JP6787437B2 - ピエゾリングジャイロスコープ - Google Patents

ピエゾリングジャイロスコープ Download PDF

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Publication number
JP6787437B2
JP6787437B2 JP2019083922A JP2019083922A JP6787437B2 JP 6787437 B2 JP6787437 B2 JP 6787437B2 JP 2019083922 A JP2019083922 A JP 2019083922A JP 2019083922 A JP2019083922 A JP 2019083922A JP 6787437 B2 JP6787437 B2 JP 6787437B2
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JP
Japan
Prior art keywords
ring
axis
symmetry
mass
diagonal
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JP2019083922A
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English (en)
Japanese (ja)
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JP2019203884A5 (enExample
JP2019203884A (ja
Inventor
ヘイッキ・クイスマ
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Murata Manufacturing Co Ltd
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Murata Manufacturing Co Ltd
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Publication of JP2019203884A5 publication Critical patent/JP2019203884A5/ja
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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/567—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using the phase shift of a vibration node or antinode
    • G01C19/5677—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using the phase shift of a vibration node or antinode of essentially two-dimensional vibrators, e.g. ring-shaped vibrators
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/567—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using the phase shift of a vibration node or antinode
    • G01C19/5677—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using the phase shift of a vibration node or antinode of essentially two-dimensional vibrators, e.g. ring-shaped vibrators
    • G01C19/5684—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using the phase shift of a vibration node or antinode of essentially two-dimensional vibrators, e.g. ring-shaped vibrators the devices involving a micromechanical structure
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/09—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by piezoelectric pick-up

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Gyroscopes (AREA)
  • Micromachines (AREA)
JP2019083922A 2018-05-08 2019-04-25 ピエゾリングジャイロスコープ Active JP6787437B2 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FI20185421 2018-05-08
FI20185421 2018-05-08

Publications (3)

Publication Number Publication Date
JP2019203884A JP2019203884A (ja) 2019-11-28
JP2019203884A5 JP2019203884A5 (enExample) 2020-10-01
JP6787437B2 true JP6787437B2 (ja) 2020-11-18

Family

ID=66334241

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2019083922A Active JP6787437B2 (ja) 2018-05-08 2019-04-25 ピエゾリングジャイロスコープ

Country Status (3)

Country Link
US (1) US11215455B2 (enExample)
EP (1) EP3575744B1 (enExample)
JP (1) JP6787437B2 (enExample)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US11668553B2 (en) * 2020-02-14 2023-06-06 Applied Materials Inc. Apparatus and method for controlling edge ring variation
CN114353776B (zh) * 2021-12-31 2025-02-21 瑞声开泰科技(武汉)有限公司 一种基于旋转模态的mems陀螺

Family Cites Families (25)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE69102590T2 (de) 1990-05-18 1994-10-06 British Aerospace Trägheitssensoren.
JPH10115526A (ja) * 1996-10-15 1998-05-06 Ngk Insulators Ltd 振動ジャイロ・センサ及び振動ジャイロ・センサの製造方法
JPH10132571A (ja) * 1996-10-25 1998-05-22 Murata Mfg Co Ltd 角速度センサ
GB2322196B (en) 1997-02-18 2000-10-18 British Aerospace A vibrating structure gyroscope
JP3942762B2 (ja) * 1998-02-12 2007-07-11 日本碍子株式会社 振動子、振動型ジャイロスコープ、直線加速度計および回転角速度の測定方法
JPH11304494A (ja) * 1998-04-22 1999-11-05 Meidensha Corp 振動ジャイロ及びその使用方法
JP2000009473A (ja) * 1998-06-22 2000-01-14 Tokai Rika Co Ltd ２軸ヨーレートセンサ及びその製造方法
GB0122254D0 (en) 2001-09-14 2001-11-07 Bae Systems Plc Vibratory gyroscopic rate sensor
US7281426B1 (en) * 2006-06-15 2007-10-16 Innalabs Technologies, Inc. Stemless hemispherical resonator gyroscope
EP2239541B1 (en) 2008-01-29 2013-10-23 Sumitomo Precision Products Co., Ltd. Vibrating gyroscope using piezoelectric film
JP5052674B2 (ja) * 2008-08-06 2012-10-17 パイオニア株式会社 回転振動型ジャイロ
US20100058861A1 (en) 2008-09-11 2010-03-11 Analog Devices, Inc. Piezoelectric Transducers and Inertial Sensors using Piezoelectric Transducers
JP5523755B2 (ja) 2009-02-11 2014-06-18 住友精密工業株式会社 圧電体膜を用いた振動ジャイロ及びその製造方法
DE102009001244A1 (de) 2009-02-27 2010-09-02 Sensordynamics Ag Mikro-Gyroskop zur Ermittlung von Rotationsbewegungen um eine x-, y- oder z-Achse
JP2011158319A (ja) * 2010-01-29 2011-08-18 Akebono Brake Ind Co Ltd 角速度センサ
CN103620343B (zh) * 2011-07-04 2016-06-08 株式会社村田制作所 振子及振动陀螺仪
EP2544370B1 (en) 2011-07-06 2020-01-01 Nxp B.V. MEMS resonator
FI126070B (en) * 2014-01-28 2016-06-15 Murata Manufacturing Co Improved ring gyroscope design and gyroscope
US10775168B2 (en) * 2014-12-01 2020-09-15 Sony Corporation Sensor device, gyro sensor, and electronic apparatus
US10113873B2 (en) * 2015-05-22 2018-10-30 The Charles Stark Draper Laboratory, Inc. Whole angle MEMS gyroscope
US10317210B2 (en) * 2015-05-22 2019-06-11 The Charles Stark Draper Laboratory, Inc. Whole angle MEMS gyroscope on hexagonal crystal substrate
CN104897145B (zh) 2015-05-29 2018-03-23 上海交通大学 一种外缘固定式压电驱动多环陀螺及其制备方法
US10809061B2 (en) * 2016-01-27 2020-10-20 Hitachi, Ltd. Vibratory gyroscope including a plurality of inertial bodies
WO2018157118A1 (en) * 2017-02-27 2018-08-30 The Charles Stark Draper Laboratory, Inc. Calibration system and method for whole angle gyroscope
JP6769517B2 (ja) * 2018-05-08 2020-10-14 株式会社村田製作所 ピエゾリングジャイロスコープ

Also Published As

Publication number Publication date
US11215455B2 (en) 2022-01-04
US20190346264A1 (en) 2019-11-14
EP3575744B1 (en) 2021-04-28
EP3575744A1 (en) 2019-12-04
JP2019203884A (ja) 2019-11-28

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