JP6831406B2 - 塗布装置および塗布方法 - Google Patents

塗布装置および塗布方法 Download PDF

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Publication number
JP6831406B2
JP6831406B2 JP2019021350A JP2019021350A JP6831406B2 JP 6831406 B2 JP6831406 B2 JP 6831406B2 JP 2019021350 A JP2019021350 A JP 2019021350A JP 2019021350 A JP2019021350 A JP 2019021350A JP 6831406 B2 JP6831406 B2 JP 6831406B2
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JP
Japan
Prior art keywords
coating
levitation
levitation region
substrate
moving direction
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
JP2019021350A
Other languages
English (en)
Japanese (ja)
Other versions
JP2020127916A (ja
Inventor
富藤　幸雄
幸雄 富藤
宗明 大宅
宗明 大宅
明仁 塩田
明仁 塩田
鈴木　啓悟
啓悟 鈴木
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Screen Holdings Co Ltd
Original Assignee
Screen Holdings Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Screen Holdings Co Ltd filed Critical Screen Holdings Co Ltd
Priority to JP2019021350A priority Critical patent/JP6831406B2/ja
Priority to CN201911172486.6A priority patent/CN111545381B/zh
Priority to TW108143898A priority patent/TWI741426B/zh
Priority to KR1020200004776A priority patent/KR102295753B1/ko
Publication of JP2020127916A publication Critical patent/JP2020127916A/ja
Application granted granted Critical
Publication of JP6831406B2 publication Critical patent/JP6831406B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
    • B05B13/00—Machines or plants for applying liquids or other fluent materials to surfaces of objects or other work by spraying, not covered by groups B05B1/00 - B05B11/00
    • B05B13/02—Means for supporting work; Arrangement or mounting of spray heads; Adaptation or arrangement of means for feeding work
    • B05B13/04—Means for supporting work; Arrangement or mounting of spray heads; Adaptation or arrangement of means for feeding work the spray heads being moved during spraying operation
    • B05B13/0405—Means for supporting work; Arrangement or mounting of spray heads; Adaptation or arrangement of means for feeding work the spray heads being moved during spraying operation with reciprocating or oscillating spray heads
    • B05B13/041—Means for supporting work; Arrangement or mounting of spray heads; Adaptation or arrangement of means for feeding work the spray heads being moved during spraying operation with reciprocating or oscillating spray heads with spray heads reciprocating along a straight line
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C11/00—Component parts, details or accessories not specifically provided for in groups B05C1/00 - B05C9/00
    • B05C11/10—Storage, supply or control of liquid or other fluent material; Recovery of excess liquid or other fluent material
    • B05C11/1002—Means for controlling supply, i.e. flow or pressure, of liquid or other fluent material to the applying apparatus, e.g. valves
    • B05C11/1015—Means for controlling supply, i.e. flow or pressure, of liquid or other fluent material to the applying apparatus, e.g. valves responsive to a conditions of ambient medium or target, e.g. humidity, temperature ; responsive to position or movement of the coating head relative to the target
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
    • B05B13/00—Machines or plants for applying liquids or other fluent materials to surfaces of objects or other work by spraying, not covered by groups B05B1/00 - B05B11/00
    • B05B13/02—Means for supporting work; Arrangement or mounting of spray heads; Adaptation or arrangement of means for feeding work
    • B05B13/0221—Means for supporting work; Arrangement or mounting of spray heads; Adaptation or arrangement of means for feeding work characterised by the means for moving or conveying the objects or other work, e.g. conveyor belts
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
    • B05B14/00—Arrangements for collecting, re-using or eliminating excess spraying material
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
    • B05B15/00—Details of spraying plant or spraying apparatus not otherwise provided for; Accessories
    • B05B15/50—Arrangements for cleaning; Arrangements for preventing deposits, drying-out or blockage; Arrangements for detecting improper discharge caused by the presence of foreign matter
    • B05B15/55—Arrangements for cleaning; Arrangements for preventing deposits, drying-out or blockage; Arrangements for detecting improper discharge caused by the presence of foreign matter using cleaning fluids
    • B05B15/555—Arrangements for cleaning; Arrangements for preventing deposits, drying-out or blockage; Arrangements for detecting improper discharge caused by the presence of foreign matter using cleaning fluids discharged by cleaning nozzles
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C11/00—Component parts, details or accessories not specifically provided for in groups B05C1/00 - B05C9/00
    • B05C11/10—Storage, supply or control of liquid or other fluent material; Recovery of excess liquid or other fluent material
    • B05C11/1002—Means for controlling supply, i.e. flow or pressure, of liquid or other fluent material to the applying apparatus, e.g. valves
    • B05C11/1015—Means for controlling supply, i.e. flow or pressure, of liquid or other fluent material to the applying apparatus, e.g. valves responsive to a conditions of ambient medium or target, e.g. humidity, temperature ; responsive to position or movement of the coating head relative to the target
    • B05C11/1018—Means for controlling supply, i.e. flow or pressure, of liquid or other fluent material to the applying apparatus, e.g. valves responsive to a conditions of ambient medium or target, e.g. humidity, temperature ; responsive to position or movement of the coating head relative to the target responsive to distance of target
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C11/00—Component parts, details or accessories not specifically provided for in groups B05C1/00 - B05C9/00
    • B05C11/10—Storage, supply or control of liquid or other fluent material; Recovery of excess liquid or other fluent material
    • B05C11/1039—Recovery of excess liquid or other fluent material; Controlling means therefor
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C5/00—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work
    • B05C5/02—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work the liquid or other fluent material being discharged through an outlet orifice by pressure, e.g. from an outlet device in contact or almost in contact, with the work
    • B05C5/027—Coating heads with several outlets, e.g. aligned transversally to the moving direction of a web to be coated
JP2019021350A 2019-02-08 2019-02-08 塗布装置および塗布方法 Active JP6831406B2 (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP2019021350A JP6831406B2 (ja) 2019-02-08 2019-02-08 塗布装置および塗布方法
CN201911172486.6A CN111545381B (zh) 2019-02-08 2019-11-26 涂布装置及涂布方法
TW108143898A TWI741426B (zh) 2019-02-08 2019-12-02 塗布裝置及塗布方法
KR1020200004776A KR102295753B1 (ko) 2019-02-08 2020-01-14 도포 장치 및 도포 방법

