JP6770261B2 - 半導体装置 - Google Patents
半導体装置 Download PDFInfo
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- JP6770261B2 JP6770261B2 JP2019541618A JP2019541618A JP6770261B2 JP 6770261 B2 JP6770261 B2 JP 6770261B2 JP 2019541618 A JP2019541618 A JP 2019541618A JP 2019541618 A JP2019541618 A JP 2019541618A JP 6770261 B2 JP6770261 B2 JP 6770261B2
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- 239000004065 semiconductor Substances 0.000 title claims description 119
- 150000004767 nitrides Chemical class 0.000 claims description 32
- 230000004888 barrier function Effects 0.000 description 18
- 230000005533 two-dimensional electron gas Effects 0.000 description 15
- 230000003071 parasitic effect Effects 0.000 description 14
- 230000007257 malfunction Effects 0.000 description 9
- 239000000758 substrate Substances 0.000 description 8
- 238000010586 diagram Methods 0.000 description 6
- 238000000926 separation method Methods 0.000 description 6
- JMASRVWKEDWRBT-UHFFFAOYSA-N Gallium nitride Chemical compound [Ga]#N JMASRVWKEDWRBT-UHFFFAOYSA-N 0.000 description 5
- 230000000694 effects Effects 0.000 description 5
- 230000010355 oscillation Effects 0.000 description 5
- PIGFYZPCRLYGLF-UHFFFAOYSA-N Aluminum nitride Chemical compound [Al]#N PIGFYZPCRLYGLF-UHFFFAOYSA-N 0.000 description 3
- 229910002601 GaN Inorganic materials 0.000 description 3
- RNQKDQAVIXDKAG-UHFFFAOYSA-N aluminum gallium Chemical compound [Al].[Ga] RNQKDQAVIXDKAG-UHFFFAOYSA-N 0.000 description 3
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- 230000005669 field effect Effects 0.000 description 2
- 230000010287 polarization Effects 0.000 description 2
- 125000006850 spacer group Chemical group 0.000 description 2
- GYHNNYVSQQEPJS-UHFFFAOYSA-N Gallium Chemical compound [Ga] GYHNNYVSQQEPJS-UHFFFAOYSA-N 0.000 description 1
- AZDRQVAHHNSJOQ-UHFFFAOYSA-N alumane Chemical group [AlH3] AZDRQVAHHNSJOQ-UHFFFAOYSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 239000000969 carrier Substances 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 230000001747 exhibiting effect Effects 0.000 description 1
- 229910052733 gallium Inorganic materials 0.000 description 1
- 229910021478 group 5 element Inorganic materials 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 229910052738 indium Inorganic materials 0.000 description 1
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- -1 nitride compound Chemical class 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 1
- 229910010271 silicon carbide Inorganic materials 0.000 description 1
- 230000002269 spontaneous effect Effects 0.000 description 1
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- H—ELECTRICITY
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- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers
- H01L27/04—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body
- H01L27/06—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body including a plurality of individual components in a non-repetitive configuration
- H01L27/0605—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body including a plurality of individual components in a non-repetitive configuration integrated circuits made of compound material, e.g. AIIIBV
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- H01L27/04—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body
- H01L27/08—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body including only semiconductor components of a single kind
- H01L27/085—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body including only semiconductor components of a single kind including field-effect components only
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- H01L21/77—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate
- H01L21/78—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices
