JP6770093B2 - レーザ照射による材料加工のための撮像光学系及びそのような撮像光学系を有するレーザ加工ヘッド - Google Patents
レーザ照射による材料加工のための撮像光学系及びそのような撮像光学系を有するレーザ加工ヘッド Download PDFInfo
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- JP6770093B2 JP6770093B2 JP2018557076A JP2018557076A JP6770093B2 JP 6770093 B2 JP6770093 B2 JP 6770093B2 JP 2018557076 A JP2018557076 A JP 2018557076A JP 2018557076 A JP2018557076 A JP 2018557076A JP 6770093 B2 JP6770093 B2 JP 6770093B2
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/36—Removing material
- B23K26/38—Removing material by boring or cutting
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/04—Automatically aligning, aiming or focusing the laser beam, e.g. using the back-scattered light
- B23K26/046—Automatically focusing the laser beam
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
- B23K26/064—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
- B23K26/0648—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms comprising lenses
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
- B23K26/0665—Shaping the laser beam, e.g. by masks or multi-focusing by beam condensation on the workpiece, e.g. for focusing
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B15/00—Optical objectives with means for varying the magnification
- G02B15/14—Optical objectives with means for varying the magnification by axial movement of one or more lenses or groups of lenses relative to the image plane for continuously varying the equivalent focal length of the objective
- G02B15/16—Optical objectives with means for varying the magnification by axial movement of one or more lenses or groups of lenses relative to the image plane for continuously varying the equivalent focal length of the objective with interdependent non-linearly related movements between one lens or lens group, and another lens or lens group
- G02B15/163—Optical objectives with means for varying the magnification by axial movement of one or more lenses or groups of lenses relative to the image plane for continuously varying the equivalent focal length of the objective with interdependent non-linearly related movements between one lens or lens group, and another lens or lens group having a first movable lens or lens group and a second movable lens or lens group, both in front of a fixed lens or lens group
- G02B15/167—Optical objectives with means for varying the magnification by axial movement of one or more lenses or groups of lenses relative to the image plane for continuously varying the equivalent focal length of the objective with interdependent non-linearly related movements between one lens or lens group, and another lens or lens group having a first movable lens or lens group and a second movable lens or lens group, both in front of a fixed lens or lens group having an additional fixed front lens or group of lenses
- G02B15/173—Optical objectives with means for varying the magnification by axial movement of one or more lenses or groups of lenses relative to the image plane for continuously varying the equivalent focal length of the objective with interdependent non-linearly related movements between one lens or lens group, and another lens or lens group having a first movable lens or lens group and a second movable lens or lens group, both in front of a fixed lens or lens group having an additional fixed front lens or group of lenses arranged +-+
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B19/00—Condensers, e.g. light collectors or similar non-imaging optics
- G02B19/0004—Condensers, e.g. light collectors or similar non-imaging optics characterised by the optical means employed
- G02B19/0009—Condensers, e.g. light collectors or similar non-imaging optics characterised by the optical means employed having refractive surfaces only
- G02B19/0014—Condensers, e.g. light collectors or similar non-imaging optics characterised by the optical means employed having refractive surfaces only at least one surface having optical power
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B19/00—Condensers, e.g. light collectors or similar non-imaging optics
- G02B19/0033—Condensers, e.g. light collectors or similar non-imaging optics characterised by the use
- G02B19/0047—Condensers, e.g. light collectors or similar non-imaging optics characterised by the use for use with a light source
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/09—Beam shaping, e.g. changing the cross-sectional area, not otherwise provided for
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B19/00—Condensers, e.g. light collectors or similar non-imaging optics
- G02B19/0033—Condensers, e.g. light collectors or similar non-imaging optics characterised by the use
