JP7000393B2 - 基板処理装置、ガスボックス及び半導体装置の製造方法 - Google Patents
基板処理装置、ガスボックス及び半導体装置の製造方法 Download PDFInfo
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B1/00—Details of electric heating devices
- H05B1/02—Automatic switching arrangements specially adapted to apparatus ; Control of heating devices
- H05B1/0227—Applications
- H05B1/023—Industrial applications
- H05B1/0244—Heating of fluids
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C11/00—Component parts, details or accessories not specifically provided for in groups B05C1/00 - B05C9/00
- B05C11/10—Storage, supply or control of liquid or other fluent material; Recovery of excess liquid or other fluent material
- B05C11/1002—Means for controlling supply, i.e. flow or pressure, of liquid or other fluent material to the applying apparatus, e.g. valves
- B05C11/1015—Means for controlling supply, i.e. flow or pressure, of liquid or other fluent material to the applying apparatus, e.g. valves responsive to a conditions of ambient medium or target, e.g. humidity, temperature ; responsive to position or movement of the coating head relative to the target
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/4412—Details relating to the exhausts, e.g. pumps, filters, scrubbers, particle traps
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/448—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for generating reactive gas streams, e.g. by evaporation or sublimation of precursor materials
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/52—Controlling or regulating the coating process
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67098—Apparatus for thermal treatment
- H01L21/67109—Apparatus for thermal treatment mainly by convection
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67242—Apparatus for monitoring, sorting or marking
- H01L21/67248—Temperature monitoring
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B1/00—Details of electric heating devices
- H05B1/02—Automatic switching arrangements specially adapted to apparatus ; Control of heating devices
- H05B1/0227—Applications
- H05B1/023—Industrial applications
- H05B1/0233—Industrial applications for semiconductors manufacturing
Description
前記ガスボックスは、前記ガスボックス外の雰囲気を前記ガスボックス内に吸い込む吸込口と、排気ダクトに接続され前記ガスボックス内の雰囲気を前記排気ダクトに排気する排気口と、ガスボックス内の雰囲気を冷却するとともに前記雰囲気の温度を測定又は監視する温度制御機器と、前記ガスボックス内に漏洩した処理ガスを検知するガス漏洩センサと、を備える技術が提供される。
Claims (5)
- 基板を処理する処理室を含む処理炉と、
前記処理室に前記基板を処理する処理ガスを供給する処理ガス供給路と、
前記処理室に供給される処理ガスの量を制御する処理ガス供給制御部と、
前記処理ガス供給路若しくは前記処理ガス供給制御部の少なくとも一部を加熱するヒータと、
前記処理ガス供給路と前記処理ガス供給制御部と前記ヒータとを収納するガスボックスと、を備え、
前記ガスボックスは、前記ガスボックス外の雰囲気を前記ガスボックス内に吸い込む吸込口と、排気ダクトに接続され前記ガスボックス内の雰囲気を前記排気ダクトに排気する排気口と、前記ガスボックス内の雰囲気を冷却するとともに前記雰囲気の温度を測定又は監視する温度制御機器と、前記ガスボックス内に漏洩した処理ガスを検知するガス漏洩センサと、を備える基板処理装置。 - 前記温度制御機器は、前記ガスボックスの内の雰囲気と接触する第1面及び前記ガスボックスの外の雰囲気と接触する第2面を有する放熱フィンと、前記第1面に雰囲気の流れを形成する第1ファンと、ガスボックス内の温度を測定する温度センサと、前記温度センサが測定した温度に応じて、第2面に雰囲気の流れを形成する前記ファンの回転数を制御する温度調整器と、を備える請求項1に記載の基板処理装置。
- 前記温度制御機器は、前記第2面に雰囲気の流れを形成する第2ファンを更に備え、前記第2ファンは、前記ガス漏洩センサが漏洩を検知したときに停止させられる請求項2に記載の基板処理装置。
- 処理室で基板を処理する基板処理装置に備えられるガスボックスであって、
前記処理室に前記基板を処理する処理ガスを供給する処理ガス供給路、及び、前記処理室に供給される処理ガスの量を制御する処理ガス供給制御部と、前記処理ガス供給路若しくは前記処理ガス供給制御部の少なくとも一部を加熱するヒータと、を収納する筐体と、
前記ガスボックス外の雰囲気を前記ガスボックス内に吸い込む吸込口と、
排気ダクトに接続され前記ガスボックス内の雰囲気を前記排気ダクトに排気する排気口と、
前記ガスボックス内の雰囲気を冷却するとともに前記雰囲気の温度を測定又は監視する温度制御機器と、
前記ガスボックス内に漏洩した処理ガスを検知するガス漏洩センサと、を備えるガスボックス。 - 処理室に処理ガスを供給して基板を処理する工程を有する半導体装置の製造方法であって、
前記基板を処理する工程では、
前記処理室に前記基板を処理する処理ガスを供給する処理ガス供給路、及び、前記処理室に供給される処理ガスの量を制御する処理ガス供給制御部と、前記処理ガス供給路若しくは前記処理ガス供給制御部の少なくとも一部を加熱するヒータと、を収納するガスボックスの内部雰囲気の温度を取得する工程と、
