JP6861817B2 - 急速熱活性化プロセスと連係した、プラズマを使用する原子層エッチングプロセス - Google Patents
急速熱活性化プロセスと連係した、プラズマを使用する原子層エッチングプロセス Download PDFInfo
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- JP6861817B2 JP6861817B2 JP2019531771A JP2019531771A JP6861817B2 JP 6861817 B2 JP6861817 B2 JP 6861817B2 JP 2019531771 A JP2019531771 A JP 2019531771A JP 2019531771 A JP2019531771 A JP 2019531771A JP 6861817 B2 JP6861817 B2 JP 6861817B2
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- H—ELECTRICITY
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- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/31—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers
- H01L21/3105—After-treatment
- H01L21/311—Etching the insulating layers by chemical or physical means
- H01L21/31127—Etching organic layers
- H01L21/31133—Etching organic layers by chemical means
- H01L21/31138—Etching organic layers by chemical means by dry-etching
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- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
- H01J37/32357—Generation remote from the workpiece, e.g. down-stream
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
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- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
- H01J37/32422—Arrangement for selecting ions or species in the plasma
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- H—ELECTRICITY
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- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32431—Constructional details of the reactor
- H01J37/3244—Gas supply means
- H01J37/32449—Gas control, e.g. control of the gas flow
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32431—Constructional details of the reactor
- H01J37/32715—Workpiece holder
- H01J37/32724—Temperature
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- H—ELECTRICITY
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- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/027—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
- H01L21/306—Chemical or electrical treatment, e.g. electrolytic etching
- H01L21/3065—Plasma etching; Reactive-ion etching
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- H—ELECTRICITY
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- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/31—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers
- H01L21/3105—After-treatment
- H01L21/31058—After-treatment of organic layers
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/324—Thermal treatment for modifying the properties of semiconductor bodies, e.g. annealing, sintering
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/20—Positioning, supporting, modifying or maintaining the physical state of objects being observed or treated
- H01J2237/2001—Maintaining constant desired temperature
Description
本出願は、2016年12月14日に出願された米国仮特許出願第62/434036号(U.S. Provisional Patent application Serial No. 62/434,036)に基づくものであって、その優先権を主張するものであり、同出願は、参照により本明細書に組み込まれる。
Claims (19)
- 半導体ウェハ上の層をエッチングするための方法であって、
フィルム層を含む半導体ウェハを処理チャンバ内に配置するステップと、
エッチャントガスから、反応種を含有するプラズマを生成するステップと、
前記フィルム層を前記反応種に接触させるステップと、
前記反応種に接触させている間に、前記半導体ウェハを急速熱サイクルに曝すステップと、
を含み、
前記急速熱サイクルは、前記反応種に前記フィルム層をエッチングさせるために十分な活性化温度を上回るように前記フィルム層を加熱し、
前記フィルム層を複数回の急速熱サイクルに曝し、
前記急速熱サイクルは、それぞれ異なるサイクル時間を有する、
方法。 - 前記フィルム層は、炭素を含有する、請求項1記載の方法。
- 前記フィルム層は、低誘電率を有する誘電体層を含む、請求項1または2記載の方法。
- 前記急速熱サイクルを、複数のランプによって生成する、請求項1から3までのいずれか1項記載の方法。
- それぞれの急速熱サイクルは、光エネルギの1つのパルスを含む、請求項4記載の方法。
- 前記フィルム層は、フォトレジスト層またはハードマスク層を含む、請求項1から5までのいずれか1項記載の方法。
- 前記フィルム層を漸増的にエッチングするために、前記半導体ウェハを複数回の急速熱サイクルに曝す、請求項1から6までのいずれか1項記載の方法。
- 前記エッチングは、原子層エッチングである、請求項1から7までのいずれか1項記載の方法。
- それぞれの急速熱サイクルは、1ms〜約10sのサイクル時間を有する、請求項1から8までのいずれか1項記載の方法。
- 前記エッチャントガスは、分子状酸素、分子状窒素、アルゴン、分子状水素、水、過酸化水素、二酸化炭素、二酸化硫黄、メタン、硫化カルボニル、フルオロホルム(トリフルオロメタン)、テトラフルオロメタン、またはそれらの混合物を含む、請求項1から9までのいずれか1項記載の方法。
- 前記フィルム層は、無定形炭素を含有する、請求項1から10までのいずれか1項記載の方法。
- 前記プラズマを、プラズマチャンバ内で生成し、前記フィルム層に接触する前にフィルタ構造を通して供給する、請求項1から11までのいずれか1項記載の方法。
- 前記急速熱サイクルにおいて、前記半導体ウェハを、約100℃〜約300℃の温度に加熱する、請求項1から12までのいずれか1項記載の方法。
- 前記フィルタ構造は、開口部を含み、
前記開口部は、前記反応種を通過させるが、前記プラズマ内に含有される荷電種の少なくとも65%をフィルタ除去し、
前記反応種は、中性粒子を含む、
請求項12記載の方法。 - 前記フィルタ構造は、開口部を含み、
前記開口部は、前記反応種を通過させるが、前記プラズマ内に含有される荷電種の少なくとも85%をフィルタ除去し、
前記反応種は、中性粒子を含む、
請求項12記載の方法。 - 前記活性化温度は、約80℃よりも高い、請求項1から15までのいずれか1項記載の方法。
- 前記フィルム層を、毎分約100オングストローム〜毎分約5000オングストロームのエッチング速度でエッチングする、請求項1から16までのいずれか1項記載の方法。
- 前記急速熱サイクルにおいて、前記半導体ウェハの温度を、非線形に上昇させる、請求項5記載の方法。
- 前記反応種を、前記半導体ウェハの上面に対向する前記処理チャンバ内に導入し、
前記急速熱サイクルを、前記半導体ウェハの下方に配置された複数のランプによって生成する、
請求項1から18までのいずれか1項記載の方法。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
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US201662434036P | 2016-12-14 | 2016-12-14 | |
US62/434,036 | 2016-12-14 | ||
PCT/US2017/030350 WO2018111333A1 (en) | 2016-12-14 | 2017-05-01 | Atomic layer etch process using plasma in conjunction with a rapid thermal activation process |
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JP2020502794A JP2020502794A (ja) | 2020-01-23 |
JP6861817B2 true JP6861817B2 (ja) | 2021-04-21 |
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US (3) | US10580661B2 (ja) |
JP (1) | JP6861817B2 (ja) |
KR (1) | KR102227883B1 (ja) |
CN (1) | CN110088882B (ja) |
TW (1) | TWI722186B (ja) |
WO (1) | WO2018111333A1 (ja) |
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US20210343541A1 (en) | 2021-11-04 |
CN110088882B (zh) | 2023-05-26 |
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TW201834066A (zh) | 2018-09-16 |
CN110088882A (zh) | 2019-08-02 |
KR102227883B1 (ko) | 2021-03-16 |
US20200203175A1 (en) | 2020-06-25 |
KR20190077545A (ko) | 2019-07-03 |
US20180166296A1 (en) | 2018-06-14 |
JP2020502794A (ja) | 2020-01-23 |
US10580661B2 (en) | 2020-03-03 |
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