JP6809157B2 - 酸化物焼結体及び酸化物透明導電膜 - Google Patents
酸化物焼結体及び酸化物透明導電膜 Download PDFInfo
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- JP6809157B2 JP6809157B2 JP2016223540A JP2016223540A JP6809157B2 JP 6809157 B2 JP6809157 B2 JP 6809157B2 JP 2016223540 A JP2016223540 A JP 2016223540A JP 2016223540 A JP2016223540 A JP 2016223540A JP 6809157 B2 JP6809157 B2 JP 6809157B2
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- oxide
- sintered body
- conductive film
- transparent conductive
- oxide sintered
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- 238000005477 sputtering target Methods 0.000 claims description 33
- 229910052715 tantalum Inorganic materials 0.000 claims description 33
- 229910052735 hafnium Inorganic materials 0.000 claims description 27
- 229910052738 indium Inorganic materials 0.000 claims description 26
- 238000004519 manufacturing process Methods 0.000 claims description 23
- 239000002245 particle Substances 0.000 claims description 22
- 238000004544 sputter deposition Methods 0.000 claims description 20
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 claims description 17
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 claims description 17
- VBJZVLUMGGDVMO-UHFFFAOYSA-N hafnium atom Chemical compound [Hf] VBJZVLUMGGDVMO-UHFFFAOYSA-N 0.000 claims description 16
- 239000013078 crystal Substances 0.000 claims description 13
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims description 10
- 229910052760 oxygen Inorganic materials 0.000 claims description 10
- 239000001301 oxygen Substances 0.000 claims description 10
- 239000012535 impurity Substances 0.000 claims description 5
- 239000000470 constituent Substances 0.000 claims description 3
- 239000010408 film Substances 0.000 description 85
- 238000000034 method Methods 0.000 description 46
- 239000000843 powder Substances 0.000 description 33
- 238000000465 moulding Methods 0.000 description 22
- 239000000203 mixture Substances 0.000 description 18
- 239000000463 material Substances 0.000 description 15
- 238000002156 mixing Methods 0.000 description 15
- 239000002585 base Substances 0.000 description 13
- 239000000758 substrate Substances 0.000 description 13
- 239000011812 mixed powder Substances 0.000 description 12
- 230000015572 biosynthetic process Effects 0.000 description 11
- 238000010304 firing Methods 0.000 description 11
- 238000005245 sintering Methods 0.000 description 11
- 239000011324 bead Substances 0.000 description 9
- 238000001035 drying Methods 0.000 description 9
- 239000011521 glass Substances 0.000 description 9
- 229910052751 metal Inorganic materials 0.000 description 9
- 239000000047 product Substances 0.000 description 8
- 238000002834 transmittance Methods 0.000 description 8
- 239000011347 resin Substances 0.000 description 7
- 229920005989 resin Polymers 0.000 description 7
- MCMNRKCIXSYSNV-UHFFFAOYSA-N Zirconium dioxide Chemical compound O=[Zr]=O MCMNRKCIXSYSNV-UHFFFAOYSA-N 0.000 description 6
- 230000000052 comparative effect Effects 0.000 description 6
- 229910003437 indium oxide Inorganic materials 0.000 description 6
- PJXISJQVUVHSOJ-UHFFFAOYSA-N indium(iii) oxide Chemical compound [O-2].[O-2].[O-2].[In+3].[In+3] PJXISJQVUVHSOJ-UHFFFAOYSA-N 0.000 description 6
- 238000001755 magnetron sputter deposition Methods 0.000 description 6
- 239000002994 raw material Substances 0.000 description 6
- 229910006404 SnO 2 Inorganic materials 0.000 description 5
- 229910000449 hafnium oxide Inorganic materials 0.000 description 5
- WIHZLLGSGQNAGK-UHFFFAOYSA-N hafnium(4+);oxygen(2-) Chemical compound [O-2].[O-2].[Hf+4] WIHZLLGSGQNAGK-UHFFFAOYSA-N 0.000 description 5
- 238000005259 measurement Methods 0.000 description 5
