JP6795137B2 - 電子素子内蔵型印刷回路基板の製造方法 - Google Patents
電子素子内蔵型印刷回路基板の製造方法 Download PDFInfo
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- JP6795137B2 JP6795137B2 JP2016003835A JP2016003835A JP6795137B2 JP 6795137 B2 JP6795137 B2 JP 6795137B2 JP 2016003835 A JP2016003835 A JP 2016003835A JP 2016003835 A JP2016003835 A JP 2016003835A JP 6795137 B2 JP6795137 B2 JP 6795137B2
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- 238000005530 etching Methods 0.000 claims description 9
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 5
- 229910052802 copper Inorganic materials 0.000 claims description 5
- 239000010949 copper Substances 0.000 claims description 5
- 239000000654 additive Substances 0.000 claims description 3
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- 230000003044 adaptive effect Effects 0.000 claims description 2
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- 238000010586 diagram Methods 0.000 description 5
- 238000009413 insulation Methods 0.000 description 5
- 239000011810 insulating material Substances 0.000 description 3
- 238000003475 lamination Methods 0.000 description 3
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- JYEUMXHLPRZUAT-UHFFFAOYSA-N 1,2,3-triazine Chemical compound C1=CN=NN=C1 JYEUMXHLPRZUAT-UHFFFAOYSA-N 0.000 description 1
- XQUPVDVFXZDTLT-UHFFFAOYSA-N 1-[4-[[4-(2,5-dioxopyrrol-1-yl)phenyl]methyl]phenyl]pyrrole-2,5-dione Chemical compound O=C1C=CC(=O)N1C(C=C1)=CC=C1CC1=CC=C(N2C(C=CC2=O)=O)C=C1 XQUPVDVFXZDTLT-UHFFFAOYSA-N 0.000 description 1
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/46—Manufacturing multilayer circuits
- H05K3/4697—Manufacturing multilayer circuits having cavities, e.g. for mounting components
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K1/00—Printed circuits
- H05K1/18—Printed circuits structurally associated with non-printed electric components
- H05K1/182—Printed circuits structurally associated with non-printed electric components associated with components mounted in the printed circuit board, e.g. insert mounted components [IMC]
- H05K1/185—Components encapsulated in the insulating substrate of the printed circuit or incorporated in internal layers of a multilayer circuit
- H05K1/186—Components encapsulated in the insulating substrate of the printed circuit or incorporated in internal layers of a multilayer circuit manufactured by mounting on or connecting to patterned circuits before or during embedding
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K1/00—Printed circuits
- H05K1/02—Details
- H05K1/0201—Thermal arrangements, e.g. for cooling, heating or preventing overheating
- H05K1/0203—Cooling of mounted components
- H05K1/0207—Cooling of mounted components using internal conductor planes parallel to the surface for thermal conduction, e.g. power planes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/02—Bonding areas; Manufacturing methods related thereto
- H01L2224/04—Structure, shape, material or disposition of the bonding areas prior to the connecting process
- H01L2224/04105—Bonding areas formed on an encapsulation of the semiconductor or solid-state body, e.g. bonding areas on chip-scale packages
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/18—High density interconnect [HDI] connectors; Manufacturing methods related thereto
- H01L2224/23—Structure, shape, material or disposition of the high density interconnect connectors after the connecting process
- H01L2224/25—Structure, shape, material or disposition of the high density interconnect connectors after the connecting process of a plurality of high density interconnect connectors
- H01L2224/251—Disposition
- H01L2224/2518—Disposition being disposed on at least two different sides of the body, e.g. dual array
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/80—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
- H01L2224/82—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected by forming build-up interconnects at chip-level, e.g. for high density interconnects [HDI]
- H01L2224/82009—Pre-treatment of the connector or the bonding area
- H01L2224/8203—Reshaping, e.g. forming vias
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/91—Methods for connecting semiconductor or solid state bodies including different methods provided for in two or more of groups H01L2224/80 - H01L2224/90
- H01L2224/92—Specific sequence of method steps
- H01L2224/921—Connecting a surface with connectors of different types
- H01L2224/9212—Sequential connecting processes
- H01L2224/92142—Sequential connecting processes the first connecting process involving a layer connector
- H01L2224/92144—Sequential connecting processes the first connecting process involving a layer connector the second connecting process involving a build-up interconnect
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/15—Details of package parts other than the semiconductor or other solid state devices to be connected
