JP6755892B2 - 半導体装置 - Google Patents
半導体装置 Download PDFInfo
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- JP6755892B2 JP6755892B2 JP2017566590A JP2017566590A JP6755892B2 JP 6755892 B2 JP6755892 B2 JP 6755892B2 JP 2017566590 A JP2017566590 A JP 2017566590A JP 2017566590 A JP2017566590 A JP 2017566590A JP 6755892 B2 JP6755892 B2 JP 6755892B2
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- 239000004065 semiconductor Substances 0.000 title claims description 171
- 150000004767 nitrides Chemical class 0.000 claims description 58
- 239000000758 substrate Substances 0.000 claims description 32
- 239000000463 material Substances 0.000 claims description 12
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 6
- 229910052799 carbon Inorganic materials 0.000 claims description 6
- 229910052749 magnesium Inorganic materials 0.000 claims description 5
- 229910052796 boron Inorganic materials 0.000 claims description 4
- 229910052742 iron Inorganic materials 0.000 claims description 3
- 229910002704 AlGaN Inorganic materials 0.000 description 15
- 239000013078 crystal Substances 0.000 description 11
- 230000003071 parasitic effect Effects 0.000 description 10
- 239000011777 magnesium Substances 0.000 description 7
- 230000004048 modification Effects 0.000 description 6
- 238000012986 modification Methods 0.000 description 6
- KDLHZDBZIXYQEI-UHFFFAOYSA-N Palladium Chemical compound [Pd] KDLHZDBZIXYQEI-UHFFFAOYSA-N 0.000 description 5
- 239000004020 conductor Substances 0.000 description 5
- 150000002500 ions Chemical class 0.000 description 5
- XEEYBQQBJWHFJM-UHFFFAOYSA-N iron Substances [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 5
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 4
- 238000000059 patterning Methods 0.000 description 4
- 230000010287 polarization Effects 0.000 description 4
- 230000005533 two-dimensional electron gas Effects 0.000 description 4
- 239000010931 gold Substances 0.000 description 3
- 239000012535 impurity Substances 0.000 description 3
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- 229910052751 metal Inorganic materials 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 239000000203 mixture Substances 0.000 description 3
- 238000004544 sputter deposition Methods 0.000 description 3
- 238000007740 vapor deposition Methods 0.000 description 3
- JMASRVWKEDWRBT-UHFFFAOYSA-N Gallium nitride Chemical compound [Ga]#N JMASRVWKEDWRBT-UHFFFAOYSA-N 0.000 description 2
- FYYHWMGAXLPEAU-UHFFFAOYSA-N Magnesium Chemical compound [Mg] FYYHWMGAXLPEAU-UHFFFAOYSA-N 0.000 description 2
- 229910052581 Si3N4 Inorganic materials 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 2