- G02B19/0047—Condensers, e.g. light collectors or similar non-imaging optics characterised by the use for use with a light source
- G02B19/0052—Condensers, e.g. light collectors or similar non-imaging optics characterised by the use for use with a light source the light source comprising a laser diode
Description
Claims (5)
- 動作レーザビーム(12)がそこを通ってガイドされることができるハウジング(10)と、
レーザ照射による材料加工のためのフォーカシング光学系(20)であって、前記フォーカシング光学系(20)が、動作レーザビーム(121)をコリメートするためのコリメーティング光学系(21)と、前記動作レーザビーム(12)を加工されるべき加工対象品(14)の上にフォーカスさせるためのフォーカシング光学系(22)と、を備える、フォーカシング光学系(20)と、
を有し、
前記コリメーティング光学系(21)が、動作レーザビーム源(18)を仮想中間焦点にフォーカスさせるための正の焦点長を有する第1の可動レンズ又はレンズ群(211)と、前記仮想中間焦点を無限遠にフォーカスさせるための負の焦点長を有する第2の可動レンズ又はレンズ群(212)と、
制御ユニット(30)と、を備え、
前記動作レーザビーム(12)が約100μmのファイバ直径を有する光ファイバ(11)を介して供給され、
前記制御ユニット(30)は、前記コリメーティング光学系(21)から平行光が出力されるように、前記第1の可動レンズ又はレンズ群(211)と、前記第2の可動レンズ又はレンズ群(212)と、を光軸(17)に沿って軸方向に変位させる、
レーザ加工ヘッド(1)。 - 前記第1の可動レンズ又はレンズ群(211)及び前記第2の可動レンズ又はレンズ群(212)が、焦点直径及び焦点位置の少なくとも一方を調整するためにそれぞれの駆動ドライブ(A,B)によって変位可能である、請求項1に記載のレーザ加工ヘッド(1)。
- 前記駆動ドライブ(A,B)がお互いに独立して動作する、請求項2に記載のレーザ加工ヘッド(1)。
- 前記第1及び第2の可動レンズ又はレンズ群(211,212)のお互いに対する且つ前記フォーカシング光学系(22)に対する位置が、前記制御ユニット(30)によって、加工のタイプ及びレーザ波長に依存して調整される、請求項2又は3に記載のレーザ加工ヘッド(1)。
- 前記制御ユニット(30)がプログラム可能である、請求項4に記載のレーザ加工ヘッド(1)。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE102016005376.3A DE102016005376A1 (de) | 2016-05-04 | 2016-05-04 | Abbildungsoptik für die Materialbearbeitung mittels Laserstrahlung und Laserbearbeitungskopf mit einer solchen |
DE102016005376.3 | 2016-05-04 | ||
PCT/EP2017/060539 WO2017191191A1 (de) | 2016-05-04 | 2017-05-03 | Abbildungsoptik für die materialbearbeitung mittels laserstrahlung und laserbearbeitungskopf mit einer solchen |
Publications (2)
Publication Number | Publication Date |
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JP2019514695A JP2019514695A (ja) | 2019-06-06 |
JP6770093B2 true JP6770093B2 (ja) | 2020-10-14 |
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JP2018557076A Active JP6770093B2 (ja) | 2016-05-04 | 2017-05-03 | レーザ照射による材料加工のための撮像光学系及びそのような撮像光学系を有するレーザ加工ヘッド |
Country Status (9)
Country | Link |
---|---|
US (1) | US11103958B2 (ja) |
EP (1) | EP3452246A1 (ja) |
JP (1) | JP6770093B2 (ja) |
KR (2) | KR20180125564A (ja) |
CN (1) | CN108712939A (ja) |
CA (1) | CA3013264C (ja) |
DE (1) | DE102016005376A1 (ja) |
RU (1) | RU2711287C1 (ja) |
WO (1) | WO2017191191A1 (ja) |
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EP3747588A1 (de) * | 2019-06-07 | 2020-12-09 | Bystronic Laser AG | Bearbeitungsvorrichtung zur laserbearbeitung eines werkstücks und verfahren zur laserbearbeitung eines werkstücks |
CN110434472B (zh) * | 2019-07-11 | 2021-05-04 | 大族激光科技产业集团股份有限公司 | 激光打标设备及其调焦方法 |
RU2725685C1 (ru) * | 2019-08-27 | 2020-07-03 | Общество с ограниченной ответственностью "НАУЧНО-ТЕХНИЧЕСКОЕ ОБЪЕДИНЕНИЕ "ИРЭ-Полюс" (ООО НТО "ИРЭ-Полюс") | Перестраиваемый оптический формирователь масштабируемого плоского однородного лазерного пучка |
CN113751862A (zh) * | 2020-05-29 | 2021-12-07 | 方强 | 基于两片透镜的变焦对焦激光切割头 |
CN113798659A (zh) * | 2020-05-29 | 2021-12-17 | 方强 | 光学变焦对焦镜头及其机械结构、光学结构及其使用方法 |
DE102020122410B3 (de) * | 2020-08-27 | 2021-11-04 | Trumpf Laser- Und Systemtechnik Gmbh | Fokussiervorrichtung und Verfahren zum Fokussieren einer Objektivlinse |
US20220283416A1 (en) * | 2021-03-04 | 2022-09-08 | Ii-Vi Delaware, Inc. | Dynamic Focus For Laser Processing Head |
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2016
- 2016-05-04 DE DE102016005376.3A patent/DE102016005376A1/de active Pending
-
2017
- 2017-05-03 JP JP2018557076A patent/JP6770093B2/ja active Active
- 2017-05-03 CA CA3013264A patent/CA3013264C/en active Active
- 2017-05-03 RU RU2018133020A patent/RU2711287C1/ru active
- 2017-05-03 KR KR1020187030801A patent/KR20180125564A/ko active Application Filing
- 2017-05-03 CN CN201780014582.0A patent/CN108712939A/zh active Pending
- 2017-05-03 WO PCT/EP2017/060539 patent/WO2017191191A1/de active Application Filing
- 2017-05-03 EP EP17720817.0A patent/EP3452246A1/de active Pending
- 2017-05-03 US US16/098,113 patent/US11103958B2/en active Active
- 2017-05-03 KR KR1020217004773A patent/KR102364197B1/ko active IP Right Grant
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Publication number | Publication date |
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KR20210021145A (ko) | 2021-02-24 |
DE102016005376A1 (de) | 2017-11-09 |
CA3013264C (en) | 2020-04-28 |
CA3013264A1 (en) | 2017-11-09 |
US11103958B2 (en) | 2021-08-31 |
KR102364197B1 (ko) | 2022-02-17 |
RU2711287C1 (ru) | 2020-01-16 |
EP3452246A1 (de) | 2019-03-13 |
CN108712939A (zh) | 2018-10-26 |
KR20180125564A (ko) | 2018-11-23 |
JP2019514695A (ja) | 2019-06-06 |
US20190151997A1 (en) | 2019-05-23 |
WO2017191191A1 (de) | 2017-11-09 |
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