JP2018185272A5 - - Google Patents

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JP2018185272A5
JP2018185272A5 JP2017088413A JP2017088413A JP2018185272A5 JP 2018185272 A5 JP2018185272 A5 JP 2018185272A5 JP 2017088413 A JP2017088413 A JP 2017088413A JP 2017088413 A JP2017088413 A JP 2017088413A JP 2018185272 A5 JP2018185272 A5 JP 2018185272A5
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JP2017088413A
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JP6875923B2 (ja
JP2018185272A (ja
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Priority claimed from JP2017088413A external-priority patent/JP6875923B2/ja
Priority to DE102018108882.5A priority patent/DE102018108882A1/de
Priority to US15/957,660 priority patent/US10634521B2/en
Publication of JP2018185272A publication Critical patent/JP2018185272A/ja
Publication of JP2018185272A5 publication Critical patent/JP2018185272A5/ja
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JP2017088413A 2017-04-27 2017-04-27 スケール装置および二軸変位検出装置 Active JP6875923B2 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2017088413A JP6875923B2 (ja) 2017-04-27 2017-04-27 スケール装置および二軸変位検出装置
DE102018108882.5A DE102018108882A1 (de) 2017-04-27 2018-04-13 Skalenvorrichtung und zweiachsige Verlagerungsdetektionsvorrichtung
US15/957,660 US10634521B2 (en) 2017-04-27 2018-04-19 Scale device and two-axis displacement detection device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2017088413A JP6875923B2 (ja) 2017-04-27 2017-04-27 スケール装置および二軸変位検出装置

Publications (3)

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JP2018185272A JP2018185272A (ja) 2018-11-22
JP2018185272A5 true JP2018185272A5 (enExample) 2020-01-30
JP6875923B2 JP6875923B2 (ja) 2021-05-26

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JP2017088413A Active JP6875923B2 (ja) 2017-04-27 2017-04-27 スケール装置および二軸変位検出装置

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US (1) US10634521B2 (enExample)
JP (1) JP6875923B2 (enExample)
DE (1) DE102018108882A1 (enExample)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102016214456A1 (de) * 2016-08-04 2018-02-08 Dr. Johannes Heidenhain Gesellschaft Mit Beschränkter Haftung Positionsmesseinrichtung und Verfahren zum Betreiben einer Positionsmesseinrichtung
DE102020118659A1 (de) * 2019-07-17 2021-01-21 Dmg Mori Co., Ltd. Detektionsvorrichtung
ES2899760T3 (es) 2019-09-04 2022-03-14 Heidenhain Gmbh Dr Johannes Dispositivo de medición de posición

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5023618B1 (enExample) 1970-05-20 1975-08-08
JPS5246093B2 (enExample) 1973-07-02 1977-11-21
DE3542514A1 (de) * 1985-12-02 1987-06-04 Zeiss Carl Fa Wegmesseinrichtung
US6649925B2 (en) * 1999-11-26 2003-11-18 Amos Talmi Methods of calibrating a position measurement device
JP4404184B2 (ja) * 2002-11-18 2010-01-27 ソニーマニュファクチュアリングシステムズ株式会社 変位検出装置
DE102008010284A1 (de) * 2008-02-21 2009-08-27 Dr. Johannes Heidenhain Gmbh XY-Tisch mit einer Messanordnung zur Positionsbestimmung
JP5126287B2 (ja) * 2010-05-31 2013-01-23 株式会社安川電機 リニアエンコーダ、リニアモータ、リニアモータシステム
JP6245941B2 (ja) * 2012-12-10 2017-12-13 Dmg森精機株式会社 変位検出装置
EP3040688B1 (de) * 2014-12-04 2018-04-18 Hexagon Technology Center GmbH Kapazitiver Linearencoder
EP3064902B1 (de) * 2015-03-06 2017-11-01 Hexagon Technology Center GmbH System zur bestimmung von positionen
JP6361760B2 (ja) 2017-02-27 2018-07-25 ブラザー工業株式会社 画像記録装置

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