JP6989427B2 - 磁気記録媒体および磁気記録再生装置 - Google Patents
磁気記録媒体および磁気記録再生装置 Download PDFInfo
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- JP6989427B2 JP6989427B2 JP2018055741A JP2018055741A JP6989427B2 JP 6989427 B2 JP6989427 B2 JP 6989427B2 JP 2018055741 A JP2018055741 A JP 2018055741A JP 2018055741 A JP2018055741 A JP 2018055741A JP 6989427 B2 JP6989427 B2 JP 6989427B2
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- 230000005291 magnetic effect Effects 0.000 title claims description 283
- 239000010410 layer Substances 0.000 claims description 195
- 239000006249 magnetic particle Substances 0.000 claims description 40
- 229910019222 CoCrPt Inorganic materials 0.000 claims description 21
- 239000000758 substrate Substances 0.000 claims description 21
- 229910052799 carbon Inorganic materials 0.000 claims description 16
- 239000011651 chromium Substances 0.000 claims description 16
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 14
- 239000011241 protective layer Substances 0.000 claims description 14
- JMANVNJQNLATNU-UHFFFAOYSA-N oxalonitrile Chemical compound N#CC#N JMANVNJQNLATNU-UHFFFAOYSA-N 0.000 claims description 13
- VNWKTOKETHGBQD-UHFFFAOYSA-N methane Chemical compound C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 claims description 12
- 150000004678 hydrides Chemical class 0.000 claims description 10
- 150000004767 nitrides Chemical class 0.000 claims description 10
- 239000010936 titanium Substances 0.000 claims description 7
- 229910052710 silicon Inorganic materials 0.000 claims description 6
- 229910052719 titanium Inorganic materials 0.000 claims description 6
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 5
- 229910052804 chromium Inorganic materials 0.000 claims description 5
- 239000010703 silicon Substances 0.000 claims description 5
- 229910052715 tantalum Inorganic materials 0.000 claims description 5
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 claims description 4
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 claims description 4
- 229910052782 aluminium Inorganic materials 0.000 claims description 4
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 4
- 229910052796 boron Inorganic materials 0.000 claims description 4
- 229910052721 tungsten Inorganic materials 0.000 claims description 4
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 claims description 3
- FYYHWMGAXLPEAU-UHFFFAOYSA-N Magnesium Chemical compound [Mg] FYYHWMGAXLPEAU-UHFFFAOYSA-N 0.000 claims description 3
- 229910017052 cobalt Inorganic materials 0.000 claims description 3
- 239000010941 cobalt Substances 0.000 claims description 3
- GUTLYIVDDKVIGB-UHFFFAOYSA-N cobalt atom Chemical compound [Co] GUTLYIVDDKVIGB-UHFFFAOYSA-N 0.000 claims description 3
- 229910052749 magnesium Inorganic materials 0.000 claims description 3
- 239000011777 magnesium Substances 0.000 claims description 3
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 claims description 3
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 claims description 3
- 239000010937 tungsten Substances 0.000 claims description 3
- 229910052727 yttrium Inorganic materials 0.000 claims description 3
- VWQVUPCCIRVNHF-UHFFFAOYSA-N yttrium atom Chemical compound [Y] VWQVUPCCIRVNHF-UHFFFAOYSA-N 0.000 claims description 3
- CREMABGTGYGIQB-UHFFFAOYSA-N carbon carbon Chemical compound C.C CREMABGTGYGIQB-UHFFFAOYSA-N 0.000 claims description 2
- 239000011203 carbon fibre reinforced carbon Substances 0.000 claims description 2
- 229910045601 alloy Inorganic materials 0.000 description 34
- 239000000956 alloy Substances 0.000 description 34
- 230000007797 corrosion Effects 0.000 description 16
- 238000005260 corrosion Methods 0.000 description 16
- 239000000463 material Substances 0.000 description 15
- 238000000034 method Methods 0.000 description 12
