JP6949908B2 - レーザ作動光源 - Google Patents
レーザ作動光源 Download PDFInfo
- Publication number
- JP6949908B2 JP6949908B2 JP2019149107A JP2019149107A JP6949908B2 JP 6949908 B2 JP6949908 B2 JP 6949908B2 JP 2019149107 A JP2019149107 A JP 2019149107A JP 2019149107 A JP2019149107 A JP 2019149107A JP 6949908 B2 JP6949908 B2 JP 6949908B2
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- Prior art keywords
- optical fiber
- light
- light source
- mode scrambler
- homogeneity
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- 239000013307 optical fiber Substances 0.000 claims description 104
- 238000004804 winding Methods 0.000 claims description 30
- 238000000034 method Methods 0.000 claims description 20
- 238000011143 downstream manufacturing Methods 0.000 claims description 12
- 238000011144 upstream manufacturing Methods 0.000 claims description 8
- 230000003287 optical effect Effects 0.000 claims description 6
- 229910052724 xenon Inorganic materials 0.000 claims description 5
- FHNFHKCVQCLJFQ-UHFFFAOYSA-N xenon atom Chemical compound [Xe] FHNFHKCVQCLJFQ-UHFFFAOYSA-N 0.000 claims description 5
- 238000002156 mixing Methods 0.000 claims description 3
- 239000000835 fiber Substances 0.000 description 24
- 210000002381 plasma Anatomy 0.000 description 18
- 239000007789 gas Substances 0.000 description 14
- 230000008569 process Effects 0.000 description 12
- 230000005855 radiation Effects 0.000 description 8
- 238000007689 inspection Methods 0.000 description 6
- 238000012546 transfer Methods 0.000 description 6
- 230000008901 benefit Effects 0.000 description 4
- 238000005259 measurement Methods 0.000 description 4
- 239000004065 semiconductor Substances 0.000 description 4
- 230000000694 effects Effects 0.000 description 3
- 230000007246 mechanism Effects 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 230000006872 improvement Effects 0.000 description 2
- 229910052756 noble gas Inorganic materials 0.000 description 2
- 230000004044 response Effects 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 1
- 230000000295 complement effect Effects 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000000265 homogenisation Methods 0.000 description 1
- 210000003734 kidney Anatomy 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 150000002835 noble gases Chemical class 0.000 description 1
- 238000005457 optimization Methods 0.000 description 1
- 230000008092 positive effect Effects 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- 238000004611 spectroscopical analysis Methods 0.000 description 1
Images
Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/02—Details
- G01J3/10—Arrangements of light sources specially adapted for spectrometry or colorimetry
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/0001—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings specially adapted for lighting devices or systems
- G02B6/0005—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings specially adapted for lighting devices or systems the light guides being of the fibre type
- G02B6/0006—Coupling light into the fibre
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/09—Beam shaping, e.g. changing the cross-sectional area, not otherwise provided for
- G02B27/0938—Using specific optical elements
- G02B27/0944—Diffractive optical elements, e.g. gratings, holograms
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/09—Beam shaping, e.g. changing the cross-sectional area, not otherwise provided for
- G02B27/0938—Using specific optical elements
- G02B27/0994—Fibers, light pipes
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/14—Mode converters
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J65/00—Lamps without any electrode inside the vessel; Lamps with at least one main electrode outside the vessel
- H01J65/04—Lamps in which a gas filling is excited to luminesce by an external electromagnetic field or by external corpuscular radiation, e.g. for indicating plasma display panels
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/005—Optical devices external to the laser cavity, specially adapted for lasers, e.g. for homogenisation of the beam or for manipulating laser pulses, e.g. pulse shaping
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05G—X-RAY TECHNIQUE
