JP6820084B2 - 熱電モジュール - Google Patents
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- JP6820084B2 JP6820084B2 JP2019541454A JP2019541454A JP6820084B2 JP 6820084 B2 JP6820084 B2 JP 6820084B2 JP 2019541454 A JP2019541454 A JP 2019541454A JP 2019541454 A JP2019541454 A JP 2019541454A JP 6820084 B2 JP6820084 B2 JP 6820084B2
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- 230000004888 barrier function Effects 0.000 claims description 56
- 229910001069 Ti alloy Inorganic materials 0.000 claims description 35
- 229910052751 metal Inorganic materials 0.000 claims description 16
- 239000002184 metal Substances 0.000 claims description 15
- 229910000679 solder Inorganic materials 0.000 claims description 14
- 238000004519 manufacturing process Methods 0.000 claims description 13
- 239000004065 semiconductor Substances 0.000 claims description 13
- 238000000034 method Methods 0.000 claims description 12
- 229910052719 titanium Inorganic materials 0.000 claims description 9
- 229910052750 molybdenum Inorganic materials 0.000 claims description 8
- 238000004544 sputter deposition Methods 0.000 claims description 8
- 238000005245 sintering Methods 0.000 claims description 7
- 229910002909 Bi-Te Inorganic materials 0.000 claims description 6
- 238000007733 ion plating Methods 0.000 claims description 6
- 229910020712 Co—Sb Inorganic materials 0.000 claims description 5
- 238000005304 joining Methods 0.000 claims description 5
- 230000015572 biosynthetic process Effects 0.000 claims description 4
- 238000005476 soldering Methods 0.000 claims description 4
- 238000007740 vapor deposition Methods 0.000 claims description 4
- 229910002665 PbTe Inorganic materials 0.000 claims description 3
- 229910000577 Silicon-germanium Inorganic materials 0.000 claims description 3
- 238000007747 plating Methods 0.000 claims description 3
- OCGWQDWYSQAFTO-UHFFFAOYSA-N tellanylidenelead Chemical compound [Pb]=[Te] OCGWQDWYSQAFTO-UHFFFAOYSA-N 0.000 claims description 3
- 229910021332 silicide Inorganic materials 0.000 claims description 2
- FVBUAEGBCNSCDD-UHFFFAOYSA-N silicide(4-) Chemical compound [Si-4] FVBUAEGBCNSCDD-UHFFFAOYSA-N 0.000 claims description 2
- 239000010410 layer Substances 0.000 description 94
- 239000010949 copper Substances 0.000 description 26
- 239000000463 material Substances 0.000 description 22
- PXHVJJICTQNCMI-UHFFFAOYSA-N nickel Substances [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 13
- 238000009792 diffusion process Methods 0.000 description 12
- 230000003647 oxidation Effects 0.000 description 10
- 238000007254 oxidation reaction Methods 0.000 description 10
- 239000000758 substrate Substances 0.000 description 9
- 230000001070 adhesive effect Effects 0.000 description 7
- 239000000956 alloy Substances 0.000 description 7
- 229910052802 copper Inorganic materials 0.000 description 7
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 6
- 239000000853 adhesive Substances 0.000 description 6
- 229910045601 alloy Inorganic materials 0.000 description 6
- 230000000052 comparative effect Effects 0.000 description 6
- 239000010931 gold Substances 0.000 description 6
- 229910052709 silver Inorganic materials 0.000 description 6
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 5