- H01L2924/151—Die mounting substrate
- H01L2924/1515—Shape
- H01L2924/15153—Shape the die mounting substrate comprising a recess for hosting the device
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K1/00—Printed circuits
- H05K1/18—Printed circuits structurally associated with non-printed electric components
- H05K1/182—Printed circuits structurally associated with non-printed electric components associated with components mounted in the printed circuit board, e.g. insert mounted components [IMC]
- H05K1/185—Components encapsulated in the insulating substrate of the printed circuit or incorporated in internal layers of a multilayer circuit
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- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Manufacturing & Machinery (AREA)
- Production Of Multi-Layered Print Wiring Board (AREA)
Description
先ず、本発明の第1実施例に係る電子素子内蔵型印刷回路基板について、図面を参照して具体的に説明する。ここで、参照する図面に記載されていない図面符号は、同一の構成を示す他の図面での図面符号であり得る。
図8は、本発明の第1実施例に係る電子素子内蔵型印刷回路基板の製造方法を示す順序図であり、図9aから図9kは、第1実施例に係る電子素子内蔵型印刷回路基板の製造方法を概略的に示す図である。
10 デタッチコア
11 金属箔
20 金属層
21 金属ブロック
31 金属薄膜層
40 ドライフィルム
50 トレンチ
110、410 第1絶縁層
115、415 第2絶縁層
120、420、720 電子素子
130、230、330、440、540、640 回路層
240、550 第3絶縁層
360、670 第4絶縁層
Claims (8)
- キャリア部材の両面上に第1金属ブロックを形成するステップ(A)と、
前記第1金属ブロックが埋め込まれるように、前記キャリア部材の両面上に第1絶縁層を形成するステップ(B)と、
前記第1金属ブロックの埋め込まれた前記第1絶縁層を前記キャリア部材から分離するステップ(C)と、
前記第1絶縁層に埋め込まれた第1金属ブロックをエッチングしてトレンチを形成するステップ(D)と、
前記トレンチに電子素子を実装するステップ(E)と、
を含む電子素子内蔵型印刷回路基板の製造方法。 - 前記ステップ(E)の後に、
前記電子素子が埋め込まれるように、前記第1絶縁層上に第2絶縁層を形成するステップ(F)と、
前記第1絶縁層及び第2絶縁層にビアと回路層とを形成するステップ(G)と、をさらに含む請求項1に記載の電子素子内蔵型印刷回路基板の製造方法。 - 前記ステップ(B)は、前記第1絶縁層上に金属薄膜層を形成するステップを含む請求項1または請求項2に記載の電子素子内蔵型印刷回路基板の製造方法。
- 前記第1金属ブロックは、銅で形成される請求項1から請求項3のいずれか1項に記載の電子素子内蔵型印刷回路基板の製造方法。
- 前記キャリア部材の両面に形成される第1金属ブロックの厚さは、電子素子の高さに対応して形成される請求項1から請求項4のいずれか1項に記載の電子素子内蔵型印刷回路基板の製造方法。
- 前記第1金属ブロックは、複数形成される請求項1から請求項5のいずれか1項に記載の電子素子内蔵型印刷回路基板の製造方法。
- 前記ステップ(A)は、前記キャリア部材の両面に放熱板用の第2金属ブロックを形成するステップを含む請求項1から請求項6のいずれか1項に記載の電子素子内蔵型印刷回路基板の製造方法。
- 前記第1金属ブロックは、サブトラクティブ(Subtractive)法、アディティブ(Additive)法、SAP(Semi Addiitive process)法のうちのいずれか1つにより形成される請求項1から請求項7のいずれか1項に記載の電子素子内蔵型印刷回路基板の製造方法。
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
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KR1020150010657A KR20160090625A (ko) | 2015-01-22 | 2015-01-22 | 전자소자내장형 인쇄회로기판 및 그 제조방법 |
KR10-2015-0010657 | 2015-01-22 |
Publications (2)
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JP2016134624A JP2016134624A (ja) | 2016-07-25 |
JP6795137B2 true JP6795137B2 (ja) | 2020-12-02 |
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JP2016003835A Active JP6795137B2 (ja) | 2015-01-22 | 2016-01-12 | 電子素子内蔵型印刷回路基板の製造方法 |
Country Status (3)
Country | Link |
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US (1) | US20160219713A1 (ja) |
JP (1) | JP6795137B2 (ja) |
KR (1) | KR20160090625A (ja) |
Families Citing this family (7)
Publication number | Priority date | Publication date | Assignee | Title |
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US10068181B1 (en) | 2015-04-27 | 2018-09-04 | Rigetti & Co, Inc. | Microwave integrated quantum circuits with cap wafer and methods for making the same |
KR102425754B1 (ko) * | 2017-05-24 | 2022-07-28 | 삼성전기주식회사 | 전자부품 내장 인쇄회로기판 |
US11121301B1 (en) | 2017-06-19 | 2021-09-14 | Rigetti & Co, Inc. | Microwave integrated quantum circuits with cap wafers and their methods of manufacture |
US10797017B2 (en) * | 2018-03-20 | 2020-10-06 | Unimicron Technology Corp. | Embedded chip package, manufacturing method thereof, and package-on-package structure |
JPWO2019198241A1 (ja) * | 2018-04-13 | 2021-04-15 | 株式会社メイコー | 部品内蔵基板の製造方法及び部品内蔵基板 |
KR102662847B1 (ko) * | 2019-09-30 | 2024-05-03 | 삼성전기주식회사 | 인쇄회로기판 |
CN111683475B (zh) * | 2020-06-29 | 2022-08-26 | 四川海英电子科技有限公司 | 一种复合式高频电路板的生产方法 |
Family Cites Families (5)
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JP2008243925A (ja) * | 2007-03-26 | 2008-10-09 | Cmk Corp | 半導体装置及びその製造方法 |
JP5493660B2 (ja) * | 2009-09-30 | 2014-05-14 | 日本電気株式会社 | 機能素子内蔵基板及びその製造方法、並びに電子機器 |
KR101095130B1 (ko) * | 2009-12-01 | 2011-12-16 | 삼성전기주식회사 | 전자부품 내장형 인쇄회로기판 및 그 제조방법 |
US8314480B2 (en) | 2010-02-08 | 2012-11-20 | Fairchild Semiconductor Corporation | Stackable semiconductor package with embedded die in pre-molded carrier frame |
KR101472640B1 (ko) * | 2012-12-31 | 2014-12-15 | 삼성전기주식회사 | 회로 기판 및 회로 기판 제조방법 |
-
2015
- 2015-01-22 KR KR1020150010657A patent/KR20160090625A/ko not_active Application Discontinuation
-
2016
- 2016-01-12 JP JP2016003835A patent/JP6795137B2/ja active Active
- 2016-01-21 US US15/003,295 patent/US20160219713A1/en not_active Abandoned
Also Published As
Publication number | Publication date |
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JP2016134624A (ja) | 2016-07-25 |
US20160219713A1 (en) | 2016-07-28 |
KR20160090625A (ko) | 2016-08-01 |
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