JP6875923B2 - スケール装置および二軸変位検出装置 - Google Patents

スケール装置および二軸変位検出装置 Download PDF

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JP6875923B2
JP6875923B2 JP2017088413A JP2017088413A JP6875923B2 JP 6875923 B2 JP6875923 B2 JP 6875923B2 JP 2017088413 A JP2017088413 A JP 2017088413A JP 2017088413 A JP2017088413 A JP 2017088413A JP 6875923 B2 JP6875923 B2 JP 6875923B2
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JP2018185272A5 (enExample
JP2018185272A (ja
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真之 新谷
真之 新谷
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DMG Mori Co Ltd
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DMG Mori Co Ltd
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Priority to JP2017088413A priority Critical patent/JP6875923B2/ja
Priority to DE102018108882.5A priority patent/DE102018108882A1/de
Priority to US15/957,660 priority patent/US10634521B2/en
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Publication of JP2018185272A5 publication Critical patent/JP2018185272A5/ja
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/347—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells using displacement encoding scales
    • G01D5/34776—Absolute encoders with analogue or digital scales
    • G01D5/34792—Absolute encoders with analogue or digital scales with only digital scales or both digital and incremental scales
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/266—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light by interferometric means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/347—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells using displacement encoding scales
    • G01D5/34707—Scales; Discs, e.g. fixation, fabrication, compensation
    • G01D5/34715—Scale reading or illumination devices
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/347—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells using displacement encoding scales
    • G01D5/34776—Absolute encoders with analogue or digital scales
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D2205/00—Indexing scheme relating to details of means for transferring or converting the output of a sensing member
    • G01D2205/90—Two-dimensional encoders, i.e. having one or two codes extending in two directions
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
    • G01D5/244—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing characteristics of pulses or pulse trains; generating pulses or pulse trains
    • G01D5/245—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing characteristics of pulses or pulse trains; generating pulses or pulse trains using a variable number of pulses in a train
    • G01D5/2454—Encoders incorporating incremental and absolute signals
    • G01D5/2455—Encoders incorporating incremental and absolute signals with incremental and absolute tracks on the same encoder
    • G01D5/2457—Incremental encoders having reference marks

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optical Transform (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Transmission And Conversion Of Sensor Element Output (AREA)
JP2017088413A 2017-04-27 2017-04-27 スケール装置および二軸変位検出装置 Active JP6875923B2 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2017088413A JP6875923B2 (ja) 2017-04-27 2017-04-27 スケール装置および二軸変位検出装置
DE102018108882.5A DE102018108882A1 (de) 2017-04-27 2018-04-13 Skalenvorrichtung und zweiachsige Verlagerungsdetektionsvorrichtung
US15/957,660 US10634521B2 (en) 2017-04-27 2018-04-19 Scale device and two-axis displacement detection device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2017088413A JP6875923B2 (ja) 2017-04-27 2017-04-27 スケール装置および二軸変位検出装置

Publications (3)

Publication Number Publication Date
JP2018185272A JP2018185272A (ja) 2018-11-22
JP2018185272A5 JP2018185272A5 (enExample) 2020-01-30
JP6875923B2 true JP6875923B2 (ja) 2021-05-26

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JP2017088413A Active JP6875923B2 (ja) 2017-04-27 2017-04-27 スケール装置および二軸変位検出装置

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US (1) US10634521B2 (enExample)
JP (1) JP6875923B2 (enExample)
DE (1) DE102018108882A1 (enExample)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102016214456A1 (de) * 2016-08-04 2018-02-08 Dr. Johannes Heidenhain Gesellschaft Mit Beschränkter Haftung Positionsmesseinrichtung und Verfahren zum Betreiben einer Positionsmesseinrichtung
DE102020118659A1 (de) * 2019-07-17 2021-01-21 Dmg Mori Co., Ltd. Detektionsvorrichtung
ES2899760T3 (es) 2019-09-04 2022-03-14 Heidenhain Gmbh Dr Johannes Dispositivo de medición de posición

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5023618B1 (enExample) 1970-05-20 1975-08-08
JPS5246093B2 (enExample) 1973-07-02 1977-11-21
DE3542514A1 (de) * 1985-12-02 1987-06-04 Zeiss Carl Fa Wegmesseinrichtung
US6649925B2 (en) * 1999-11-26 2003-11-18 Amos Talmi Methods of calibrating a position measurement device
JP4404184B2 (ja) * 2002-11-18 2010-01-27 ソニーマニュファクチュアリングシステムズ株式会社 変位検出装置
DE102008010284A1 (de) * 2008-02-21 2009-08-27 Dr. Johannes Heidenhain Gmbh XY-Tisch mit einer Messanordnung zur Positionsbestimmung
JP5126287B2 (ja) * 2010-05-31 2013-01-23 株式会社安川電機 リニアエンコーダ、リニアモータ、リニアモータシステム
JP6245941B2 (ja) * 2012-12-10 2017-12-13 Dmg森精機株式会社 変位検出装置
EP3040688B1 (de) * 2014-12-04 2018-04-18 Hexagon Technology Center GmbH Kapazitiver Linearencoder
EP3064902B1 (de) * 2015-03-06 2017-11-01 Hexagon Technology Center GmbH System zur bestimmung von positionen
JP6361760B2 (ja) 2017-02-27 2018-07-25 ブラザー工業株式会社 画像記録装置

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Publication number Publication date
JP2018185272A (ja) 2018-11-22
US10634521B2 (en) 2020-04-28
DE102018108882A1 (de) 2018-10-31
US20180313671A1 (en) 2018-11-01

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