JP6737670B2 - 基板処理方法、基板処理装置 - Google Patents
基板処理方法、基板処理装置 Download PDFInfo
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- 239000000945 filler Substances 0.000 claims description 40
- 238000011049 filling Methods 0.000 claims description 28
- 239000000463 material Substances 0.000 claims description 23
- 230000002093 peripheral effect Effects 0.000 claims description 17
- 239000011261 inert gas Substances 0.000 claims description 12
- 238000000926 separation method Methods 0.000 claims description 7
- KFZMGEQAYNKOFK-UHFFFAOYSA-N Isopropanol Chemical compound CC(C)O KFZMGEQAYNKOFK-UHFFFAOYSA-N 0.000 description 75
- 238000000034 method Methods 0.000 description 64
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- 239000008367 deionised water Substances 0.000 description 45
- 238000004140 cleaning Methods 0.000 description 38
- 238000000576 coating method Methods 0.000 description 15
- 239000002904 solvent Substances 0.000 description 13
- 239000000126 substance Substances 0.000 description 11
- 238000010438 heat treatment Methods 0.000 description 9
- 238000011282 treatment Methods 0.000 description 9
- 239000011248 coating agent Substances 0.000 description 5
- 230000004048 modification Effects 0.000 description 5
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- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 5
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- 239000007789 gas Substances 0.000 description 4
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- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 description 2
- 238000013459 approach Methods 0.000 description 2
- 238000007599 discharging Methods 0.000 description 2
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- 238000000859 sublimation Methods 0.000 description 2
- 230000008022 sublimation Effects 0.000 description 2
- 239000004925 Acrylic resin Substances 0.000 description 1
- 229920000178 Acrylic resin Polymers 0.000 description 1
- VHUUQVKOLVNVRT-UHFFFAOYSA-N Ammonium hydroxide Chemical compound [NH4+].[OH-] VHUUQVKOLVNVRT-UHFFFAOYSA-N 0.000 description 1
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 1
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- 229910052739 hydrogen Inorganic materials 0.000 description 1
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- 238000009832 plasma treatment Methods 0.000 description 1
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- 238000001179 sorption measurement Methods 0.000 description 1
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
- H01L21/304—Mechanical treatment, e.g. grinding, polishing, cutting
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02041—Cleaning
- H01L21/02043—Cleaning before device manufacture, i.e. Begin-Of-Line process
- H01L21/02052—Wet cleaning only
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02041—Cleaning
- H01L21/02057—Cleaning during device manufacture
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02107—Forming insulating materials on a substrate
- H01L21/02296—Forming insulating materials on a substrate characterised by the treatment performed before or after the formation of the layer
- H01L21/02299—Forming insulating materials on a substrate characterised by the treatment performed before or after the formation of the layer pre-treatment
- H01L21/02307—Forming insulating materials on a substrate characterised by the treatment performed before or after the formation of the layer pre-treatment treatment by exposure to a liquid
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02107—Forming insulating materials on a substrate
- H01L21/02296—Forming insulating materials on a substrate characterised by the treatment performed before or after the formation of the layer
- H01L21/02318—Forming insulating materials on a substrate characterised by the treatment performed before or after the formation of the layer post-treatment
- H01L21/02343—Forming insulating materials on a substrate characterised by the treatment performed before or after the formation of the layer post-treatment treatment by exposure to a liquid
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
- H01L21/67028—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/6715—Apparatus for applying a liquid, a resin, an ink or the like
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67242—Apparatus for monitoring, sorting or marking
- H01L21/67259—Position monitoring, e.g. misposition detection or presence detection
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
- H01L21/68714—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support
- H01L21/68764—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support characterised by a movable susceptor, stage or support, others than those only rotating on their own vertical axis, e.g. susceptors on a rotating caroussel
