JP6898427B2 - 管状サファイア部材、熱交換器、半導体製造装置および管状サファイア部材の製造方法 - Google Patents
管状サファイア部材、熱交換器、半導体製造装置および管状サファイア部材の製造方法 Download PDFInfo
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- JP6898427B2 JP6898427B2 JP2019509402A JP2019509402A JP6898427B2 JP 6898427 B2 JP6898427 B2 JP 6898427B2 JP 2019509402 A JP2019509402 A JP 2019509402A JP 2019509402 A JP2019509402 A JP 2019509402A JP 6898427 B2 JP6898427 B2 JP 6898427B2
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- sapphire
- axial direction
- tubular
- axis
- wall
- Prior art date
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- 229910052594 sapphire Inorganic materials 0.000 title claims description 126
- 239000010980 sapphire Substances 0.000 title claims description 126
- 238000004519 manufacturing process Methods 0.000 title claims description 22
- 239000004065 semiconductor Substances 0.000 title claims description 5
- 239000013078 crystal Substances 0.000 claims description 73
- 238000005192 partition Methods 0.000 claims description 54
- 238000000034 method Methods 0.000 claims description 8
- 238000010438 heat treatment Methods 0.000 description 6
- 230000002093 peripheral effect Effects 0.000 description 6
- 239000012530 fluid Substances 0.000 description 3
- 239000007789 gas Substances 0.000 description 3
- 239000007788 liquid Substances 0.000 description 3
- 238000012545 processing Methods 0.000 description 3
- 238000012360 testing method Methods 0.000 description 3
- 238000009826 distribution Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 239000000155 melt Substances 0.000 description 2
- 238000002844 melting Methods 0.000 description 2
- 230000008018 melting Effects 0.000 description 2
- 238000013001 point bending Methods 0.000 description 2
- 239000002994 raw material Substances 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 238000000137 annealing Methods 0.000 description 1
- 230000004323 axial length Effects 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 238000005336 cracking Methods 0.000 description 1
- 230000006378 damage Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 229910003460 diamond Inorganic materials 0.000 description 1
- 239000010432 diamond Substances 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 230000005484 gravity Effects 0.000 description 1
- 238000003384 imaging method Methods 0.000 description 1
- 230000006698 induction Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 239000012495 reaction gas Substances 0.000 description 1
- 238000009751 slip forming Methods 0.000 description 1
- 230000003746 surface roughness Effects 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
Images
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F28—HEAT EXCHANGE IN GENERAL
- F28F—DETAILS OF HEAT-EXCHANGE AND HEAT-TRANSFER APPARATUS, OF GENERAL APPLICATION
- F28F21/00—Constructions of heat-exchange apparatus characterised by the selection of particular materials
- F28F21/006—Constructions of heat-exchange apparatus characterised by the selection of particular materials of glass
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
- C30B15/34—Edge-defined film-fed crystal-growth using dies or slits
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
- C30B29/10—Inorganic compounds or compositions
- C30B29/16—Oxides
- C30B29/20—Aluminium oxides
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
- C30B29/60—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape characterised by shape
- C30B29/66—Crystals of complex geometrical shape, e.g. tubes, cylinders
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F28—HEAT EXCHANGE IN GENERAL
- F28D—HEAT-EXCHANGE APPARATUS, NOT PROVIDED FOR IN ANOTHER SUBCLASS, IN WHICH THE HEAT-EXCHANGE MEDIA DO NOT COME INTO DIRECT CONTACT
