JP6762608B2 - 走査型白色干渉顕微鏡を用いた三次元形状計測方法 - Google Patents

走査型白色干渉顕微鏡を用いた三次元形状計測方法 Download PDF

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JP6762608B2
JP6762608B2 JP2016173995A JP2016173995A JP6762608B2 JP 6762608 B2 JP6762608 B2 JP 6762608B2 JP 2016173995 A JP2016173995 A JP 2016173995A JP 2016173995 A JP2016173995 A JP 2016173995A JP 6762608 B2 JP6762608 B2 JP 6762608B2
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coherence length
dimensional shape
inclination angle
interference
observed
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Japanese (ja)
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JP2018040644A (ja
Inventor
有吾 小野田
有吾 小野田
栄広 佐藤
栄広 佐藤
晶一 長谷川
晶一 長谷川
香織 柳川
香織 柳川
石橋　清隆
清隆 石橋
輝雄 加藤
輝雄 加藤
林太郎 中谷
林太郎 中谷
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Hitachi High Tech Science Corp
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Hitachi High Tech Science Corp
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Priority to JP2016173995A priority Critical patent/JP6762608B2/ja
Priority to TW106123753A priority patent/TWI724204B/zh
Priority to CN201710717616.4A priority patent/CN107796326B/zh
Publication of JP2018040644A publication Critical patent/JP2018040644A/ja
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G01B11/2441—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures using interferometry
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)
JP2016173995A 2016-09-06 2016-09-06 走査型白色干渉顕微鏡を用いた三次元形状計測方法 Expired - Fee Related JP6762608B2 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2016173995A JP6762608B2 (ja) 2016-09-06 2016-09-06 走査型白色干渉顕微鏡を用いた三次元形状計測方法
TW106123753A TWI724204B (zh) 2016-09-06 2017-07-17 使用了掃描型白色干涉顯微鏡的三維形狀計測方法
CN201710717616.4A CN107796326B (zh) 2016-09-06 2017-08-21 使用了扫描型白色干涉显微镜的三维形状计测方法

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JP2016173995A JP6762608B2 (ja) 2016-09-06 2016-09-06 走査型白色干渉顕微鏡を用いた三次元形状計測方法

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JP2018040644A JP2018040644A (ja) 2018-03-15
JP6762608B2 true JP6762608B2 (ja) 2020-09-30

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CN (1) CN107796326B (zh)
TW (1) TWI724204B (zh)

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2019191087A (ja) * 2018-04-27 2019-10-31 株式会社日立ハイテクサイエンス 干渉信号の位相補正方法
EP4067811A4 (en) * 2019-11-29 2023-12-27 Machine Vision Lighting Inc. SHAPE RECONSTRUCTION METHOD AND IMAGE MEASUREMENT DEVICE
CN114442677A (zh) * 2020-11-03 2022-05-06 国仪量子(合肥)技术有限公司 被测样品的倾角自动调平方法及装置

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6493093B2 (en) * 2001-04-12 2002-12-10 Veeco Instruments Inc. Bat-wing attenuation in white-light interferometry
WO2004015366A1 (ja) * 2002-08-09 2004-02-19 Toray Engineering Co., Ltd. 表面形状測定方法およびその装置
US7324214B2 (en) * 2003-03-06 2008-01-29 Zygo Corporation Interferometer and method for measuring characteristics of optically unresolved surface features
KR101185473B1 (ko) * 2003-09-15 2012-10-02 지고 코포레이션 표면에 대한 간섭 측정의 분석
JP4845607B2 (ja) * 2006-06-21 2011-12-28 オリンパス株式会社 ３次元形状測定方法及び装置
JP5013968B2 (ja) * 2007-02-21 2012-08-29 キヤノン株式会社 信号処理装置、プログラムおよび計測装置
JP4388113B2 (ja) * 2007-09-19 2009-12-24 アンリツ株式会社 三次元形状測定装置
WO2009079334A2 (en) * 2007-12-14 2009-06-25 Zygo Corporation Analyzing surface structure using scanning interferometry
CN105209852B (zh) * 2013-05-14 2018-12-14 株式会社日立高新技术 表面形状测量方法以及其装置
FR3015659B1 (fr) * 2013-12-20 2016-01-29 Centre Nat Rech Scient Appareil et procede de tomographie optique

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JP2018040644A (ja) 2018-03-15
TW201812250A (zh) 2018-04-01
TWI724204B (zh) 2021-04-11
CN107796326A (zh) 2018-03-13
CN107796326B (zh) 2021-03-12

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