- 230000004888 barrier function Effects 0.000 description 2
- 238000002109 crystal growth method Methods 0.000 description 2
- 238000009792 diffusion process Methods 0.000 description 2
- 239000002019 doping agent Substances 0.000 description 2
- 238000001312 dry etching Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
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- 239000011810 insulating material Substances 0.000 description 2
- 238000009413 insulation Methods 0.000 description 2
- 238000002488 metal-organic chemical vapour deposition Methods 0.000 description 2
- 229910052759 nickel Inorganic materials 0.000 description 2
- 229910052760 oxygen Inorganic materials 0.000 description 2
- 239000001301 oxygen Substances 0.000 description 2
- 229910052763 palladium Inorganic materials 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 2
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 1
- 229910004298 SiO 2 Inorganic materials 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- -1 for example Substances 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 238000010030 laminating Methods 0.000 description 1
- 125000002524 organometallic group Chemical group 0.000 description 1
- 238000000206 photolithography Methods 0.000 description 1
- 229910052814 silicon oxide Inorganic materials 0.000 description 1
- WNUPENMBHHEARK-UHFFFAOYSA-N silicon tungsten Chemical compound [Si].[W] WNUPENMBHHEARK-UHFFFAOYSA-N 0.000 description 1
- 238000009751 slip forming Methods 0.000 description 1
- 230000002269 spontaneous effect Effects 0.000 description 1
- 239000012808 vapor phase Substances 0.000 description 1
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Description
図9は、特許文献1に記載された従来の半導体装置100の断面図である。図10は、従来の半導体装置100の電気的な特性を説明するための断面図である。
以下、本開示の第1の実施形態に係る半導体装置について、添付の図面を参照して説明する。
図1は、第1の実施形態に係る半導体装置13の断面図である。
本実施形態に係る半導体装置13のオン抵抗の特性について、図2及び図3と図9〜図11を用いて、図9に示す従来の半導体装置100と比較しながら以下に説明する。
以上のように、本実施形態の半導体装置13は、互いに背向する第1の主面及び第2の主面を有し、第1の導電型を有する基板1と、基板1の第1の主面上に配置されたドリフト層2と、ドリフト層2上に配置された、第1の導電型とは逆導電型の第2の導電型を有する第1の下地層3と、第1の下地層3を貫通し、ドリフト層2にまで達する凹状の第1の開口部10と、第1の下地層3の上面及び第1の開口部10を覆うように基板1側から順に配置され、上記上面及び第1の開口部10の凹状の表面に沿って形成された、窒化物半導体よりなる第1の再成長層6、及び、窒化物半導体よりなる第2の再成長層7と、第2の再成長層7の上方に配置されたゲート電極Gと、ゲート電極Gと離間して、第2の再成長層7及び第1の再成長層6を貫通し、第1の下地層3にまで達する凹状のソース開口部11と、ソース開口部11を覆うように配置され、第1の下地層3と電気的に接続されたソース電極Sと、基板1の第2の主面上に配置されたドレイン電極Dとを備える。第2の再成長層7は、第1の主面に略平行な上面部7aと、第1の開口部10の側面に沿った側面部7bとを有し、ゲート電極Gは、上面部7aと側面部7bとのうち上面部7aに選択的に設けられている。
次に、本開示の第2の実施形態に係る半導体装置について、図面を参照しながら説明する。図4は、本実施形態に係る半導体装置14の断面図である。第2の実施形態に係る半導体装置14は、第1の実施形態に係る半導体装置13と比較して、絶縁層9の代わりに、第2の導電型(具体的にはp型)を有する第3の窒化物半導体層を備える点が相違する。以下では、第1の実施形態との相違点を中心に説明し、共通点の説明を省略又は簡略化する。
