JP6821467B2 - 液体吐出ヘッドの製造方法及び液体吐出ヘッド - Google Patents
液体吐出ヘッドの製造方法及び液体吐出ヘッド Download PDFInfo
- Publication number
- JP6821467B2 JP6821467B2 JP2017033912A JP2017033912A JP6821467B2 JP 6821467 B2 JP6821467 B2 JP 6821467B2 JP 2017033912 A JP2017033912 A JP 2017033912A JP 2017033912 A JP2017033912 A JP 2017033912A JP 6821467 B2 JP6821467 B2 JP 6821467B2
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- photosensitive resin
- resin layer
- discharge head
- liquid discharge
- layer
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- Engineering & Computer Science (AREA)
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Description
図3に示す工程により、液体吐出ヘッドを作製した。
中間層6の厚さを0.5μmとした以外は、実施例1と同様に液体吐出ヘッドを作製した。なお、中間層6の吸水率を実施例1と同様に評価した結果、0.51%であった。
中間層6の厚さを2.5μmとした以外は、実施例1と同様に液体吐出ヘッドを作製した。なお、中間層6の吸水率を実施例1と同様に評価した結果、0.54%であった。
第1の感光性樹脂層14を、表1に記載の感光性樹脂組成物を用いて8000J/m2の露光量で露光して形成し、第2の感光性樹脂層16への露光量を500J/m2とした以外は、実施例1と同様に液体吐出ヘッドを作製した。なお、第1の感光性樹脂層14の露光部分及び第2の感光性樹脂層16の露光部分の吸水率を実施例1と同様に評価した結果、それぞれ0.53%及び0.20%であった。
中間層6を表4に記載の感光性樹脂組成物を用いて形成した以外は、実施例1と同様に液体吐出ヘッドを作製した。なお、中間層6の吸水率を実施例1と同様に評価した結果、0.43%であった。
中間層6を実施例5と同様の感光性樹脂組成物を用いて形成し、第1の感光性樹脂層14を18000J/m2の露光量で露光して形成した以外は、実施例1と同様に液体吐出ヘッドを作製した。なお、第1の感光性樹脂層14の吸水率を実施例1と同様に評価した結果、0.22%であった。
第1の感光性樹脂層14を18000J/m2の露光量で露光して形成した以外は、実施例1と同様に液体吐出ヘッドを作製した。なお、第1の感光性樹脂層14の吸水率を実施例1と同様に評価した結果、0.22%であった。
中間層6を「HIMAL1200」(日立化成工業社製、ポリエーテルアミド樹脂、溶媒:N−メチルピロリドン/ブチルセルソルブアセテート)を用いて形成した以外は、実施例1と同様に液体吐出ヘッドを作製した。なお、中間層6の形成に用いた樹脂組成物は熱可塑性の樹脂からなるため、中間層6のパターニングはドライエッチングによって行った。具体的には、「HIMAL1200」をスピンコート法により基板1上に塗布し、100℃で30分の加熱と、さらに250℃で60分の加熱を行うことで、溶媒を蒸発させ、厚さ1.0μmの中間層6を形成した。次に、中間層上にポジ型感光性樹脂「OFPR」(東京応化工業社製)を形成し、パターニングを行った。さらにパターニングしたポジ型感光性樹脂をマスクとして、O2プラズマアッシングにより中間層6のパターニングを行い、最後にマスクとして使用したポジ型感光性樹脂を剥離した。なお、中間層6の吸水率を実施例1と同様に評価した結果、0.07%であった。
比較例1と同様に中間層6を形成した。その後、第1の感光性樹脂層14を表3に記載の感光性樹脂性組成物を用いて5500J/m2の露光量で露光して形成し、第2の感光性樹脂層16を表2に記載の感光性樹脂組成物を用いて5000J/m2の露光量で露光して形成した。これ以外は、実施例1と同様に液体吐出ヘッドを作製した。なお、第1の感光性樹脂層14の露光部分及び第2の感光性樹脂層16の露光部分の吸水率を実施例1と同様に評価した結果、それぞれ0.10%及び0.50%であった。
実施例1と同様に中間層6を形成した。その後、第1の感光性樹脂層14を表3に記載の感光性樹脂性組成物を用いて5500J/m2の露光量で露光して形成し、第2の感光性樹脂層16を表2に記載の感光性樹脂組成物を用いて5000J/m2の露光量で露光して形成した。これ以外は、実施例1と同様に液体吐出ヘッドを作製した。なお、第1の感光性樹脂層14の露光部分及び第2の感光性樹脂層16の露光部分の吸水率は比較例2と同じである。