取得した前記温度に基づいて、前記ガスボックスの内部雰囲気を冷却する温度制御機器のファンの回転数を決定する工程と、
吸込口を通じて前記ガスボックスの外から内に取り込まれた前記内部雰囲気を、温度制御機器によって冷却し、排気口から排気ダクトに排気する工程と、を備える半導体装置の製造方法。
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
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JP2019174571A JP7000393B2 (ja) | 2019-09-25 | 2019-09-25 | 基板処理装置、ガスボックス及び半導体装置の製造方法 |
CN202010875155.5A CN112563157A (zh) | 2019-09-25 | 2020-08-27 | 基板处理装置、气柜以及半导体器件的制造方法 |
KR1020200118090A KR102560400B1 (ko) | 2019-09-25 | 2020-09-15 | 기판 처리 장치, 가스 박스, 반도체 장치의 제조 방법 및 프로그램 |
US17/024,249 US20210092798A1 (en) | 2019-09-25 | 2020-09-17 | Substrate Processing Apparatus and Gas Box |
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JP2019174571A JP7000393B2 (ja) | 2019-09-25 | 2019-09-25 | 基板処理装置、ガスボックス及び半導体装置の製造方法 |
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JP2021052110A JP2021052110A (ja) | 2021-04-01 |
JP7000393B2 true JP7000393B2 (ja) | 2022-01-19 |
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JP7203070B2 (ja) * | 2020-09-23 | 2023-01-12 | 株式会社Kokusai Electric | 基板処理装置、基板処理方法及び半導体装置の製造方法 |
CN113594067B (zh) * | 2021-07-30 | 2024-01-12 | 长鑫存储技术有限公司 | 一种温度控制系统及方法、装置、存储介质 |
CN116460009A (zh) * | 2021-12-24 | 2023-07-21 | 马慧敏 | 背板膜用智能化涂胶装置 |
Citations (4)
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JP2007242791A (ja) | 2006-03-07 | 2007-09-20 | Hitachi Kokusai Electric Inc | 基板処理装置 |
JP2010265501A (ja) | 2009-05-13 | 2010-11-25 | Sharp Corp | Cvd装置 |
JP2011001995A (ja) | 2009-06-17 | 2011-01-06 | Tokyo Electron Ltd | ガスボックス |
JP2013062271A (ja) | 2011-09-12 | 2013-04-04 | Hitachi Kokusai Electric Inc | 基板処理装置 |
Family Cites Families (8)
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JP4359965B2 (ja) * | 1999-07-27 | 2009-11-11 | 東京エレクトロン株式会社 | 成膜装置 |
JP5017913B2 (ja) * | 2005-08-17 | 2012-09-05 | 東京エレクトロン株式会社 | 熱処理装置及び熱処理方法 |
US9460945B2 (en) * | 2006-11-06 | 2016-10-04 | Hitachi Kokusai Electric Inc. | Substrate processing apparatus for semiconductor devices |
KR101012082B1 (ko) * | 2007-06-25 | 2011-02-07 | 데이또꾸샤 가부시키가이샤 | 가열 장치 및 이것을 채용한 기판 처리 장치 및 반도체장치의 제조 방법 및 절연체 |
JP5658463B2 (ja) * | 2009-02-27 | 2015-01-28 | 株式会社日立国際電気 | 基板処理装置及び半導体装置の製造方法 |
US8755678B2 (en) * | 2011-06-21 | 2014-06-17 | Arjan Dykman | Explosion proof forced air electric heater |
CN109560010B (zh) * | 2017-09-26 | 2022-12-16 | 株式会社国际电气 | 基板处理装置、半导体装置的制造方法以及存储介质 |
US11662237B2 (en) * | 2018-04-03 | 2023-05-30 | Lam Research Corporation | MEMS coriolis gas flow controller |
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2019
- 2019-09-25 JP JP2019174571A patent/JP7000393B2/ja active Active
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2020
- 2020-08-27 CN CN202010875155.5A patent/CN112563157A/zh active Pending
- 2020-09-15 KR KR1020200118090A patent/KR102560400B1/ko active IP Right Grant
- 2020-09-17 US US17/024,249 patent/US20210092798A1/en not_active Abandoned
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2007242791A (ja) | 2006-03-07 | 2007-09-20 | Hitachi Kokusai Electric Inc | 基板処理装置 |
JP2010265501A (ja) | 2009-05-13 | 2010-11-25 | Sharp Corp | Cvd装置 |
JP2011001995A (ja) | 2009-06-17 | 2011-01-06 | Tokyo Electron Ltd | ガスボックス |
JP2013062271A (ja) | 2011-09-12 | 2013-04-04 | Hitachi Kokusai Electric Inc | 基板処理装置 |
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CN112563157A (zh) | 2021-03-26 |
KR20210036265A (ko) | 2021-04-02 |
US20210092798A1 (en) | 2021-03-25 |
JP2021052110A (ja) | 2021-04-01 |
KR102560400B1 (ko) | 2023-07-27 |
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