- 229910010413 TiO 2 Inorganic materials 0.000 description 10
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 9
- 229910004298 SiO 2 Inorganic materials 0.000 description 9
- 238000005121 nitriding Methods 0.000 description 8
- 239000000696 magnetic material Substances 0.000 description 7
- 229910052755 nonmetal Inorganic materials 0.000 description 7
- 238000004544 sputter deposition Methods 0.000 description 7
- 230000005540 biological transmission Effects 0.000 description 6
- 230000000052 comparative effect Effects 0.000 description 6
- 229910052697 platinum Inorganic materials 0.000 description 6
- 229910000531 Co alloy Inorganic materials 0.000 description 5
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 5
- 239000007789 gas Substances 0.000 description 5
- 229910052757 nitrogen Inorganic materials 0.000 description 5
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 4
- 229910052739 hydrogen Inorganic materials 0.000 description 4
- 239000001257 hydrogen Substances 0.000 description 4
- 230000001050 lubricating effect Effects 0.000 description 4
- 238000001004 secondary ion mass spectrometry Methods 0.000 description 4
- 239000007769 metal material Substances 0.000 description 3
- 229910052726 zirconium Inorganic materials 0.000 description 3
- 229910015372 FeAl Inorganic materials 0.000 description 2
- 229910002546 FeCo Inorganic materials 0.000 description 2
- 229910002555 FeNi Inorganic materials 0.000 description 2
- 229910000604 Ferrochrome Inorganic materials 0.000 description 2
- 229910052786 argon Inorganic materials 0.000 description 2
- 238000009792 diffusion process Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 238000005984 hydrogenation reaction Methods 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- 229910052759 nickel Inorganic materials 0.000 description 2
- 239000010702 perfluoropolyether Substances 0.000 description 2
- 230000008569 process Effects 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 1
- 229910000838 Al alloy Inorganic materials 0.000 description 1
- 229910003321 CoFe Inorganic materials 0.000 description 1
- 229910000684 Cobalt-chrome Inorganic materials 0.000 description 1
- 229910000599 Cr alloy Inorganic materials 0.000 description 1
- 229910005347 FeSi Inorganic materials 0.000 description 1
- 229910005435 FeTaN Inorganic materials 0.000 description 1
- 241000511976 Hoya Species 0.000 description 1
- 229910000929 Ru alloy Inorganic materials 0.000 description 1
- 229910001069 Ti alloy Inorganic materials 0.000 description 1
- 230000009471 action Effects 0.000 description 1
- 150000001298 alcohols Chemical class 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 150000001732 carboxylic acid derivatives Chemical class 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 239000010952 cobalt-chrome Substances 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 229910001873 dinitrogen Inorganic materials 0.000 description 1
- 238000007598 dipping method Methods 0.000 description 1
- 238000011156 evaluation Methods 0.000 description 1
- 230000005294 ferromagnetic effect Effects 0.000 description 1
- 230000004907 flux Effects 0.000 description 1
- 229910052732 germanium Inorganic materials 0.000 description 1
- 229910021385 hard carbon Inorganic materials 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 238000007689 inspection Methods 0.000 description 1
- 230000003993 interaction Effects 0.000 description 1
- 238000010884 ion-beam technique Methods 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- 239000000314 lubricant Substances 0.000 description 1
- 230000005389 magnetism Effects 0.000 description 1
- 230000005415 magnetization Effects 0.000 description 1
- 238000001755 magnetron sputter deposition Methods 0.000 description 1
