JP6747198B2 - 誘電体バリア放電イオン化検出器 - Google Patents

誘電体バリア放電イオン化検出器 Download PDF

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Publication number
JP6747198B2
JP6747198B2 JP2016175505A JP2016175505A JP6747198B2 JP 6747198 B2 JP6747198 B2 JP 6747198B2 JP 2016175505 A JP2016175505 A JP 2016175505A JP 2016175505 A JP2016175505 A JP 2016175505A JP 6747198 B2 JP6747198 B2 JP 6747198B2
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gas
flow path
gas flow
dielectric
plasma
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Japanese (ja)
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JP2018040722A5 (enExample
JP2018040722A (ja
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品田　恵
恵 品田
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Shimadzu Corp
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Shimadzu Corp
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Priority to JP2016175505A priority Critical patent/JP6747198B2/ja
Priority to US15/698,351 priority patent/US10545118B2/en
Priority to CN201710798481.9A priority patent/CN107807194B/zh
Publication of JP2018040722A publication Critical patent/JP2018040722A/ja
Publication of JP2018040722A5 publication Critical patent/JP2018040722A5/ja
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/62—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating the ionisation of gases, e.g. aerosols; by investigating electric discharges, e.g. emission of cathode
    • G01N27/68—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating the ionisation of gases, e.g. aerosols; by investigating electric discharges, e.g. emission of cathode using electric discharge to ionise a gas
    • G01N27/70—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating the ionisation of gases, e.g. aerosols; by investigating electric discharges, e.g. emission of cathode using electric discharge to ionise a gas and measuring current or voltage
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/60—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating electrostatic variables, e.g. electrographic flaw testing
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N30/00—Investigating or analysing materials by separation into components using adsorption, absorption or similar phenomena or using ion-exchange, e.g. chromatography or field flow fractionation
    • G01N30/02—Column chromatography
    • G01N30/62—Detectors specially adapted therefor
    • G01N30/64—Electrical detectors
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N33/00—Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
    • G01N33/0004—Gaseous mixtures, e.g. polluted air
    • G01N33/0009—General constructional details of gas analysers, e.g. portable test equipment
    • G01N33/0027—General constructional details of gas analysers, e.g. portable test equipment concerning the detector
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/0006—Investigating plasma, e.g. measuring the degree of ionisation or the electron temperature
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/0006—Investigating plasma, e.g. measuring the degree of ionisation or the electron temperature
    • H05H1/0081—Investigating plasma, e.g. measuring the degree of ionisation or the electron temperature by electric means
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/2406—Generating plasma using dielectric barrier discharges, i.e. with a dielectric interposed between the electrodes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N30/00—Investigating or analysing materials by separation into components using adsorption, absorption or similar phenomena or using ion-exchange, e.g. chromatography or field flow fractionation
    • G01N30/02—Column chromatography
    • G01N2030/022—Column chromatography characterised by the kind of separation mechanism
    • G01N2030/025—Gas chromatography
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R19/00—Arrangements for measuring currents or voltages or for indicating presence or sign thereof
    • G01R19/0046—Arrangements for measuring currents or voltages or for indicating presence or sign thereof characterised by a specific application or detail not covered by any other subgroup of G01R19/00
    • G01R19/0061—Measuring currents of particle-beams, currents from electron multipliers, photocurrents, ion currents; Measuring in plasmas
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/2406—Generating plasma using dielectric barrier discharges, i.e. with a dielectric interposed between the electrodes
    • H05H1/2443—Generating plasma using dielectric barrier discharges, i.e. with a dielectric interposed between the electrodes the plasma fluid flowing through a dielectric tube

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  • Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Plasma & Fusion (AREA)
  • Immunology (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Analytical Chemistry (AREA)
  • Pathology (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Combustion & Propulsion (AREA)
  • Food Science & Technology (AREA)
  • Medicinal Chemistry (AREA)
  • Fluid Mechanics (AREA)
  • Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
JP2016175505A 2016-09-08 2016-09-08 誘電体バリア放電イオン化検出器 Active JP6747198B2 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2016175505A JP6747198B2 (ja) 2016-09-08 2016-09-08 誘電体バリア放電イオン化検出器
US15/698,351 US10545118B2 (en) 2016-09-08 2017-09-07 Dielectric barrier discharge ionization detector
CN201710798481.9A CN107807194B (zh) 2016-09-08 2017-09-07 电介质阻挡放电离子化检测器

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2016175505A JP6747198B2 (ja) 2016-09-08 2016-09-08 誘電体バリア放電イオン化検出器

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JP2018040722A JP2018040722A (ja) 2018-03-15
JP2018040722A5 JP2018040722A5 (enExample) 2019-02-28
JP6747198B2 true JP6747198B2 (ja) 2020-08-26