- 230000003287 optical effect Effects 0.000 description 5
- BPUBBGLMJRNUCC-UHFFFAOYSA-N oxygen(2-);tantalum(5+) Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ta+5].[Ta+5] BPUBBGLMJRNUCC-UHFFFAOYSA-N 0.000 description 5
- 229920006254 polymer film Polymers 0.000 description 5
- 238000003756 stirring Methods 0.000 description 5
- 229910001936 tantalum oxide Inorganic materials 0.000 description 5
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 4
- 230000002159 abnormal effect Effects 0.000 description 4
- 239000003513 alkali Substances 0.000 description 4
- 239000004973 liquid crystal related substance Substances 0.000 description 4
- 239000002184 metal Substances 0.000 description 4
- MYMOFIZGZYHOMD-UHFFFAOYSA-N Dioxygen Chemical compound O=O MYMOFIZGZYHOMD-UHFFFAOYSA-N 0.000 description 3
- 239000004677 Nylon Substances 0.000 description 3
- 239000000654 additive Substances 0.000 description 3
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 3
- 238000001354 calcination Methods 0.000 description 3
- 238000011156 evaluation Methods 0.000 description 3
- 238000001914 filtration Methods 0.000 description 3
- 239000007789 gas Substances 0.000 description 3
- 229920001778 nylon Polymers 0.000 description 3
- 239000010453 quartz Substances 0.000 description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 3
- 239000002002 slurry Substances 0.000 description 3
- 239000000243 solution Substances 0.000 description 3
- 238000001694 spray drying Methods 0.000 description 3
- 239000010409 thin film Substances 0.000 description 3
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 2
- 230000000996 additive effect Effects 0.000 description 2
- 229910052786 argon Inorganic materials 0.000 description 2
- 239000000919 ceramic Substances 0.000 description 2
- 238000005336 cracking Methods 0.000 description 2
- 229910001882 dioxygen Inorganic materials 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 230000031700 light absorption Effects 0.000 description 2
- 238000010907 mechanical stirring Methods 0.000 description 2
- 239000006259 organic additive Substances 0.000 description 2
- 238000013001 point bending Methods 0.000 description 2
- 238000002360 preparation method Methods 0.000 description 2
- 239000011164 primary particle Substances 0.000 description 2
- 238000004904 shortening Methods 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- 238000007088 Archimedes method Methods 0.000 description 1
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 1
- BVKZGUZCCUSVTD-UHFFFAOYSA-L Carbonate Chemical compound [O-]C([O-])=O BVKZGUZCCUSVTD-UHFFFAOYSA-L 0.000 description 1
- VEXZGXHMUGYJMC-UHFFFAOYSA-M Chloride anion Chemical compound [Cl-] VEXZGXHMUGYJMC-UHFFFAOYSA-M 0.000 description 1
- VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 description 1
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 1
- 229910002651 NO3 Inorganic materials 0.000 description 1
- NHNBFGGVMKEFGY-UHFFFAOYSA-N Nitrate Chemical compound [O-][N+]([O-])=O NHNBFGGVMKEFGY-UHFFFAOYSA-N 0.000 description 1
- 238000010521 absorption reaction Methods 0.000 description 1
- 150000004703 alkoxides Chemical class 0.000 description 1
- 238000005266 casting Methods 0.000 description 1
- 238000003486 chemical etching Methods 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 239000010432 diamond Substances 0.000 description 1
- 229910003460 diamond Inorganic materials 0.000 description 1
- 229910001873 dinitrogen Inorganic materials 0.000 description 1
- 238000004453 electron probe microanalysis Methods 0.000 description 1
- 238000004993 emission spectroscopy Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000002438 flame photometric detection Methods 0.000 description 1