- 229910052748 manganese Inorganic materials 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 150000001247 metal acetylides Chemical class 0.000 description 1
- 229910052750 molybdenum Inorganic materials 0.000 description 1
- 229910052758 niobium Inorganic materials 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
- 238000005546 reactive sputtering Methods 0.000 description 1
- 230000009257 reactivity Effects 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 229910052702 rhenium Inorganic materials 0.000 description 1
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 1
- 229910010271 silicon carbide Inorganic materials 0.000 description 1
- 230000007704 transition Effects 0.000 description 1
- 229910052720 vanadium Inorganic materials 0.000 description 1
Images
Classifications
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- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/62—Record carriers characterised by the selection of the material
- G11B5/64—Record carriers characterised by the selection of the material comprising only the magnetic material without bonding agent
- G11B5/66—Record carriers characterised by the selection of the material comprising only the magnetic material without bonding agent the record carriers consisting of several layers
- G11B5/672—Record carriers characterised by the selection of the material comprising only the magnetic material without bonding agent the record carriers consisting of several layers having different compositions in a plurality of magnetic layers, e.g. layer compositions having differing elemental components or differing proportions of elements
-
- C—CHEMISTRY; METALLURGY
- C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
- C22C—ALLOYS
- C22C19/00—Alloys based on nickel or cobalt
- C22C19/07—Alloys based on nickel or cobalt based on cobalt
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/14—Metallic material, boron or silicon
- C23C14/18—Metallic material, boron or silicon on other inorganic substrates
- C23C14/185—Metallic material, boron or silicon on other inorganic substrates by cathodic sputtering
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/62—Record carriers characterised by the selection of the material
- G11B5/64—Record carriers characterised by the selection of the material comprising only the magnetic material without bonding agent
- G11B5/65—Record carriers characterised by the selection of the material comprising only the magnetic material without bonding agent characterised by its composition
- G11B5/657—Record carriers characterised by the selection of the material comprising only the magnetic material without bonding agent characterised by its composition containing inorganic, non-oxide compound of Si, N, P, B, H or C, e.g. in metal alloy or compound
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/62—Record carriers characterised by the selection of the material
- G11B5/64—Record carriers characterised by the selection of the material comprising only the magnetic material without bonding agent
- G11B5/65—Record carriers characterised by the selection of the material comprising only the magnetic material without bonding agent characterised by its composition
- G11B5/658—Record carriers characterised by the selection of the material comprising only the magnetic material without bonding agent characterised by its composition containing oxygen, e.g. molecular oxygen or magnetic oxide
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/62—Record carriers characterised by the selection of the material
- G11B5/64—Record carriers characterised by the selection of the material comprising only the magnetic material without bonding agent
- G11B5/66—Record carriers characterised by the selection of the material comprising only the magnetic material without bonding agent the record carriers consisting of several layers
