JP6774135B2 - クロム被覆を製造する方法および被覆物体 - Google Patents
クロム被覆を製造する方法および被覆物体 Download PDFInfo
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- 238000000576 coating method Methods 0.000 title claims description 97
- 239000011248 coating agent Substances 0.000 title claims description 77
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 title claims description 59
- 239000011651 chromium Substances 0.000 claims description 96
- 238000010438 heat treatment Methods 0.000 claims description 78
- PXHVJJICTQNCMI-UHFFFAOYSA-N nickel Substances [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 claims description 56
- 229910052804 chromium Inorganic materials 0.000 claims description 54
- 229910052751 metal Inorganic materials 0.000 claims description 51
- 239000002184 metal Substances 0.000 claims description 51
- 238000000034 method Methods 0.000 claims description 46
- 229910052759 nickel Inorganic materials 0.000 claims description 24
- 238000000151 deposition Methods 0.000 claims description 23
- 239000000919 ceramic Substances 0.000 claims description 14
- 229910001092 metal group alloy Inorganic materials 0.000 claims description 13
- 238000007747 plating Methods 0.000 claims description 12
- 229910052698 phosphorus Inorganic materials 0.000 claims description 11
- 229910052799 carbon Inorganic materials 0.000 claims description 8
- 239000007787 solid Substances 0.000 claims description 8
- 238000000427 thin-film deposition Methods 0.000 claims description 8
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 claims description 7
- 230000008021 deposition Effects 0.000 claims description 7
- 239000000203 mixture Substances 0.000 claims description 7
- 239000011574 phosphorus Substances 0.000 claims description 7
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 6
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 6
- 229910052802 copper Inorganic materials 0.000 claims description 6
- 239000010949 copper Substances 0.000 claims description 6
- 229910000881 Cu alloy Inorganic materials 0.000 claims description 5
- 229910001182 Mo alloy Inorganic materials 0.000 claims description 5
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 claims description 5
- 150000001247 metal acetylides Chemical class 0.000 claims description 5
- 229910044991 metal oxide Inorganic materials 0.000 claims description 5
- 150000004706 metal oxides Chemical class 0.000 claims description 5
- 239000011733 molybdenum Substances 0.000 claims description 5
- 229910052750 molybdenum Inorganic materials 0.000 claims description 5
- 150000004767 nitrides Chemical class 0.000 claims description 5
- OFNHPGDEEMZPFG-UHFFFAOYSA-N phosphanylidynenickel Chemical compound [P].[Ni] OFNHPGDEEMZPFG-UHFFFAOYSA-N 0.000 claims description 4
- 229910045601 alloy Inorganic materials 0.000 claims description 3
- 239000000956 alloy Substances 0.000 claims description 3
- 150000002739 metals Chemical class 0.000 claims description 3
- 229910001096 P alloy Inorganic materials 0.000 claims description 2
