JP6715093B2 - ハンダ接合方法 - Google Patents
ハンダ接合方法 Download PDFInfo
- Publication number
- JP6715093B2 JP6715093B2 JP2016116196A JP2016116196A JP6715093B2 JP 6715093 B2 JP6715093 B2 JP 6715093B2 JP 2016116196 A JP2016116196 A JP 2016116196A JP 2016116196 A JP2016116196 A JP 2016116196A JP 6715093 B2 JP6715093 B2 JP 6715093B2
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- Japan
- Prior art keywords
- solder
- intermetallic compound
- columnar
- bonding layer
- joined
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- 229910000679 solder Inorganic materials 0.000 title claims description 126
- 238000000034 method Methods 0.000 title claims description 26
- 229910000765 intermetallic Inorganic materials 0.000 claims description 55
- 229910020888 Sn-Cu Inorganic materials 0.000 claims description 45
- 229910019204 Sn—Cu Inorganic materials 0.000 claims description 45
- 239000000463 material Substances 0.000 claims description 35
- 229910017944 Ag—Cu Inorganic materials 0.000 claims description 22
- 229910052751 metal Inorganic materials 0.000 claims description 16
- 239000002184 metal Substances 0.000 claims description 16
- 239000004065 semiconductor Substances 0.000 claims description 7
- 238000002844 melting Methods 0.000 claims description 5
- 230000008018 melting Effects 0.000 claims description 5
- 239000010949 copper Substances 0.000 description 37
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 11
- 229910052802 copper Inorganic materials 0.000 description 10
- 238000003384 imaging method Methods 0.000 description 6
- 230000000052 comparative effect Effects 0.000 description 5
- 229940125810 compound 20 Drugs 0.000 description 5
- JAXFJECJQZDFJS-XHEPKHHKSA-N gtpl8555 Chemical compound OC(=O)C[C@H](N)C(=O)N[C@@H](CCC(O)=O)C(=O)N[C@@H](C(C)C)C(=O)N[C@@H](C(C)C)C(=O)N1CCC[C@@H]1C(=O)N[C@H](B1O[C@@]2(C)[C@H]3C[C@H](C3(C)C)C[C@H]2O1)CCC1=CC=C(F)C=C1 JAXFJECJQZDFJS-XHEPKHHKSA-N 0.000 description 5
- 230000015572 biosynthetic process Effects 0.000 description 4
- 238000010828 elution Methods 0.000 description 4
- 229910052782 aluminium Inorganic materials 0.000 description 3
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 238000007796 conventional method Methods 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
- 238000011161 development Methods 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 239000007791 liquid phase Substances 0.000 description 2
- 238000012545 processing Methods 0.000 description 2
- 238000005476 soldering Methods 0.000 description 2
- 229910018471 Cu6Sn5 Inorganic materials 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000000635 electron micrograph Methods 0.000 description 1
- 230000001747 exhibiting effect Effects 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 230000002250 progressing effect Effects 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K1/00—Soldering, e.g. brazing, or unsoldering
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K31/00—Processes relevant to this subclass, specially adapted for particular articles or purposes, but not covered by only one of the preceding main groups
- B23K31/02—Processes relevant to this subclass, specially adapted for particular articles or purposes, but not covered by only one of the preceding main groups relating to soldering or welding
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K35/00—Rods, electrodes, materials, or media, for use in soldering, welding, or cutting