- H01L21/82—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices to produce devices, e.g. integrated circuits, each consisting of a plurality of components
- H01L21/8252—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices to produce devices, e.g. integrated circuits, each consisting of a plurality of components the substrate being a semiconductor, using III-V technology
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- H01L27/04—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body
- H01L27/08—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body including only semiconductor components of a single kind
- H01L27/085—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body including only semiconductor components of a single kind including field-effect components only
- H01L27/088—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body including only semiconductor components of a single kind including field-effect components only the components being field-effect transistors with insulated gate
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- H01L29/40—Electrodes ; Multistep manufacturing processes therefor
- H01L29/41—Electrodes ; Multistep manufacturing processes therefor characterised by their shape, relative sizes or dispositions
- H01L29/417—Electrodes ; Multistep manufacturing processes therefor characterised by their shape, relative sizes or dispositions carrying the current to be rectified, amplified or switched
- H01L29/41725—Source or drain electrodes for field effect devices
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- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/778—Field effect transistors with two-dimensional charge carrier gas channel, e.g. HEMT ; with two-dimensional charge-carrier layer formed at a heterojunction interface
- H01L29/7782—Field effect transistors with two-dimensional charge carrier gas channel, e.g. HEMT ; with two-dimensional charge-carrier layer formed at a heterojunction interface with confinement of carriers by at least two heterojunctions, e.g. DHHEMT, quantum well HEMT, DHMODFET
- H01L29/7783—Field effect transistors with two-dimensional charge carrier gas channel, e.g. HEMT ; with two-dimensional charge-carrier layer formed at a heterojunction interface with confinement of carriers by at least two heterojunctions, e.g. DHHEMT, quantum well HEMT, DHMODFET using III-V semiconductor material
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- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
- H01L29/12—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by the materials of which they are formed
- H01L29/20—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by the materials of which they are formed including, apart from doping materials or other impurities, only AIIIBV compounds
- H01L29/2003—Nitride compounds
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- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/778—Field effect transistors with two-dimensional charge carrier gas channel, e.g. HEMT ; with two-dimensional charge-carrier layer formed at a heterojunction interface
- H01L29/7786—Field effect transistors with two-dimensional charge carrier gas channel, e.g. HEMT ; with two-dimensional charge-carrier layer formed at a heterojunction interface with direct single heterostructure, i.e. with wide bandgap layer formed on top of active layer, e.g. direct single heterostructure MIS-like HEMT
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- Computer Hardware Design (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Ceramic Engineering (AREA)
- Chemical & Material Sciences (AREA)
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- Manufacturing & Machinery (AREA)
- Junction Field-Effect Transistors (AREA)
- Semiconductor Integrated Circuits (AREA)
Description
よって、スイッチング素子のオフ状態において、スイッチング素子が誤動作したり、発振したりすることを抑制することができる。
