JP6909057B2 - 炭化ケイ素半導体装置およびその製造方法 - Google Patents
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- 239000004065 semiconductor Substances 0.000 title claims description 226
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 title claims description 102
- 229910010271 silicon carbide Inorganic materials 0.000 title claims description 102
- 238000004519 manufacturing process Methods 0.000 title claims description 21
- 238000000926 separation method Methods 0.000 claims description 120
- 239000004020 conductor Substances 0.000 claims description 101
- 239000000758 substrate Substances 0.000 claims description 90
- 238000000034 method Methods 0.000 claims description 25
- 230000005669 field effect Effects 0.000 claims description 3
- 238000002955 isolation Methods 0.000 claims description 2
- 239000010410 layer Substances 0.000 description 267
- 238000009792 diffusion process Methods 0.000 description 29
- 230000005684 electric field Effects 0.000 description 27
- 239000012535 impurity Substances 0.000 description 27
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 12
- 229910052814 silicon oxide Inorganic materials 0.000 description 12
- 229910052751 metal Inorganic materials 0.000 description 11
- 239000002184 metal Substances 0.000 description 11
- 230000000052 comparative effect Effects 0.000 description 10
- 230000005855 radiation Effects 0.000 description 10
- 229910052782 aluminium Inorganic materials 0.000 description 8
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 8
- 238000012986 modification Methods 0.000 description 8
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- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 6
- 229910052581 Si3N4 Inorganic materials 0.000 description 6
- 238000009825 accumulation Methods 0.000 description 6
- 239000010931 gold Substances 0.000 description 6
- 238000000206 photolithography Methods 0.000 description 6
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 6
- 230000000694 effects Effects 0.000 description 5
- 239000011229 interlayer Substances 0.000 description 5
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- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 3
- 229910052737 gold Inorganic materials 0.000 description 3
- 229910052757 nitrogen Inorganic materials 0.000 description 3
- 230000003071 parasitic effect Effects 0.000 description 3
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- 238000013459 approach Methods 0.000 description 2
- 238000011161 development Methods 0.000 description 2
- 238000009413 insulation Methods 0.000 description 2
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 2
- 229920005591 polysilicon Polymers 0.000 description 2
- 238000012545 processing Methods 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- 238000004544 sputter deposition Methods 0.000 description 2
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 2
- 229910052721 tungsten Inorganic materials 0.000 description 2
- 239000010937 tungsten Substances 0.000 description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 230000001186 cumulative effect Effects 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 230000008595 infiltration Effects 0.000 description 1
- 238000001764 infiltration Methods 0.000 description 1
- 239000011810 insulating material Substances 0.000 description 1
