JP7009813B2 - 振動デバイス、電子機器及び移動体 - Google Patents

振動デバイス、電子機器及び移動体 Download PDF

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Publication number
JP7009813B2
JP7009813B2 JP2017145070A JP2017145070A JP7009813B2 JP 7009813 B2 JP7009813 B2 JP 7009813B2 JP 2017145070 A JP2017145070 A JP 2017145070A JP 2017145070 A JP2017145070 A JP 2017145070A JP 7009813 B2 JP7009813 B2 JP 7009813B2
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Japan
Prior art keywords
oscillator
circuit
clock signal
circuit device
signal
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JP2017145070A
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Japanese (ja)
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JP2019029737A (ja
JP2019029737A5 (enExample
Inventor
敦嗣 田中
昭夫 堤
史和 小松
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Seiko Epson Corp
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Seiko Epson Corp
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Priority to JP2017145070A priority Critical patent/JP7009813B2/ja
Priority to CN201810817078.0A priority patent/CN109309478B/zh
Priority to US16/046,098 priority patent/US10608586B2/en
Publication of JP2019029737A publication Critical patent/JP2019029737A/ja
Publication of JP2019029737A5 publication Critical patent/JP2019029737A5/ja
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    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03B—GENERATION OF OSCILLATIONS, DIRECTLY OR BY FREQUENCY-CHANGING, BY CIRCUITS EMPLOYING ACTIVE ELEMENTS WHICH OPERATE IN A NON-SWITCHING MANNER; GENERATION OF NOISE BY SUCH CIRCUITS
    • H03B5/00—Generation of oscillations using amplifier with regenerative feedback from output to input
    • H03B5/30—Generation of oscillations using amplifier with regenerative feedback from output to input with frequency-determining element being electromechanical resonator
    • H03B5/32—Generation of oscillations using amplifier with regenerative feedback from output to input with frequency-determining element being electromechanical resonator being a piezoelectric resonator
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03L—AUTOMATIC CONTROL, STARTING, SYNCHRONISATION OR STABILISATION OF GENERATORS OF ELECTRONIC OSCILLATIONS OR PULSES
    • H03L1/00—Stabilisation of generator output against variations of physical values, e.g. power supply
    • H03L1/02—Stabilisation of generator output against variations of physical values, e.g. power supply against variations of temperature only
    • H03L1/028—Stabilisation of generator output against variations of physical values, e.g. power supply against variations of temperature only of generators comprising piezoelectric resonators
    • G—PHYSICS
    • G04—HOROLOGY
    • G04F—TIME-INTERVAL MEASURING
    • G04F10/00—Apparatus for measuring unknown time intervals by electric means
    • G04F10/005—Time-to-digital converters [TDC]
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03B—GENERATION OF OSCILLATIONS, DIRECTLY OR BY FREQUENCY-CHANGING, BY CIRCUITS EMPLOYING ACTIVE ELEMENTS WHICH OPERATE IN A NON-SWITCHING MANNER; GENERATION OF NOISE BY SUCH CIRCUITS
    • H03B5/00—Generation of oscillations using amplifier with regenerative feedback from output to input
    • H03B5/02—Details
    • H03B5/04—Modifications of generator to compensate for variations in physical values, e.g. power supply, load, temperature
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03B—GENERATION OF OSCILLATIONS, DIRECTLY OR BY FREQUENCY-CHANGING, BY CIRCUITS EMPLOYING ACTIVE ELEMENTS WHICH OPERATE IN A NON-SWITCHING MANNER; GENERATION OF NOISE BY SUCH CIRCUITS
    • H03B5/00—Generation of oscillations using amplifier with regenerative feedback from output to input
    • H03B5/30—Generation of oscillations using amplifier with regenerative feedback from output to input with frequency-determining element being electromechanical resonator
    • H03B5/32—Generation of oscillations using amplifier with regenerative feedback from output to input with frequency-determining element being electromechanical resonator being a piezoelectric resonator
    • H03B5/36—Generation of oscillations using amplifier with regenerative feedback from output to input with frequency-determining element being electromechanical resonator being a piezoelectric resonator active element in amplifier being semiconductor device
    • H03B5/362—Generation of oscillations using amplifier with regenerative feedback from output to input with frequency-determining element being electromechanical resonator being a piezoelectric resonator active element in amplifier being semiconductor device the amplifier being a single transistor
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03B—GENERATION OF OSCILLATIONS, DIRECTLY OR BY FREQUENCY-CHANGING, BY CIRCUITS EMPLOYING ACTIVE ELEMENTS WHICH OPERATE IN A NON-SWITCHING MANNER; GENERATION OF NOISE BY SUCH CIRCUITS
    • H03B5/00—Generation of oscillations using amplifier with regenerative feedback from output to input
    • H03B5/30—Generation of oscillations using amplifier with regenerative feedback from output to input with frequency-determining element being electromechanical resonator