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US (1) US10545118B2 (enExample)
JP (1) JP6747198B2 (enExample)
CN (1) CN107807194B (enExample)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110254962B (zh) 2014-09-30 2021-09-10 京洛株式会社 微波炉用容器
JP6775141B2 (ja) 2016-09-08 2020-10-28 株式会社島津製作所 誘電体バリア放電イオン化検出器
JP6747197B2 (ja) 2016-09-08 2020-08-26 株式会社島津製作所 誘電体バリア放電イオン化検出器
JP6743599B2 (ja) 2016-09-08 2020-08-19 株式会社島津製作所 誘電体バリア放電イオン化検出器
JP6675709B2 (ja) 2016-09-08 2020-04-01 株式会社島津製作所 誘電体バリア放電イオン化検出器
CN108323146B (zh) * 2018-04-11 2019-07-02 京东方科技集团股份有限公司 玻璃组件及制造方法、玻璃窗
CN110010444B (zh) * 2019-03-29 2024-02-09 广州安诺科技股份有限公司 一种多电场质谱仪离子源
JP7408097B2 (ja) * 2020-09-29 2024-01-05 株式会社島津製作所 放電イオン化検出器およびガスクロマトグラフ分析装置
JP2023077708A (ja) * 2021-11-25 2023-06-06 株式会社島津製作所 放電イオン化検出器およびガスクロマトグラフ分析装置

Family Cites Families (23)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4282521A (en) 1979-11-13 1981-08-04 Tif Instruments, Inc. Regulating circuit for gaseous impurity detector
EP1073091A3 (en) 1999-07-27 2004-10-06 Matsushita Electric Works, Ltd. Electrode for plasma generation, plasma treatment apparatus using the electrode, and plasma treatment with the apparatus
JP4527302B2 (ja) 2001-02-27 2010-08-18 Ｎｅｃライティング株式会社 希ガス放電灯及びその製造方法
JP4206048B2 (ja) 2004-03-05 2009-01-07 メタウォーター株式会社 オゾン化ガスの分解を抑制したオゾン発生装置
JP4407474B2 (ja) 2004-11-01 2010-02-03 ウシオ電機株式会社 エキシマランプ
US7922979B2 (en) 2005-03-28 2011-04-12 Mitsubishi Denki Kabushiki Kaisha Silent discharge plasma apparatus
JP2007029896A (ja) 2005-07-28 2007-02-08 Canon Inc プラズマリアクタ、ガス処理装置
WO2009091065A1 (ja) * 2008-01-18 2009-07-23 Kyocera Corporation プラズマ発生体、プラズマ発生体を用いた放電装置および反応装置
JP5136300B2 (ja) 2008-09-02 2013-02-06 株式会社島津製作所 放電イオン化電流検出器
WO2010037238A1 (en) * 2008-10-03 2010-04-08 National Research Council Of Canada Plasma-based direct sampling of molecules for mass spectrometric analysis
US8453457B2 (en) * 2009-08-26 2013-06-04 Lockheed Martin Corporation Nozzle plasma flow control utilizing dielectric barrier discharge plasma actuators
JP5470543B2 (ja) 2010-04-26 2014-04-16 株式会社島津製作所 放電イオン化電流検出器
JP5445353B2 (ja) * 2010-06-28 2014-03-19 株式会社島津製作所 放電イオン化電流検出器
JP5470544B2 (ja) * 2010-06-28 2014-04-16 株式会社島津製作所 放電イオン化電流検出器
CN103403536B (zh) 2011-06-07 2016-03-09 株式会社岛津制作所 放电电离电流检测器
JP5704065B2 (ja) 2011-12-16 2015-04-22 株式会社島津製作所 放電イオン化電流検出器
CN102866224B (zh) * 2012-09-17 2014-10-01 四川大学 一种基于碳原子发射光谱测定含碳化合物的气相色谱检测方法
US9784714B2 (en) 2013-02-15 2017-10-10 Shimadzu Corporation Discharge ionization current detector and tuning method for the same
WO2017050142A1 (zh) 2015-09-23 2017-03-30 中国石油大学(华东) 一种多孔介质中气水合物模拟实验测试系统及测试方法
JP6743599B2 (ja) 2016-09-08 2020-08-19 株式会社島津製作所 誘電体バリア放電イオン化検出器
JP6747197B2 (ja) 2016-09-08 2020-08-26 株式会社島津製作所 誘電体バリア放電イオン化検出器
JP6675709B2 (ja) 2016-09-08 2020-04-01 株式会社島津製作所 誘電体バリア放電イオン化検出器
JP6775141B2 (ja) 2016-09-08 2020-10-28 株式会社島津製作所 誘電体バリア放電イオン化検出器

Also Published As

Publication number Publication date
JP2018040722A (ja) 2018-03-15
CN107807194B (zh) 2020-07-31
US10545118B2 (en) 2020-01-28
CN107807194A (zh) 2018-03-16
US20180067083A1 (en) 2018-03-08

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