- 229910021332 silicide Inorganic materials 0.000 claims 2
- 239000000758 substrate Substances 0.000 description 20
- 229910000831 Steel Inorganic materials 0.000 description 19
- 239000010959 steel Substances 0.000 description 19
- 238000005260 corrosion Methods 0.000 description 15
- 230000007797 corrosion Effects 0.000 description 15
- 230000006698 induction Effects 0.000 description 14
- 238000002441 X-ray diffraction Methods 0.000 description 11
- 238000009713 electroplating Methods 0.000 description 10
- 238000001228 spectrum Methods 0.000 description 10
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 9
- 239000000463 material Substances 0.000 description 9
- JOPOVCBBYLSVDA-UHFFFAOYSA-N chromium(6+) Chemical compound [Cr+6] JOPOVCBBYLSVDA-UHFFFAOYSA-N 0.000 description 6
- 239000000126 substance Substances 0.000 description 6
- 238000000231 atomic layer deposition Methods 0.000 description 5
- 238000006243 chemical reaction Methods 0.000 description 5
- 238000005229 chemical vapour deposition Methods 0.000 description 5
- 238000004519 manufacturing process Methods 0.000 description 5
- 238000005240 physical vapour deposition Methods 0.000 description 5
- 239000000243 solution Substances 0.000 description 5
- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 4
- NRTOMJZYCJJWKI-UHFFFAOYSA-N Titanium nitride Chemical compound [Ti]#N NRTOMJZYCJJWKI-UHFFFAOYSA-N 0.000 description 4
- 238000001816 cooling Methods 0.000 description 4
- 229910052742 iron Inorganic materials 0.000 description 4
- 238000004093 laser heating Methods 0.000 description 4
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 4
- OKKJLVBELUTLKV-UHFFFAOYSA-N Methanol Chemical compound OC OKKJLVBELUTLKV-UHFFFAOYSA-N 0.000 description 3
- 150000001875 compounds Chemical class 0.000 description 3
- 238000007772 electroless plating Methods 0.000 description 3
- 238000002149 energy-dispersive X-ray emission spectroscopy Methods 0.000 description 3
- 238000000724 energy-dispersive X-ray spectrum Methods 0.000 description 3
- 238000002347 injection Methods 0.000 description 3
- 239000007924 injection Substances 0.000 description 3
- 229910052914 metal silicate Inorganic materials 0.000 description 3
- 239000000853 adhesive Substances 0.000 description 2
- 230000001070 adhesive effect Effects 0.000 description 2
- CXOWYMLTGOFURZ-UHFFFAOYSA-N azanylidynechromium Chemical compound [Cr]#N CXOWYMLTGOFURZ-UHFFFAOYSA-N 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- 229910001430 chromium ion Inorganic materials 0.000 description 2
- 239000008151 electrolyte solution Substances 0.000 description 2
- 231100001231 less toxic Toxicity 0.000 description 2
- 238000002844 melting Methods 0.000 description 2
- 230000008018 melting Effects 0.000 description 2
- BDAGIHXWWSANSR-UHFFFAOYSA-N methanoic acid Natural products OC=O BDAGIHXWWSANSR-UHFFFAOYSA-N 0.000 description 2
- 238000001000 micrograph Methods 0.000 description 2
- KERTUBUCQCSNJU-UHFFFAOYSA-L nickel(2+);disulfamate Chemical compound [Ni+2].NS([O-])(=O)=O.NS([O-])(=O)=O KERTUBUCQCSNJU-UHFFFAOYSA-L 0.000 description 2