    • H03B5/32—Generation of oscillations using amplifier with regenerative feedback from output to input with frequency-determining element being electromechanical resonator being a piezoelectric resonator
    • H03B5/36—Generation of oscillations using amplifier with regenerative feedback from output to input with frequency-determining element being electromechanical resonator being a piezoelectric resonator active element in amplifier being semiconductor device
    • H03B5/366—Generation of oscillations using amplifier with regenerative feedback from output to input with frequency-determining element being electromechanical resonator being a piezoelectric resonator active element in amplifier being semiconductor device and comprising means for varying the frequency by a variable voltage or current
    • H03B5/368—Generation of oscillations using amplifier with regenerative feedback from output to input with frequency-determining element being electromechanical resonator being a piezoelectric resonator active element in amplifier being semiconductor device and comprising means for varying the frequency by a variable voltage or current the means being voltage variable capacitance diodes
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
    • H03H9/205—Constructional features of resonators consisting of piezoelectric or electrostrictive material having multiple resonators
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03L—AUTOMATIC CONTROL, STARTING, SYNCHRONISATION OR STABILISATION OF GENERATORS OF ELECTRONIC OSCILLATIONS OR PULSES
    • H03L1/00—Stabilisation of generator output against variations of physical values, e.g. power supply
    • H03L1/02—Stabilisation of generator output against variations of physical values, e.g. power supply against variations of temperature only
    • H03L1/022—Stabilisation of generator output against variations of physical values, e.g. power supply against variations of temperature only by indirect stabilisation, i.e. by generating an electrical correction signal which is a function of the temperature
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03L—AUTOMATIC CONTROL, STARTING, SYNCHRONISATION OR STABILISATION OF GENERATORS OF ELECTRONIC OSCILLATIONS OR PULSES
    • H03L7/00—Automatic control of frequency or phase; Synchronisation
    • H03L7/06—Automatic control of frequency or phase; Synchronisation using a reference signal applied to a frequency- or phase-locked loop
    • H03L7/08—Details of the phase-locked loop
    • H03L7/099—Details of the phase-locked loop concerning mainly the controlled oscillator of the loop
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03L—AUTOMATIC CONTROL, STARTING, SYNCHRONISATION OR STABILISATION OF GENERATORS OF ELECTRONIC OSCILLATIONS OR PULSES
    • H03L7/00—Automatic control of frequency or phase; Synchronisation
    • H03L7/06—Automatic control of frequency or phase; Synchronisation using a reference signal applied to a frequency- or phase-locked loop
    • H03L7/16—Indirect frequency synthesis, i.e. generating a desired one of a number of predetermined frequencies using a frequency- or phase-locked loop
    • H03L7/22—Indirect frequency synthesis, i.e. generating a desired one of a number of predetermined frequencies using a frequency- or phase-locked loop using more than one loop
    • H03L7/23—Indirect frequency synthesis, i.e. generating a desired one of a number of predetermined frequencies using a frequency- or phase-locked loop using more than one loop with pulse counters or frequency dividers
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/80—Constructional details
    • H10N30/88—Mounts; Supports; Enclosures; Casings
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02007—Details of bulk acoustic wave devices
    • H03H9/02086—Means for compensation or elimination of undesirable effects
    • H03H9/02102—Means for compensation or elimination of undesirable effects of temperature influence
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/05—Holders or supports
    • H03H9/0504—Holders or supports for bulk acoustic wave devices
    • H03H9/0514—Holders or supports for bulk acoustic wave devices consisting of mounting pads or bumps
    • H03H9/0519—Holders or supports for bulk acoustic wave devices consisting of mounting pads or bumps for cantilever
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/125—Driving means, e.g. electrodes, coils
    • H03H9/13—Driving means, e.g. electrodes, coils for networks consisting of piezoelectric or electrostrictive materials
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
    • H03H9/17—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Oscillators With Electromechanical Resonators (AREA)
JP2017145070A 2017-07-27 2017-07-27 振動デバイス、電子機器及び移動体 Active JP7009813B2 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2017145070A JP7009813B2 (ja) 2017-07-27 2017-07-27 振動デバイス、電子機器及び移動体
CN201810817078.0A CN109309478B (zh) 2017-07-27 2018-07-24 振动器件、电子设备以及移动体
US16/046,098 US10608586B2 (en) 2017-07-27 2018-07-26 Resonator device, electronic apparatus, and vehicle

