JP6937784B2 - 歪み管理のための希土類プニクタイド - Google Patents
歪み管理のための希土類プニクタイド Download PDFInfo
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- JP6937784B2 JP6937784B2 JP2018563172A JP2018563172A JP6937784B2 JP 6937784 B2 JP6937784 B2 JP 6937784B2 JP 2018563172 A JP2018563172 A JP 2018563172A JP 2018563172 A JP2018563172 A JP 2018563172A JP 6937784 B2 JP6937784 B2 JP 6937784B2
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- rare earth
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- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
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- H01L24/26—Layer connectors, e.g. plate connectors, solder or adhesive layers; Manufacturing methods related thereto
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Description
本願は、2016年6月2日に出願された米国仮出願第62/344,439号、および2016年9月9日に出願された米国仮出願第62/385,744号に対する優先権を主張するものであり、これらの各々は、全体的に参照により本明細書中に援用される。本願は、2017年6月2日に出願された同時係属中の米国出願第15/612,355号に関連しており、該出願は、全体的に参照により本明細書中に援用される。
本明細書は、例えば、以下の項目も提供する。
(項目1)
層構造であって、
第1の格子定数を伴う第1の半導体層と、
前記第1の半導体にわたってエピタキシャルに成長する希土類プニクタイド緩衝材であって、前記第1の半導体に隣接する前記希土類プニクタイド緩衝材の第1の領域は、1%を下回る第1の正味歪みを有する、緩衝材と、
前記希土類プニクタイド緩衝材にわたってエピタキシャルに成長する第2の半導体層であって、前記第2の半導体に隣接する前記希土類プニクタイド緩衝材の第2の領域は、所望される歪みである第2の正味歪みを有する、層と
を含み、前記希土類プニクタイド緩衝材は、
1つ以上の希土類元素と
1つ以上の第V族元素と
を含む、層構造。
(項目2)
前記所望される歪みは、1%を下回る、項目1に記載の層構造。
(項目3)
前記希土類プニクタイド緩衝材の第1の領域は、
第1の希土類プニクタイド合金を含み、かつ第1の厚さを有する、第1の副層と、
第2の希土類プニクタイド合金を含み、かつ第2の厚さを有する、第2の副層と
を含み、前記第2の厚さに対する前記第1の厚さの比は、1%を下回る前記第1の領域の第1の正味歪みをもたらす、項目1に記載の層構造。
(項目4)
前記希土類プニクタイド緩衝材の第2の領域は、
第3の希土類プニクタイド合金を含み、かつ第3の厚さを有する、第3の副層と、
前記第2の希土類プニクタイド合金を含み、かつ前記第2の厚さを有する、第4の副層と
を含み、前記第2の厚さに対する前記第3の厚さの比は、前記所望される歪みである前記第2の領域の第2の正味歪みをもたらす、
項目3に記載の層構造。
(項目5)
前記所望される歪みは、1%〜3%である、項目4に記載の層構造。
(項目6)
前記第1、第2、および第3の希土類プニクタイド合金は、一般的な希土類元素を含む、項目4に記載の層構造。
(項目7)
前記第1の希土類プニクタイド合金は、ErNを含み、
前記第2の希土類プニクタイド合金は、ErPを含み、
前記第3の希土類プニクタイド合金は、ErAsを含む、
項目6に記載の層構造。
(項目8)
前記第1の希土類プニクタイド合金は、GdNを含み、
前記第2の希土類プニクタイド合金は、GdAsを含み、
前記第3の希土類プニクタイド合金は、GdNを含む、
項目6に記載の層構造。
(項目9)
前記第1の希土類プニクタイド合金は、ErNを含み、
前記第2の希土類プニクタイド合金は、ErPを含み、
前記第3の希土類プニクタイド合金は、GdPを含む、
項目4に記載の層構造。
(項目10)
前記第1の半導体は、Siを含み、前記第2の半導体は、Si 1−x Ge x (0<x≦1)を含む、項目1に記載の層構造。
(項目11)
前記第1の半導体は、Siを含み、前記第2の半導体は、In x Ga 1−x As y P 1−y およびAl x Ga 1−x As(0≦x、y≦1)のうちの1つ以上を含む、項目1に記載の層構造。
(項目12)
前記希土類プニクタイド緩衝材の第1の領域は、第1の比率の元素を伴う第1の希土類プニクタイド合金を含み、
