JP6796652B2 - SiCエピタキシャル成長炉系における三フッ化塩素クリーニング残渣除去方法 - Google Patents
SiCエピタキシャル成長炉系における三フッ化塩素クリーニング残渣除去方法 Download PDFInfo
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- JP6796652B2 JP6796652B2 JP2018539461A JP2018539461A JP6796652B2 JP 6796652 B2 JP6796652 B2 JP 6796652B2 JP 2018539461 A JP2018539461 A JP 2018539461A JP 2018539461 A JP2018539461 A JP 2018539461A JP 6796652 B2 JP6796652 B2 JP 6796652B2
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- Prior art keywords
- gas
- epitaxial growth
- growth furnace
- chlorine trifluoride
- cleaning
- Prior art date
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Classifications
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- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
- C30B29/10—Inorganic compounds or compositions
- C30B29/36—Carbides
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
- C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
- C23C16/42—Silicides
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B25/00—Single-crystal growth by chemical reaction of reactive gases, e.g. chemical vapour-deposition growth
- C30B25/02—Epitaxial-layer growth
- C30B25/14—Feed and outlet means for the gases; Modifying the flow of the reactive gases
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- Mechanical Engineering (AREA)
- Inorganic Chemistry (AREA)
- Chemical Vapour Deposition (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Description
Si+3HCl→SiHCl3+H2
この結果、ウエハの生産性を向上させることができる。
Claims (1)
- SiC成膜を行うエピタキシャル成長炉とそのステンレス製の排気配管であって接ガス面にステンレスが露出したものとを含むSiCエピタキシャル成長炉系を三フッ化塩素ガスによりクリーニングした後の排気配管内の三フッ化塩素クリーニング残渣を除去する方法であって、
三フッ化塩素ガスによるクリーニング終了後、SiC成膜工程においてエピタキシャル成長炉内に原料ガスとともに塩化水素ガスを導入することによりSiCの成膜を行うとともに、成膜処理終了後のガスを排気配管を通じて排出することにより同排気配管内の三フッ化塩素クリーニング残渣を除去することを特徴とする、SiCエピタキシャル成長炉系における三フッ化塩素クリーニング残渣除去方法。
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
PCT/JP2016/077330 WO2018051472A1 (ja) | 2016-09-15 | 2016-09-15 | SiCエピタキシャル成長炉系における三フッ化塩素クリーニング残渣除去方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPWO2018051472A1 JPWO2018051472A1 (ja) | 2019-06-27 |
JP6796652B2 true JP6796652B2 (ja) | 2020-12-09 |
Family
ID=61618703
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2018539461A Active JP6796652B2 (ja) | 2016-09-15 | 2016-09-15 | SiCエピタキシャル成長炉系における三フッ化塩素クリーニング残渣除去方法 |
Country Status (3)
Country | Link |
---|---|
JP (1) | JP6796652B2 (ja) |
SG (1) | SG11201901641UA (ja) |
WO (1) | WO2018051472A1 (ja) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN114959887B (zh) * | 2022-05-31 | 2024-04-30 | 云南临沧鑫圆锗业股份有限公司 | 利用碳化硅长晶余料进行晶体生长的方法 |
Family Cites Families (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2012080035A (ja) * | 2010-10-06 | 2012-04-19 | Hitachi Kokusai Electric Inc | 基板処理装置及び基板製造方法 |
JP2012175072A (ja) * | 2011-02-24 | 2012-09-10 | Hitachi Kokusai Electric Inc | 基板処理装置 |
JP2014179550A (ja) * | 2013-03-15 | 2014-09-25 | Hitachi Kokusai Electric Inc | 基板処理装置 |
-
2016
- 2016-09-15 WO PCT/JP2016/077330 patent/WO2018051472A1/ja active Application Filing
- 2016-09-15 JP JP2018539461A patent/JP6796652B2/ja active Active
- 2016-09-15 SG SG11201901641UA patent/SG11201901641UA/en unknown
Also Published As
Publication number | Publication date |
---|---|
SG11201901641UA (en) | 2019-03-28 |
WO2018051472A1 (ja) | 2018-03-22 |
JPWO2018051472A1 (ja) | 2019-06-27 |
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