第1の感光性樹脂層14を表3に記載の感光性樹脂性組成物を用いて2000J/m2の露光量で露光して形成し、第2の感光性樹脂層16への露光量を500J/m2とした以外は、実施例1と同様に液体吐出ヘッドを作製した。なお、第1の感光性樹脂層14及び第2の感光性樹脂層16の吸水率を実施例1と同様に評価した結果、ともに0.20%であった。
作製したそれぞれの液体吐出ヘッドの表面をレーザー顕微鏡(キーエンス社製、商品名:VD−9710)で観察し、ソルベントクラックの発生の有無を確認した。また、作製したそれぞれの液体吐出ヘッドに、エチレングリコール/尿素/イソプロピルアルコール/N−メチルピロリドン/黒色染料/水=5/3/2/5/3/82(質量比)からなるインクを充填し、罫線印字、ドット印字の条件で印字を行った。印字品位は以下の基準で評価した。評価結果を表5及び表6に示す。
B:乱れはわずかにあるが実用上問題が無いレベル
C:乱れが見られる
実施例1から7で作製した液体吐出ヘッドでは、表面にソルベントクラックが無く印字品位も良好であった。一方、比較例1から4で作製した液体吐出ヘッドでは、ソルベントクラックが発生し、印字品位の低下が見られた。
6 中間層
7 流路形成部材
8 流路
9 吐出口
10 吐出口形成部材
12 中間層となる樹脂層
14 第1の感光性樹脂層
16 第2の感光性樹脂層
Claims (13)
- 基板と、該基板上に設けられ液体の流路を形成する流路形成部材と、該流路形成部材上に設けられ前記液体を吐出する吐出口を形成する吐出口形成部材と、前記基板と前記流路形成部材との間に設けられた中間層と、を有する液体吐出ヘッドの製造方法であって、
前記基板上に前記中間層を形成する工程と、
前記中間層上に第1の感光性樹脂層を形成する工程と、
前記第1の感光性樹脂層を選択的に露光することにより、前記第1の感光性樹脂層の前記流路形成部材となる部分を硬化させる工程と、
前記第1の感光性樹脂層上に第2の感光性樹脂層を形成する工程と、
前記第2の感光性樹脂層を選択的に露光することにより、前記第2の感光性樹脂層の前記吐出口形成部材となる部分を硬化させる工程と、
前記第1の感光性樹脂層の非露光部分と前記第2の感光性樹脂層の非露光部分を現像液により一括で除去する工程とを有し、
前記中間層、前記第1の感光性樹脂層の露光部分及び前記第2の感光性樹脂層の露光部分の前記現像液による除去前における吸水率をそれぞれ、W、W1、及びW2としたとき、W≧W1>W2の関係を満たすことを特徴とする液体吐出ヘッドの製造方法。 - 前記中間層を形成する工程は、中間層となる樹脂層を露光により硬化させる工程を含む請求項1に記載の液体吐出ヘッドの製造方法。
- 前記中間層となる樹脂層が、エポキシ樹脂と光酸発生剤を含む請求項2に記載の液体吐出ヘッドの製造方法。
- 前記第1の感光性樹脂層と前記第2の感光性樹脂層が、エポキシ樹脂と光酸発生剤を含む請求項1〜3のいずれか1項に記載の液体吐出ヘッドの製造方法。
- 前記第1の感光性樹脂層と前記第2の感光性樹脂層を同一波長の光を用いて露光する請求項1〜4のいずれか1項に記載の液体吐出ヘッドの製造方法。
- 前記光に対して、前記第2の感光性樹脂層の感度が、前記第1の感光性樹脂層の感度より高い請求項5に記載の液体吐出ヘッドの製造方法。
- 前記吸水率W、W1及びW2が、W>W1>W2の関係を満たす請求項1〜6のいずれか1項に記載の液体吐出ヘッドの製造方法。
- 前記吸水率W1が前記吸水率W2の2倍以上5倍以下である請求項1〜7のいずれか1項に記載の液体吐出ヘッドの製造方法。
- 前記吸水率Wが前記吸水率W1の2倍以下である請求項1〜8のいずれか1項に記載の液体吐出ヘッドの製造方法。
- 前記第1の感光性樹脂層の厚さが前記第2の感光性樹脂層の厚さの0.8倍以上3.0倍以下である請求項1〜9のいずれか1項に記載の液体吐出ヘッドの製造方法。
- 前記中間層となる樹脂層の厚さが前記第1の感光性樹脂層の厚さよりも薄く、0.5μm以上5.0μm以下である請求項1〜10のいずれか1項に記載の液体吐出ヘッドの製造方法。
- 前記現像液が、プロピレングリコールモノメチルエーテルアセテート、プロピレングリコールモノメチルエーテル、メチルイソブチルケトン、ジグライム、イソプロピルアルコール、テトラメチルアンモニウムハイドロオキサイド、酢酸n−ブチルまたはキシレンを含む請求項1〜11のいずれか1項に記載の液体吐出ヘッドの製造方法。
- 基板と、該基板上に設けられ液体の流路を形成する流路形成部材と、該流路形成部材上に設けられ前記液体を吐出する吐出口を形成する吐出口形成部材と、前記基板と前記流路形成部材との間に設けられた中間層と、を有する液体吐出ヘッドであって、
前記中間層、前記流路形成部材及び前記吐出口形成部材の吸水率をそれぞれ、W、W1、及びW2としたとき、W≧W1>W2の関係を満たすことを特徴とする液体吐出ヘッド。
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