JP6769146B2 - レーザ加工方法およびレーザ加工装置 - Google Patents

レーザ加工方法およびレーザ加工装置 Download PDF

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Publication number
JP6769146B2
JP6769146B2 JP2016138630A JP2016138630A JP6769146B2 JP 6769146 B2 JP6769146 B2 JP 6769146B2 JP 2016138630 A JP2016138630 A JP 2016138630A JP 2016138630 A JP2016138630 A JP 2016138630A JP 6769146 B2 JP6769146 B2 JP 6769146B2
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JP
Japan
Prior art keywords
scanning
laser
laser processing
laser beam
turning portion
Prior art date
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Active
Application number
JP2016138630A
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English (en)
Japanese (ja)
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JP2018008291A (ja
Inventor
弘徳 宇佐美
弘徳 宇佐美
義弘 二神
義弘 二神
文崇 大田
文崇 大田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Omron Corp
Original Assignee
Omron Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Publication date
Application filed by Omron Corp filed Critical Omron Corp
Priority to JP2016138630A priority Critical patent/JP6769146B2/ja
Priority to CN201780035844.1A priority patent/CN109311125A/zh
Priority to PCT/JP2017/022337 priority patent/WO2018012195A1/fr
Priority to EP17827326.4A priority patent/EP3486026A4/fr
Publication of JP2018008291A publication Critical patent/JP2018008291A/ja
Priority to US16/221,675 priority patent/US20190118289A1/en
Application granted granted Critical
Publication of JP6769146B2 publication Critical patent/JP6769146B2/ja
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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/08—Devices involving relative movement between laser beam and workpiece
    • B23K26/082—Scanning systems, i.e. devices involving movement of the laser beam relative to the laser head
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/36—Removing material
    • B23K26/362—Laser etching
    • B23K26/364—Laser etching for making a groove or trench, e.g. for scribing a break initiation groove

Landscapes

  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Mechanical Engineering (AREA)
  • Laser Beam Processing (AREA)
JP2016138630A 2016-07-13 2016-07-13 レーザ加工方法およびレーザ加工装置 Active JP6769146B2 (ja)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP2016138630A JP6769146B2 (ja) 2016-07-13 2016-07-13 レーザ加工方法およびレーザ加工装置
CN201780035844.1A CN109311125A (zh) 2016-07-13 2017-06-16 激光加工方法以及激光加工装置
PCT/JP2017/022337 WO2018012195A1 (fr) 2016-07-13 2017-06-16 Procédé de traitement au laser et appareil de traitement au laser
EP17827326.4A EP3486026A4 (fr) 2016-07-13 2017-06-16 Procédé de traitement au laser et appareil de traitement au laser
US16/221,675 US20190118289A1 (en) 2016-07-13 2018-12-17 Laser machining method and laser machining apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2016138630A JP6769146B2 (ja) 2016-07-13 2016-07-13 レーザ加工方法およびレーザ加工装置

Publications (2)

Publication Number Publication Date
JP2018008291A JP2018008291A (ja) 2018-01-18
JP6769146B2 true JP6769146B2 (ja) 2020-10-14

Family

ID=60952954

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2016138630A Active JP6769146B2 (ja) 2016-07-13 2016-07-13 レーザ加工方法およびレーザ加工装置

Country Status (5)

Country Link
US (1) US20190118289A1 (fr)
EP (1) EP3486026A4 (fr)
JP (1) JP6769146B2 (fr)
CN (1) CN109311125A (fr)
WO (1) WO2018012195A1 (fr)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR102310466B1 (ko) * 2019-06-27 2021-10-13 세메스 주식회사 기판 처리 장치 및 방법
EP3995237A1 (fr) * 2020-11-05 2022-05-11 Siemens Energy Global GmbH & Co. KG Stratégie de rayonnement destinée à la fabrication additive d'un composant et composant correspondant
CN116174968B (zh) * 2023-03-24 2023-09-29 中国科学院西安光学精密机械研究所 一种异形孔激光加工的直线型轨迹规划方法

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3557512B2 (ja) * 1997-12-03 2004-08-25 ミヤチテクノス株式会社 ２次元バーコードのレーザマーキング方法
EP1328372B1 (fr) * 2000-10-26 2006-11-29 Xsil Technology Limited Commande d'usinage laser
JP2002178157A (ja) * 2000-12-07 2002-06-25 Daido Steel Co Ltd 肉盛溶接方法および肉盛溶接装置
DE10207288B4 (de) * 2002-02-21 2005-05-04 Newson Engineering Nv Verfahren zum Bohren von Löchern mittels eines Laserstrahls in einem Substrat, insbesondere in einem elektrischen Schaltungsubstrat
JP2007268576A (ja) 2006-03-31 2007-10-18 Hitachi Via Mechanics Ltd レーザ加工方法
JP5527526B2 (ja) * 2010-02-24 2014-06-18 マツダ株式会社 レーザ溶接方法
JP5323874B2 (ja) 2011-02-24 2013-10-23 Ｈｏｙａ株式会社 マスクブランク用ガラス基板、マスクブランク、マスクおよび反射型マスク並びにこれらの製造方法
JP6002392B2 (ja) * 2012-01-20 2016-10-05 パナソニック デバイスＳｕｎｘ株式会社 レーザ加工装置
US20140273752A1 (en) * 2013-03-13 2014-09-18 Applied Materials, Inc. Pad conditioning process control using laser conditioning
US9358635B2 (en) * 2013-12-19 2016-06-07 Siemens Energy, Inc. Rastered laser melting of a curved surface path with uniform power density distribution

Also Published As

Publication number Publication date
US20190118289A1 (en) 2019-04-25
EP3486026A1 (fr) 2019-05-22
CN109311125A (zh) 2019-02-05
EP3486026A4 (fr) 2020-01-22
JP2018008291A (ja) 2018-01-18
WO2018012195A1 (fr) 2018-01-18

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