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 5
- 239000011651 chromium Substances 0.000 description 5
- 229910052759 nickel Inorganic materials 0.000 description 5
- 239000004332 silver Substances 0.000 description 5
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 4
- 238000006243 chemical reaction Methods 0.000 description 4
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Substances [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 4
- 239000000843 powder Substances 0.000 description 4
- 230000002265 prevention Effects 0.000 description 4
- 238000012360 testing method Methods 0.000 description 4
- 229910052782 aluminium Inorganic materials 0.000 description 3
- 229910052804 chromium Inorganic materials 0.000 description 3
- 238000001816 cooling Methods 0.000 description 3
- 230000001747 exhibiting effect Effects 0.000 description 3
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 3
- 229910052737 gold Inorganic materials 0.000 description 3
- 239000000203 mixture Substances 0.000 description 3
- 238000010248 power generation Methods 0.000 description 3
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 2
- 241001364096 Pachycephalidae Species 0.000 description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 2
- 230000008901 benefit Effects 0.000 description 2
- 230000008859 change Effects 0.000 description 2
- 239000004020 conductor Substances 0.000 description 2
- 230000005611 electricity Effects 0.000 description 2
- 238000011156 evaluation Methods 0.000 description 2
- 230000014509 gene expression Effects 0.000 description 2
- 150000002739 metals Chemical class 0.000 description 2
- 238000005240 physical vapour deposition Methods 0.000 description 2
- 229910052697 platinum Inorganic materials 0.000 description 2
- 238000012546 transfer Methods 0.000 description 2
- 239000012790 adhesive layer Substances 0.000 description 1
- 238000005275 alloying Methods 0.000 description 1
- XKRFYHLGVUSROY-UHFFFAOYSA-N argon Substances [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 1
- 229910052786 argon Inorganic materials 0.000 description 1
- -1 argon ions Chemical class 0.000 description 1
- 239000011230 binding agent Substances 0.000 description 1
- 239000000969 carrier Substances 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- WUUZKBJEUBFVMV-UHFFFAOYSA-N copper molybdenum Chemical compound [Cu].[Mo] WUUZKBJEUBFVMV-UHFFFAOYSA-N 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 239000002270 dispersing agent Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 239000000446 fuel Substances 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 229910052738 indium Inorganic materials 0.000 description 1
- 239000002440 industrial waste Substances 0.000 description 1
- 229910000765 intermetallic Inorganic materials 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 229910052758 niobium Inorganic materials 0.000 description 1
- 229910052763 palladium Inorganic materials 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 230000002441 reversible effect Effects 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 239000002904 solvent Substances 0.000 description 1
- 229910052715 tantalum Inorganic materials 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 229910052720 vanadium Inorganic materials 0.000 description 1