- 230000008092 positive effect Effects 0.000 description 2
- OSWFIVFLDKOXQC-UHFFFAOYSA-N 4-(3-methoxyphenyl)aniline Chemical compound COC1=CC=CC(C=2C=CC(N)=CC=2)=C1 OSWFIVFLDKOXQC-UHFFFAOYSA-N 0.000 description 1
- 229910001369 Brass Inorganic materials 0.000 description 1
- 229910000906 Bronze Inorganic materials 0.000 description 1
- 229910000599 Cr alloy Inorganic materials 0.000 description 1
- 229910002555 FeNi Inorganic materials 0.000 description 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- 238000007545 Vickers hardness test Methods 0.000 description 1
- 125000000218 acetic acid group Chemical class C(C)(=O)* 0.000 description 1
- SJKRCWUQJZIWQB-UHFFFAOYSA-N azane;chromium Chemical compound N.[Cr] SJKRCWUQJZIWQB-UHFFFAOYSA-N 0.000 description 1
- KGBXLFKZBHKPEV-UHFFFAOYSA-N boric acid Chemical compound OB(O)O KGBXLFKZBHKPEV-UHFFFAOYSA-N 0.000 description 1
- 239000004327 boric acid Substances 0.000 description 1
- 239000010951 brass Substances 0.000 description 1
- 239000010974 bronze Substances 0.000 description 1
- 239000003638 chemical reducing agent Substances 0.000 description 1
- 239000000788 chromium alloy Substances 0.000 description 1
- KUNSUQLRTQLHQQ-UHFFFAOYSA-N copper tin Chemical compound [Cu].[Sn] KUNSUQLRTQLHQQ-UHFFFAOYSA-N 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 238000005238 degreasing Methods 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 238000004070 electrodeposition Methods 0.000 description 1
- 238000010894 electron beam technology Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000010408 film Substances 0.000 description 1
- 235000019253 formic acid Nutrition 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- 229910000734 martensite Inorganic materials 0.000 description 1
- 238000010310 metallurgical process Methods 0.000 description 1
- 231100000252 nontoxic Toxicity 0.000 description 1
- 230000003000 nontoxic effect Effects 0.000 description 1
- 230000001590 oxidative effect Effects 0.000 description 1
- 229910001562 pearlite Inorganic materials 0.000 description 1
- 230000000704 physical effect Effects 0.000 description 1
- 238000005554 pickling Methods 0.000 description 1
- 238000010791 quenching Methods 0.000 description 1
- 230000000171 quenching effect Effects 0.000 description 1
- 239000007921 spray Substances 0.000 description 1
- SDVHRXOTTYYKRY-UHFFFAOYSA-J tetrasodium;dioxido-oxo-phosphonato-$l^{5}-phosphane Chemical compound [Na+].[Na+].[Na+].[Na+].[O-]P([O-])(=O)P([O-])([O-])=O SDVHRXOTTYYKRY-UHFFFAOYSA-J 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- 239000010936 titanium Substances 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
- 231100000331 toxic Toxicity 0.000 description 1
- 230000002588 toxic effect Effects 0.000 description 1
- 239000003440 toxic substance Substances 0.000 description 1
- 230000009466 transformation Effects 0.000 description 1
- 229910000859 α-Fe Inorganic materials 0.000 description 1