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2019021350A JP6831406B2 (ja) 2019-02-08 2019-02-08 塗布装置および塗布方法

Publications (2)

Publication Number Publication Date
JP2020127916A JP2020127916A (ja) 2020-08-27
JP6831406B2 true JP6831406B2 (ja) 2021-02-17

Family

ID=71998079

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2019021350A Active JP6831406B2 (ja) 2019-02-08 2019-02-08 塗布装置および塗布方法

Country Status (4)

Country Link
JP (1) JP6831406B2 (zh)
KR (1) KR102295753B1 (zh)
CN (1) CN111545381B (zh)
TW (1) TWI741426B (zh)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20240002996A (ko) 2022-06-29 2024-01-08 세메스 주식회사 부상스테이지 막힘방지장치, 기판처리기기 및 기판처리방법
CN115970983A (zh) * 2022-12-06 2023-04-18 京东方科技集团股份有限公司 涂胶装置
CN116511008B (zh) * 2023-05-04 2024-02-27 浙江宝鸿新材料股份有限公司 一种抗指纹发丝不锈钢板的生产方法及其连续生产线

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4413789B2 (ja) * 2005-01-24 2010-02-10 東京エレクトロン株式会社 ステージ装置および塗布処理装置
JP4673180B2 (ja) * 2005-10-13 2011-04-20 東京エレクトロン株式会社 塗布装置及び塗布方法
JP4318714B2 (ja) * 2006-11-28 2009-08-26 東京エレクトロン株式会社 塗布装置
JP5485928B2 (ja) * 2011-03-09 2014-05-07 東京エレクトロン株式会社 基板浮上搬送装置及び基板処理装置
JP2017029948A (ja) * 2015-08-04 2017-02-09 オイレス工業株式会社 ワーク浮上搬送装置
JP2018043200A (ja) 2016-09-15 2018-03-22 株式会社Ｓｃｒｅｅｎホールディングス 塗布装置および塗布方法

Also Published As

Publication number Publication date
CN111545381A (zh) 2020-08-18
TW202030026A (zh) 2020-08-16
CN111545381B (zh) 2022-06-07
TWI741426B (zh) 2021-10-01
KR102295753B1 (ko) 2021-08-30
KR20200097640A (ko) 2020-08-19
JP2020127916A (ja) 2020-08-27

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