- F28D7/00—Heat-exchange apparatus having stationary tubular conduit assemblies for both heat-exchange media, the media being in contact with different sides of a conduit wall
- F28D7/10—Heat-exchange apparatus having stationary tubular conduit assemblies for both heat-exchange media, the media being in contact with different sides of a conduit wall the conduits being arranged one within the other, e.g. concentrically
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F28—HEAT EXCHANGE IN GENERAL
- F28F—DETAILS OF HEAT-EXCHANGE AND HEAT-TRANSFER APPARATUS, OF GENERAL APPLICATION
- F28F21/00—Constructions of heat-exchange apparatus characterised by the selection of particular materials
- F28F21/04—Constructions of heat-exchange apparatus characterised by the selection of particular materials of ceramic; of concrete; of natural stone
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F28—HEAT EXCHANGE IN GENERAL
- F28F—DETAILS OF HEAT-EXCHANGE AND HEAT-TRANSFER APPARATUS, OF GENERAL APPLICATION
- F28F21/00—Constructions of heat-exchange apparatus characterised by the selection of particular materials
- F28F21/08—Constructions of heat-exchange apparatus characterised by the selection of particular materials of metal
- F28F21/081—Heat exchange elements made from metals or metal alloys
- F28F21/084—Heat exchange elements made from metals or metal alloys from aluminium or aluminium alloys
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F28—HEAT EXCHANGE IN GENERAL
- F28F—DETAILS OF HEAT-EXCHANGE AND HEAT-TRANSFER APPARATUS, OF GENERAL APPLICATION
- F28F1/00—Tubular elements; Assemblies of tubular elements
- F28F1/10—Tubular elements and assemblies thereof with means for increasing heat-transfer area, e.g. with fins, with projections, with recesses
- F28F1/40—Tubular elements and assemblies thereof with means for increasing heat-transfer area, e.g. with fins, with projections, with recesses the means being only inside the tubular element
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F28—HEAT EXCHANGE IN GENERAL
- F28F—DETAILS OF HEAT-EXCHANGE AND HEAT-TRANSFER APPARATUS, OF GENERAL APPLICATION
- F28F13/00—Arrangements for modifying heat-transfer, e.g. increasing, decreasing
- F28F2013/001—Particular heat conductive materials, e.g. superconductive elements
Description
1a :外壁
1b :隔壁
2a :貫通孔(第1貫通孔)
2b :囲繞貫通孔(第2貫通孔)
3 :金型
3a :環状金型
3b :内部金型
6 :スリット
7 :開口部
8 :結晶育成面
9 :凹部
10 :結晶育成領域
D :延在方向
Claims (8)
- サファイアからなる管状体であり、
軸方向に伸びた外壁と、
前記軸方向に伸びた複数の貫通孔と、
複数の前記貫通孔を区分する、前記軸方向に伸びた1以上の隔壁とを備え、
前記軸方向はサファイアのc軸と平行であり、
前記隔壁の少なくとも1つは、前記軸方向に見た正面視において、中心軸から前記外壁に向かって延在して前記外壁と接続しており、前記隔壁の延在方向はサファイアのa軸およびm軸のいずれかと平行である、管状サファイア部材。 - 前記貫通孔の1つが前記中心軸と重なる位置に配置されており、
前記軸方向に見た正面視において、前記中心軸と重なる位置に配置された前記貫通孔を囲む囲繞外壁を備える、請求項1に記載の管状サファイア部材。 - 前記軸方向に見た正面視において、前記貫通孔が非円形である、請求項1または請求項2に記載の管状サファイア部材。
- 前記軸方向に見た正面視において、複数の前記貫通孔が前記外壁の外周に沿って環状に配置されている、請求項1乃至請求項3に記載の管状サファイア部材。
- 前記軸方向に見た正面視において、いずれも同一形状を有する、環状に配置された複数の前記貫通孔を備える、請求項4に記載の管状サファイア部材。
- 請求項1乃至請求項5のいずれかに記載の管状サファイア部材を流路部材として備える熱交換器。
- 請求項6に記載の熱交換器を備える半導体製造装置。
- サファイアからなる管状体であり、
軸方向に伸びた外壁と、
前記軸方向に伸びた複数の貫通孔と、
複数の前記貫通孔を区分する、前記軸方向に伸びた1以上の隔壁とを備え、
前記軸方向はサファイアのc軸と平行であり、
前記隔壁の少なくとも1つは、前記軸方向に見た正面視において、中心軸から前記外壁に向かって延在して前記外壁と接続しており、前記延在方向はサファイアのa軸およびm軸のいずれかと平行である管状サファイア部材の製造方法であって、
前記管状サファイア部材における前記外壁および前記隔壁に対応する部分に結晶育成領域を有する金型を準備する工程と、
サファイアからなる種結晶を準備する工程と、
引き上げ方向が前記種結晶のc軸と平行であり、前記隔壁の前記延在方向が、前記種結晶のa軸およびm軸のいずれかとなるように前記種結晶の結晶方位と前記金型の位置合わせをする工程と、
前記位置合わせをする工程で位置合わせされた状態で、前記金型の前記結晶育成領域に存在するサファイア融液に前記種結晶を接触させる工程と、
前記種結晶を引き上げて結晶を育成する工程とを有する、管状サファイア部材の製造方法。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2017066689 | 2017-03-30 | ||
JP2017066689 | 2017-03-30 | ||
PCT/JP2018/013831 WO2018181981A1 (ja) | 2017-03-30 | 2018-03-30 | 管状サファイア部材、熱交換器、半導体製造装置および管状サファイア部材の製造方法 |
Publications (2)