- 239000002918 waste heat Substances 0.000 description 1
- 229910052726 zirconium Inorganic materials 0.000 description 1
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N10/00—Thermoelectric devices comprising a junction of dissimilar materials, i.e. devices exhibiting Seebeck or Peltier effects
- H10N10/80—Constructional details
- H10N10/85—Thermoelectric active materials
- H10N10/851—Thermoelectric active materials comprising inorganic compositions
- H10N10/854—Thermoelectric active materials comprising inorganic compositions comprising only metals
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N10/00—Thermoelectric devices comprising a junction of dissimilar materials, i.e. devices exhibiting Seebeck or Peltier effects
- H10N10/80—Constructional details
- H10N10/85—Thermoelectric active materials
- H10N10/851—Thermoelectric active materials comprising inorganic compositions
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N10/00—Thermoelectric devices comprising a junction of dissimilar materials, i.e. devices exhibiting Seebeck or Peltier effects
- H10N10/01—Manufacture or treatment
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N10/00—Thermoelectric devices comprising a junction of dissimilar materials, i.e. devices exhibiting Seebeck or Peltier effects
- H10N10/80—Constructional details
- H10N10/81—Structural details of the junction
- H10N10/817—Structural details of the junction the junction being non-separable, e.g. being cemented, sintered or soldered
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N10/00—Thermoelectric devices comprising a junction of dissimilar materials, i.e. devices exhibiting Seebeck or Peltier effects
- H10N10/80—Constructional details
- H10N10/82—Connection of interconnections
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N10/00—Thermoelectric devices comprising a junction of dissimilar materials, i.e. devices exhibiting Seebeck or Peltier effects
- H10N10/80—Constructional details
- H10N10/85—Thermoelectric active materials
- H10N10/851—Thermoelectric active materials comprising inorganic compositions
- H10N10/852—Thermoelectric active materials comprising inorganic compositions comprising tellurium, selenium or sulfur
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N10/00—Thermoelectric devices comprising a junction of dissimilar materials, i.e. devices exhibiting Seebeck or Peltier effects
- H10N10/80—Constructional details
- H10N10/85—Thermoelectric active materials
- H10N10/851—Thermoelectric active materials comprising inorganic compositions
- H10N10/853—Thermoelectric active materials comprising inorganic compositions comprising arsenic, antimony or bismuth
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N10/00—Thermoelectric devices comprising a junction of dissimilar materials, i.e. devices exhibiting Seebeck or Peltier effects
- H10N10/80—Constructional details
- H10N10/85—Thermoelectric active materials
- H10N10/851—Thermoelectric active materials comprising inorganic compositions
- H10N10/855—Thermoelectric active materials comprising inorganic compositions comprising compounds containing boron, carbon, oxygen or nitrogen
