JP6841433B2 - 発電素子 - Google Patents
発電素子 Download PDFInfo
- Publication number
- JP6841433B2 JP6841433B2 JP2018077749A JP2018077749A JP6841433B2 JP 6841433 B2 JP6841433 B2 JP 6841433B2 JP 2018077749 A JP2018077749 A JP 2018077749A JP 2018077749 A JP2018077749 A JP 2018077749A JP 6841433 B2 JP6841433 B2 JP 6841433B2
- Authority
- JP
- Japan
- Prior art keywords
- displacement
- power generation
- electrode layer
- convex portion
- generation element
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- 238000010248 power generation Methods 0.000 title claims description 291
- 239000010410 layer Substances 0.000 claims description 703
- 238000006073 displacement reaction Methods 0.000 claims description 556
- 239000000463 material Substances 0.000 claims description 273
- 239000011229 interlayer Substances 0.000 claims description 70
- 230000007423 decrease Effects 0.000 description 27
- 238000012986 modification Methods 0.000 description 20
- 230000004048 modification Effects 0.000 description 20
- 239000000758 substrate Substances 0.000 description 18
- 230000000052 comparative effect Effects 0.000 description 8
- 239000004065 semiconductor Substances 0.000 description 8
- 239000004020 conductor Substances 0.000 description 7
- 238000000034 method Methods 0.000 description 7
- 241000224016 Plasmodium Species 0.000 description 6
- 239000003990 capacitor Substances 0.000 description 5
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 4
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 4
- 229910052782 aluminium Inorganic materials 0.000 description 4
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 4
- 238000013459 approach Methods 0.000 description 4
- 229910052802 copper Inorganic materials 0.000 description 4
- 239000010949 copper Substances 0.000 description 4
- 230000003247 decreasing effect Effects 0.000 description 4
- 230000005611 electricity Effects 0.000 description 4
- 239000012212 insulator Substances 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 4
- 229910052710 silicon Inorganic materials 0.000 description 4
- 239000010703 silicon Substances 0.000 description 4
- 230000007613 environmental effect Effects 0.000 description 3
- -1 for example Substances 0.000 description 3
- 238000005240 physical vapour deposition Methods 0.000 description 3
- 230000010287 polarization Effects 0.000 description 3
- 239000011800 void material Substances 0.000 description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 239000003513 alkali Substances 0.000 description 2
- 238000005530 etching Methods 0.000 description 2
- 238000009499 grossing Methods 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 229920000642 polymer Polymers 0.000 description 2
- 229910052814 silicon oxide Inorganic materials 0.000 description 2
- 238000004544 sputter deposition Methods 0.000 description 2
- 239000004743 Polypropylene Substances 0.000 description 1
- 229910052581 Si3N4 Inorganic materials 0.000 description 1
- 238000007792 addition Methods 0.000 description 1
- 230000002730 additional effect Effects 0.000 description 1
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 239000002585 base Substances 0.000 description 1
- 238000012217 deletion Methods 0.000 description 1
- 230000037430 deletion Effects 0.000 description 1
- 239000003989 dielectric material Substances 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- 238000005304 joining Methods 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 238000000206 photolithography Methods 0.000 description 1
- 229920000139 polyethylene terephthalate Polymers 0.000 description 1
- 239000005020 polyethylene terephthalate Substances 0.000 description 1
- 229920001155 polypropylene Polymers 0.000 description 1
- 229910001414 potassium ion Inorganic materials 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 1
- 235000012431 wafers Nutrition 0.000 description 1
Images
Landscapes
- Electrostatic, Electromagnetic, Magneto- Strictive, And Variable-Resistance Transducers (AREA)
- General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2018077749A JP6841433B2 (ja) | 2018-04-13 | 2018-04-13 | 発電素子 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2018077749A JP6841433B2 (ja) | 2018-04-13 | 2018-04-13 | 発電素子 |
Related Parent Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2017022388A Division JP6335347B1 (ja) | 2017-02-09 | 2017-02-09 | 発電素子および発電装置 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2018130027A JP2018130027A (ja) | 2018-08-16 |
| JP2018130027A5 JP2018130027A5 (enExample) | 2020-03-12 |
| JP6841433B2 true JP6841433B2 (ja) | 2021-03-10 |
Family
ID=63173327
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2018077749A Active JP6841433B2 (ja) | 2018-04-13 | 2018-04-13 | 発電素子 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP6841433B2 (enExample) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP7297280B2 (ja) * | 2018-08-29 | 2023-06-26 | 国立大学法人千葉大学 | 振動発電器及びエレクトレット |
| JP7015770B2 (ja) * | 2018-10-15 | 2022-02-03 | 株式会社鷺宮製作所 | 振動発電素子および振動発電装置 |
| JP7341463B2 (ja) * | 2019-09-02 | 2023-09-11 | 国立大学法人千葉大学 | 振動発電素子 |
| JP2021158818A (ja) * | 2020-03-27 | 2021-10-07 | 株式会社鷺宮製作所 | 発電素子 |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5603200B2 (ja) * | 2010-10-26 | 2014-10-08 | 日本電信電話株式会社 | 静電変換装置および静電変換装置の製造方法 |
| JP2014226003A (ja) * | 2013-05-17 | 2014-12-04 | パナソニック株式会社 | 振動発電器 |
| JP5855602B2 (ja) * | 2013-05-22 | 2016-02-09 | アオイ電子株式会社 | 静電誘導型電気機械変換素子およびナノピンセット |
| JP6108137B2 (ja) * | 2016-03-08 | 2017-04-05 | 学校法人 関西大学 | 発電装置 |
-
2018
- 2018-04-13 JP JP2018077749A patent/JP6841433B2/ja active Active
Also Published As
| Publication number | Publication date |
|---|---|
| JP2018130027A (ja) | 2018-08-16 |
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