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- Engineering & Computer Science (AREA)
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- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
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- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Cleaning Or Drying Semiconductors (AREA)
Description
Claims (11)
- 基板の下面に近接する近接位置と前記近接位置よりも前記基板の前記下面から離れた離間位置との間で移動可能な可動部材を前記近接位置に位置させた状態で、第1速度で回転する前記基板の上面に第1液体を供給する第1工程と、
前記第1速度未満でゼロ以上の第2速度へ前記基板の回転速度を減速した状態で、前記基板の前記上面に前記第1液体を供給する第2工程と、
前記可動部材を前記離間位置に位置させた状態で、前記第2速度より速い第3速度で前記可動部材を回転させる第3工程と
を備える基板処理方法。 - 前記第2工程において、前記可動部材を前記近接位置から前記離間位置に移動させる請求項1に記載の基板処理方法。
- 前記第3工程では、前記可動部材とともに前記基板を前記第3速度で回転させつつ前記基板の前記上面に第2液体を供給する請求項1または2に記載の基板処理方法。
- 前記第3工程で前記基板の前記上面に前記第2液体を供給する単位時間あたりの量は、前記第1工程で前記基板の前記上面に前記第1液体を供給する単位時間あたりの量よりも少ない請求項3に記載の基板処理方法。
- 前記第3工程で前記基板の前記上面に前記第2液体を供給する単位時間あたりの量は、前記第1工程で前記基板の前記上面に前記第1液体を供給する単位時間あたりの量の半分以下である請求項4に記載の基板処理方法。
- 前記第2速度はゼロである請求項1ないし5のいずれか一項に記載の基板処理方法。
- 前記基板の前記上面にはパターンが形成されている請求項1ないし6のいずれか一項に記載の基板処理方法。
- 前記第2速度より速い第4速度で前記基板を回転させつつ、隣接する前記パターンの間に充填される充填材を含む第3液体を前記基板の上面に供給する第4工程を、前記第3工程の後にさらに備える請求項7に記載の基板処理方法。
- 前記第1液体は前記基板の前記パターンの間を含む前記基板の上面をリンスするリンス液であり、前記充填材は前記リンス液が置換された前記パターンの間に充填される請求項8に記載の基板処理方法。
- 前記第1工程と並行して、前記基板の前記下面と前記可動部材の上面との間に不活性ガスを供給して、前記基板の回転中心から前記基板の周縁に向かう前記不活性ガスの気流を前記基板の前記下面側に生成する請求項1ないし9のいずれか一項に記載の基板処理方法。
- 基板の下面側に設けられた可動部材と、
前記基板あるいは前記可動部材を回転させる第1駆動部と、
前記基板の下面に近接する近接位置と前記近接位置よりも前記基板の前記下面から離れた離間位置との間で前記可動部材を駆動する第2駆動部と、
前記基板の上面に液体を供給する液体供給部と、
前記第1駆動部、前記第2駆動部および前記液体供給部を制御する制御部と
を備え、
前記制御部は、前記可動部材を前記近接位置に位置させた状態で、第1速度で回転する前記基板の前記上面に前記液体を供給する制御と、前記第1速度未満でゼロ以上の第2速度へ前記基板の回転速度を減速した状態で、前記基板の前記上面に前記液体を供給する制御と、前記可動部材を前記離間位置に位置させた状態で、前記第2速度より速い第3速度で前記可動部材を回転させる制御とを実行する基板処理装置。
Priority Applications (5)
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JP2016181404A JP6737670B2 (ja) | 2016-09-16 | 2016-09-16 | 基板処理方法、基板処理装置 |
PCT/JP2017/025229 WO2018051620A1 (ja) | 2016-09-16 | 2017-07-11 | 基板処理方法、基板処理装置 |
KR1020197004931A KR102150813B1 (ko) | 2016-09-16 | 2017-07-11 | 기판 처리 방법, 기판 처리 장치 |
CN201780057069.XA CN109791883B (zh) | 2016-09-16 | 2017-07-11 | 基板处理方法、基板处理装置 |
TW106126729A TWI665025B (zh) | 2016-09-16 | 2017-08-08 | 基板處理方法、基板處理裝置 |
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JP2016181404A JP6737670B2 (ja) | 2016-09-16 | 2016-09-16 | 基板処理方法、基板処理装置 |
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JP2018046226A JP2018046226A (ja) | 2018-03-22 |
JP6737670B2 true JP6737670B2 (ja) | 2020-08-12 |
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KR (1) | KR102150813B1 (ja) |
CN (1) | CN109791883B (ja) |
TW (1) | TWI665025B (ja) |
WO (1) | WO2018051620A1 (ja) |
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JP2845738B2 (ja) * | 1993-10-28 | 1999-01-13 | 大日本スクリーン製造株式会社 | 回転式基板処理装置の基板回転保持具 |
JP3361223B2 (ja) * | 1995-12-14 | 2003-01-07 | 大日本スクリーン製造株式会社 | 回転式基板処理装置 |
JP3958594B2 (ja) * | 2002-01-30 | 2007-08-15 | 東京エレクトロン株式会社 | 基板処理装置及び基板処理方法 |
JP2003303762A (ja) | 2002-04-11 | 2003-10-24 | Tokyo Electron Ltd | 基板処理装置及び基板処理方法 |
JP4498893B2 (ja) * | 2004-11-11 | 2010-07-07 | 大日本スクリーン製造株式会社 | 基板処理方法および基板処理装置 |
JP2008288488A (ja) * | 2007-05-21 | 2008-11-27 | Sokudo:Kk | 基板処理装置および基板処理方法 |
JP5114252B2 (ja) * | 2008-03-06 | 2013-01-09 | 大日本スクリーン製造株式会社 | 基板処理方法および基板処理装置 |
JP5485672B2 (ja) * | 2009-12-07 | 2014-05-07 | 株式会社Sokudo | 基板処理装置および基板処理方法 |
JP5296021B2 (ja) * | 2010-07-23 | 2013-09-25 | 東京エレクトロン株式会社 | 塗布処理方法、プログラム、コンピュータ記憶媒体及び塗布処理装置 |
JP2015097268A (ja) * | 2011-04-26 | 2015-05-21 | 東京エレクトロン株式会社 | 塗布処理方法及びその塗布処理方法を実行させるためのプログラムを記録した記録媒体 |
US9385020B2 (en) * | 2011-12-19 | 2016-07-05 | SCREEN Holdings Co., Ltd. | Substrate holding and rotating device, substrate treatment apparatus including the device, and substrate treatment method |
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- 2016-09-16 JP JP2016181404A patent/JP6737670B2/ja active Active
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- 2017-07-11 WO PCT/JP2017/025229 patent/WO2018051620A1/ja active Application Filing
- 2017-07-11 KR KR1020197004931A patent/KR102150813B1/ko active IP Right Grant
- 2017-07-11 CN CN201780057069.XA patent/CN109791883B/zh active Active
- 2017-08-08 TW TW106126729A patent/TWI665025B/zh active
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Publication number | Publication date |
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CN109791883A (zh) | 2019-05-21 |
KR20190029718A (ko) | 2019-03-20 |
KR102150813B1 (ko) | 2020-09-01 |
JP2018046226A (ja) | 2018-03-22 |
TW201825194A (zh) | 2018-07-16 |
WO2018051620A1 (ja) | 2018-03-22 |
TWI665025B (zh) | 2019-07-11 |
CN109791883B (zh) | 2023-02-28 |
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