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
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- H10N10/00—Thermoelectric devices comprising a junction of dissimilar materials, i.e. devices exhibiting Seebeck or Peltier effects
- H10N10/80—Constructional details
- H10N10/85—Thermoelectric active materials
- H10N10/851—Thermoelectric active materials comprising inorganic compositions
- H10N10/8556—Thermoelectric active materials comprising inorganic compositions comprising compounds containing germanium or silicon
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- Physical Vapour Deposition (AREA)
- Cooling Or The Like Of Semiconductors Or Solid State Devices (AREA)
- Powder Metallurgy (AREA)
Description
本出願は、2017年3月30日付韓国特許出願第10−2017−0040553号に基づいた優先権の利益を主張し、当該韓国特許出願の文献に開示されたすべての内容は本明細書の一部として含まれる。
熱電半導体を含む複数の熱電素子と、
前記複数の熱電素子の間を連結するための電極と、
前記熱電素子の各々と電極との間に位置し、熱電素子と電極を接合するための接合層とを備え、
前記熱電素子と接合層との間に位置し、Cu−Mo−Ti合金を含むバリア層をさらに備える熱電モジュールを提供する。
また、前記熱電モジュールにおいて、前記バリア層の厚さは、100nm〜200μmであり得る。
また、本発明の他の一実施例によれば、熱電素子の少なくとも一面に、Cu−Mo−Ti合金を含むバリア層をそれぞれ形成する段階と、前記バリア層上にそれぞれ接合層形成用金属ペーストを位置させた後、電極と接合する段階とを含む熱電モジュールの製造方法が提供される。
また、前記接合は、ソルダリングまたは焼結によって行われ得る。
熱電半導体を含む複数の熱電素子と、
前記複数の熱電素子の間を連結するための電極と、
前記熱電素子の各々と電極との間に位置し、熱電素子と電極を接合するための接合層とを備え、
前記熱電素子と接合層との間に位置し、Cu−Mo−Ti合金を含むバリア層をさらに備える。
Bi−Ti系熱電半導体を含む熱電素子の上にスパッタリング(sputtering)方式によりCu−Mo−Ti合金のバリア層を蒸着した(バリア層の厚さ:350nm、Cu−Mo−Ti合金組成:Cu12.5原子%、Mo70原子%、Ti17.5原子%)。
前記実施例1でバリア層の厚さを160nmに変更したことを除いては、前記実施例1と同様の方法で行い熱電モジュールを製造した。
前記実施例2でのCu−Mo−Ti合金の代わりにCu 25原子%、Mo 43原子%及びTi 32原子%で含むCu−Mo−Ti合金を使用してバリア層を形成することを除いては、前記実施例2と同様の方法で行い熱電モジュールを製造した。
前記実施例2でのCu−Mo−Ti合金の代わりにCu 50原子%、Mo 33.3原子%及びTi 16.7原子%で含むCu−Mo−Ti合金を使用してバリア層を形成することを除いては、前記実施例2と同様の方法で行い熱電モジュールを製造した。
前記実施例1でのCu−Mo−Ti合金の代わりに、Mo−Ti合金(Mo 55原子%、Ti 45原子%)合金を使用することを除いては、前記実施例1と同様の方法で行いMo−Ti合金を含むバリア層(バリア層の厚さ:160nm)を有する熱電モジュールを製造した。
付着力評価のためにDSS(Die shear strength)評価を行った。
前記実施例1及び2でのバリア層が形成されたBi−Ti系熱電素材を3x3mm2の大きさで切断してダイをそれぞれ製作した後、AuめっきCu基板にリード(Lead)接合して試料を準備した。この時、比較のために前記比較例1でのMo−Tiバリア層形成Bi−Ti系熱電素材を使用した。
実施例1、3、4、及び比較例1を用いてMo−Ti合金に含まれるCu含有量に応じた熱膨張係数(Coefficient of Thermal Expansion、CTE)の変化を観察した。その結果を図1に示した。
図1に示すように、Mo−Ti合金内にCuをさらに含むバリア層を備える実施例1、3及び4は、比較例1に比べて高いCTEを示し、Mo−Ti合金内に含まれるCuの含有量が増加するほどCTEが大きく増加する傾向を示した。このような結果からCuの追加及びその含有量の最適化によって、よりバリア層の熱電素子に対する付着力をさらに向上させ得ることが分かる。
Claims (8)
- 熱電半導体を含む複数の熱電素子と、
前記複数の熱電素子の間を連結するための電極と、
前記熱電素子の各々と電極との間に位置し、熱電素子と電極を接合するための接合層とを備え、
前記熱電素子と接合層との間に位置し、Cu−Mo−Ti合金を含むバリア層をさらに備え、
前記Cu−Mo−Ti合金は、金属原子の総含有量に対してCuを1〜50原子%で含む、熱電モジュール。 - 前記Cu−Mo−Ti合金は、MoとTiを1:9〜9:1の原子比で含む、請求項1に記載の熱電モジュール。
- 前記バリア層の厚さは、100nm〜200μmである、請求項1または2に記載の熱電モジュール。
- 前記熱電半導体は、Bi−Te系、スクッテルダイト系、シリサイド系、ハーフホイスラー系、Co−Sb系、PbTe系、Si系及びSiGe系熱電半導体からなる群より選ばれる少なくともいずれか一つを含む、請求項1から3のいずれか一項に記載の熱電モジュール。
- 前記接合層は、半田を含む、請求項1から4のいずれか一項に記載の熱電モジュール。
- 熱電素子の少なくとも一面に、Cu−Mo−Ti合金を含むバリア層を形成する段階と、
前記バリア層上に接合層形成用金属ペーストを位置させた後、電極と接合する段階とを含み、
前記Cu−Mo−Ti合金は、金属原子の総含有量に対してCuを1〜50原子%で含む、熱電モジュールの製造方法。 - 前記バリア層の形成は、スパッタリング、蒸着、イオンプレーティング、メッキ、または焼結によって行われる、請求項6に記載の熱電モジュールの製造方法。
- 前記接合は、ソルダリングまたは焼結によって行われる、請求項6または7に記載の熱電モジュールの製造方法。
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KR1020170040553A KR102125051B1 (ko) | 2017-03-30 | 2017-03-30 | 열전 모듈 |
KR10-2017-0040553 | 2017-03-30 | ||
PCT/KR2017/015484 WO2018182139A1 (ko) | 2017-03-30 | 2017-12-26 | 열전 모듈 |