- G11B5/674—Record carriers characterised by the selection of the material comprising only the magnetic material without bonding agent the record carriers consisting of several layers having differing macroscopic or microscopic structures, e.g. differing crystalline lattices, varying atomic structures or differing roughnesses
Description
(2)前記CoCrPt系の磁性粒子は、前記炭素の窒化物または炭素の水素化物を1mol%〜8mol%の範囲内で含むことを特徴とする(1)に記載の磁気記録媒体。
(3)前記酸化物は、シリコン、クロム、チタン、タンタル、アルミニウム、イットリウム、硼素、マグネシウム、タングステンまたはコバルトの酸化物であることを特徴とする(1)または(2)に記載の磁気記録媒体。
(4)前記CoCrPt系の磁性粒子は、Bを含まないことを特徴とする(1)〜(3)の何れか1項に記載の磁気記録媒体。
(5)前記第2の磁性層は、酸化物を含まないことを特徴とする(1)〜(4)の何れか1項に記載の磁気記録媒体。
(6)(1)〜(5)のいずれか1項に記載の磁気記録媒体と、前記磁気記録媒体に情報を記録再生する磁気ヘッドを有することを特徴とする磁気記録再生装置。
以下の方法により、磁気記録媒体を作製した。
第2の磁性層を形成する際に、反応性水素プラズマに10秒間曝して厚さ10nmのグラニュラー構造を有する磁性層を水素化処理して、70(Co11Cr18Pt)−30(CH3.5)からなるグラニュラー構造を有する磁性層とした以外は、実施例1と同様にして、磁気記録媒体を作製した。このとき、水素プラズマは、水素ガスの含有量8体積%、アルゴンガスの含有量92体積%の混合ガスに、RF電力(500W)を印加して発生させた。ここで、Cの水素化量は、SIMS(二次イオン質量分析)を用いて定量した。また、Cの水素化物の構造を、TEM(透過電子顕微鏡)を用いて解析したところ、アモルファス構造であった。
第2の磁性層を形成する際に、70(Co10Cr20Pt14B)−30Cのターゲットを用い、70(Co10Cr20Pt14B)−30(CN2.5)からなるグラニュラー構造を有する磁性層とした以外は、実施例1と同様にして、磁気記録媒体を作製した。ここで、Cの窒化物の構造を、TEM(透過電子顕微鏡)を用いて解析したところ、アモルファス構造であった。
第2の磁性層を形成する際に、70(Co10Cr20Pt14B)−30Cのターゲットを用い、70(Co10Cr20Pt14B)−30(CH3.5)からなるグラニュラー構造を有する磁性層とした以外は、実施例2と同様にして、磁気記録媒体を作製した。ここで、Cの水素化物の構造を、TEM(透過電子顕微鏡)を用いて解析したところ、アモルファス構造であった。
第2の磁性層を形成する際に、70[95(Co11Cr14Pt)−5(CN2.1)]−30C{Crの含有量11at%、Ptの含有量14at%、残部Coの合金の含有量が95mol%、CN2.1の含有量5mol%の合金の含有量70mol%、Cの含有量30mol%}のターゲットを用い、70[95(Co11Cr14Pt)−5(CN2.1)]−30(CN2.5)からなるグラニュラー構造を有する磁性層とした以外は、実施例1と同様にして、磁気記録媒体を作製した。ここで、Cの窒化物の構造を、TEM(透過電子顕微鏡)を用いて解析したところ、アモルファス構造であった。
第2の磁性層を形成する際に、70[95(Co11Cr14Pt)−5(CH3.1)]−30Cのターゲットを用い、70[95(Co11Cr14Pt)−5(CH3.1)]−30(CH3.5)からなるグラニュラー構造を有する磁性層とした以外は、実施例2と同様にして、磁気記録媒体を作製した。ここで、Cの水素化物の構造を、TEM(透過電子顕微鏡)を用いて解析したところ、アモルファス構造であった。
第2の磁性層を形成する際に、Co10Cr20Pt14Bのターゲットを用い、窒化処理せず、非グラニュラー構造を有する磁性層とした以外は、実施例1と同様にして、磁気記録媒体を作製した。
第2の磁性層を形成する際に、92(Co11Cr18Pt)−5(SiO2)−3(TiO2)のターゲットを用い、窒化処理せず、グラニュラー構造を有する磁性層とした以外は、実施例1と同様にして、磁気記録媒体を作製した。
第2の磁性層を形成する際に、窒化処理せず、グラニュラー構造を有する磁性層とした以外は、実施例1と同様にして、磁気記録媒体を作製した。
リードライトアナライザRWA1632およびスピンスタンドS1701MP(以上、GUZIK社製)を用いて、磁気記録媒体のSNR[dB]を測定し、ノイズ特性を評価した。
90℃、90%RHの環境下に、磁気記録媒体を96時間放置した後、光学式表面検査機を用いて、磁気記録媒体の表面に発生したコロージョンスポット[個/面]をカウントし、耐腐食性を評価した。このとき、検出精度を直径5μm以上に設定した。
2 軟磁性下地層
3 配向制御層
4 垂直磁性層
5 保護層
6 潤滑層
4a 第1の磁性層
4b 第2の磁性層
7a、7b、7c、7d、7e 磁性層または非磁性層
10 磁気記録媒体
11 媒体駆動部
12 磁気ヘッド
13 ヘッド駆動部
14 記録再生信号処理系
41 磁性粒子または非磁性粒子
42 粒界部
Claims (6)
- 非磁性基板上に、軟磁性下地層と、配向制御層と、垂直磁性層と、保護層をこの順で有する磁気記録媒体であって、
前記垂直磁性層は、前記配向制御層の側から、第1の磁性層と、第2の磁性層をこの順で有し、
前記第1の磁性層は、磁性粒子の粒界部に酸化物を含む、グラニュラー構造を有する磁性層であり、
前記第2の磁性層は、CoCrPt系の磁性粒子と、炭素の窒化物または炭素の水素化物とを含む、前記保護層に最も近い磁性層であり、前記CoCrPt系の磁性粒子の粒界部に前記炭素の窒化物または炭素の水素化物を1mol%〜50mol%の範囲内で含む、グラニュラー構造を有する磁性層であることを特徴とする磁気記録媒体。 - 前記酸化物は、シリコン、クロム、チタン、タンタル、アルミニウム、イットリウム、硼素、マグネシウム、タングステンまたはコバルトの酸化物であることを特徴とする請求項1に記載の磁気記録媒体。
- 前記CoCrPt系の磁性粒子は、Bを含まないことを特徴とする請求項1または2に記載の磁気記録媒体。
- 前記第2の磁性層は、酸化物を含まないことを特徴とする請求項1〜3の何れか1項に記載の磁気記録媒体。
- 前記第2の磁性層は、前記CoCrPt系の磁性粒子の粒界部に前記炭素の窒化物または炭素の水素化物を含む、グラニュラー構造を有する磁性層であり、
前記CoCrPt系の磁性粒子は、前記炭素の窒化物または炭素の水素化物を1mol%〜8mol%の範囲内で含むことを特徴とする請求項1〜4の何れか1項に記載の磁気記録媒体。 - 請求項1〜5のいずれか1項に記載の磁気記録媒体と、
前記磁気記録媒体に情報を記録再生する磁気ヘッドを有することを特徴とする磁気記録再生装置。
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JP2018055741A JP6989427B2 (ja) | 2018-03-23 | 2018-03-23 | 磁気記録媒体および磁気記録再生装置 |
US16/279,143 US10984829B2 (en) | 2018-03-23 | 2019-02-19 | Magnetic recording medium having magnetic layer with hydride of carbon, and magnetic storage apparatus |
US16/953,894 US11295775B2 (en) | 2018-03-23 | 2020-11-20 | Magnetic recording medium having magnetic layer with nitride of carbon or hydride of carbon, and magnetic storage apparatus |
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