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2017145070A JP7009813B2 (ja) 2017-07-27 2017-07-27 振動デバイス、電子機器及び移動体

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JP2019029737A JP2019029737A (ja) 2019-02-21
JP2019029737A5 JP2019029737A5 (enExample) 2020-07-30
JP7009813B2 true JP7009813B2 (ja) 2022-01-26

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CN (1) CN109309478B (enExample)

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* Cited by examiner, † Cited by third party
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US10615809B2 (en) * 2017-09-28 2020-04-07 Stmicroelectronics International N.V. Calibration of a voltage controlled oscillator to trim the gain thereof, using a phase locked loop and a frequency locked loop
US12049811B2 (en) 2018-03-09 2024-07-30 Schlumberger Technology Corporation Integrated well construction system operations
JP7314553B2 (ja) * 2019-03-22 2023-07-26 セイコーエプソン株式会社 回路装置、発振器、電子機器及び移動体
JP7247135B2 (ja) * 2020-03-18 2023-03-28 日立Astemo株式会社 検知装置
CN111474522A (zh) * 2020-04-23 2020-07-31 西安电子工程研究所 一种不同时钟相位同步的补偿电路
MY206703A (en) * 2020-11-30 2025-01-02 Huawei Tech Co Ltd Clock oscillator and method for preparing clock oscillator
CN114584071A (zh) * 2020-11-30 2022-06-03 华为技术有限公司 一种时钟振荡器及其制备方法
JP2024156338A (ja) * 2023-04-24 2024-11-06 セイコーエプソン株式会社 発振器

Citations (4)

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JP2001141853A (ja) 1999-11-11 2001-05-25 Communication Research Laboratory Mpt タイムインターバルカウンタ装置
JP2004015444A (ja) 2002-06-06 2004-01-15 Nippon Dempa Kogyo Co Ltd Ｐｌｌ制御発振器
JP2011097553A (ja) 2009-09-30 2011-05-12 Seiko Instruments Inc 圧電振動子、発振器及び発振器パッケージ
JP2014150453A (ja) 2013-02-01 2014-08-21 Asahi Kasei Electronics Co Ltd 圧電デバイス

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JP3196254B2 (ja) 1991-09-28 2001-08-06 スズキ株式会社 微小時間計測方法及び微小時間計測装置
JPH0738333A (ja) * 1993-07-23 1995-02-07 Matsushita Electric Ind Co Ltd 水晶発振器
JP3157765B2 (ja) * 1998-01-26 2001-04-16 日本電気アイシーマイコンシステム株式会社 半導体集積回路
US6946919B2 (en) * 2002-01-14 2005-09-20 Cts Corporation Controllable crystal oscillator component
US7471162B2 (en) * 2006-04-24 2008-12-30 Nihon Dempa Kogyo Co., Ltd. Surface mount type temperature-compensated crystal oscillator
JP2009065334A (ja) * 2007-09-05 2009-03-26 Nippon Dempa Kogyo Co Ltd 表面実装用の水晶発振器
JP4944223B2 (ja) * 2010-03-26 2012-05-30 日本電波工業株式会社 多機能型とした電圧制御型の温度補償水晶発振器
JP6548411B2 (ja) * 2014-03-31 2019-07-24 日本電波工業株式会社 発振装置
JP6536780B2 (ja) * 2015-01-22 2019-07-03 セイコーエプソン株式会社 半導体回路装置、発振器、電子機器および移動体
JP2016187154A (ja) * 2015-03-27 2016-10-27 セイコーエプソン株式会社 発振器、電子機器及び移動体
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Patent Citations (4)

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Publication number Priority date Publication date Assignee Title
JP2001141853A (ja) 1999-11-11 2001-05-25 Communication Research Laboratory Mpt タイムインターバルカウンタ装置
JP2004015444A (ja) 2002-06-06 2004-01-15 Nippon Dempa Kogyo Co Ltd Ｐｌｌ制御発振器
JP2011097553A (ja) 2009-09-30 2011-05-12 Seiko Instruments Inc 圧電振動子、発振器及び発振器パッケージ
JP2014150453A (ja) 2013-02-01 2014-08-21 Asahi Kasei Electronics Co Ltd 圧電デバイス

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CN109309478A (zh) 2019-02-05
CN109309478B (zh) 2023-09-29
JP2019029737A (ja) 2019-02-21
US10608586B2 (en) 2020-03-31
US20190035848A1 (en) 2019-01-31

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