前記希土類プニクタイド緩衝材の第2の領域は、第2の比率の元素を伴う前記第1の希土類プニクタイド合金を含む、
項目1に記載の層構造。
(項目13)
前記希土類プニクタイド緩衝材の第2の領域は、第3の比率の元素を伴う第3の希土類プニクタイド合金を含み、前記第3の比率は、前記所望される歪みである前記第2の領域の第2の正味歪みをもたらす、項目3に記載の層構造。
(項目14)
前記第1の半導体層は、基部材料にわたってエピタキシャルに成長し、
上側半導体層は、前記第2の半導体層にわたってエピタキシャルに成長する、
項目1に記載の層構造。
(項目15)
前記第2および前記第3の厚さは、所望される波長の光のブラッグ反射をもたらすように選択される、項目4に記載の層構造を含む、鏡構造。
(Δa1×t1)=(Δa2×t2) 方程式1
式中、Δa1は、半導体1に対する材料1の格子誤整合を表し、t1は、層304の厚さを表し、Δa2は、半導体1に対する材料2の格子誤整合を表し、t2は、層306の厚さを表す。方程式1が該当する場合、層304および306は、層302上のこれらの層の効果が相互に相殺するように、歪み平衡の状態となる。故に、層302上には結果として生じる歪みは存在しない。このスタックは、格子構造内の僅かなずれを伴って反復されながら、機械的安定性を維持し、層構造300の格子定数を半導体1(302)の格子定数から構造300上に堆積されるべき代替材料の格子定数に遷移してもよい。
Claims (15)
- 層構造であって、
第1の格子定数を伴う第1の半導体層と、
前記第1の半導体にわたってエピタキシャルに成長する希土類プニクタイド緩衝材であって、前記第1の半導体に隣接する前記希土類プニクタイド緩衝材の第1の領域は、1%を下回る第1の正味歪みを有する、緩衝材と、
前記希土類プニクタイド緩衝材にわたってエピタキシャルに成長する第2の半導体層であって、前記第2の半導体に隣接する前記希土類プニクタイド緩衝材の第2の領域は、所望される歪みである第2の正味歪みを有する、層と
を含み、前記希土類プニクタイド緩衝材は、
1つ以上の希土類元素と、
1つ以上の第V族元素と
を含む、層構造。 - 前記所望される歪みは、1%を下回る、請求項1に記載の層構造。
- 前記希土類プニクタイド緩衝材の第1の領域は、
第1の希土類プニクタイド合金を含み、かつ第1の厚さを有する、第1の副層と、
第2の希土類プニクタイド合金を含み、かつ第2の厚さを有する、第2の副層と
を含み、前記第2の厚さに対する前記第1の厚さの比は、1%を下回る前記第1の領域の第1の正味歪みをもたらす、請求項1に記載の層構造。 - 前記希土類プニクタイド緩衝材の第2の領域は、
第3の希土類プニクタイド合金を含み、かつ第3の厚さを有する、第3の副層と、
前記第2の希土類プニクタイド合金を含み、かつ前記第2の厚さを有する、第4の副層と
を含み、前記第2の厚さに対する前記第3の厚さの比は、前記所望される歪みである前記第2の領域の第2の正味歪みをもたらす、
請求項3に記載の層構造。 - 前記所望される歪みは、1%〜3%である、請求項4に記載の層構造。
- 前記第1、第2、および第3の希土類プニクタイド合金は、一般的な希土類元素を含む、請求項4に記載の層構造。
- 前記第1の希土類プニクタイド合金は、ErNを含み、
前記第2の希土類プニクタイド合金は、ErPを含み、
前記第3の希土類プニクタイド合金は、ErAsを含む、
請求項6に記載の層構造。 - 前記第1の希土類プニクタイド合金は、GdNを含み、
前記第2の希土類プニクタイド合金は、GdAsを含み、
前記第3の希土類プニクタイド合金は、GdNを含む、
請求項6に記載の層構造。 - 前記第1の希土類プニクタイド合金は、ErNを含み、
前記第2の希土類プニクタイド合金は、ErPを含み、
前記第3の希土類プニクタイド合金は、GdPを含む、
請求項4に記載の層構造。 - 前記第1の半導体は、Siを含み、前記第2の半導体は、Si1−xGex(0<x≦1)を含む、請求項1に記載の層構造。
- 前記第1の半導体は、Siを含み、前記第2の半導体は、InxGa1−xAsyP1−yおよびAlxGa1−xAs(0≦x、y≦1)のうちの1つ以上を含む、請求項1に記載の層構造。
- 前記希土類プニクタイド緩衝材の第1の領域は、第1の比率の元素を伴う第1の希土類プニクタイド合金を含み、
前記希土類プニクタイド緩衝材の第2の領域は、第2の比率の元素を伴う前記第1の希土類プニクタイド合金を含む、
請求項1に記載の層構造。 - 前記希土類プニクタイド緩衝材の第2の領域は、第3の比率の元素を伴う第3の希土類プニクタイド合金を含み、前記第3の比率は、前記所望される歪みである前記第2の領域の第2の正味歪みをもたらす、請求項3に記載の層構造。
- 前記第1の半導体層は、基部材料にわたってエピタキシャルに成長し、
上側半導体層は、前記第2の半導体層にわたってエピタキシャルに成長する、
請求項1に記載の層構造。 - 前記第2および前記第3の厚さは、約1000nm〜約1800nmの波長を有する光のブラッグ反射をもたらすように選択される、請求項4に記載の層構造を含む、分散ブラッグ反射器。
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