Publication Number | Publication Date |
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JPWO2018181981A1 JPWO2018181981A1 (ja) | 2020-04-23 |
JP6898427B2 true JP6898427B2 (ja) | 2021-07-07 |
Family
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Application Number | Title | Priority Date | Filing Date |
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JP2019509402A Active JP6898427B2 (ja) | 2017-03-30 | 2018-03-30 | 管状サファイア部材、熱交換器、半導体製造装置および管状サファイア部材の製造方法 |
Country Status (5)
Country | Link |
---|---|
US (1) | US20200048790A1 (ja) |
EP (1) | EP3604630B1 (ja) |
JP (1) | JP6898427B2 (ja) |
CN (1) | CN110475915B (ja) |
WO (1) | WO2018181981A1 (ja) |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
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US11545272B2 (en) | 2019-01-31 | 2023-01-03 | Seaborg Aps | Structural material for molten salt reactors |
JP2020149051A (ja) * | 2019-03-11 | 2020-09-17 | 京セラ株式会社 | 光コネクタ用スリーブおよび光コネクタ |
JP2020149052A (ja) * | 2019-03-11 | 2020-09-17 | 京セラ株式会社 | 光コネクタ用スリーブおよび光コネクタ |
WO2021107049A1 (ja) * | 2019-11-27 | 2021-06-03 | 京セラ株式会社 | 電離用電極およびサファイア部材 |
Family Cites Families (17)
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US3868228A (en) * | 1971-06-01 | 1975-02-25 | Tyco Laboratories Inc | Method of growing crystalline bodies from the melt |
US4440728A (en) * | 1981-08-03 | 1984-04-03 | Mobil Solar Energy Corporation | Apparatus for growing tubular crystalline bodies |
SE453010B (sv) * | 1986-07-24 | 1988-01-04 | Eric Granryd | Vermevexlarvegg anordnad med en tunn, halforsedd metallfolie for att forbettra vermeovergangen vid kokning respektive kondensation |
US5549746A (en) * | 1993-09-24 | 1996-08-27 | General Electric Company | Solid state thermal conversion of polycrystalline alumina to sapphire using a seed crystal |
US5575067A (en) * | 1995-02-02 | 1996-11-19 | Hexcel Corporation | Method of making a continuous ceramic fiber reinforced heat exchanger tube |
JP2001255081A (ja) * | 2000-03-10 | 2001-09-21 | Sekisui Chem Co Ltd | 地中熱交換器 |
US6562132B2 (en) | 2001-04-04 | 2003-05-13 | Ase Americas, Inc. | EFG crystal growth apparatus and method |
JP2003327495A (ja) * | 2002-05-14 | 2003-11-19 | Namiki Precision Jewel Co Ltd | 晶癖面サファイヤ板材及びその製造方法 |
CN101858705B (zh) * | 2010-06-13 | 2011-11-16 | 三花丹佛斯(杭州)微通道换热器有限公司 | 热交换器及其隔板 |
US9562703B2 (en) * | 2012-08-03 | 2017-02-07 | Tom Richards, Inc. | In-line ultrapure heat exchanger |
CN102767922B (zh) * | 2012-08-10 | 2015-06-03 | 天津三电汽车空调有限公司 | 用于微通道换热器的分配管及微通道换热器 |
CN203132410U (zh) * | 2013-03-19 | 2013-08-14 | 杭州三花微通道换热器有限公司 | 集流管和具有该集流管的换热器 |
CN203744811U (zh) * | 2014-02-26 | 2014-07-30 | 美的集团股份有限公司 | 集流管及具有该集流管的平行流换热器 |
JP6400438B2 (ja) * | 2014-11-07 | 2018-10-03 | 株式会社フルヤ金属 | 単結晶製造方法及び単結晶製造装置 |
CN105066084B (zh) * | 2015-07-23 | 2017-04-19 | 泰晋环保工程技术(上海)有限公司 | 换热装置 |
CN105889768A (zh) * | 2016-04-10 | 2016-08-24 | 何忠亮 | 一种散热组件 |
US20170328651A1 (en) * | 2016-05-10 | 2017-11-16 | Tom Richards, Inc. | Point of dispense heat exchanger for fluids |
-
2018
- 2018-03-30 WO PCT/JP2018/013831 patent/WO2018181981A1/ja unknown
- 2018-03-30 CN CN201880022552.9A patent/CN110475915B/zh active Active
- 2018-03-30 JP JP2019509402A patent/JP6898427B2/ja active Active
- 2018-03-30 EP EP18777279.3A patent/EP3604630B1/en active Active
- 2018-03-30 US US16/498,987 patent/US20200048790A1/en not_active Abandoned
Also Published As
Publication number | Publication date |
---|---|
EP3604630A4 (en) | 2021-01-13 |
US20200048790A1 (en) | 2020-02-13 |
CN110475915A (zh) | 2019-11-19 |
EP3604630A1 (en) | 2020-02-05 |
CN110475915B (zh) | 2021-11-02 |
EP3604630B1 (en) | 2024-02-21 |
WO2018181981A1 (ja) | 2018-10-04 |
JPWO2018181981A1 (ja) | 2020-04-23 |
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