図3で示すように半導体装置10を上面から見て、ソース電極23は隣り合うソース電極21の長手方向の端部同士を接続するように形成されている。また、ソース電極23は隣り合うソース電極21の長手方向の左端部同士を接続し、ソース電極23の長手方向(延伸する方向)はソース電極21の長手方向(延伸する方向)に対して交わる方向、より好ましくは垂直な方向となるように形成されている。よって、図3のように半導体装置10を上面から見て、点線で囲まれたスイッチング素子として機能する領域のソース電極21の部分から点線で囲まれた駆動用トランジスタ200として機能する領域のソース電極23の部分との間の長さ又はその各々の総和は、短くなる。
よって、ドレイン電極24と第1の制御電極31との間に生じる寄生インピーダンスの面内のバラツキを抑制しつつ、ドレイン電極24と第1の制御電極31との間に生じる寄生インピーダンスの低減を図ることができる。
また、図3で示すように半導体装置10を上面から見て、第1の制御電極31が第2の制御電極32とソース電極23と交差する部分において、第1の制御電極31は第2の制御電極32及びソース電極23から離間して配置されている。
また、図3の半導体装置10において、隣り合うドレイン電極22同士は図示しない配線で互いに接続されている。また、図3の半導体装置10において、図示しない半導体装置10の出力端子(ドレイン端子)がスイッチング素子100のドレイン電極22と接続し、図示しない半導体装置10の入力端子INLが駆動用トランジスタ200のゲート電極32と接続し、半導体装置10のソース端子Sとスイッチング素子100のソース電極21とがスイッチング素子100のソース電極21の出来る限り近くの接続点Fで接続している。
また、隣り合うソース電極21の接続配線をソース電極23が兼ねることで、半導体装置10のチップ面積を小さくすることができる。
図5のように半導体装置10bを上から見て、駆動用トランジスタ300のソース電極25はスイッチング素子100側に設けられており、スイッチング素子100とは反対側に第3の制御電極33、ドレイン電極26、第3の制御電極33、ソース電極25を単位として、1回又は複数回繰り返されている。図5においては、その単位を2回繰り返されている。また、図5の半導体装置において、隣り合うドレイン電極22同士、隣り合うソース電極231同士、隣り合う第2の制御電極32同士、隣り合うドレイン電極241同士、ソース電極23とソース電極231、ドレイン電極241とドレイン電極24、隣り合うソース電極25同士、隣り合う第2の制御電極32同士、隣り合うドレイン電極241同士は図示しない配線で互いに接続されている。
14…基板
15…バッファ層
16…チャネル層
17…バリア層
18…2次元電子ガス層
19…素子分離構造
21…ソース電極(第1の電極の第1の部分)
22…ドレイン電極(第2の電極)
23…ソース電極(第1の電極の第2の部分)
24…ドレイン電極(第3の電極)
31…ゲート電極(第1の制御電極)
32…ゲート電極(第2の制御電極)
100…スイッチング素子
200…駆動用トランジスタ
Claims (5)
- 窒化物系半導体層と、
前記窒化物系半導体層上に形成された第1の電極の第1の部分と、
前記窒化物系半導体層上に形成された第2の電極と、
前記第1の電極の第1の部分と前記第2の電極との間にあって前記窒化物系半導体層上に形成された第1の制御電極と、
を含むスイッチング素子と、
隣り合う前記第1の電極の第1の部分同士を接続し前記窒化物系半導体層上に形成された第1の電極の第2の部分と、
前記窒化物系半導体層上に形成され前記第1の制御電極に信号を送信する第3の電極と、
前記第1の電極の第2の部分と前記第3の電極との間にあって前記窒化物系半導体層上に形成された第2の制御電極と、
を含む駆動用トランジスタと
を備えたものであることを特徴とする半導体装置。 - 前記第1の制御電極は第3の電極と接続していることを特徴とする請求項1に記載の半導体装置。
- 前記第1の電極の第1の部分の長手方向とは垂直な方向が前記第1の電極の第2の部分の長手方向となるように形成されていることを特徴とする請求項1又は請求項2に記載の半導体装置。
- 前記窒化物系半導体層上に第4の電極と前記第2の制御電極と前記第3の電極が繰返し複数配置され、
第4の電極は前記第1の電極の第2の部分と電気的に接続し、
前記第4の電極は前記第1の電極の第2の部分に対しスイッチング素子とは反対側に配置されていることを特徴とする請求項1から請求項3のいずれか1項に記載の半導体装置。 - 前記駆動用トランジスタとの間で前記スイッチング素子を挟むように第2の駆動用トランジスタを有し、
前記第2の駆動用トランジスタは前記窒化物系半導体層上に形成された第5の電極と、前記窒化物系半導体層上に形成された第6の電極と、前記第5の電極と前記第6の電極との間にあって前記窒化物系半導体層上に形成された第3の制御電極とを有し、
前記第6の電極は前記第1の制御電極と接続していることを特徴とする請求項1から請求項4のいずれか1項に記載の半導体装置。
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PCT/JP2017/033611 WO2019053905A1 (ja) | 2017-09-15 | 2017-09-15 | 半導体装置 |
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JP (1) | JP6770261B2 (ja) |
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JP7368054B2 (ja) | 2019-05-16 | 2023-10-24 | ローム株式会社 | 半導体装置 |
JP7434750B2 (ja) * | 2019-08-20 | 2024-02-21 | サンケン電気株式会社 | 半導体装置 |
US11038048B2 (en) | 2019-10-01 | 2021-06-15 | Taiwan Semiconductor Manufacturing Company, Ltd. | Gallium nitride-on-silicon devices |
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JP5618571B2 (ja) * | 2010-03-02 | 2014-11-05 | パナソニック株式会社 | 電界効果トランジスタ |
JP5056883B2 (ja) * | 2010-03-26 | 2012-10-24 | サンケン電気株式会社 | 半導体装置 |
JP5728258B2 (ja) * | 2011-03-10 | 2015-06-03 | 株式会社東芝 | 半導体装置 |
JP5285103B2 (ja) * | 2011-03-10 | 2013-09-11 | 株式会社東芝 | 窒化物半導体装置 |
JP5556726B2 (ja) | 2011-04-04 | 2014-07-23 | サンケン電気株式会社 | スイッチング回路 |
JP6112491B2 (ja) | 2012-04-26 | 2017-04-12 | パナソニックIpマネジメント株式会社 | 半導体装置および電力変換装置 |
US9799643B2 (en) * | 2013-05-23 | 2017-10-24 | Infineon Technologies Austria Ag | Gate voltage control for III-nitride transistors |
JP6331471B2 (ja) * | 2014-02-28 | 2018-05-30 | パナソニック株式会社 | 窒化物半導体装置 |
US10177061B2 (en) * | 2015-02-12 | 2019-01-08 | Infineon Technologies Austria Ag | Semiconductor device |
JP6400546B2 (ja) * | 2015-09-11 | 2018-10-03 | 株式会社東芝 | 半導体装置、駆動制御装置、および駆動制御方法 |
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US20200111779A1 (en) | 2020-04-09 |
WO2019053905A1 (ja) | 2019-03-21 |
JPWO2019053905A1 (ja) | 2019-12-12 |
US11011512B2 (en) | 2021-05-18 |
CN110383435B (zh) | 2023-05-05 |
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