- 238000005469 granulation Methods 0.000 description 1
- 230000003179 granulation Effects 0.000 description 1
- CJNBYAVZURUTKZ-UHFFFAOYSA-N hafnium(iv) oxide Chemical compound O=[Hf]=O CJNBYAVZURUTKZ-UHFFFAOYSA-N 0.000 description 1
- 230000020169 heat generation Effects 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 230000002706 hydrostatic effect Effects 0.000 description 1
- AMGQUBHHOARCQH-UHFFFAOYSA-N indium;oxotin Chemical compound [In].[Sn]=O AMGQUBHHOARCQH-UHFFFAOYSA-N 0.000 description 1
- 239000011261 inert gas Substances 0.000 description 1
- 238000001659 ion-beam spectroscopy Methods 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 230000014759 maintenance of location Effects 0.000 description 1
- 238000005457 optimization Methods 0.000 description 1
- 239000011368 organic material Substances 0.000 description 1
- 230000000704 physical effect Effects 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 229920000307 polymer substrate Polymers 0.000 description 1
- 238000009700 powder processing Methods 0.000 description 1
- 239000002244 precipitate Substances 0.000 description 1
- 238000001552 radio frequency sputter deposition Methods 0.000 description 1
- 238000005057 refrigeration Methods 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 238000012552 review Methods 0.000 description 1
- 230000000630 rising effect Effects 0.000 description 1
- 239000012266 salt solution Substances 0.000 description 1
- 150000003839 salts Chemical class 0.000 description 1
- 238000005488 sandblasting Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 230000003746 surface roughness Effects 0.000 description 1
Classifications
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- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/22—Surface treatment of glass, not in the form of fibres or filaments, by coating with other inorganic material
- C03C17/23—Oxides
- C03C17/245—Oxides by deposition from the vapour phase
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- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
- C23C14/3407—Cathode assembly for sputtering apparatus, e.g. Target
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- C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
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- C04B35/01—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics
- C04B35/495—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics based on vanadium, niobium, tantalum, molybdenum or tungsten oxides or solid solutions thereof with other oxides, e.g. vanadates, niobates, tantalates, molybdates or tungstates
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- C04B35/62605—Treating the starting powders individually or as mixtures
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- C23C14/08—Oxides
- C23C14/083—Oxides of refractory metals or yttrium
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- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
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- C23C14/086—Oxides of zinc, germanium, cadmium, indium, tin, thallium or bismuth
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- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
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- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
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- H01B1/00—Conductors or conductive bodies characterised by the conductive materials; Selection of materials as conductors
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- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