次に、本開示の第3の実施形態について、図面を参照しながら説明する。本実施形態では、本開示の第1の実施形態に係る半導体装置13、又は、第2の実施形態に係る半導体装置14を複数備える1つのチップ16における、半導体装置13又は14の平面配置(レイアウト)について、図5を用いて説明する。
続いて、本開示の第3の実施形態の変形例について、図面を参照しながら説明する。本変形例では、本開示の第1の実施形態に係る半導体装置13、又は、第2の実施形態に係る半導体装置14を複数備える1つのチップ18における、半導体装置13又は14の平面配置(レイアウト)について、図6及び図7を用いて説明する。
次に、本開示の第4の実施形態について、図面を参照しながら説明する。図8は、本実施形態に係る半導体装置27の断面図である。第4の実施形態に係る半導体装置27は、第1の実施形態に係る半導体装置13と比較して、絶縁層9を備えない点が相違する。具体的には、ゲート電極Gが直接、第2の再成長層7(上面部7a)に接触している点が異なる。
以上、本発明に係る半導体装置について、上記の実施形態及び変形例に基づいて説明したが、本発明は、上記の実施形態に限定されるものではない。
2 ドリフト層(第1の窒化物半導体層)
3 第1の下地層(第2の窒化物半導体層)
4 ブロック層
5 第2の下地層(第2の電子供給層)
6 第1の再成長層(電子走行層)
6a、7a 上面部
6b、7b、10a 側面部
6c、7c、10b 底面部
7 第2の再成長層(第1の電子供給層)
8 二次元電子ガス層
9、9a 絶縁層
10 第1の開口部
11 ソース開口部(第2の開口部)
12 ゲート開口部
13、14、27 半導体装置
15 コントロール層
16、18 チップ
17、19 単位セル
20 ゲート電極終端部
21 ゲート電極ビア
22 ゲート電極引出し配線
23 ソース電極ビア
24 ソース電極引出し配線
25 ゲートパッド
26 ソースパッド
Ch1、Ch2 チャネル領域
D ドレイン電極
G ゲート電極
S ソース電極
Claims (6)
- 半導体装置であって、
互いに背向する第1の主面及び第2の主面を有し、第1の導電型を有する基板と、
前記基板の前記第1の主面上に配置された第1の窒化物半導体層と、
前記第1の窒化物半導体層上に配置された第2の窒化物半導体層と、
前記第2の窒化物半導体層を貫通し、前記第1の窒化物半導体層にまで達する凹状の第1の開口部と、
前記第2の窒化物半導体層の上面及び前記第1の開口部を覆うように前記基板側から順に配置され、前記上面及び前記第1の開口部の凹状の表面に沿って形成された、窒化物半導体よりなる電子走行層、及び、窒化物半導体よりなる第1の電子供給層と、
前記第1の電子供給層の上方に配置されたゲート電極と、
前記ゲート電極と離間して、前記第1の電子供給層及び前記電子走行層を貫通し、前記第2の窒化物半導体層にまで達する凹状の第2の開口部と、
前記第2の開口部を覆うように配置され、前記第2の窒化物半導体層と電気的に接続されたソース電極と、
前記基板の前記第2の主面上に配置されたドレイン電極とを備え、
前記第1の電子供給層は、
前記第1の主面に略平行な上面部と、
前記第1の開口部の側面に沿った側面部とを有し、
前記ゲート電極は、前記上面部と前記側面部とのうち前記上面部に選択的に設けられており、
前記半導体装置は、
前記ゲート電極と前記第1の電子供給層との間に配置され、かつ、前記上面部と前記側面部とのうち前記上面部に選択的に配置された絶縁層を、さらに備える、
半導体装置。 - 半導体装置であって、
互いに背向する第1の主面及び第2の主面を有し、第1の導電型を有する基板と、
前記基板の前記第1の主面上に配置された第1の窒化物半導体層と、
前記第1の窒化物半導体層上に配置された第2の窒化物半導体層と、
前記第2の窒化物半導体層を貫通し、前記第1の窒化物半導体層にまで達する凹状の第1の開口部と、
前記第2の窒化物半導体層の上面及び前記第1の開口部を覆うように前記基板側から順に配置され、前記上面及び前記第1の開口部の凹状の表面に沿って形成された、窒化物半導体よりなる電子走行層、及び、窒化物半導体よりなる第1の電子供給層と、
前記第1の電子供給層の上方に配置されたゲート電極と、
前記ゲート電極と離間して、前記第1の電子供給層及び前記電子走行層を貫通し、前記第2の窒化物半導体層にまで達する凹状の第2の開口部と、
前記第2の開口部を覆うように配置され、前記第2の窒化物半導体層と電気的に接続されたソース電極と、
前記基板の前記第2の主面上に配置されたドレイン電極とを備え、
前記第1の電子供給層は、
前記第1の主面に略平行な上面部と、
前記第1の開口部の側面に沿った側面部とを有し、
前記ゲート電極は、前記上面部と前記側面部とのうち前記上面部に選択的に設けられており、
前記半導体装置は、
前記ゲート電極と前記第1の電子供給層との間に配置され、かつ、前記上面部と前記側面部とのうち前記上面部に選択的に配置された、前記第1の導電型とは逆導電型の第2の導電型を有する第3の窒化物半導体層を、さらに備える、
半導体装置。 - 前記電子走行層と前記第2の窒化物半導体層との間に配置された、前記第1の電子供給層よりもバンドギャップの大きい第2の電子供給層を、さらに備える、
請求項1又は2に記載の半導体装置。 - 前記電子走行層と前記第2の窒化物半導体層との間に配置された、絶縁性又は半絶縁性である窒化物半導体よりなるブロック層を、さらに備える、
請求項1から3のいずれか1項に記載の半導体装置。 - 前記ブロック層の炭素濃度は、3×1017cm−3以上である、
請求項4に記載の半導体装置。 - 前記ブロック層には、Fe、Mg、Bのいずれか1つ以上が添加されている、
請求項4に記載の半導体装置。
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