- H05G2/00—Apparatus or processes specially adapted for producing X-rays, not involving X-ray tubes, e.g. involving generation of a plasma
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2893/00—Discharge tubes and lamps
- H01J2893/0063—Plasma light sources
Landscapes
- Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Electromagnetism (AREA)
- Optical Couplings Of Light Guides (AREA)
Description
Claims (15)
- プラズマを収容するように構成されたプラズマチャンバと、
前記プラズマにレーザエネルギを入力して光を発生させるように構成されたレーザと、
下流プロセスに前記光を伝送するように構成された光ファイバと、
前記光ファイバにおいてモードミキシングを可能にして、前記光ファイバを通過する前記光の均質性を向上させるように構成されたモードスクランブラと、
別の光ファイバと、
第3の光ファイバと、
を備え、
前記第3の光ファイバが、前記光ファイバ及び前記別の光ファイバの双方の直径より大きい直径を有し、前記光ファイバ及び前記別の光ファイバと光学的に連絡し、且つ前記光ファイバ及び前記別の光ファイバの上流に接続されるように構成される、光源。 - 別のモードスクランブラを更に備え、
前記モードスクランブラ及び前記別のモードスクランブラが、前記光ファイバ及び前記別の光ファイバに関連付けられる、請求項1に記載の光源。 - 前記第3の光ファイバが、前記光ファイバ及び前記別の光ファイバの双方の直径より大きい直径を有し、前記光ファイバ及び前記別の光ファイバと光学的に連絡し、且つ前記光ファイバ及び前記別の光ファイバの上流に接続されるように構成される、請求項2に記載の光源。
- 前記プラズマが、イオン性気体を含む、請求項1に記載の光源。
- 前記イオン性気体が、キセノンを含む、請求項4に記載の光源。
- 前記光を前記光ファイバに結合するように構成された光ファイバ結合器を更に含む、請求項1に記載の光源。
- 前記光の前記均質性を向上させることが、表面の均質性及び前記光の角度の均質性を適用することを含む、請求項1に記載の光源。
- 前記光が、約400nmから950nmの波長を有するように構成される、請求項1に記載の光源。
- 前記モードスクランブラが、捲回デバイスを備え、
前記光ファイバが、前記捲回デバイスの周りに複数回巻かれるように構成され、
前記複数回の巻きが、第1の半径及び第2の半径を有する、請求項1に記載の光源。 - 前記モードスクランブラが、複数の締め付け板を備える締め付けデバイスを備え、
前記光ファイバが、前記複数の締め付け板の間で締め付けられるように構成され、
前記複数の締め付け板が、蛇行進路を前記光ファイバに与えるように構成される、請求項1に記載の光源。 - プラズマにレーザエネルギを入力して光を発生させることと、
光ファイバ、別の光ファイバ、および第3の光ファイバによって下流プロセスに前記光を伝送することと、
モードスクランブラによって前記光ファイバおよび前記別の光ファイバ内で前記光に対してモードミキシングを行って、前記光ファイバおよび前記別の光ファイバを通過する前記光の均質性を向上させることと、を含む、
前記第3の光ファイバが、前記光ファイバ及び前記別の光ファイバの双方の直径より大きい直径を有し、前記光ファイバ及び前記別の光ファイバと光学的に連絡し、且つ前記光ファイバ及び前記別の光ファイバの上流に接続されるように構成される、方法。 - 前記光の前記均質性を向上させることが、表面の均質性及び前記光の角度の均質性を適用することを含む、請求項11に記載の方法。
- 前記光を前記光ファイバに結合する光ファイバ結合器を使用することを更に含む、請求項11に記載の方法。
- 前記モードスクランブラによって湾曲を前記光ファイバに与えることを更に含み、
前記モードスクランブラが捲回デバイスを備え、前記湾曲が複数回の巻きを備える、請求項11に記載の方法。 - 前記モードスクランブラによって湾曲を与えることを更に含み、
前記モードスクランブラが締め付けデバイスを備え、前記湾曲が蛇行進路を備える、請求項11に記載の方法。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE102013110390 | 2013-09-20 | ||
DE102013110390.1 | 2013-09-20 | ||
JP2014191034A JP6574086B2 (ja) | 2013-09-20 | 2014-09-19 | レーザ作動光源 |
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JP2014191034A Division JP6574086B2 (ja) | 2013-09-20 | 2014-09-19 | レーザ作動光源 |
Publications (2)
Publication Number | Publication Date |
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JP2019216105A JP2019216105A (ja) | 2019-12-19 |
JP6949908B2 true JP6949908B2 (ja) | 2021-10-13 |
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JP2014191034A Active JP6574086B2 (ja) | 2013-09-20 | 2014-09-19 | レーザ作動光源 |
JP2019149107A Active JP6949908B2 (ja) | 2013-09-20 | 2019-08-15 | レーザ作動光源 |
Family Applications Before (1)
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JP2014191034A Active JP6574086B2 (ja) | 2013-09-20 | 2014-09-19 | レーザ作動光源 |
Country Status (6)
Country | Link |
---|---|
US (2) | US10078167B2 (ja) |
EP (1) | EP2851934B1 (ja) |
JP (2) | JP6574086B2 (ja) |
KR (2) | KR20150032814A (ja) |
IL (1) | IL234729B (ja) |
TW (2) | TWI718428B (ja) |
Families Citing this family (7)
Publication number | Priority date | Publication date | Assignee | Title |
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IL234729B (en) * | 2013-09-20 | 2021-02-28 | Asml Netherlands Bv | A light source operated by a laser and a method using a mode mixer |
IL234728A0 (en) * | 2013-09-20 | 2014-11-30 | Asml Netherlands Bv | A light source powered by a Yadel laser |
US10244613B2 (en) | 2015-10-04 | 2019-03-26 | Kla-Tencor Corporation | System and method for electrodeless plasma ignition in laser-sustained plasma light source |
JP6496260B2 (ja) * | 2016-02-26 | 2019-04-03 | 日本電信電話株式会社 | モードスクランブラ及び光ファイバケーブル |
DE102019123448B4 (de) * | 2019-09-02 | 2024-01-25 | Schott Ag | Beleuchtungssystem mit einem Lichtleiter und einem Abstrahlelement |
US11587781B2 (en) | 2021-05-24 | 2023-02-21 | Hamamatsu Photonics K.K. | Laser-driven light source with electrodeless ignition |
CN113889830B (zh) * | 2021-12-03 | 2022-02-25 | 武汉锐科光纤激光技术股份有限公司 | 光束的生成方法、设备和装置、存储介质及电子装置 |
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US10078167B2 (en) | 2018-09-18 |
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