- B23K35/22—Rods, electrodes, materials, or media, for use in soldering, welding, or cutting characterised by the composition or nature of the material
- B23K35/24—Selection of soldering or welding materials proper
- B23K35/26—Selection of soldering or welding materials proper with the principal constituent melting at less than 400 degrees C
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/50—Assembly of semiconductor devices using processes or apparatus not provided for in a single one of the subgroups H01L21/06 - H01L21/326, e.g. sealing of a cap to a base of a container
- H01L21/52—Mounting semiconductor bodies in containers
Description
図1から図4を参照して、実施の形態に係るハンダ接合体1およびその接合方法について説明する。
ここで、ハンダ接合層Sにおける柱状のSn−Cu金属間化合物(IMC)の含有率(体積分率)の強度への影響について研究した結果を示す。
図5、図9および図10を参照して、本実施の形態と比較例との対比について述べる。
M1…第1の被接合材
M2…第2の被接合材
20…Sn−Cu金属間化合物
C1、C2…クラック
Claims (4)
- 第1の被接合材と第2の被接合材と、前記第1の被接合材と前記第2の被接合材との間にあって、両者を接合するハンダ接合層とを有し、前記ハンダ接合層は、Sn−Ag−Cu系ハンダを主成分とし、前記ハンダ接合層内に、体積分率で0.5%〜5.5%の柱状のSn−Cu金属間化合物を含有するハンダ接合体のハンダ接合方法であって、
前記第1の被接合材と前記第2の被接合材との間に、前記Sn−Ag−Cu系ハンダとCu供給源とを載置する工程と、
前記Sn−Ag−Cu系ハンダの温度を、該Sn−Ag−Cu系ハンダの融点よりも60℃以上90℃以下高い温度まで加熱し、その状態を10分〜20分間保持し、溶融した前記Sn−Ag−Cu系ハンダに前記Cu供給源からCuを溶出させ、柱状のSn−Cu金属間化合物を析出させたハンダ接合層を形成する工程と、
を有することを特徴とするハンダ接合方法。 - 前記柱状のSn−Cu金属間化合物の体積分率は0.8%〜4.5%であることを特徴とする請求項1に記載のハンダ接合方法。
- 前記第1の被接合材および前記第2の被接合材は、金属または半導体で構成されていることを特徴とする請求項1または請求項2に記載のハンダ接合方法。
- 前記柱状のSn−Cu金属間化合物は、少なくとも前記ハンダ接合層の縁部または隅部に形成されていることを特徴とする請求項1から請求項3の何れか1項に記載のハンダ接合方法。
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2016116196A JP6715093B2 (ja) | 2016-06-10 | 2016-06-10 | ハンダ接合方法 |
PCT/JP2017/021186 WO2017213189A1 (ja) | 2016-06-10 | 2017-06-07 | ハンダ接合体およびハンダ接合方法 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2016116196A JP6715093B2 (ja) | 2016-06-10 | 2016-06-10 | ハンダ接合方法 |
Publications (3)
Publication Number | Publication Date |
---|---|
JP2017220638A JP2017220638A (ja) | 2017-12-14 |
JP2017220638A5 JP2017220638A5 (ja) | 2019-03-28 |
JP6715093B2 true JP6715093B2 (ja) | 2020-07-01 |
Family
ID=60577936
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2016116196A Active JP6715093B2 (ja) | 2016-06-10 | 2016-06-10 | ハンダ接合方法 |
Country Status (2)
Country | Link |
---|---|
JP (1) | JP6715093B2 (ja) |
WO (1) | WO2017213189A1 (ja) |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6602777B1 (en) * | 2001-12-28 | 2003-08-05 | National Central University | Method for controlling the formation of intermetallic compounds in solder joints |
JP2006167735A (ja) * | 2004-12-14 | 2006-06-29 | Hitachi Ltd | 機器、構造材等の製造法 |
JP2010179336A (ja) * | 2009-02-05 | 2010-08-19 | Toyota Central R&D Labs Inc | 接合体、半導体モジュール、及び接合体の製造方法 |
JP6380539B2 (ja) * | 2014-08-22 | 2018-08-29 | 株式会社豊田自動織機 | 接合構造、接合材、及び接合方法 |
JP6398499B2 (ja) * | 2014-09-09 | 2018-10-03 | 富士通株式会社 | 電子装置及び電子装置の製造方法 |
JP2016128184A (ja) * | 2015-01-09 | 2016-07-14 | カルソニックカンセイ株式会社 | ハンダ接合方法およびパワーモジュール |
-
2016
- 2016-06-10 JP JP2016116196A patent/JP6715093B2/ja active Active
-
2017
- 2017-06-07 WO PCT/JP2017/021186 patent/WO2017213189A1/ja active Application Filing
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Publication number | Publication date |
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JP2017220638A (ja) | 2017-12-14 |
WO2017213189A1 (ja) | 2017-12-14 |
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