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JP6820084B2 true JP6820084B2 (ja) | 2021-01-27 |
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US (1) | US11309477B2 (ja) |
EP (1) | EP3553838B1 (ja) |
JP (1) | JP6820084B2 (ja) |
KR (1) | KR102125051B1 (ja) |
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CN110635020B (zh) * | 2019-08-30 | 2021-05-25 | 中国科学院物理研究所 | 一种镁锑基热电元件及其制备方法和应用 |
CN111014929B (zh) * | 2019-12-28 | 2021-04-20 | 哈尔滨工业大学 | 一种用于方钴矿热电材料与电极的快速扩散焊连接方法 |
Family Cites Families (24)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3484960B2 (ja) | 1997-12-22 | 2004-01-06 | 松下電工株式会社 | 熱電変換素子及び熱電変換素子の製造方法 |
JP2001028462A (ja) * | 1999-07-13 | 2001-01-30 | Yamaha Corp | 熱電素子及び熱電素子の製造方法 |
US7074640B2 (en) * | 2000-06-06 | 2006-07-11 | Simon Fraser University | Method of making barrier layers |
JP2003092435A (ja) * | 2001-09-17 | 2003-03-28 | Komatsu Ltd | 熱電モジュール及びその製造方法 |
US7321157B2 (en) * | 2004-07-23 | 2008-01-22 | Gm Global Technology Operations, Inc. | CoSb3-based thermoelectric device fabrication method |
JP4810652B2 (ja) | 2004-10-18 | 2011-11-09 | 国立大学法人山口大学 | 熱電変換モジュール |
JP4686171B2 (ja) * | 2004-10-29 | 2011-05-18 | 株式会社東芝 | 熱−電気直接変換装置 |
JP2008010612A (ja) | 2006-06-29 | 2008-01-17 | Komatsu Ltd | 熱電素子及びその製造方法、並びに、熱電モジュール |
CN100524867C (zh) * | 2007-08-10 | 2009-08-05 | 中国科学院上海硅酸盐研究所 | 一种锑化钴基热电器件的制造方法 |
US20090173082A1 (en) * | 2007-12-14 | 2009-07-09 | Matthew Rubin | Novel solid state thermovoltaic device for isothermal power generation and cooling |
CN101447548B (zh) * | 2008-12-26 | 2011-03-30 | 中国科学院上海硅酸盐研究所 | 热电器件的制作方法 |
CN101847686A (zh) | 2009-03-26 | 2010-09-29 | 中国科学院上海硅酸盐研究所 | 热电器件、电极材料及其制作方法 |
US20120104346A1 (en) * | 2010-10-29 | 2012-05-03 | Wei Yi | Semiconductor device for providing heat management |
US8841540B2 (en) | 2011-08-03 | 2014-09-23 | Marlow Industries, Inc. | High temperature thermoelectrics |
KR20140050390A (ko) * | 2012-10-19 | 2014-04-29 | 삼성전자주식회사 | 열전모듈, 이를 구비한 열전장치, 및 열전모듈의 제조방법 |
JP2014086623A (ja) * | 2012-10-25 | 2014-05-12 | Furukawa Co Ltd | 熱電変換モジュール |
US20140137917A1 (en) * | 2012-11-19 | 2014-05-22 | King Fahd University Of Petroleum And Minerals | Thermoelectric module with bi-tapered thermoelectric pins |
JP6171513B2 (ja) * | 2013-04-10 | 2017-08-02 | 日立化成株式会社 | 熱電変換モジュールおよびその製造方法 |
CN103311262B (zh) * | 2013-06-09 | 2015-12-30 | 中国华能集团清洁能源技术研究院有限公司 | 微型热电器件、制作方法及包括其的温差发电机 |
JP6078438B2 (ja) | 2013-08-30 | 2017-02-08 | 株式会社Kelk | 熱電発電モジュール |
CN103531704B (zh) * | 2013-10-31 | 2020-01-21 | 中国科学院上海硅酸盐研究所 | 方钴矿热电单偶元件用电极与封装材料及一步法连接工艺 |
KR101673528B1 (ko) | 2015-04-24 | 2016-11-21 | 이기호 | 건조 및 세척기능을 구비하는 그리스트랩 |
KR101734817B1 (ko) * | 2015-04-24 | 2017-05-12 | 한국세라믹기술원 | 그래핀-열전소재 복합체를 이용한 열전 모듈 |
KR20170040663A (ko) | 2015-10-05 | 2017-04-13 | (주)대주기업 | 셔터용 슬랫 |
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JP2020510990A (ja) | 2020-04-09 |
EP3553838A4 (en) | 2019-12-18 |
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CN110178234A (zh) | 2019-08-27 |
KR20180110795A (ko) | 2018-10-11 |
CN110178234B (zh) | 2023-02-07 |
WO2018182139A1 (ko) | 2018-10-04 |
EP3553838B1 (en) | 2020-08-05 |
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US11309477B2 (en) | 2022-04-19 |
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