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- H01L31/02—Details
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- H01L31/022466—Electrodes made of transparent conductive layers, e.g. TCO, ITO layers
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- H01L31/0248—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies
- H01L31/0256—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies characterised by the material
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Description
(1) 構成元素としてインジウム、ハフニウム、タンタル及び酸素を有する酸化物焼結体であって、インジウム、ハフニウム及びタンタルをそれぞれIn、Hf及びTaとしたときに、原子比でHf/(In+Hf+Ta)が0.2〜3.0at%、Ta/(In+Hf+Ta)が0.02〜1.3at%であることを特徴とする酸化物焼結体。
(2) 酸化物焼結体の相対密度が97%以上であり、かつ平均結晶粒子径が8μm以下であることを特徴とする上記(1)に記載の酸化物焼結体。
(3) 不可避的な不純物を1at%未満含んでなることを特徴とする上記(1)又は上記(2)に記載の酸化物焼結体、
(4) 上記(1)乃至上記(3)に記載の酸化物焼結体からなることを特徴とするスパッタリングターゲット、
(5) 上記(4)に記載のスパッタリングターゲットを用いてスパッタリングすることを特徴とする酸化物透明導電膜の製造方法、
(6) インジウム、ハフニウム及びタンタルをそれぞれIn、Hf及びTaとしたときに、原子比でHf/(In+Hf+Ta)が0.2〜3.0at%、Ta/(In+Hf+Ta)が0.02〜1.3at%であることを特徴とする酸化物透明導電膜、
に関するものである。
酸化物焼結体の焼結密度B(g/cm3)は、JIS−R1634−1998に準拠してアルキメデス法で測定した。
本発明の酸化物焼結体の平均結晶粒子径は好ましくは8μm以下、さらに好ましくは6μm以下である。このような平均結晶粒子径とすることにより、酸化物焼結体の強度を高めることが可能となる。平均結晶粒子径の下限は、製造の容易性の観点から、好ましくは0.01μmであり、より好ましくは0.5μmであり、さらに好ましくは2μmである。
表1に示す組成に従い、以下の方法で焼結体、スパッタリングターゲット、透明導電膜を作製した。
原料粉末として、純度99.99重量%、平均粒径0.5μmの酸化インジウム粉末、純度99.9重量%、平均粒径0.2μmの酸化ハフニウム粉末、純度99.9重量%、平均粒径0.2μmの酸化タンタル粉末を準備した。表1に記載された原子比となるように、これらの原料粉末を秤量して乾式ボールミルで混合し、成形用の混合粉末を得た。混合粉末の平均粒径は0.2μmであった。
・昇温速度 :50℃/時間
・焼結保持温度 :1600℃
・保持時間 :5時間
・焼結雰囲気 :昇温開始前(室温)から降温時の100℃に到達するまで純酸素ガスを炉内に導入
・降温速度 :100℃/時間
・成形体の重量/酸素流量:0.9[kg/(L/min)]
<酸化物焼結体の評価>
(組成)
各実施例、各比較例及び各参考例の酸化物焼結体の組成を、市販のICP発光分析装置を用いて、ICP発光分析法により定量した。そして、原子比を求めた。その結果を表1に示す。なお、酸化物焼結体の組成は、成形用の混合粉末の組成とほぼ同一であった。
各実施例、各比較例及び各参考例の酸化物焼結体の相対密度を求めた。相対密度は、酸化物焼結体の理論密度をA、焼結密度をBとしたとき、下記式によって求められる値である。理論密度A及び焼結密度Bの測定方法は上述のとおりである。測定結果を表1に示す。
(平均結晶粒子径)
各実施例、各比較例及び各参考例の酸化物焼結体を構成する結晶粒子の平均結晶粒子径を測定した。平均結晶粒子径の測定方法は、上述のとおりである。ただし、酸化物焼結体の研磨面の観察写真(倍率:1000〜5000倍)は、走査電子顕微鏡を用いて撮影した。この観察写真において、粒子500個の長径を求めた。求めた長径の算術平均値を平均結晶粒子径とした。測定結果を表1に示す。
焼結体の強度は、JIS−R−1601に準拠して三点曲げ強度を測定した。
各実施例、各比較例及び各参考例で作製した酸化物焼結体を、円板形状(直径:4インチ=101.6mm)に加工した。スパッタリングターゲットとして用いる際にスパッタリング面となる面は、平面研削盤とダイヤモンド砥石を用いて研磨した。研磨の際に砥石の番手を変えることにより、中心線平均粗さ(Ra)を調整した。このようにしてスパッタリングターゲットを作製した。作製したスパッタリングターゲットのスパッタリング面のRaを、市販の表面性状測定装置(装置名 サーフテストSV−3100 ミツトヨ製)を用いて測定した。その結果は表1に示す通りであった。
・装置 :DCマグネトロンスパッタ装置
・磁界強度 :1000Gauss(ターゲット直上、水平成分)
・基板温度 :室温(25℃)
・到達真空度 :8×10−5Pa
・製膜時の雰囲気 :アルゴン
・スパッタリング時のガス圧:0.5Pa
・DCパワー :200W
・膜厚 :30nm
・使用基板 :無アルカリガラス(コーニング社製EAGLE XGガラス 厚さ0.7mm)
(製膜後の後処理条件)
製膜後に、透明導電膜付基板を大気中、150℃で60分間加熱する熱処理を行った。このときの昇温速度は50℃/minとした。
(膜厚)
薄膜の厚さはDEKTAK3030(スローン社製)を用いて測定した。
薄膜の抵抗率は、HL5500(日本バイオ・ラッド ラボラトリーズ社製)を用いて測定した。
基板上に酸化物透明導電膜が形成された試料の光透過率は、分光光度計(商品名:U−4100、株式会社 日立ハイテクノロジーズ社製)を用いて、波長240nmから2600nmの範囲を測定し、表示デバイスで重要となる波長400〜800nmにおける光透過率の平均値を示した。
表1に示す組成に従い、実施例1〜20と同様の方法で焼結体、スパッタリングターゲット、透明導電膜を作製した。
表1に示す組成に従い、焼成時の保持時間を15時間とし、それ以外の条件は実施例1〜20と同様の方法で焼結体、スパッタリングターゲット、透明導電膜を作製した。
表1に示す組成に従い、焼成時の保持時間を25時間とし、それ以外の条件は実施例1〜20と同様の方法で焼結体、スパッタリングターゲット、透明導電膜を作製した。
添加元素をSnとし、実施例1〜20と同様の方法で焼結体、スパッタリングターゲット、透明導電膜を作製した。評価結果を表2に示す。この結果から本発明は、現在一般的に用いられているSnを添加したIn2O3(ITO)と比較しても低温プロセスで低い抵抗を達成することが可能であることが分かる。
Claims (6)
- 構成元素としてインジウム、ハフニウム、タンタル及び酸素からなる酸化物焼結体であって、インジウム、ハフニウム及びタンタルをそれぞれIn、Hf及びTaとしたときに、原子比でHf/(In+Hf+Ta)が0.2〜3.0at%、Ta/(In+Hf+Ta)が0.02〜1.0at%未満であることを特徴とする酸化物焼結体。
- 酸化物焼結体の相対密度が97%以上であり、かつ平均結晶粒子径が8μm以下であることを特徴とする請求項1に記載の酸化物焼結体。
- 不可避的な不純物を1at%未満含んでなることを特徴とする請求項1又は2に記載の酸化物焼結体。
- 請求項1乃至3に記載の酸化物焼結体からなることを特徴とするスパッタリングターゲット。
- 請求項4に記載のスパッタリングターゲットを用いてスパッタリングすることを特徴とする酸化物透明導電膜の製造方法。
- インジウム、ハフニウム及びタンタルからなり、それぞれIn、Hf及びTaとしたときに、原子比でHf/(In+Hf+Ta)が0.2〜3.0at%、Ta/(In+Hf+Ta)が0.02〜1.0at%未満であることを特徴とする酸化物透明導電膜。
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