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Description
本発明の目的は、従来技術の直面する問題を排除することまたは少なくとも減らすことである。
いくつかの鋼物体を7μmのNiP層および4μmのCr層で被覆し、その後、被覆物体に二重熱処理シーケンスを行った。第一加熱ステップは、200℃〜700℃の間の温度で30分間または45分間行い、その後、被覆物体を冷却した。同じサンプルの第二加熱ステップは、400℃〜700℃の間の温度で5〜30分間行い、その後、被覆物体を再び冷却した。
鋼物体を、7μmのNiP層および4μmのCr層で被覆した。熱処理を、二つのステップで行った。第一ステップは400℃で45分かけ、第二ステップは700℃で30分かけた。
‐Feリッチな層(鋼基質)、
‐FeおよびNiを主に含む層、
‐NiおよびPを主に含む層、
‐NiおよびCrを主に含む層、
‐CrおよびOを主に含む層、
‐CrおよびCを主に含む層。
別の鋼物体を、7μmのNiP層および4μmのCr層を含む、実施例2と類似の被覆で被覆した。熱処理を、400℃で30分の第一ステップ、および700℃で30分の第二ステップの二つのステップで行った。
‐Feリッチな層(鋼基質)、
‐FeおよびNiを主に含む層、
‐NiおよびPを主に含む層、
‐NiおよびCrを主に含む層、
‐CrおよびOを主に含む層、
‐CrおよびCを主に含む層。
斜入射回折(GID:grazing incidence diffraction)を用いて、被覆表面の相構造の表面付近の深さプロフィールを得た。結果を図5に示す。最下は従来のXRDスペクトルである。入射角1.2°、5.5°および8.5°は、被覆の異なる深さを表す。測定されたスペクトルを被覆物体に含まれることが既知の元素のスペクトルと比較することによって、異なる入射角で測定したXRDスペクトルのピークを同定した。
硬化可能なまたは表面硬化された金属物体を、1μmのストライクニッケル層、3μmのNiP層および4μmのCr層で被覆した。被覆の総厚みは、約8μmであった。その後、物体を誘導加熱によって一つのステップで熱処理した。
硬化可能な金属物体を、1μmのストライクニッケル層、3μmのNiP層および4μmのCr層で被覆した。被覆の総厚みは、約8μmであった。その後、物体を誘導加熱によって熱処理した。
表面硬化した金属物体を、1μmの第一ストライクニッケル層、3μmの第一NiP層、4μmの第一Cr層、1μmの第二ストライクニッケル層、3μmの第二NiP層および4μmの第二Cr層で被覆した。被覆の総厚みは、約16μmであった。その後、物体を誘導加熱によって熱処理した。
物体を、7μmのNiP層および5μmのCr層で被覆した。被覆物体を、700℃で30分間加熱した。その後、薄膜堆積によってDLC(ダイヤモンドライクカーボン)の最上層を被覆物体上に堆積させた。
Claims (22)
- 三価クロムめっきによって物体上にクロム被覆を製造する方法であって、
‐前記物体上にニッケルリン合金(NiP)の層を堆積するステップと、
‐前記NiP層上に中間層を堆積するステップであって、前記中間層は、他の金属もしくは金属合金またはセラミックからなる、ステップと、
‐前記中間層上に三価クロム浴からクロムの層を堆積するステップと、
‐前記被覆を硬化し、前記NiP層に由来し、結晶性Niと結晶性Ni3Pとを含む少なくとも一つの層と、前記クロム層に由来し、結晶性Crを含む少なくとも一つの層とを含む多相層を製造するために、前記被覆物体に一つ以上の熱処理を行うステップと、
を含む、方法。 - 前記中間層は、銅または銅の合金を含む、請求項1に記載の方法。
- 前記中間層は、モリブデンまたはモリブデンの合金を含む、請求項1に記載の方法。
- 前記中間層は、金属酸化物、金属炭化物、金属ホウ化物、金属窒化物、金属ケイ化物およびそれらの混合物を含む群より選択される無機非金属固体を含む、請求項1に記載の方法。
- 前記NiP層を堆積させる前に、前記物体上にニッケルストライク層を堆積するステップをさらに含む、請求項1〜4のいずれか一項に記載の方法。
- 前記NiP合金のリン含量は、1〜15w%である、請求項1〜5のいずれか一項に記載の方法。
- 前記一つ以上の熱処理の温度は、200〜1000℃である、請求項1〜6のいずれか一項に記載の方法。
- 前記被覆物体は、二つ以上の熱処理が行われ、各熱処理の後に冷却される、請求項1〜7のいずれか一項に記載の方法。
- 前記熱処理のうちの少なくとも一つは、500〜700℃の間の温度で行われる、請求項8のいずれか一項に記載の方法。
- 第一熱処理の温度は、200〜500℃であり、第二熱処理の温度は、500〜800℃である、請求項8に記載の方法。
- 第一熱処理の温度は、500〜800℃であり、第二熱処理の温度は、200〜500℃である、請求項8に記載の方法。
- 被覆されるべき前記物体は金属の物体であり、前記物体の前記金属の硬化は、前記被覆物体が熱処理されるのと同時に行われる、請求項1〜11のいずれか一項に記載の方法。
- NiPの少なくとも二つの層と、Crの少なくとも二つの層と、少なくとも一つの中間層とを含む多層被覆を製造するために、前記堆積するステップを二回以上繰り返し、その後、前記多層被覆物体に、一つ以上の熱処理が行われるステップを含む、請求項1〜12のいずれか一項に記載の方法。
- 薄膜堆積によって、前記被覆および熱処理された物体上に最上層を堆積するステップをさらに含む、請求項1〜13のいずれか一項に記載の方法。
- 前記被覆物体に一つ以上の熱処理を行う前記ステップの前に、薄膜堆積によって、前記被覆物体上に最上層を堆積するステップをさらに含む、請求項1〜13のいずれか一項に記載の方法。
- 請求項1〜15のいずれか一項に記載の方法を使用して被覆された物体であって、前記被覆は、結晶性Niと結晶性Ni3Pとを含む多相層と、他の金属もしくは金属合金またはセラミックを含む中間層と、結晶性Crを含む多相層とを含む、被覆物体。
- 前記中間層は、銅または銅の合金からなる、請求項16に記載の被覆物体。
- 前記中間層は、モリブデンまたはモリブデンの合金からなる、請求項16に記載の被覆物体。
- 前記中間層は、金属酸化物、金属炭化物、金属ホウ化物、金属窒化物、金属ケイ化物およびそれらの混合物を含む群より選択される無機非金属固体を含む、請求項16に記載の被覆物体。
- 薄膜堆積によって前記被覆物体上に施された最上層を含む、請求項16〜19のいずれか一項に記載の被覆物体。
- 前記最上層は、金属、金属合金、セラミック、またはダイヤモンドライクカーボンからなる、請求項20に記載の被覆物体。
- 2000HVより高いビッカース微小硬度値を有する、請求項16〜21のいずれか一項に記載の被覆物体。
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