の半導体装置の製造方法。
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