- 230000005865 ionizing radiation Effects 0.000 description 1
- 230000001678 irradiating effect Effects 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 229910044991 metal oxide Inorganic materials 0.000 description 1
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- 238000007254 oxidation reaction Methods 0.000 description 1
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Description
<炭化ケイ素半導体装置の構造>
図1に、本発明の実施の形態1である炭化ケイ素半導体装置の断面図を示す。
以下に、図19および図20を比較例として示し、本実施の形態の効果について説明する。図19は、比較例である炭化ケイ素半導体装置を示す断面図である。図20は、比較例の炭化ケイ素半導体装置にγ線を照射した場合のゲート電圧と、ゲートおよび酸化膜の容量比との関係の変化を示すグラフである。
図4に本実施の形態2である炭化ケイ素半導体装置の断面図を示す。また、図5に本実施の形態2である炭化ケイ素半導体装置の平面レイアウトを示す。
図7に本実施の形態3である炭化ケイ素半導体装置の平面レイアウトを示し、図8に本実施の形態3である炭化ケイ素半導体装置の断面図を示す。図8は、図7のA−A線における断面図である。
以下に、図16を用いて、本実施の形態の変形例である炭化ケイ素半導体装置について説明する。図16は、本実施の形態の変形例である炭化ケイ素半導体装置を示す断面図である。
図17に本実施の形態4である炭化ケイ素半導体装置の断面図を示す。本実施の形態の炭化ケイ素半導体装置は、素子分離層上に導電体部を形成するのではなく、半導体基板の主面に形成された拡散抵抗器を構成する低抵抗な部分の直上に、当該部分に電気的に接続された導電体部を形成するものである。
2 半導体基板
3 素子分離層
4 絶縁層
5 導電体部
Claims (10)
- 第1領域および第2領域を備え、炭化ケイ素を含む半導体基板と、
前記半導体基板の前記第1領域の主面に電流経路を有する半導体素子と、
前記第1領域を平面視で囲む前記第2領域に形成された半導体領域からなる素子分離層と、
前記素子分離層の直上に絶縁層を介して形成され、前記素子分離層と電気的に接続された導電体部と、
を有し、
前記導電体部の直上には、前記導電体部および前記素子分離層のそれぞれと絶縁された第1配線が形成され、
前記半導体基板の前記主面に沿う方向において、前記導電体部の端部は、前記第1配線の端部よりも外側に張り出している、炭化ケイ素半導体装置。 - 請求項1記載の炭化ケイ素半導体装置において、
前記半導体基板の前記主面に対して垂直な方向において、前記第1配線と前記素子分離層との間には、前記導電体部が配置されている、炭化ケイ素半導体装置。 - 請求項1記載の炭化ケイ素半導体装置において、
前記半導体基板の前記主面に沿う方向において、前記導電体部の端部は、前記第1配線の端部よりも外側に0.2μm以上張り出している、炭化ケイ素半導体装置。 - 請求項1記載の炭化ケイ素半導体装置において、
前記半導体素子は、前記半導体基板の前記第1領域の前記主面に形成されたソース領域およびドレイン領域と、前記ソース領域と前記ドレイン領域との相互間の前記半導体基板の前記主面上に絶縁膜を介して形成されたゲート電極とを備えた電界効果トランジスタである、炭化ケイ素半導体装置。 - 請求項1記載の炭化ケイ素半導体装置において、
前記導電体部上に形成された第2配線と、
前記第2配線と前記素子分離層とを電気的に接続する第1導電性接続部と、
前記第2配線と前記導電体部とを電気的に接続する第2導電性接続部と、
を有し、
前記素子分離層と前記導電体部とは、前記第1導電性接続部、前記第2配線および前記第2導電性接続部を介して電気的に接続されている、炭化ケイ素半導体装置。 - (a)炭化ケイ素を含む半導体基板を準備する工程、
(b)前記半導体基板の第1領域の主面に第1半導体領域を形成する工程、
(c)前記半導体基板の第1領域を平面視で囲む第2領域の前記半導体基板の前記主面に、第2半導体領域からなる素子分離層を形成する工程、
(d)前記(b)工程および前記(c)工程の後、前記素子分離層に電気的に接続された導電体部を、前記素子分離層の直上に第1絶縁層を介して形成する工程、
を有し、
前記(d)工程では、前記導電体部と、前記導電体部の直上に第2絶縁層を介して第1配線とを形成し、
前記第1配線は、前記導電体部および前記素子分離層のそれぞれと絶縁され、
前記第1半導体領域は、前記半導体基板の前記第1領域の前記主面に電流経路を有する半導体素子を構成する、炭化ケイ素半導体装置の製造方法。 - 請求項6記載の炭化ケイ素半導体装置の製造方法において、
前記(d)工程は、
(d1)前記導電体部を、前記素子分離層の直上に前記第1絶縁層を介して形成する工程、
(d2)前記導電体部を覆う第2絶縁層を前記半導体基板上および前記第1絶縁層上に形成する工程、
(d3)前記第2絶縁層を貫通し、前記素子分離層の上面に接続された第1導電性接続部と、前記第2絶縁層を貫通し、前記導電体部の上面に接続された第2導電性接続部と、前記第1導電性接続部および前記第2導電性接続部に接続され、前記第2絶縁層上に位置する第2配線とを形成する工程、
を有し、
前記素子分離層と前記導電体部とは、前記第1導電性接続部、前記第2配線および前記第2導電性接続部を介して電気的に接続されている、炭化ケイ素半導体装置の製造方法。 - 請求項6記載の炭化ケイ素半導体装置の製造方法において、
前記半導体基板の前記主面に対して垂直な方向において、前記第1配線と前記素子分離層との間には、前記導電体部が配置されている、炭化ケイ素半導体装置の製造方法。 - 請求項6記載の炭化ケイ素半導体装置の製造方法において、
前記半導体基板の前記主面に沿う方向において、前記導電体部の端部は、前記第1配線の端部よりも外側に0.2μm以上張り出している、炭化ケイ素半導体装置の製造方法。 - 請求項6記載の炭化ケイ素半導体装置の製造方法において、
前記(b)工程では、第1導電型の前記第1半導体領域と、前記半導体基板の第1領域の主面において前記第1半導体領域と離間する前記第1導電型の第3半導体領域を形成し、
前記(d)工程は、
(d1)前記素子分離層の直上に第1絶縁層を介して前記導電体部を形成し、前記第1領域の前記半導体基板上にゲート絶縁膜を介してゲート電極を形成する工程、
(d2)前記導電体部を覆う第2絶縁層を前記半導体基板上および前記第1絶縁層上に形成する工程、
(d3)前記第2絶縁層を貫通し、前記素子分離層の上面に接続された第1導電性接続部と、前記第2絶縁層を貫通し、前記導電体部の上面に接続された第2導電性接続部と、前記第1導電性接続部および前記第2導電性接続部に接続され、前記第2絶縁層上に位置する第2配線とを形成する工程、
を有し、
前記第1半導体領域からなるソース領域と、前記第3半導体領域からなるドレイン領域と、前記ゲート電極とは、前記半導体素子である電界効果トランジスタを構成する、炭化ケイ素半導体装置の製造方法。
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